WO2008108387A1 - 多感度軸を持つ磁気センサ装置 - Google Patents

多感度軸を持つ磁気センサ装置 Download PDF

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Publication number
WO2008108387A1
WO2008108387A1 PCT/JP2008/053913 JP2008053913W WO2008108387A1 WO 2008108387 A1 WO2008108387 A1 WO 2008108387A1 JP 2008053913 W JP2008053913 W JP 2008053913W WO 2008108387 A1 WO2008108387 A1 WO 2008108387A1
Authority
WO
WIPO (PCT)
Prior art keywords
magnetic sensor
sensor device
substrate
multiple sensing
sensing axes
Prior art date
Application number
PCT/JP2008/053913
Other languages
English (en)
French (fr)
Inventor
Hiromitsu Sasaki
Original Assignee
Alps Electric Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alps Electric Co., Ltd. filed Critical Alps Electric Co., Ltd.
Publication of WO2008108387A1 publication Critical patent/WO2008108387A1/ja

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/105—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by magnetically sensitive devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/0206—Three-component magnetometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/10—Magnetoresistive devices

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Measuring Magnetic Variables (AREA)

Abstract

　第１磁気センサ（１１）は、その並設方向を基板（１０）の主面に対して略平行に配置されており、Ｘ軸方向に感度を持つように配置されている。また、第２磁気センサ（１２）は、その立設方向を基板（１０）の主面に対して略垂直に配置されており、Ｚ軸方向に感度を持つように配置されている。すなわち、第１磁気センサ（１１）が基板（１０）の表面に平行な方向（水平方向）に沿って延在するように配置され、第２磁気センサ（１２）が基板（１０）の表面に垂直な方向（鉛直方向）に沿って延在するように配置される。
PCT/JP2008/053913 2007-03-06 2008-03-05 多感度軸を持つ磁気センサ装置 WO2008108387A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007055321 2007-03-06
JP2007-055321 2007-03-06

Publications (1)

Publication Number Publication Date
WO2008108387A1 true WO2008108387A1 (ja) 2008-09-12

Family

ID=39738260

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/053913 WO2008108387A1 (ja) 2007-03-06 2008-03-05 多感度軸を持つ磁気センサ装置

Country Status (1)

Country Link
WO (1) WO2008108387A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010085338A (ja) * 2008-10-02 2010-04-15 Ricoh Co Ltd センシング素子、センシング装置、方位検出装置及び情報機器

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08179023A (ja) * 1994-12-27 1996-07-12 Res Dev Corp Of Japan 半導体基板に集積される磁気検出素子及び磁気検出モジュール
JP2003078187A (ja) * 2001-09-05 2003-03-14 Res Inst Electric Magnetic Alloys 磁界センサ
JP2006156661A (ja) * 2004-11-29 2006-06-15 Alps Electric Co Ltd 薄膜磁気抵抗素子及びその製造方法並びに薄膜磁気抵抗素子を用いた磁気センサ
JP2006234615A (ja) * 2005-02-25 2006-09-07 Citizen Watch Co Ltd 磁気センサ素子とその製造方法及び電子方位計

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08179023A (ja) * 1994-12-27 1996-07-12 Res Dev Corp Of Japan 半導体基板に集積される磁気検出素子及び磁気検出モジュール
JP2003078187A (ja) * 2001-09-05 2003-03-14 Res Inst Electric Magnetic Alloys 磁界センサ
JP2006156661A (ja) * 2004-11-29 2006-06-15 Alps Electric Co Ltd 薄膜磁気抵抗素子及びその製造方法並びに薄膜磁気抵抗素子を用いた磁気センサ
JP2006234615A (ja) * 2005-02-25 2006-09-07 Citizen Watch Co Ltd 磁気センサ素子とその製造方法及び電子方位計

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010085338A (ja) * 2008-10-02 2010-04-15 Ricoh Co Ltd センシング素子、センシング装置、方位検出装置及び情報機器

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