WO2008114728A1 - 磁気式圧力センサ - Google Patents
磁気式圧力センサ Download PDFInfo
- Publication number
- WO2008114728A1 WO2008114728A1 PCT/JP2008/054753 JP2008054753W WO2008114728A1 WO 2008114728 A1 WO2008114728 A1 WO 2008114728A1 JP 2008054753 W JP2008054753 W JP 2008054753W WO 2008114728 A1 WO2008114728 A1 WO 2008114728A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- layer
- major surface
- pressure sensor
- magnetic pressure
- shield layer
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/14—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means involving the displacement of magnets, e.g. electromagnets
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Measuring Fluid Pressure (AREA)
- Hall/Mr Elements (AREA)
Abstract
本発明の磁気式圧力センサ(1)は、主面を有するガラス基板(11)と、前記主面に設けられた凹部内に形成された第1シールド層(12)と、前記第1シールド層(12)上に絶縁層(13)を介して形成されたGMR素子(17)と、前記絶縁層(13)上に金-スズ共晶物(18)により接合されており、一方の主面上に前記GMR素子と対向するようにハード磁性層(21)を有し、他方の主面上に第2シールド層(22)を有するダイヤフラム(20a)を持つシリコン基板(20)と、を具備する。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009505199A JP4866957B2 (ja) | 2007-03-14 | 2008-03-14 | 磁気式圧力センサ |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007064460 | 2007-03-14 | ||
JP2007-064460 | 2007-03-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2008114728A1 true WO2008114728A1 (ja) | 2008-09-25 |
Family
ID=39765836
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2008/054753 WO2008114728A1 (ja) | 2007-03-14 | 2008-03-14 | 磁気式圧力センサ |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP4866957B2 (ja) |
WO (1) | WO2008114728A1 (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2016148687A (ja) * | 2016-05-27 | 2016-08-18 | 株式会社東芝 | 素子パッケージ及び電気回路 |
US10070230B2 (en) | 2012-11-20 | 2018-09-04 | Kabushiki Kaisha Toshiba | Microphone package |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10775197B2 (en) | 2018-03-14 | 2020-09-15 | Kabushiki Kaisha Toshiba | Sensor |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05340831A (ja) * | 1992-02-26 | 1993-12-24 | Nippondenso Co Ltd | 圧力センサ |
US5637905A (en) * | 1996-02-01 | 1997-06-10 | New Jersey Institute Of Technology | High temperature, pressure and displacement microsensor |
JPH10170377A (ja) * | 1996-12-11 | 1998-06-26 | Toyota Motor Corp | 圧力検出装置 |
US6507187B1 (en) * | 1999-08-24 | 2003-01-14 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Ultra-sensitive magnetoresistive displacement sensing device |
JP2005221418A (ja) * | 2004-02-06 | 2005-08-18 | Tdk Corp | 圧力センサ |
-
2008
- 2008-03-14 WO PCT/JP2008/054753 patent/WO2008114728A1/ja active Application Filing
- 2008-03-14 JP JP2009505199A patent/JP4866957B2/ja not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05340831A (ja) * | 1992-02-26 | 1993-12-24 | Nippondenso Co Ltd | 圧力センサ |
US5637905A (en) * | 1996-02-01 | 1997-06-10 | New Jersey Institute Of Technology | High temperature, pressure and displacement microsensor |
JPH10170377A (ja) * | 1996-12-11 | 1998-06-26 | Toyota Motor Corp | 圧力検出装置 |
US6507187B1 (en) * | 1999-08-24 | 2003-01-14 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Ultra-sensitive magnetoresistive displacement sensing device |
JP2005221418A (ja) * | 2004-02-06 | 2005-08-18 | Tdk Corp | 圧力センサ |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10070230B2 (en) | 2012-11-20 | 2018-09-04 | Kabushiki Kaisha Toshiba | Microphone package |
JP2016148687A (ja) * | 2016-05-27 | 2016-08-18 | 株式会社東芝 | 素子パッケージ及び電気回路 |
Also Published As
Publication number | Publication date |
---|---|
JPWO2008114728A1 (ja) | 2010-07-01 |
JP4866957B2 (ja) | 2012-02-01 |
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