WO2008126603A1 - ドライバ回路および半導体試験装置 - Google Patents

ドライバ回路および半導体試験装置 Download PDF

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Publication number
WO2008126603A1
WO2008126603A1 PCT/JP2008/054505 JP2008054505W WO2008126603A1 WO 2008126603 A1 WO2008126603 A1 WO 2008126603A1 JP 2008054505 W JP2008054505 W JP 2008054505W WO 2008126603 A1 WO2008126603 A1 WO 2008126603A1
Authority
WO
WIPO (PCT)
Prior art keywords
driver circuit
capacitive load
impedance
testing apparatus
semiconductor testing
Prior art date
Application number
PCT/JP2008/054505
Other languages
English (en)
French (fr)
Inventor
Yoshiyuki Hirata
Original Assignee
Advantest Corporation
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advantest Corporation filed Critical Advantest Corporation
Publication of WO2008126603A1 publication Critical patent/WO2008126603A1/ja

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/317—Testing of digital circuits
    • G01R31/3181—Functional testing
    • G01R31/319—Tester hardware, i.e. output processing circuits
    • G01R31/31917—Stimuli generation or application of test patterns to the device under test [DUT]
    • G01R31/31924—Voltage or current aspects, e.g. driver, receiver
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F1/00—Details of amplifiers with only discharge tubes, only semiconductor devices or only unspecified devices as amplifying elements
    • H03F1/56—Modifications of input or output impedances, not otherwise provided for
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F3/00—Amplifiers with only discharge tubes or only semiconductor devices as amplifying elements
    • H03F3/60—Amplifiers in which coupling networks have distributed constants, e.g. with waveguide resonators
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K19/00—Logic circuits, i.e. having at least two inputs acting on one output; Inverting circuits
    • H03K19/0005—Modifications of input or output impedance
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2200/00—Indexing scheme relating to amplifiers
    • H03F2200/297—Indexing scheme relating to amplifiers the loading circuit of an amplifying stage comprising a capacitor
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2200/00—Indexing scheme relating to amplifiers
    • H03F2200/387—A circuit being added at the output of an amplifier to adapt the output impedance of the amplifier
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2200/00—Indexing scheme relating to amplifiers
    • H03F2200/421—Multiple switches coupled in the output circuit of an amplifier are controlled by a circuit
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03F—AMPLIFIERS
    • H03F2200/00—Indexing scheme relating to amplifiers
    • H03F2200/423—Amplifier output adaptation especially for transmission line coupling purposes, e.g. impedance adaptation

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Computing Systems (AREA)
  • Mathematical Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

本発明は、容量性負荷４に伝送線路３を介して所定の電圧を供給するドライバ回路である。ドライバ１と伝送線路３との間に配置され、インピーダンスが可変できるインピーダンス回路６を備えている。インピーダンス回路６は、容量性負荷４の容量値の大きさに応じて、インピーダンスを任意の値に設定自在になっている。これにより、本発明は、容量性負荷の容量値の大小にかかわらず、その容量性負荷の両端電圧の立ち上がり時間、およびその立ち上がり波形を所定範囲に収められる。
PCT/JP2008/054505 2007-03-13 2008-03-12 ドライバ回路および半導体試験装置 WO2008126603A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-063553 2007-03-13
JP2007063553 2007-03-13

Publications (1)

Publication Number Publication Date
WO2008126603A1 true WO2008126603A1 (ja) 2008-10-23

Family

ID=39863735

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/054505 WO2008126603A1 (ja) 2007-03-13 2008-03-12 ドライバ回路および半導体試験装置

Country Status (1)

Country Link
WO (1) WO2008126603A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013130427A (ja) * 2011-12-20 2013-07-04 Tokyo Electron Ltd 半導体デバイスの検査装置
TWI671987B (zh) * 2018-09-10 2019-09-11 捷佳科技股份有限公司 無線電力傳輸單元

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62238477A (ja) * 1986-04-10 1987-10-19 Hitachi Electronics Eng Co Ltd Ｉｃ検査装置
JPS6331311A (ja) * 1986-07-22 1988-02-10 クリデンス　システムズ　コーポレイション 可変インピ−ダンス駆動回路
JPH0458170A (ja) * 1990-06-26 1992-02-25 Mitsubishi Electric Corp 半導体試験装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62238477A (ja) * 1986-04-10 1987-10-19 Hitachi Electronics Eng Co Ltd Ｉｃ検査装置
JPS6331311A (ja) * 1986-07-22 1988-02-10 クリデンス　システムズ　コーポレイション 可変インピ−ダンス駆動回路
JPH0458170A (ja) * 1990-06-26 1992-02-25 Mitsubishi Electric Corp 半導体試験装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013130427A (ja) * 2011-12-20 2013-07-04 Tokyo Electron Ltd 半導体デバイスの検査装置
TWI671987B (zh) * 2018-09-10 2019-09-11 捷佳科技股份有限公司 無線電力傳輸單元

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