WO2008133322A1 - Method for the treatment of tetraalkylammonium ion-containing development waste liquor - Google Patents

Method for the treatment of tetraalkylammonium ion-containing development waste liquor Download PDF

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Publication number
WO2008133322A1
WO2008133322A1 PCT/JP2008/058026 JP2008058026W WO2008133322A1 WO 2008133322 A1 WO2008133322 A1 WO 2008133322A1 JP 2008058026 W JP2008058026 W JP 2008058026W WO 2008133322 A1 WO2008133322 A1 WO 2008133322A1
Authority
WO
WIPO (PCT)
Prior art keywords
resin
waste liquor
tetraalkylammonium ion
contact
bringing
Prior art date
Application number
PCT/JP2008/058026
Other languages
French (fr)
Japanese (ja)
Inventor
Hisahiko Iwamoto
Yoshifumi Yamashita
Original Assignee
Tokuyama Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokuyama Corporation filed Critical Tokuyama Corporation
Priority to JP2009511914A priority Critical patent/JP5167253B2/en
Publication of WO2008133322A1 publication Critical patent/WO2008133322A1/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J39/00—Cation exchange; Use of material as cation exchangers; Treatment of material for improving the cation exchange properties
    • B01J39/04—Processes using organic exchangers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J45/00—Ion-exchange in which a complex or a chelate is formed; Use of material as complex or chelate forming ion-exchangers; Treatment of material for improving the complex or chelate forming ion-exchange properties
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/58—Treatment of water, waste water, or sewage by removing specified dissolved compounds
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/66—Treatment of water, waste water, or sewage by neutralisation; pH adjustment
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/42—Treatment of water, waste water, or sewage by ion-exchange
    • C02F2001/425—Treatment of water, waste water, or sewage by ion-exchange using cation exchangers
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2101/00—Nature of the contaminant
    • C02F2101/30—Organic compounds
    • C02F2101/38—Organic compounds containing nitrogen
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2103/00—Nature of the water, waste water, sewage or sludge to be treated
    • C02F2103/34—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32
    • C02F2103/40—Nature of the water, waste water, sewage or sludge to be treated from industrial activities not provided for in groups C02F2103/12 - C02F2103/32 from the manufacture or use of photosensitive materials
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2209/00—Controlling or monitoring parameters in water treatment
    • C02F2209/06—Controlling or monitoring parameters in water treatment pH

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)

Abstract

A method for the treatment of tetraalkylammonium ion-containing development waste liquor by conducting successively the conversion step of bringing an acid into contact with a cation-exchange resin or a chelating resin to convert the resin into a H+-form one, the acid removal step of bringing water into contact with the H+-form resin until the pH of the eluate from the resin becomes 3 or above, the step of bringing a 0.3 to 0.8mol/L tetraalkylammonium ion solution into contact with the resulting resin to convert the resin into a tetraalkylammonium-form one, and the step of bringing a tetraalkylammonium ion-containing development waste liquor into contact with the tetraalkyl- ammonium-form resin to remove impurities from the waste liquor.
PCT/JP2008/058026 2007-04-25 2008-04-25 Method for the treatment of tetraalkylammonium ion-containing development waste liquor WO2008133322A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009511914A JP5167253B2 (en) 2007-04-25 2008-04-25 Processing method of developing waste liquid containing tetraalkylammonium ions

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-114985 2007-04-25
JP2007114985 2007-04-25

Publications (1)

Publication Number Publication Date
WO2008133322A1 true WO2008133322A1 (en) 2008-11-06

Family

ID=39925768

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/058026 WO2008133322A1 (en) 2007-04-25 2008-04-25 Method for the treatment of tetraalkylammonium ion-containing development waste liquor

Country Status (5)

Country Link
JP (1) JP5167253B2 (en)
KR (1) KR101258730B1 (en)
CN (1) CN101652325A (en)
TW (1) TWI399342B (en)
WO (1) WO2008133322A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010036130A (en) * 2008-08-06 2010-02-18 Kurita Water Ind Ltd Method and apparatus for recovering water-soluble organic solvent having amino group
JP2010125352A (en) * 2008-11-25 2010-06-10 Japan Organo Co Ltd Treatment system for waste water generated in photoresist development
JP2011183298A (en) * 2010-03-08 2011-09-22 Sharp Corp Method for recycling silane coupling agent-containing solution and method for producing silane coupling agent by using the method
WO2019163499A1 (en) * 2018-02-22 2019-08-29 オルガノ株式会社 Method and apparatus for producing chelate resin, and method for purifying to-be-treated liquid

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3528045B2 (en) * 2000-07-31 2004-05-17 株式会社村田製作所 Manufacturing equipment for multilayer ceramic electronic components

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5775152A (en) * 1980-10-30 1982-05-11 Hitachi Ltd Regenerating method for granular ion exchange resin and regenerating system thereof
JP2003155261A (en) * 2001-08-27 2003-05-27 Nippon Shokubai Co Ltd Method for purifying unsaturated organic acid salt and method for regenerating weakly basic anion exchange resin and adsorbing resin used therein
JP2003190822A (en) * 2001-12-27 2003-07-08 Tokuyama Corp Method for regenerating cation exchange resin or chelate resin
WO2005102993A1 (en) * 2004-04-22 2005-11-03 Adeka Corporation Process for purification of aqueous acid solutions

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1099853A (en) 1996-09-27 1998-04-21 Kurita Water Ind Ltd Apparatus for treating water containing tetraalkylammonium hydroxide
JP3671644B2 (en) 1998-01-05 2005-07-13 オルガノ株式会社 Photoresist developing waste liquid recycling method and apparatus
JP3968678B2 (en) 1998-10-26 2007-08-29 オルガノ株式会社 Method for treating tetraalkylammonium ion-containing liquid
JP3728945B2 (en) * 1998-10-30 2005-12-21 オルガノ株式会社 Method and apparatus for recovering and reusing developer from photoresist developer waste

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5775152A (en) * 1980-10-30 1982-05-11 Hitachi Ltd Regenerating method for granular ion exchange resin and regenerating system thereof
JP2003155261A (en) * 2001-08-27 2003-05-27 Nippon Shokubai Co Ltd Method for purifying unsaturated organic acid salt and method for regenerating weakly basic anion exchange resin and adsorbing resin used therein
JP2003190822A (en) * 2001-12-27 2003-07-08 Tokuyama Corp Method for regenerating cation exchange resin or chelate resin
WO2005102993A1 (en) * 2004-04-22 2005-11-03 Adeka Corporation Process for purification of aqueous acid solutions

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010036130A (en) * 2008-08-06 2010-02-18 Kurita Water Ind Ltd Method and apparatus for recovering water-soluble organic solvent having amino group
JP2010125352A (en) * 2008-11-25 2010-06-10 Japan Organo Co Ltd Treatment system for waste water generated in photoresist development
JP2011183298A (en) * 2010-03-08 2011-09-22 Sharp Corp Method for recycling silane coupling agent-containing solution and method for producing silane coupling agent by using the method
WO2019163499A1 (en) * 2018-02-22 2019-08-29 オルガノ株式会社 Method and apparatus for producing chelate resin, and method for purifying to-be-treated liquid
JP2019141800A (en) * 2018-02-22 2019-08-29 オルガノ株式会社 Method and apparatus for producing chelate resin, and method for purifying liquid to be treated
JP7137318B2 (en) 2018-02-22 2022-09-14 オルガノ株式会社 Method for purifying liquid to be treated

Also Published As

Publication number Publication date
CN101652325A (en) 2010-02-17
JP5167253B2 (en) 2013-03-21
TWI399342B (en) 2013-06-21
KR20100014915A (en) 2010-02-11
JPWO2008133322A1 (en) 2010-07-29
TW200906732A (en) 2009-02-16
KR101258730B1 (en) 2013-05-02

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