WO2009074408A3 - Vacuum pump, and method for operating a vacuum pump - Google Patents

Vacuum pump, and method for operating a vacuum pump Download PDF

Info

Publication number
WO2009074408A3
WO2009074408A3 PCT/EP2008/065079 EP2008065079W WO2009074408A3 WO 2009074408 A3 WO2009074408 A3 WO 2009074408A3 EP 2008065079 W EP2008065079 W EP 2008065079W WO 2009074408 A3 WO2009074408 A3 WO 2009074408A3
Authority
WO
WIPO (PCT)
Prior art keywords
pump
vacuum pump
operating
chamber
flow channel
Prior art date
Application number
PCT/EP2008/065079
Other languages
German (de)
French (fr)
Other versions
WO2009074408A2 (en
Inventor
Dirk Schiller
Magnus Janicki
Michael Steininger
Michael Hoelzemer
Original Assignee
Oerlikon Leybold Vacuum Gmbh
Dirk Schiller
Magnus Janicki
Michael Steininger
Michael Hoelzemer
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oerlikon Leybold Vacuum Gmbh, Dirk Schiller, Magnus Janicki, Michael Steininger, Michael Hoelzemer filed Critical Oerlikon Leybold Vacuum Gmbh
Publication of WO2009074408A2 publication Critical patent/WO2009074408A2/en
Publication of WO2009074408A3 publication Critical patent/WO2009074408A3/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/24—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves
    • F04C28/26—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids characterised by using valves controlling pressure or flow rate, e.g. discharge valves or unloading valves using bypass channels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
    • F04C28/28—Safety arrangements; Monitoring

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Control Of Positive-Displacement Pumps (AREA)

Abstract

A vacuum pump, in particular a Roots vacuum pump, has a pump chamber (12) which is formed by a pump housing (10). Pump elements (14) which are driven by a drive motor are arranged in the pump chamber (12). A medium is pumped by the pump elements from the pump inlet (18) through the pump chamber (12) and from the latter through the pump outlet (20). In order to avoid overheating, a flow channel (24) is provided, through which at least if required medium can be returned from the pump outlet (20) to the pump inlet (18). A valve device (30) is provided in the flow channel. According to the invention, the valve device (30) can be regulated and, to this end, is connected to a regulating device (52). Furthermore, the invention relates to a method for operating the vacuum pump.
PCT/EP2008/065079 2007-12-13 2008-11-06 Vacuum pump, and method for operating a vacuum pump WO2009074408A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200710060174 DE102007060174A1 (en) 2007-12-13 2007-12-13 Vacuum pump and method for operating a vacuum pump
DE102007060174.5 2007-12-13

Publications (2)

Publication Number Publication Date
WO2009074408A2 WO2009074408A2 (en) 2009-06-18
WO2009074408A3 true WO2009074408A3 (en) 2009-08-20

Family

ID=40673879

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/065079 WO2009074408A2 (en) 2007-12-13 2008-11-06 Vacuum pump, and method for operating a vacuum pump

Country Status (2)

Country Link
DE (1) DE102007060174A1 (en)
WO (1) WO2009074408A2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5622738B2 (en) * 2009-10-14 2014-11-12 川崎重工業株式会社 Engine supercharger
JP5763358B2 (en) * 2011-02-03 2015-08-12 アルバック機工株式会社 Vacuum pump
DE202013000913U1 (en) * 2013-01-30 2014-05-05 Oerlikon Leybold Vacuum Gmbh Vacuum pump, in particular Roots pump
DE102013208829A1 (en) * 2013-05-14 2014-11-20 Oerlikon Leybold Vacuum Gmbh vacuum pump
DE102013223556A1 (en) * 2013-11-19 2015-05-21 Oerlikon Leybold Vacuum Gmbh Vacuum pump system and method for operating a vacuum pump system
KR20160072962A (en) * 2014-12-16 2016-06-24 주식회사 우성진공 Roots pump having improved structure
CN107035692A (en) * 2016-02-04 2017-08-11 张权 A kind of vacuum system performance degradation measuring method based on lobe pump fault mode
DE102016223782A1 (en) * 2016-11-30 2018-05-30 Leybold Gmbh Method for operating a vacuum pump system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2032527A (en) * 1978-10-09 1980-05-08 Leybold Heraeus Gmbh & Co Kg Rotary positive-displacement fluid-machines
US4763636A (en) * 1985-09-30 1988-08-16 Aisin Seiki Kabushiki Kaisha Mechanical supercharger
US4991562A (en) * 1988-09-28 1991-02-12 Aisin Seiki Kabushiki Kaisha Mechanical supercharger system
JP2001164943A (en) * 1999-12-09 2001-06-19 Tochigi Fuji Ind Co Ltd Fluid machinery

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CH368261A (en) * 1959-04-16 1963-03-31 Balzers Hochvakuum Blower type rotary lobe pump
DE1226239B (en) * 1960-11-03 1966-10-06 Leybolds Nachfolger E Operating procedure for a vacuum pump unit
US3989413A (en) * 1975-05-14 1976-11-02 Ingersoll-Rand Company Gas compressor unloading means
DE3238015C2 (en) * 1982-10-13 1986-07-31 Aerzener Maschinenfabrik Gmbh, 3251 Aerzen Roots compressor
DE3911541C1 (en) * 1989-04-08 1990-03-29 Aktiengesellschaft Kuehnle, Kopp & Kausch, 6710 Frankenthal, De
US5127386A (en) * 1990-06-01 1992-07-07 Ingersoll-Rand Company Apparatus for controlling a supercharger
DE19511430A1 (en) * 1995-03-29 1996-10-02 Leybold Ag Circulation blower, vacuum pump or the like
DE19524609A1 (en) * 1995-07-06 1997-01-09 Leybold Ag Device for the rapid evacuation of a vacuum chamber
FR2804729B1 (en) * 2000-02-07 2002-05-10 Air Liquide METHOD FOR IMPLEMENTING A FLUID COMPRESSION MACHINE, FLUID TREATMENT PLANT COMPRISING SUCH A MACHINE, AND APPLICATION OF SUCH A PLANT TO THE PRODUCTION OF AN AIR CONSTITUENT
GB0502149D0 (en) * 2005-02-02 2005-03-09 Boc Group Inc Method of operating a pumping system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2032527A (en) * 1978-10-09 1980-05-08 Leybold Heraeus Gmbh & Co Kg Rotary positive-displacement fluid-machines
US4763636A (en) * 1985-09-30 1988-08-16 Aisin Seiki Kabushiki Kaisha Mechanical supercharger
US4991562A (en) * 1988-09-28 1991-02-12 Aisin Seiki Kabushiki Kaisha Mechanical supercharger system
JP2001164943A (en) * 1999-12-09 2001-06-19 Tochigi Fuji Ind Co Ltd Fluid machinery

Also Published As

Publication number Publication date
DE102007060174A1 (en) 2009-06-25
WO2009074408A2 (en) 2009-06-18

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