WO2008114728A1 - 磁気式圧力センサ - Google Patents

磁気式圧力センサ Download PDF

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Publication number
WO2008114728A1
WO2008114728A1 PCT/JP2008/054753 JP2008054753W WO2008114728A1 WO 2008114728 A1 WO2008114728 A1 WO 2008114728A1 JP 2008054753 W JP2008054753 W JP 2008054753W WO 2008114728 A1 WO2008114728 A1 WO 2008114728A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
major surface
pressure sensor
magnetic pressure
shield layer
Prior art date
Application number
PCT/JP2008/054753
Other languages
English (en)
French (fr)
Inventor
Tetsuya Fukuda
Kiyoshi Sato
Hiroyuki Morioka
Shigeaki Yamauchi
Hisanobu Ohkawa
Original Assignee
Alps Electric Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co., Ltd. filed Critical Alps Electric Co., Ltd.
Priority to JP2009505199A priority Critical patent/JP4866957B2/ja
Publication of WO2008114728A1 publication Critical patent/WO2008114728A1/ja

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/14—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means involving the displacement of magnets, e.g. electromagnets
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L1/00—Measuring force or stress, in general
    • G01L1/14—Measuring force or stress, in general by measuring variations in capacitance or inductance of electrical elements, e.g. by measuring variations of frequency of electrical oscillators

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Measuring Fluid Pressure (AREA)
  • Hall/Mr Elements (AREA)

Abstract

　本発明の磁気式圧力センサ（１）は、主面を有するガラス基板（１１）と、前記主面に設けられた凹部内に形成された第１シールド層（１２）と、前記第１シールド層（１２）上に絶縁層（１３）を介して形成されたＧＭＲ素子（１７）と、前記絶縁層（１３）上に金－スズ共晶物（１８）により接合されており、一方の主面上に前記ＧＭＲ素子と対向するようにハード磁性層（２１）を有し、他方の主面上に第２シールド層（２２）を有するダイヤフラム（２０ａ）を持つシリコン基板（２０）と、を具備する。
PCT/JP2008/054753 2007-03-14 2008-03-14 磁気式圧力センサ WO2008114728A1 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009505199A JP4866957B2 (ja) 2007-03-14 2008-03-14 磁気式圧力センサ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007064460 2007-03-14
JP2007-064460 2007-03-14

Publications (1)

Publication Number Publication Date
WO2008114728A1 true WO2008114728A1 (ja) 2008-09-25

Family

ID=39765836

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/054753 WO2008114728A1 (ja) 2007-03-14 2008-03-14 磁気式圧力センサ

Country Status (2)

Country Link
JP (1) JP4866957B2 (ja)
WO (1) WO2008114728A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016148687A (ja) * 2016-05-27 2016-08-18 株式会社東芝 素子パッケージ及び電気回路
US10070230B2 (en) 2012-11-20 2018-09-04 Kabushiki Kaisha Toshiba Microphone package

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10775197B2 (en) 2018-03-14 2020-09-15 Kabushiki Kaisha Toshiba Sensor

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05340831A (ja) * 1992-02-26 1993-12-24 Nippondenso Co Ltd 圧力センサ
US5637905A (en) * 1996-02-01 1997-06-10 New Jersey Institute Of Technology High temperature, pressure and displacement microsensor
JPH10170377A (ja) * 1996-12-11 1998-06-26 Toyota Motor Corp 圧力検出装置
US6507187B1 (en) * 1999-08-24 2003-01-14 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Ultra-sensitive magnetoresistive displacement sensing device
JP2005221418A (ja) * 2004-02-06 2005-08-18 Tdk Corp 圧力センサ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05340831A (ja) * 1992-02-26 1993-12-24 Nippondenso Co Ltd 圧力センサ
US5637905A (en) * 1996-02-01 1997-06-10 New Jersey Institute Of Technology High temperature, pressure and displacement microsensor
JPH10170377A (ja) * 1996-12-11 1998-06-26 Toyota Motor Corp 圧力検出装置
US6507187B1 (en) * 1999-08-24 2003-01-14 The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration Ultra-sensitive magnetoresistive displacement sensing device
JP2005221418A (ja) * 2004-02-06 2005-08-18 Tdk Corp 圧力センサ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10070230B2 (en) 2012-11-20 2018-09-04 Kabushiki Kaisha Toshiba Microphone package
JP2016148687A (ja) * 2016-05-27 2016-08-18 株式会社東芝 素子パッケージ及び電気回路

Also Published As

Publication number Publication date
JPWO2008114728A1 (ja) 2010-07-01
JP4866957B2 (ja) 2012-02-01

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