WO2009063820A1 - Dry pump - Google Patents

Dry pump Download PDF

Info

Publication number
WO2009063820A1
WO2009063820A1 PCT/JP2008/070393 JP2008070393W WO2009063820A1 WO 2009063820 A1 WO2009063820 A1 WO 2009063820A1 JP 2008070393 W JP2008070393 W JP 2008070393W WO 2009063820 A1 WO2009063820 A1 WO 2009063820A1
Authority
WO
WIPO (PCT)
Prior art keywords
dry pump
rotor
shaft
heat transfer
rotor shaft
Prior art date
Application number
PCT/JP2008/070393
Other languages
French (fr)
Japanese (ja)
Inventor
Toshio Suzuki
Original Assignee
Ulvac, Inc.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac, Inc. filed Critical Ulvac, Inc.
Publication of WO2009063820A1 publication Critical patent/WO2009063820A1/en

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/001—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids of similar working principle

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)

Abstract

Provided is a dry pump having a rotor stored in a cylinder; a rotor shaft, i.e., a shaft for rotating the rotor; and a heat transfer member which is arranged inside the rotor shaft and has a heat transfer performance higher than that of the rotor shaft.
PCT/JP2008/070393 2007-11-14 2008-11-10 Dry pump WO2009063820A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-296013 2007-11-14
JP2007296013 2007-11-14

Publications (1)

Publication Number Publication Date
WO2009063820A1 true WO2009063820A1 (en) 2009-05-22

Family

ID=40638670

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/070393 WO2009063820A1 (en) 2007-11-14 2008-11-10 Dry pump

Country Status (2)

Country Link
TW (1) TW200938732A (en)
WO (1) WO2009063820A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109026709A (en) * 2018-09-18 2018-12-18 世通海泰泵业（天津）股份有限公司 Multiple compression vacuum pump
CN111911386A (en) * 2020-08-12 2020-11-10 安徽高坚机械科技有限公司 Crank-connecting rod mechanism for refrigeration compressor and working method thereof
FR3103862A1 (en) * 2019-12-03 2021-06-04 Pfeiffer Vacuum Rotor and multistage dry vacuum pump
WO2023223031A1 (en) * 2022-05-18 2023-11-23 Edwards Limited Multi-stage vacuum pump

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56167894A (en) * 1980-05-27 1981-12-23 Matsushita Electric Ind Co Ltd Compressor
JPS62200191U (en) * 1986-06-11 1987-12-19
JPS63126576U (en) * 1987-02-12 1988-08-18
JPH11230060A (en) * 1998-02-18 1999-08-24 Ebara Corp Rotor for rotary gas machine and its manufacture

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56167894A (en) * 1980-05-27 1981-12-23 Matsushita Electric Ind Co Ltd Compressor
JPS62200191U (en) * 1986-06-11 1987-12-19
JPS63126576U (en) * 1987-02-12 1988-08-18
JPH11230060A (en) * 1998-02-18 1999-08-24 Ebara Corp Rotor for rotary gas machine and its manufacture

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109026709A (en) * 2018-09-18 2018-12-18 世通海泰泵业（天津）股份有限公司 Multiple compression vacuum pump
FR3103862A1 (en) * 2019-12-03 2021-06-04 Pfeiffer Vacuum Rotor and multistage dry vacuum pump
WO2021110447A1 (en) * 2019-12-03 2021-06-10 Pfeiffer Vacuum Rotor and multistage dry vacuum pump
CN114729642A (en) * 2019-12-03 2022-07-08 普发真空公司 Rotor and multistage dry vacuum pump
CN111911386A (en) * 2020-08-12 2020-11-10 安徽高坚机械科技有限公司 Crank-connecting rod mechanism for refrigeration compressor and working method thereof
WO2023223031A1 (en) * 2022-05-18 2023-11-23 Edwards Limited Multi-stage vacuum pump

Also Published As

Publication number Publication date
TW200938732A (en) 2009-09-16

Similar Documents

Publication Publication Date Title
EP2206923A4 (en) Internal gear pump rotor, and internal gear pump using the rotor
PL2358937T3 (en) Condenser dryer having a heat pump, and method for operating the same
EP1959098A4 (en) Turbine rotor blade, turbine rotor and steam turbine comprising them
WO2009137288A3 (en) Biopsy devices
WO2009063890A1 (en) Multi-stage dry pump
EP1946413A4 (en) High power, end pumped laser with off-peak pumping
WO2010026427A3 (en) Electrical machine
WO2011086013A3 (en) Vane pump
WO2014011960A3 (en) Valve assembly
DK2274503T3 (en) DEVICE WITH ROTATING STAMPS WHICH MAY BE USED AS A COMPRESSOR, A PUMP, A VACUUM PUMP, A TURBINE, ENGINE AND OTHER DRIVE OR DRIVE HYDRAULIC-PNEUMATIC MACHINES
WO2009063820A1 (en) Dry pump
WO2013030108A3 (en) Induction machine having an outside rotor
WO2013107805A3 (en) Wet rotor pump comprising power electronics
WO2014074294A3 (en) Trochoidal rotary device
WO2010017795A3 (en) Pump unit
BRPI0822927A2 (en) Transmission assembly and collector housing for a working machine, and working machine.
WO2012142378A3 (en) Compressor including motor cooling
AU2013257469A1 (en) Axial flow pump with multi-grooved rotor
WO2010035097A3 (en) Fluid-powered motors and pumps
ZA201008908B (en) Heat engine/heat pump using centrifugal fans
WO2009061144A3 (en) Lock device having a rotating latch separated from cylinder
IT1391285B1 (en) TANNING MACHINE, AND ITS PROCEDURE.
WO2012094351A3 (en) Highly integrated inside-out ramjet
EP2565378A3 (en) Rotor casing liner assembly and corresponding power plant
WO2011058042A3 (en) Rotor for a turbo-machine

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08849170

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

NENP Non-entry into the national phase

Ref country code: JP

122 Ep: pct application non-entry in european phase

Ref document number: 08849170

Country of ref document: EP

Kind code of ref document: A1