WO2009002644A8 - Methods of making hierarchical articles - Google Patents
Methods of making hierarchical articles Download PDFInfo
- Publication number
- WO2009002644A8 WO2009002644A8 PCT/US2008/064631 US2008064631W WO2009002644A8 WO 2009002644 A8 WO2009002644 A8 WO 2009002644A8 US 2008064631 W US2008064631 W US 2008064631W WO 2009002644 A8 WO2009002644 A8 WO 2009002644A8
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- methods
- microstructures
- articles
- making
- nanofeatures
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/0002—Lithographic processes using patterning methods other than those involving the exposure to radiation, e.g. by stamping
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0075—Manufacture of substrate-free structures
- B81C99/009—Manufacturing the stamps or the moulds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y10/00—Nanotechnology for information processing, storage or transmission, e.g. quantum computing or single electron logic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y40/00—Manufacture or treatment of nanostructures
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/03—Static structures
- B81B2203/0361—Tips, pillars
Landscapes
- Engineering & Computer Science (AREA)
- Nanotechnology (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Mathematical Physics (AREA)
- Theoretical Computer Science (AREA)
- Micromachines (AREA)
- Drying Of Semiconductors (AREA)
Abstract
Provided is a method of fabricating hierarchical articles that contain nano features and microstructures. The method includes providing a substrate that includes nano features and then creating microstructures adding a layer, removing at least a portion of the layer to reveal at least a portion of the substrate. Also provided is a method of making hierarchical structures that contain nanofeatures and microstructures wherein the method includes adding the nanofeatures to existing microstuctures using nanoparticles as an etch mask.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN200880103985A CN101827783A (en) | 2007-06-21 | 2008-05-23 | Methods of making hierarchical articles |
EP08769665A EP2170764A4 (en) | 2007-06-21 | 2008-05-23 | Methods of making hierarchical articles |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US99975207P | 2007-06-21 | 2007-06-21 | |
US99975307P | 2007-06-21 | 2007-06-21 | |
US60/999,753 | 2007-06-21 | ||
US60/999,752 | 2007-06-21 |
Publications (3)
Publication Number | Publication Date |
---|---|
WO2009002644A2 WO2009002644A2 (en) | 2008-12-31 |
WO2009002644A3 WO2009002644A3 (en) | 2009-02-19 |
WO2009002644A8 true WO2009002644A8 (en) | 2011-12-22 |
Family
ID=40186234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2008/064631 WO2009002644A2 (en) | 2007-06-21 | 2008-05-23 | Methods of making hierarchical articles |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2170764A4 (en) |
CN (1) | CN101827783A (en) |
WO (1) | WO2009002644A2 (en) |
Families Citing this family (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
BR9610557A (en) * | 1995-09-20 | 1999-12-21 | Uponor Bv | Oriented polymeric products |
US9061892B2 (en) | 2008-03-17 | 2015-06-23 | Avery Dennison Corporation | Functional micro- and/or nano-structure bearing constructions and/or methods for fabricating same |
DE102010023490A1 (en) * | 2010-06-11 | 2011-12-15 | MAX-PLANCK-Gesellschaft zur Förderung der Wissenschaften e.V. | Three-dimensional metal-covered nanostructures on substrate surfaces, methods for their production and their use |
DE102010026490A1 (en) | 2010-07-07 | 2012-01-12 | Basf Se | Process for the production of finely structured surfaces |
WO2012058605A1 (en) * | 2010-10-28 | 2012-05-03 | 3M Innovative Properties Company | Engineered surfaces for reducing bacterial adhesion |
US9085019B2 (en) | 2010-10-28 | 2015-07-21 | 3M Innovative Properties Company | Superhydrophobic films |
CN102480001B (en) * | 2011-03-25 | 2013-07-03 | 深圳光启高等理工研究院 | Preparation method of metamaterial |
CN102810504A (en) * | 2011-05-31 | 2012-12-05 | 无锡华润上华半导体有限公司 | Process for growing thick aluminium |
US8877072B2 (en) | 2011-10-10 | 2014-11-04 | Ranjana Sahai | Three-dimensional fractal graduated-branching hierarchical structures and fabrication method thereof |
CN102381679A (en) * | 2011-10-28 | 2012-03-21 | 华中科技大学 | Manufacturing method of gecko hair-imitating dry adhesive |
CA2787584A1 (en) | 2012-08-22 | 2014-02-22 | Hy-Power Nano Inc. | Method for continuous preparation of indium-tin coprecipitates and indium-tin-oxide nanopowders with substantially homogeneous indium/tin composition, controllable shape and particle size |
CN103204460B (en) * | 2013-03-21 | 2016-03-02 | 北京工业大学 | Based on the preparation method of the metal micro-nanostructure of laser interference induction cross-linking reaction |
CN105374907B (en) * | 2014-08-29 | 2018-08-14 | 展晶科技(深圳)有限公司 | The substrate and its manufacturing method of light-emitting diode chip for backlight unit |
US10384432B2 (en) * | 2016-02-19 | 2019-08-20 | Palo Alto Research Center Incorporated | Hierarchical laminates fabricated from micro-scale, digitally patterned films |
KR101921670B1 (en) | 2016-04-08 | 2018-11-26 | 재단법인 멀티스케일 에너지시스템 연구단 | Hierarchial fine structures, a mold for forming same, and a method for manufacturing the mold |
CN108821229B (en) * | 2018-06-15 | 2023-05-02 | 西北工业大学 | Preparation method of ZnS infrared window antireflection microstructure surface |
CN111830614A (en) * | 2020-05-13 | 2020-10-27 | 华南师范大学 | Solution for realizing nano grating imprinting by utilizing laser polarization state |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH10282635A (en) * | 1997-04-09 | 1998-10-23 | Sony Corp | Method for correcting pattern data, electron beam writing method, photomask and its manufacture, exposure method, semiconductor device and its production and pattern data correcting device |
KR100480772B1 (en) * | 2000-01-05 | 2005-04-06 | 삼성에스디아이 주식회사 | Forming method of micro structure with surface roughness of nano scale |
US6960327B2 (en) * | 2003-01-30 | 2005-11-01 | The Regents Of The University Of California | Methods for removing organic compounds from nano-composite materials |
US20050129844A1 (en) * | 2003-06-06 | 2005-06-16 | Colleen Legzdins | Method of deposition of nano-particles onto micro and nano-structured materials |
US7229936B2 (en) * | 2004-05-03 | 2007-06-12 | International Business Machines Corporation | Method to reduce photoresist pattern collapse by controlled surface microroughening |
-
2008
- 2008-05-23 EP EP08769665A patent/EP2170764A4/en not_active Withdrawn
- 2008-05-23 CN CN200880103985A patent/CN101827783A/en active Pending
- 2008-05-23 WO PCT/US2008/064631 patent/WO2009002644A2/en active Application Filing
Also Published As
Publication number | Publication date |
---|---|
WO2009002644A3 (en) | 2009-02-19 |
EP2170764A2 (en) | 2010-04-07 |
CN101827783A (en) | 2010-09-08 |
EP2170764A4 (en) | 2011-06-22 |
WO2009002644A2 (en) | 2008-12-31 |
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