WO2008129891A1 - エッチング用組成物及びエッチング方法 - Google Patents
エッチング用組成物及びエッチング方法 Download PDFInfo
- Publication number
- WO2008129891A1 WO2008129891A1 PCT/JP2008/051873 JP2008051873W WO2008129891A1 WO 2008129891 A1 WO2008129891 A1 WO 2008129891A1 JP 2008051873 W JP2008051873 W JP 2008051873W WO 2008129891 A1 WO2008129891 A1 WO 2008129891A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- etching
- composition
- ruthenium
- foul
- chlorine
- Prior art date
Links
- 238000005530 etching Methods 0.000 title abstract 5
- 238000000034 method Methods 0.000 title abstract 2
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 abstract 2
- 229910052707 ruthenium Inorganic materials 0.000 abstract 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 abstract 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 abstract 1
- 239000003513 alkali Substances 0.000 abstract 1
- 229910052801 chlorine Inorganic materials 0.000 abstract 1
- 239000000460 chlorine Substances 0.000 abstract 1
- 229910052731 fluorine Inorganic materials 0.000 abstract 1
- 239000011737 fluorine Substances 0.000 abstract 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32134—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by liquid etching only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/30—Acidic compositions for etching other metallic material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/32—Alkaline compositions
- C23F1/40—Alkaline compositions for etching other metallic material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- ing And Chemical Polishing (AREA)
Abstract
装置を汚染せず、低コストで、強アルカリを使用することなく、ルテニウムをエッチングできる、エッチング用組成物、及びそれを用いたエッチング方法を提供する。 塩素及び水を含み、フッ素を含まず、なおかつpHが12未満であることを特徴とするルテニウムのエッチング用組成物。
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-105720 | 2007-04-13 | ||
JP2007105720 | 2007-04-13 | ||
JP2007148025A JP2008280605A (ja) | 2006-12-21 | 2007-06-04 | エッチング用組成物及びエッチング方法 |
JP2007-148025 | 2007-06-04 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008129891A1 true WO2008129891A1 (ja) | 2008-10-30 |
Family
ID=39875421
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/051873 WO2008129891A1 (ja) | 2007-04-13 | 2008-02-05 | エッチング用組成物及びエッチング方法 |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2008129891A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3926663A4 (en) * | 2019-02-13 | 2022-12-21 | Tokuyama Corporation | SEMICONDUCTOR WAFER TREATMENT LIQUID WITH HYPOCHLORITIONS AND PH BUFFER |
EP3926662A4 (en) * | 2019-02-13 | 2023-01-11 | Tokuyama Corporation | PROCESSING SOLUTION CONTAINING ONIUM SALT FOR SEMICONDUCTOR WAFER |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000315670A (ja) * | 1999-04-30 | 2000-11-14 | Nec Corp | 半導体基板の洗浄方法 |
JP2001237389A (ja) * | 2000-02-24 | 2001-08-31 | Nec Corp | 半導体装置の製造方法 |
JP2001240985A (ja) * | 1999-12-20 | 2001-09-04 | Hitachi Ltd | 固体表面の処理方法及び処理液並びにこれらを用いた電子デバイスの製造方法 |
JP2002016053A (ja) * | 2000-06-28 | 2002-01-18 | Hitachi Ltd | 半導体装置の製造方法 |
JP2007009331A (ja) * | 2005-06-28 | 2007-01-18 | Lg Philips Lcd Co Ltd | エッチング組成物、及び液晶表示装置用アレイ基板の製造方法 |
-
2008
- 2008-02-05 WO PCT/JP2008/051873 patent/WO2008129891A1/ja active Application Filing
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000315670A (ja) * | 1999-04-30 | 2000-11-14 | Nec Corp | 半導体基板の洗浄方法 |
JP2001240985A (ja) * | 1999-12-20 | 2001-09-04 | Hitachi Ltd | 固体表面の処理方法及び処理液並びにこれらを用いた電子デバイスの製造方法 |
JP2001237389A (ja) * | 2000-02-24 | 2001-08-31 | Nec Corp | 半導体装置の製造方法 |
JP2002016053A (ja) * | 2000-06-28 | 2002-01-18 | Hitachi Ltd | 半導体装置の製造方法 |
JP2007009331A (ja) * | 2005-06-28 | 2007-01-18 | Lg Philips Lcd Co Ltd | エッチング組成物、及び液晶表示装置用アレイ基板の製造方法 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3926663A4 (en) * | 2019-02-13 | 2022-12-21 | Tokuyama Corporation | SEMICONDUCTOR WAFER TREATMENT LIQUID WITH HYPOCHLORITIONS AND PH BUFFER |
EP3926662A4 (en) * | 2019-02-13 | 2023-01-11 | Tokuyama Corporation | PROCESSING SOLUTION CONTAINING ONIUM SALT FOR SEMICONDUCTOR WAFER |
US12024663B2 (en) | 2019-02-13 | 2024-07-02 | Tokuyama Corporation | Onium salt-containing treatment liquid for semiconductor wafers |
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