WO2009025167A1 - 圧電ポンプ - Google Patents

圧電ポンプ Download PDF

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Publication number
WO2009025167A1
WO2009025167A1 PCT/JP2008/064013 JP2008064013W WO2009025167A1 WO 2009025167 A1 WO2009025167 A1 WO 2009025167A1 JP 2008064013 W JP2008064013 W JP 2008064013W WO 2009025167 A1 WO2009025167 A1 WO 2009025167A1
Authority
WO
WIPO (PCT)
Prior art keywords
piezoelectric
pump
vibrator
piezoelectric pump
shim
Prior art date
Application number
PCT/JP2008/064013
Other languages
English (en)
French (fr)
Inventor
Akira Sato
Satoshi Yamada
Eiichi Komai
Katsuya Sugai
Original Assignee
Alps Electric Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co., Ltd. filed Critical Alps Electric Co., Ltd.
Publication of WO2009025167A1 publication Critical patent/WO2009025167A1/ja

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B43/00—Machines, pumps, or pumping installations having flexible working members
    • F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
    • F04B43/04—Pumps having electric drive
    • F04B43/043—Micropumps
    • F04B43/046—Micropumps with piezoelectric drive

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)

Abstract

　周縁を液密に保持した圧電振動子の表裏に、ポンプ室と大気室を形成し、該圧電振動子を振動させてポンプ作用を得る圧電ポンプにおいて、圧電振動子の圧電体層にクラックが生じにくい圧電ポンプを得る。導電性金属薄板からなる少なくとも一枚のシムと少なくとも一層の圧電体層との交互積層構造を有する圧電振動子を、最も大気室側にはシムが位置するように配置した圧電ポンプ。
PCT/JP2008/064013 2007-08-17 2008-08-05 圧電ポンプ WO2009025167A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007212573A JP2010242501A (ja) 2007-08-17 2007-08-17 圧電ポンプ
JP2007-212573 2007-08-17

Publications (1)

Publication Number Publication Date
WO2009025167A1 true WO2009025167A1 (ja) 2009-02-26

Family

ID=40378075

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/064013 WO2009025167A1 (ja) 2007-08-17 2008-08-05 圧電ポンプ

Country Status (2)

Country Link
JP (1) JP2010242501A (ja)
WO (1) WO2009025167A1 (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102926979A (zh) * 2012-07-30 2013-02-13 赛龙通信技术（深圳）有限公司 振膜风扇、应用该振膜风扇的手机及膜片振动通风方法
CN104806488A (zh) * 2014-01-24 2015-07-29 胡军 一种并联式压电微型泵
CN104632588B (zh) * 2013-11-12 2017-02-08 胡军 一种双腔式压电微型泵
CN109424528A (zh) * 2017-08-31 2019-03-05 研能科技股份有限公司 气体输送装置
CN109424520A (zh) * 2017-08-31 2019-03-05 研能科技股份有限公司 气体输送装置
US10801487B2 (en) 2017-08-31 2020-10-13 Microjet Technology Co., Ltd. Gas transportation device
US10823165B2 (en) 2017-08-31 2020-11-03 Microjet Technology Co., Ltd. Gas transportation device
CN111980885A (zh) * 2020-08-24 2020-11-24 常州工学院 一种出口带隔板的层叠式双腔并联压电泵

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6747183B2 (ja) * 2016-08-31 2020-08-26 セイコーエプソン株式会社 ポンプおよびロボットハンド

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005240871A (ja) * 2004-02-25 2005-09-08 Alps Electric Co Ltd ダイヤフラム及びこれを備えた小型ポンプ
JP2006144761A (ja) * 2004-11-25 2006-06-08 Alps Electric Co Ltd ダイヤフラム用電極接続端子
JP2007046551A (ja) * 2005-08-10 2007-02-22 Alps Electric Co Ltd 圧電ポンプ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005240871A (ja) * 2004-02-25 2005-09-08 Alps Electric Co Ltd ダイヤフラム及びこれを備えた小型ポンプ
JP2006144761A (ja) * 2004-11-25 2006-06-08 Alps Electric Co Ltd ダイヤフラム用電極接続端子
JP2007046551A (ja) * 2005-08-10 2007-02-22 Alps Electric Co Ltd 圧電ポンプ

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102926979A (zh) * 2012-07-30 2013-02-13 赛龙通信技术（深圳）有限公司 振膜风扇、应用该振膜风扇的手机及膜片振动通风方法
CN104632588B (zh) * 2013-11-12 2017-02-08 胡军 一种双腔式压电微型泵
CN104806488A (zh) * 2014-01-24 2015-07-29 胡军 一种并联式压电微型泵
CN104806488B (zh) * 2014-01-24 2018-11-06 胡军 一种并联式压电微型泵
CN109424528A (zh) * 2017-08-31 2019-03-05 研能科技股份有限公司 气体输送装置
CN109424520A (zh) * 2017-08-31 2019-03-05 研能科技股份有限公司 气体输送装置
US10801487B2 (en) 2017-08-31 2020-10-13 Microjet Technology Co., Ltd. Gas transportation device
US10823165B2 (en) 2017-08-31 2020-11-03 Microjet Technology Co., Ltd. Gas transportation device
CN111980885A (zh) * 2020-08-24 2020-11-24 常州工学院 一种出口带隔板的层叠式双腔并联压电泵

Also Published As

Publication number Publication date
JP2010242501A (ja) 2010-10-28

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