WO2009063890A1 - 多段式ドライポンプ - Google Patents
多段式ドライポンプ Download PDFInfo
- Publication number
- WO2009063890A1 WO2009063890A1 PCT/JP2008/070562 JP2008070562W WO2009063890A1 WO 2009063890 A1 WO2009063890 A1 WO 2009063890A1 JP 2008070562 W JP2008070562 W JP 2008070562W WO 2009063890 A1 WO2009063890 A1 WO 2009063890A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- rotor shaft
- pump
- stage dry
- dry pump
- fixed bearing
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
- F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
- F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
- F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
- F01C21/02—Arrangements of bearings
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
- F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
- F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
- F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
- F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2220/00—Application
- F04C2220/10—Vacuum
- F04C2220/12—Dry running
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C2240/00—Components
- F04C2240/50—Bearings
- F04C2240/52—Bearings for assemblies with supports on both sides
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
- F04C28/00—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids
- F04C28/02—Control of, monitoring of, or safety arrangements for, pumps or pumping installations specially adapted for elastic fluids specially adapted for several pumps connected in series or in parallel
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Abstract
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009541145A JP5073754B2 (ja) | 2007-11-14 | 2008-11-12 | 多段式ドライポンプ |
KR1020107010275A KR101227033B1 (ko) | 2007-11-14 | 2008-11-12 | 다단식 드라이 펌프 |
EP08850687.8A EP2221482B1 (en) | 2007-11-14 | 2008-11-12 | Multi-stage dry pump |
US12/742,654 US8662869B2 (en) | 2007-11-14 | 2008-11-12 | Multi-stage dry pump |
CN2008801156221A CN101855454B (zh) | 2007-11-14 | 2008-11-12 | 多级干泵 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007296014 | 2007-11-14 | ||
JP2007-296014 | 2007-11-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009063890A1 true WO2009063890A1 (ja) | 2009-05-22 |
Family
ID=40638739
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/070562 WO2009063890A1 (ja) | 2007-11-14 | 2008-11-12 | 多段式ドライポンプ |
Country Status (7)
Country | Link |
---|---|
US (1) | US8662869B2 (ja) |
EP (1) | EP2221482B1 (ja) |
JP (1) | JP5073754B2 (ja) |
KR (1) | KR101227033B1 (ja) |
CN (1) | CN101855454B (ja) |
TW (1) | TWI479078B (ja) |
WO (1) | WO2009063890A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102220981A (zh) * | 2010-04-19 | 2011-10-19 | 株式会社荏原制作所 | 干式真空泵装置、排气单元和消音器 |
JP2021510404A (ja) * | 2018-01-12 | 2021-04-22 | レイボルド ゲーエムベーハー | 圧縮機 |
TWI735764B (zh) * | 2017-04-07 | 2021-08-11 | 法商普發真空公司 | 泵抽單元及其用途 |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
IT1403169B1 (it) * | 2010-10-21 | 2013-10-04 | Tecnodinamica S R L | Impianto per la produzione di manufatti in materiale polimerico, plastico o similare, e relativo procedimento |
GB2510829B (en) * | 2013-02-13 | 2015-09-02 | Edwards Ltd | Pumping system |
CN103352849A (zh) * | 2013-07-31 | 2013-10-16 | 南通龙鹰真空泵业有限公司 | 滑阀罗茨真空泵 |
DE202014007117U1 (de) * | 2014-09-05 | 2015-12-09 | Oerlikon Leybold Vacuum Gmbh | Klauenpumpe |
CN106762650A (zh) * | 2015-11-25 | 2017-05-31 | 中国科学院沈阳科学仪器股份有限公司 | 一种用于真空获得设备的节能控制***及方法 |
CN106762641A (zh) * | 2016-11-28 | 2017-05-31 | 陈琼 | 一种真空联合机组 |
GB201621618D0 (en) * | 2016-12-19 | 2017-02-01 | Edwards Ltd | Pump sealing |
GB201700995D0 (en) * | 2017-01-20 | 2017-03-08 | Edwards Ltd | Multi-stage vacuum booster pump rotor |
GB201701000D0 (en) | 2017-01-20 | 2017-03-08 | Edwards Ltd | Multi-stage vacuum booster pump coupling |
GB2563595B (en) | 2017-06-19 | 2020-04-15 | Edwards Ltd | Twin-shaft pumps |
JP7141332B2 (ja) * | 2018-12-28 | 2022-09-22 | 株式会社荏原製作所 | 真空ポンプ装置 |
FR3096096B1 (fr) * | 2019-05-13 | 2021-05-14 | Pfeiffer Vacuum | Pompe à vide primaire sèche |
FR3098869B1 (fr) * | 2019-07-17 | 2021-07-16 | Pfeiffer Vacuum | Groupe de pompage |
KR102258397B1 (ko) * | 2019-08-30 | 2021-06-02 | 코우테크 주식회사 | 압축기와 다단 압축 모듈 및 이를 이용한 학습 지능형 제어 압축 시스템 |
CN110566457B (zh) * | 2019-09-03 | 2020-07-10 | 乐清市芮易经济信息咨询有限公司 | 一种带有三爪转子的气液混合输送装置 |
GB2590665B (en) * | 2019-12-23 | 2022-06-08 | Edwards S R O | Pump configured to mitigate the effect of any rotor and stator clash and its method of manufacture |
US20230096279A1 (en) * | 2021-09-27 | 2023-03-30 | Raymond Zhou Shaw | Vacuum system having condenser and root vacuum pump set |
US20230167822A1 (en) * | 2021-09-27 | 2023-06-01 | Raymond Zhou Shaw | Vacuum system having condenser and root vacuum pump set |
GB2620724A (en) * | 2022-05-18 | 2024-01-24 | Edwards Ltd | Multi-stage vacuum pump with improved low vacuum pressure performance |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52158908U (ja) * | 1976-05-28 | 1977-12-02 | ||
JPS6319090U (ja) * | 1986-07-23 | 1988-02-08 | ||
JPH0932766A (ja) * | 1995-07-13 | 1997-02-04 | Dia Shinku Kk | スクリュ−流体機械及びねじ歯車 |
JPH11230060A (ja) * | 1998-02-18 | 1999-08-24 | Ebara Corp | 回転式気体機械用ロータ及びその製造方法 |
JP2003166483A (ja) | 2001-11-29 | 2003-06-13 | Aisin Seiki Co Ltd | 多段式ルーツ型ポンプ |
JP2003172282A (ja) * | 2001-12-03 | 2003-06-20 | Aisin Seiki Co Ltd | 多段式真空ポンプ |
JP2005061421A (ja) * | 1995-03-20 | 2005-03-10 | Ebara Corp | 真空ポンプ |
JP2005098210A (ja) * | 2003-09-25 | 2005-04-14 | Aisin Seiki Co Ltd | 多段ドライポンプ |
JP2006520873A (ja) | 2003-03-19 | 2006-09-14 | 株式会社荏原製作所 | 容積型真空ポンプ |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US1531607A (en) * | 1923-01-24 | 1925-03-31 | Thomas W Green | High-pressure rotary pump |
JPS56167894A (en) * | 1980-05-27 | 1981-12-23 | Matsushita Electric Ind Co Ltd | Compressor |
JPS6319090A (ja) | 1986-07-11 | 1988-01-26 | Sumitomo Electric Ind Ltd | 光学文字読取装置 |
US4828467A (en) * | 1988-01-19 | 1989-05-09 | Eaton Corporation | Supercharger and rotor and shaft arrangement therefor |
JPH06505079A (ja) * | 1991-03-04 | 1994-06-09 | バルツァース ウント ライボルト ドイチュラント ホールディング アクチエンゲゼルシャフト | 多段式の乾式運転型の真空ポンプに不活性ガスを供給する不活性ガス供給装置 |
KR100382308B1 (ko) | 1995-03-20 | 2003-07-10 | 가부시키 가이샤 에바라 세이사꾸쇼 | 진공펌프 |
SE506513C2 (sv) * | 1995-10-23 | 1997-12-22 | Lysholm Techn Ab | Transmission med ett tvådelat kopplingsorgan |
US6123526A (en) * | 1998-09-18 | 2000-09-26 | Industrial Technology Research Institute | Multistage pump and method for assembling the pump |
JP2001329985A (ja) * | 2000-05-22 | 2001-11-30 | Toyota Industries Corp | 真空ポンプにおける冷却構造 |
JP2004300964A (ja) * | 2003-03-28 | 2004-10-28 | Aisin Seiki Co Ltd | 真空ポンプ |
JP4767625B2 (ja) * | 2005-08-24 | 2011-09-07 | 樫山工業株式会社 | 多段ルーツ式ポンプ |
-
2008
- 2008-11-12 US US12/742,654 patent/US8662869B2/en active Active
- 2008-11-12 WO PCT/JP2008/070562 patent/WO2009063890A1/ja active Application Filing
- 2008-11-12 TW TW097143730A patent/TWI479078B/zh active
- 2008-11-12 KR KR1020107010275A patent/KR101227033B1/ko active IP Right Grant
- 2008-11-12 CN CN2008801156221A patent/CN101855454B/zh active Active
- 2008-11-12 JP JP2009541145A patent/JP5073754B2/ja active Active
- 2008-11-12 EP EP08850687.8A patent/EP2221482B1/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52158908U (ja) * | 1976-05-28 | 1977-12-02 | ||
JPS6319090U (ja) * | 1986-07-23 | 1988-02-08 | ||
JP2005061421A (ja) * | 1995-03-20 | 2005-03-10 | Ebara Corp | 真空ポンプ |
JPH0932766A (ja) * | 1995-07-13 | 1997-02-04 | Dia Shinku Kk | スクリュ−流体機械及びねじ歯車 |
JPH11230060A (ja) * | 1998-02-18 | 1999-08-24 | Ebara Corp | 回転式気体機械用ロータ及びその製造方法 |
JP2003166483A (ja) | 2001-11-29 | 2003-06-13 | Aisin Seiki Co Ltd | 多段式ルーツ型ポンプ |
JP2003172282A (ja) * | 2001-12-03 | 2003-06-20 | Aisin Seiki Co Ltd | 多段式真空ポンプ |
JP2006520873A (ja) | 2003-03-19 | 2006-09-14 | 株式会社荏原製作所 | 容積型真空ポンプ |
JP2005098210A (ja) * | 2003-09-25 | 2005-04-14 | Aisin Seiki Co Ltd | 多段ドライポンプ |
Non-Patent Citations (1)
Title |
---|
See also references of EP2221482A4 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102220981A (zh) * | 2010-04-19 | 2011-10-19 | 株式会社荏原制作所 | 干式真空泵装置、排气单元和消音器 |
TWI735764B (zh) * | 2017-04-07 | 2021-08-11 | 法商普發真空公司 | 泵抽單元及其用途 |
JP2021510404A (ja) * | 2018-01-12 | 2021-04-22 | レイボルド ゲーエムベーハー | 圧縮機 |
Also Published As
Publication number | Publication date |
---|---|
US8662869B2 (en) | 2014-03-04 |
EP2221482B1 (en) | 2015-04-15 |
JPWO2009063890A1 (ja) | 2011-03-31 |
EP2221482A4 (en) | 2012-09-12 |
KR20100081345A (ko) | 2010-07-14 |
JP5073754B2 (ja) | 2012-11-14 |
EP2221482A1 (en) | 2010-08-25 |
KR101227033B1 (ko) | 2013-01-28 |
CN101855454B (zh) | 2012-12-05 |
US20100266433A1 (en) | 2010-10-21 |
TWI479078B (zh) | 2015-04-01 |
TW200936885A (en) | 2009-09-01 |
CN101855454A (zh) | 2010-10-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2009063890A1 (ja) | 多段式ドライポンプ | |
WO2009054285A1 (ja) | スクリュ流体機械 | |
WO2010010995A3 (en) | Compressor | |
EP2586966A3 (en) | Rotary actuator | |
EP2056005A3 (en) | Rotary valve | |
WO2011088371A3 (en) | Integral compressor-expander | |
WO2011086013A3 (de) | Flügelzellenpumpe | |
EP2407636A3 (en) | Vane compressor | |
RU2011118133A (ru) | Многоступенчатый компрессор, способ изготовления компрессора и ротационная установка | |
WO2011145844A3 (ko) | 방수구조를 갖는 유체 펌프 | |
WO2012064575A3 (en) | Exhaust-gas turbocharger | |
EP2634425A3 (en) | Hydraulic pump | |
WO2014011960A3 (en) | Valve assembly | |
EP2108844A3 (en) | Turbo vacuum pump | |
WO2010060416A3 (de) | Flügelzellenpumpe | |
WO2009052930A3 (de) | Vakuumpumpe | |
WO2010017795A3 (de) | Pumpeneinheit | |
WO2012007125A3 (de) | Flügelzellenpumpe | |
WO2007059727A3 (de) | Lagersatz mit einem schrägkugellager und einem axialkräfte aufnehmenden zylinderrollenlager | |
WO2010012621A3 (de) | Flügelzellenpumpe | |
WO2011138318A3 (de) | Schrauben-vakuumpumpe | |
WO2011049362A3 (ko) | 모터 내장형 스크루 로터 타입 진공펌프 | |
WO2011131598A3 (de) | Flügelzellenpumpe | |
WO2011069845A3 (de) | Drehkolben- oder schraubenrotor als hohlkörper aus einem kaltgewalzten stahlprofil | |
WO2013083740A3 (en) | Rotary lobe pump with fixed supports and rotating sleeves |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
WWE | Wipo information: entry into national phase |
Ref document number: 200880115622.1 Country of ref document: CN |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 08850687 Country of ref document: EP Kind code of ref document: A1 |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2009541145 Country of ref document: JP |
|
ENP | Entry into the national phase |
Ref document number: 20107010275 Country of ref document: KR Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 12742654 Country of ref document: US |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2008850687 Country of ref document: EP |