WO2009025167A1 - 圧電ポンプ - Google Patents
圧電ポンプ Download PDFInfo
- Publication number
- WO2009025167A1 WO2009025167A1 PCT/JP2008/064013 JP2008064013W WO2009025167A1 WO 2009025167 A1 WO2009025167 A1 WO 2009025167A1 JP 2008064013 W JP2008064013 W JP 2008064013W WO 2009025167 A1 WO2009025167 A1 WO 2009025167A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- piezoelectric
- pump
- vibrator
- piezoelectric pump
- shim
- Prior art date
Links
- 239000002184 metal Substances 0.000 abstract 1
- 238000005086 pumping Methods 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezoelectric drive
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
周縁を液密に保持した圧電振動子の表裏に、ポンプ室と大気室を形成し、該圧電振動子を振動させてポンプ作用を得る圧電ポンプにおいて、圧電振動子の圧電体層にクラックが生じにくい圧電ポンプを得る。導電性金属薄板からなる少なくとも一枚のシムと少なくとも一層の圧電体層との交互積層構造を有する圧電振動子を、最も大気室側にはシムが位置するように配置した圧電ポンプ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007212573A JP2010242501A (ja) | 2007-08-17 | 2007-08-17 | 圧電ポンプ |
JP2007-212573 | 2007-08-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2009025167A1 true WO2009025167A1 (ja) | 2009-02-26 |
Family
ID=40378075
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/064013 WO2009025167A1 (ja) | 2007-08-17 | 2008-08-05 | 圧電ポンプ |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP2010242501A (ja) |
WO (1) | WO2009025167A1 (ja) |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102926979A (zh) * | 2012-07-30 | 2013-02-13 | 赛龙通信技术(深圳)有限公司 | 振膜风扇、应用该振膜风扇的手机及膜片振动通风方法 |
CN104806488A (zh) * | 2014-01-24 | 2015-07-29 | 胡军 | 一种并联式压电微型泵 |
CN104632588B (zh) * | 2013-11-12 | 2017-02-08 | 胡军 | 一种双腔式压电微型泵 |
CN109424528A (zh) * | 2017-08-31 | 2019-03-05 | 研能科技股份有限公司 | 气体输送装置 |
CN109424520A (zh) * | 2017-08-31 | 2019-03-05 | 研能科技股份有限公司 | 气体输送装置 |
US10801487B2 (en) | 2017-08-31 | 2020-10-13 | Microjet Technology Co., Ltd. | Gas transportation device |
US10823165B2 (en) | 2017-08-31 | 2020-11-03 | Microjet Technology Co., Ltd. | Gas transportation device |
CN111980885A (zh) * | 2020-08-24 | 2020-11-24 | 常州工学院 | 一种出口带隔板的层叠式双腔并联压电泵 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6747183B2 (ja) * | 2016-08-31 | 2020-08-26 | セイコーエプソン株式会社 | ポンプおよびロボットハンド |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005240871A (ja) * | 2004-02-25 | 2005-09-08 | Alps Electric Co Ltd | ダイヤフラム及びこれを備えた小型ポンプ |
JP2006144761A (ja) * | 2004-11-25 | 2006-06-08 | Alps Electric Co Ltd | ダイヤフラム用電極接続端子 |
JP2007046551A (ja) * | 2005-08-10 | 2007-02-22 | Alps Electric Co Ltd | 圧電ポンプ |
-
2007
- 2007-08-17 JP JP2007212573A patent/JP2010242501A/ja not_active Withdrawn
-
2008
- 2008-08-05 WO PCT/JP2008/064013 patent/WO2009025167A1/ja active Application Filing
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005240871A (ja) * | 2004-02-25 | 2005-09-08 | Alps Electric Co Ltd | ダイヤフラム及びこれを備えた小型ポンプ |
JP2006144761A (ja) * | 2004-11-25 | 2006-06-08 | Alps Electric Co Ltd | ダイヤフラム用電極接続端子 |
JP2007046551A (ja) * | 2005-08-10 | 2007-02-22 | Alps Electric Co Ltd | 圧電ポンプ |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102926979A (zh) * | 2012-07-30 | 2013-02-13 | 赛龙通信技术(深圳)有限公司 | 振膜风扇、应用该振膜风扇的手机及膜片振动通风方法 |
CN104632588B (zh) * | 2013-11-12 | 2017-02-08 | 胡军 | 一种双腔式压电微型泵 |
CN104806488A (zh) * | 2014-01-24 | 2015-07-29 | 胡军 | 一种并联式压电微型泵 |
CN104806488B (zh) * | 2014-01-24 | 2018-11-06 | 胡军 | 一种并联式压电微型泵 |
CN109424528A (zh) * | 2017-08-31 | 2019-03-05 | 研能科技股份有限公司 | 气体输送装置 |
CN109424520A (zh) * | 2017-08-31 | 2019-03-05 | 研能科技股份有限公司 | 气体输送装置 |
US10801487B2 (en) | 2017-08-31 | 2020-10-13 | Microjet Technology Co., Ltd. | Gas transportation device |
US10823165B2 (en) | 2017-08-31 | 2020-11-03 | Microjet Technology Co., Ltd. | Gas transportation device |
CN111980885A (zh) * | 2020-08-24 | 2020-11-24 | 常州工学院 | 一种出口带隔板的层叠式双腔并联压电泵 |
Also Published As
Publication number | Publication date |
---|---|
JP2010242501A (ja) | 2010-10-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2009025167A1 (ja) | 圧電ポンプ | |
WO2006074038A3 (en) | Pumps with diaphragms bonded as bellows | |
EP2573396A3 (en) | Piezoelectric pump | |
GB201312676D0 (en) | An improved focused acoustic transducer | |
EP4234930A3 (en) | Pump | |
WO2009075088A1 (ja) | 表面波装置及びデュプレクサ | |
WO2007064404A8 (en) | Microfluidic membrane pump and valve | |
WO2011079218A3 (en) | Rigless low volume pump system | |
WO2009001842A1 (ja) | 積層セラミック電子部品及びその実装構造 | |
EP3009863A3 (en) | Compliance chambers for marine vibrators | |
EP3121844A3 (en) | Ultrasound transducers | |
WO2009069746A1 (ja) | 積層型圧電素子、これを備えた噴射装置及び燃料噴射システム | |
WO2009028027A1 (ja) | 圧電薄膜共振子、それを用いたフィルタ、そのフィルタを用いたデュプレクサおよびそのフィルタまたはそのデュプレクサを用いた通信機 | |
WO2009057489A1 (ja) | 積層型圧電素子、これを備えた噴射装置及び燃料噴射システム | |
DE502006008233D1 (de) | Schraubenspindelpumpe | |
WO2012145348A3 (en) | Electrical submersible pump with reciprocating linear motor | |
WO2009050881A1 (ja) | 超音波探触子 | |
TW200730357A (en) | Drop generator | |
WO2009020377A3 (en) | Saw sensor | |
WO2009028444A1 (ja) | 積層型圧電素子、これを備えた噴射装置及び燃料噴射システム | |
US20080170951A1 (en) | Piezoelectric pump | |
GB2539614A (en) | Variable thickness acoustic transducers | |
TW200501790A (en) | Sound detection mechanism and manufacturing method thereof | |
USD871456S1 (en) | Fuel pump assembly | |
EP1652670A3 (en) | Liquid transporting apparatus |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 08792199 Country of ref document: EP Kind code of ref document: A1 |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
NENP | Non-entry into the national phase |
Ref country code: JP |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 08792199 Country of ref document: EP Kind code of ref document: A1 |