WO2009019006A3 - Device and method for reducing speckle in the field of laser applications - Google Patents

Device and method for reducing speckle in the field of laser applications Download PDF

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Publication number
WO2009019006A3
WO2009019006A3 PCT/EP2008/006472 EP2008006472W WO2009019006A3 WO 2009019006 A3 WO2009019006 A3 WO 2009019006A3 EP 2008006472 W EP2008006472 W EP 2008006472W WO 2009019006 A3 WO2009019006 A3 WO 2009019006A3
Authority
WO
WIPO (PCT)
Prior art keywords
laser
field
laser applications
reducing speckle
beam axis
Prior art date
Application number
PCT/EP2008/006472
Other languages
German (de)
French (fr)
Other versions
WO2009019006A2 (en
Inventor
Dieter Grebner
Rico Fuchs
Alexander Kalies
Original Assignee
Zeiss Carl Meditec Ag
Dieter Grebner
Rico Fuchs
Alexander Kalies
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Carl Meditec Ag, Dieter Grebner, Rico Fuchs, Alexander Kalies filed Critical Zeiss Carl Meditec Ag
Publication of WO2009019006A2 publication Critical patent/WO2009019006A2/en
Publication of WO2009019006A3 publication Critical patent/WO2009019006A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/073—Shaping the laser spot
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F9/00802—Methods or devices for eye surgery using laser for photoablation
    • A61F9/00804—Refractive treatments
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F9/00802—Methods or devices for eye surgery using laser for photoablation
    • A61F9/00814—Laser features or special beam parameters therefor
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F9/00802—Methods or devices for eye surgery using laser for photoablation
    • A61F9/00817—Beam shaping with masks
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F2009/00861—Methods or devices for eye surgery using laser adapted for treatment at a particular location
    • A61F2009/00872—Cornea
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61F—FILTERS IMPLANTABLE INTO BLOOD VESSELS; PROSTHESES; DEVICES PROVIDING PATENCY TO, OR PREVENTING COLLAPSING OF, TUBULAR STRUCTURES OF THE BODY, e.g. STENTS; ORTHOPAEDIC, NURSING OR CONTRACEPTIVE DEVICES; FOMENTATION; TREATMENT OR PROTECTION OF EYES OR EARS; BANDAGES, DRESSINGS OR ABSORBENT PADS; FIRST-AID KITS
    • A61F9/00—Methods or devices for treatment of the eyes; Devices for putting-in contact lenses; Devices to correct squinting; Apparatus to guide the blind; Protective devices for the eyes, carried on the body or in the hand
    • A61F9/007—Methods or devices for eye surgery
    • A61F9/008—Methods or devices for eye surgery using laser
    • A61F9/00802—Methods or devices for eye surgery using laser for photoablation
    • A61F9/00804—Refractive treatments
    • A61F9/00806—Correction of higher orders
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/005—Optical devices external to the laser cavity, specially adapted for lasers, e.g. for homogenisation of the beam or for manipulating laser pulses, e.g. pulse shaping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08018—Mode suppression
    • H01S3/0804—Transverse or lateral modes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/05—Construction or shape of optical resonators; Accommodation of active medium therein; Shape of active medium
    • H01S3/08—Construction or shape of optical resonators or components thereof
    • H01S3/08059—Constructional details of the reflector, e.g. shape
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/14—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range characterised by the material used as the active medium
    • H01S3/22—Gases
    • H01S3/223—Gases the active gas being polyatomic, i.e. containing two or more atoms
    • H01S3/225—Gases the active gas being polyatomic, i.e. containing two or more atoms comprising an excimer or exciplex

Landscapes

  • Health & Medical Sciences (AREA)
  • Optics & Photonics (AREA)
  • Physics & Mathematics (AREA)
  • Ophthalmology & Optometry (AREA)
  • Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Surgery (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Vascular Medicine (AREA)
  • Animal Behavior & Ethology (AREA)
  • General Health & Medical Sciences (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Lasers (AREA)

Abstract

The present invention relates to a device for improving the laser beam quality for machining applications, comprising a laser (1) having an asymmetrical beam profile, comprising a first, short beam axis (20), a second, long beam axis (30), wherein the laser (1) comprises at least one optical element (10) and/or one resonator mirror (11) having a cylindrical mirror surface (13) for reducing spatial coherence and/or increasing the divergence in the short beam axis.
PCT/EP2008/006472 2007-08-06 2008-08-06 Device and method for reducing speckle in the field of laser applications WO2009019006A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE102007036988 2007-08-06
DE102007036988.5 2007-08-06
DE102008035898A DE102008035898A1 (en) 2007-08-06 2008-07-31 Apparatus and method for reducing speckling in the field of laser applications
DE102008035898.3 2008-07-31

Publications (2)

Publication Number Publication Date
WO2009019006A2 WO2009019006A2 (en) 2009-02-12
WO2009019006A3 true WO2009019006A3 (en) 2009-04-16

Family

ID=40227130

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2008/006472 WO2009019006A2 (en) 2007-08-06 2008-08-06 Device and method for reducing speckle in the field of laser applications

Country Status (2)

Country Link
DE (1) DE102008035898A1 (en)
WO (1) WO2009019006A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011102166A1 (en) * 2011-05-20 2012-11-22 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Method for homogenizing the laser beam profile in processes using a liquid jet laser and corresponding device
CN107851955A (en) * 2015-08-19 2018-03-27 极光先进雷射株式会社 Laser aid
EP3364924B1 (en) 2015-10-21 2021-06-16 AMO Development, LLC Laser beam calibration and beam quality measurement in laser surgery systems
DE102022103899A1 (en) 2022-02-18 2023-08-24 Schwind Eye-Tech-Solutions Gmbh Treatment device for eye treatment, method, computer program and computer-readable medium

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0472727A1 (en) * 1989-05-18 1992-03-04 Kabushiki Kaisha Komatsu Seisakusho Narrow-band oscillation excimer laser
DE4225781A1 (en) * 1992-08-04 1994-02-10 Lambda Physik Gmbh Excimer laser with unstable optical resonator - has concave rear mirror and cylindrical output mirror contg. internal face of concave shape to produce divergence of laser beams in perpendicular directions which approach one another
JPH10106927A (en) * 1996-10-01 1998-04-24 Canon Inc Aligner and device manufacturing method
WO1999001915A1 (en) * 1997-07-01 1999-01-14 Cymer, Inc. Very narrow band laser with unstable resonance cavity
EP1722450A1 (en) * 2005-05-12 2006-11-15 Innovavent GmbH Anamorphic solid state disk laser

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5684822A (en) 1994-11-17 1997-11-04 Cymer, Inc. Laser system with anamorphic confocal unstable resonator
US5946337A (en) 1998-04-29 1999-08-31 Lambda Physik Gmbh Hybrid laser resonator with special line narrowing
SE0202584D0 (en) 2002-09-02 2002-09-02 Micronic Laser Systems Ab A method and device for coherence reduction

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0472727A1 (en) * 1989-05-18 1992-03-04 Kabushiki Kaisha Komatsu Seisakusho Narrow-band oscillation excimer laser
DE4225781A1 (en) * 1992-08-04 1994-02-10 Lambda Physik Gmbh Excimer laser with unstable optical resonator - has concave rear mirror and cylindrical output mirror contg. internal face of concave shape to produce divergence of laser beams in perpendicular directions which approach one another
JPH10106927A (en) * 1996-10-01 1998-04-24 Canon Inc Aligner and device manufacturing method
WO1999001915A1 (en) * 1997-07-01 1999-01-14 Cymer, Inc. Very narrow band laser with unstable resonance cavity
EP1722450A1 (en) * 2005-05-12 2006-11-15 Innovavent GmbH Anamorphic solid state disk laser

Also Published As

Publication number Publication date
DE102008035898A1 (en) 2009-02-12
WO2009019006A2 (en) 2009-02-12

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