WO2009056420A3 - Système micromécanique - Google Patents
Système micromécanique Download PDFInfo
- Publication number
- WO2009056420A3 WO2009056420A3 PCT/EP2008/063116 EP2008063116W WO2009056420A3 WO 2009056420 A3 WO2009056420 A3 WO 2009056420A3 EP 2008063116 W EP2008063116 W EP 2008063116W WO 2009056420 A3 WO2009056420 A3 WO 2009056420A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- micromechanical system
- base
- micromechanical
- suspension
- substrate
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/0802—Details
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
- B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
- B81B7/0012—Protection against reverse engineering, unauthorised use, use in unintended manner, wrong insertion or pin assignment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Pressure Sensors (AREA)
Abstract
L'invention concerne un système micromécanique (1) comprenant un substrat (100), un dispositif de suspension (130), une base (140), et un capteur micromécanique (150), la base (140) étant maintenue de manière mobile au-dessus du substrat (100) par le dispositif de suspension (130), et le capteur micromécanique (150) étant disposé sur la base (140).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200880113985A CN101842313A (zh) | 2007-11-02 | 2008-10-01 | 微机械*** |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102007052367.1 | 2007-11-02 | ||
DE200710052367 DE102007052367A1 (de) | 2007-11-02 | 2007-11-02 | Mikromechanisches System |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2009056420A2 WO2009056420A2 (fr) | 2009-05-07 |
WO2009056420A3 true WO2009056420A3 (fr) | 2009-10-22 |
Family
ID=40514303
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/EP2008/063116 WO2009056420A2 (fr) | 2007-11-02 | 2008-10-01 | Système micromécanique |
Country Status (4)
Country | Link |
---|---|
CN (1) | CN101842313A (fr) |
DE (1) | DE102007052367A1 (fr) |
TW (1) | TWI471258B (fr) |
WO (1) | WO2009056420A2 (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9227835B2 (en) * | 2010-11-23 | 2016-01-05 | Honeywell International Inc. | Vibration isolation interposer die |
DE102012200929B4 (de) * | 2012-01-23 | 2020-10-01 | Robert Bosch Gmbh | Mikromechanische Struktur und Verfahren zur Herstellung einer mikromechanischen Struktur |
DE102013216898B4 (de) * | 2013-08-26 | 2023-02-09 | Robert Bosch Gmbh | Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements |
DE102013216901A1 (de) * | 2013-08-26 | 2015-02-26 | Robert Bosch Gmbh | Mikromechanisches Bauelement und Verfahren zur Herstellung eines mikromechanischen Bauelements |
CN104891419B (zh) * | 2015-06-29 | 2016-11-09 | 歌尔股份有限公司 | 一种mems惯性传感器及其制造方法 |
TWI663403B (zh) * | 2017-05-08 | 2019-06-21 | 日商村田製作所股份有限公司 | 一種電容式微機械加速度計以及一種用於在此電容式微機械加速度計中執行一自我測試之方法 |
DE102021202573B3 (de) | 2021-03-16 | 2022-07-07 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung eingetragener Verein | Mems-schallwandler mit ausnehmungen und auskragungen |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5721377A (en) * | 1995-07-22 | 1998-02-24 | Robert Bosch Gmbh | Angular velocity sensor with built-in limit stops |
US5726073A (en) * | 1993-06-01 | 1998-03-10 | Cornell Research Foundation, Inc. | Compound stage MEM actuator suspended for multidimensional motion |
US20010048784A1 (en) * | 2000-03-24 | 2001-12-06 | Behrang Behin | Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6632698B2 (en) * | 2001-08-07 | 2003-10-14 | Hewlett-Packard Development Company, L.P. | Microelectromechanical device having a stiffened support beam, and methods of forming stiffened support beams in MEMS |
KR100431004B1 (ko) * | 2002-02-08 | 2004-05-12 | 삼성전자주식회사 | 회전형 비연성 멤스 자이로스코프 |
US20050066728A1 (en) * | 2003-09-25 | 2005-03-31 | Kionix, Inc. | Z-axis angular rate micro electro-mechanical systems (MEMS) sensor |
US7187100B2 (en) * | 2004-04-20 | 2007-03-06 | Advanced Numicro Systems, Inc. | Dimensions for a MEMS scanning mirror with ribs and tapered comb teeth |
KR100652952B1 (ko) * | 2004-07-19 | 2006-12-06 | 삼성전자주식회사 | 커플링 스프링을 구비한 멤스 자이로스코프 |
-
2007
- 2007-11-02 DE DE200710052367 patent/DE102007052367A1/de not_active Withdrawn
-
2008
- 2008-10-01 WO PCT/EP2008/063116 patent/WO2009056420A2/fr active Application Filing
- 2008-10-01 CN CN200880113985A patent/CN101842313A/zh active Pending
- 2008-10-31 TW TW97141910A patent/TWI471258B/zh not_active IP Right Cessation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5726073A (en) * | 1993-06-01 | 1998-03-10 | Cornell Research Foundation, Inc. | Compound stage MEM actuator suspended for multidimensional motion |
US5721377A (en) * | 1995-07-22 | 1998-02-24 | Robert Bosch Gmbh | Angular velocity sensor with built-in limit stops |
US20010048784A1 (en) * | 2000-03-24 | 2001-12-06 | Behrang Behin | Two-dimensional gimbaled scanning actuator with vertical electrostatic comb-drive for actuation and/or sensing |
Also Published As
Publication number | Publication date |
---|---|
TW200927637A (en) | 2009-07-01 |
WO2009056420A2 (fr) | 2009-05-07 |
TWI471258B (zh) | 2015-02-01 |
DE102007052367A1 (de) | 2009-05-07 |
CN101842313A (zh) | 2010-09-22 |
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