WO2008084853A1 - 着色組成物、カラーフィルタ、及びその製造方法 - Google Patents

着色組成物、カラーフィルタ、及びその製造方法 Download PDF

Info

Publication number
WO2008084853A1
WO2008084853A1 PCT/JP2008/050276 JP2008050276W WO2008084853A1 WO 2008084853 A1 WO2008084853 A1 WO 2008084853A1 JP 2008050276 W JP2008050276 W JP 2008050276W WO 2008084853 A1 WO2008084853 A1 WO 2008084853A1
Authority
WO
WIPO (PCT)
Prior art keywords
color filter
filter segment
coating film
black matrix
colored composition
Prior art date
Application number
PCT/JP2008/050276
Other languages
English (en)
French (fr)
Inventor
Isao Shigemori
Morihide Miyamura
Toshio Waku
Yusuke Iida
Kenro Sunahara
Kohei Matsui
Takeshi Ikeda
Hideyo Tanaka
Eishi Aoki
Genki Harada
Original Assignee
Toyo Ink Mfg. Co., Ltd.
Toppan Printing Co., Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2007302009A external-priority patent/JP5459949B2/ja
Application filed by Toyo Ink Mfg. Co., Ltd., Toppan Printing Co., Ltd. filed Critical Toyo Ink Mfg. Co., Ltd.
Priority to CN200880002129.9A priority Critical patent/CN101595406B/zh
Publication of WO2008084853A1 publication Critical patent/WO2008084853A1/ja
Priority to US12/458,383 priority patent/US8216750B2/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C09DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09BORGANIC DYES OR CLOSELY-RELATED COMPOUNDS FOR PRODUCING DYES, e.g. PIGMENTS; MORDANTS; LAKES
    • C09B67/00Influencing the physical, e.g. the dyeing or printing properties of dyestuffs without chemical reactions, e.g. by treating with solvents grinding or grinding assistants, coating of pigments or dyes; Process features in the making of dyestuff preparations; Dyestuff preparations of a special physical nature, e.g. tablets, films
    • C09B67/006Preparation of organic pigments
    • C09B67/0065Preparation of organic pigments of organic pigments with only non-macromolecular compounds
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/201Filters in the form of arrays
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00Optical elements other than lenses
    • G02B5/20Filters
    • G02B5/22Absorbing filters
    • G02B5/223Absorbing filters containing organic substances, e.g. dyes, inks or pigments
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/0005Production of optical devices or components in so far as characterised by the lithographic processes or materials used therefor
    • G03F7/0007Filters, e.g. additive colour filters; Components for display devices
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/0045Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/027Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
    • G03F7/028Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with photosensitivity-increasing substances, e.g. photoinitiators
    • G03F7/031Organic compounds not covered by group G03F7/029
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/09Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/105Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having substances, e.g. indicators, for forming visible images
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00Stock material or miscellaneous articles
    • Y10T428/24Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24479Structurally defined web or sheet [e.g., overall dimension, etc.] including variation in thickness

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Materials For Photolithography (AREA)
  • Optical Filters (AREA)

Abstract

 基板上に、顔料、エチレン性不飽和二重結合を有するモノマーおよび光重合開始剤を含有する着色組成物を用いて着色塗膜を形成する工程と、前記着色塗膜のフィルタセグメントまたはブラックマトリックスとなる部分に、積算露光量が1~150mJ/cm2になるように波長308nm(XeCL)のエキシマレーザを照射して硬化させる工程と、前記着色塗膜の未硬化部分を除去してフィルタセグメントまたはブラックマトリックスを形成する工程とを複数回繰り返し、少なくとも2色のフィルタセグメント及び/又はブラックマトリックスを形成するカラーフィルタの製造方法、および該カラーフィルタの製造方法に用いられる、顔料、エチレン性不飽和二重結合を有するモノマーおよび光重合開始剤を含有する着色組成物。
PCT/JP2008/050276 2007-01-12 2008-01-11 着色組成物、カラーフィルタ、及びその製造方法 WO2008084853A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CN200880002129.9A CN101595406B (zh) 2007-01-12 2008-01-11 着色组合物、滤色器及其制造方法
US12/458,383 US8216750B2 (en) 2007-01-12 2009-07-09 Colored composition, color filter and manufacturing method thereof

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2007-004205 2007-01-12
JP2007004205 2007-01-12
JP2007-106741 2007-04-16
JP2007106741 2007-04-16
JP2007-302009 2007-11-21
JP2007302009A JP5459949B2 (ja) 2007-11-21 2007-11-21 着色組成物、カラーフィルタ及びその製造方法

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/458,383 Continuation US8216750B2 (en) 2007-01-12 2009-07-09 Colored composition, color filter and manufacturing method thereof

Publications (1)

Publication Number Publication Date
WO2008084853A1 true WO2008084853A1 (ja) 2008-07-17

Family

ID=39608740

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/050276 WO2008084853A1 (ja) 2007-01-12 2008-01-11 着色組成物、カラーフィルタ、及びその製造方法

Country Status (5)

Country Link
US (1) US8216750B2 (ja)
KR (1) KR20090122184A (ja)
CN (1) CN101595406B (ja)
TW (1) TWI413858B (ja)
WO (1) WO2008084853A1 (ja)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010002457A (ja) * 2008-06-18 2010-01-07 Toppan Printing Co Ltd 感光性着色組成物及びカラーフィルタ基板及び半透過型液晶表示装置
JP2010072633A (ja) * 2008-08-19 2010-04-02 Fujifilm Corp カラーフィルタ、カラーフィルタの製造方法、及び液晶表示装置
CN101807002A (zh) * 2009-02-18 2010-08-18 Jsr株式会社 着色放射线敏感性组合物、滤色器及彩色液晶显示元件
JP2010224267A (ja) * 2009-03-24 2010-10-07 Toyo Ink Mfg Co Ltd 青色着色組成物、カラーフィルタの製造方法およびカラーフィルタ
JP2010256768A (ja) * 2009-04-28 2010-11-11 Toppan Printing Co Ltd 青色感光性樹脂組成物、カラーフィルタ及び液晶表示装置
WO2011040083A1 (ja) * 2009-09-29 2011-04-07 富士フイルム株式会社 着色感光性樹脂組成物、カラーフィルター、および液晶表示装置
JP2012022189A (ja) * 2010-07-15 2012-02-02 Dainippon Printing Co Ltd 光学積層体、偏光板及び画像表示装置
CN102520585A (zh) * 2010-08-20 2012-06-27 株式会社田村制作所 碱溶性透明树脂组合物

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009145032A1 (ja) * 2008-05-28 2009-12-03 凸版印刷株式会社 カラーフィルタの製造方法、パターン付き基板の製造方法及び小型フォトマスク
DE102009055099A1 (de) 2009-12-21 2011-06-22 tesa SE, 20253 Hitzeaktiviert verklebbare Flächenelemente
US20130279038A1 (en) * 2012-04-20 2013-10-24 Shenzhen China Star Optoelectronics Technology Co., Ltd. Color filter and manufacturing method thereof
CN103819625A (zh) * 2013-06-09 2014-05-28 江阴摩尔化工新材料有限公司 可紫外光固化的改性氯化聚丙烯的合成方法
JP6178164B2 (ja) * 2013-08-23 2017-08-09 富士フイルム株式会社 感光性着色組成物、カラーフィルタ、カラーフィルタの製造方法、有機el液晶表示装置
KR20220148301A (ko) * 2014-05-21 2022-11-04 아사히 가세이 가부시키가이샤 감광성 수지 조성물 및 회로 패턴의 형성 방법
US10946670B1 (en) 2015-04-09 2021-03-16 Get Group Holdings Limited Compositions, apparatus, methods, and substrates for making images and text
CN105425388B (zh) * 2015-12-25 2017-12-19 深圳市国华光电科技有限公司 一种电润湿显示器中间隔物的制备方法
CN107340688B (zh) * 2016-04-29 2022-05-06 东友精细化工有限公司 硬掩模用组合物
WO2020040043A1 (ja) * 2018-08-22 2020-02-27 富士フイルム株式会社 着色組成物、硬化膜、パターン形成方法、カラーフィルタ、固体撮像素子および画像表示装置

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10253815A (ja) * 1997-03-12 1998-09-25 Mitsubishi Chem Corp カラーフィルター用光重合性組成物及びカラーフィルター
JPH10253817A (ja) * 1997-03-12 1998-09-25 Mitsubishi Chem Corp カラーフィルター用光重合性組成物及びカラーフィルター
JPH10253816A (ja) * 1997-03-12 1998-09-25 Mitsubishi Chem Corp カラーフィルター用黒色光重合性組成物
JP2000249822A (ja) * 1999-02-26 2000-09-14 Showa Denko Kk カラーフィルタ用光重合開始剤、感光性着色組成物およびカラーフィルタ
JP2004198542A (ja) * 2002-12-16 2004-07-15 Showa Denko Kk カラーフィルターブラックマトリックスレジスト組成物及びその組成物に用いる感光性組成物
JP2005314633A (ja) * 2003-09-26 2005-11-10 Dainippon Printing Co Ltd 光ラジカル発生剤、感光性樹脂組成物及び、物品
JP2006133378A (ja) * 2004-11-04 2006-05-25 Tokyo Ohka Kogyo Co Ltd 感光性樹脂組成物、およびこれを用いた感光性ドライフィルム

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3641093B2 (ja) 1996-02-02 2005-04-20 東京応化工業株式会社 緑色カラーフィルタ用感光性組成物及びこれを用いた緑色カラーフィルタの製造方法
ATE300558T1 (de) * 1999-02-26 2005-08-15 Showa Denko Kk Photopolymerisationsinitiator für farbfilter, farbzusammensetzung und farbfilter
JP2003156842A (ja) 2001-11-22 2003-05-30 Sumitomo Chem Co Ltd 着色感光性樹脂組成物
US7528205B2 (en) * 2003-09-26 2009-05-05 Dai Nippon Printing Co., Ltd. Photo radical generator, photo sensitive resin composition and article
JP4492238B2 (ja) * 2004-07-26 2010-06-30 Jsr株式会社 着色層形成用感放射線性組成物、カラーフィルタおよびカラー液晶表示パネル

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10253815A (ja) * 1997-03-12 1998-09-25 Mitsubishi Chem Corp カラーフィルター用光重合性組成物及びカラーフィルター
JPH10253817A (ja) * 1997-03-12 1998-09-25 Mitsubishi Chem Corp カラーフィルター用光重合性組成物及びカラーフィルター
JPH10253816A (ja) * 1997-03-12 1998-09-25 Mitsubishi Chem Corp カラーフィルター用黒色光重合性組成物
JP2000249822A (ja) * 1999-02-26 2000-09-14 Showa Denko Kk カラーフィルタ用光重合開始剤、感光性着色組成物およびカラーフィルタ
JP2004198542A (ja) * 2002-12-16 2004-07-15 Showa Denko Kk カラーフィルターブラックマトリックスレジスト組成物及びその組成物に用いる感光性組成物
JP2005314633A (ja) * 2003-09-26 2005-11-10 Dainippon Printing Co Ltd 光ラジカル発生剤、感光性樹脂組成物及び、物品
JP2006133378A (ja) * 2004-11-04 2006-05-25 Tokyo Ohka Kogyo Co Ltd 感光性樹脂組成物、およびこれを用いた感光性ドライフィルム

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010002457A (ja) * 2008-06-18 2010-01-07 Toppan Printing Co Ltd 感光性着色組成物及びカラーフィルタ基板及び半透過型液晶表示装置
JP2010072633A (ja) * 2008-08-19 2010-04-02 Fujifilm Corp カラーフィルタ、カラーフィルタの製造方法、及び液晶表示装置
CN101807002A (zh) * 2009-02-18 2010-08-18 Jsr株式会社 着色放射线敏感性组合物、滤色器及彩色液晶显示元件
JP2010224267A (ja) * 2009-03-24 2010-10-07 Toyo Ink Mfg Co Ltd 青色着色組成物、カラーフィルタの製造方法およびカラーフィルタ
JP2010256768A (ja) * 2009-04-28 2010-11-11 Toppan Printing Co Ltd 青色感光性樹脂組成物、カラーフィルタ及び液晶表示装置
WO2011040083A1 (ja) * 2009-09-29 2011-04-07 富士フイルム株式会社 着色感光性樹脂組成物、カラーフィルター、および液晶表示装置
JP2011095716A (ja) * 2009-09-29 2011-05-12 Fujifilm Corp 着色感光性樹脂組成物、着色樹脂パターンの製造方法、カラーフィルター、および液晶表示装置
CN102576190A (zh) * 2009-09-29 2012-07-11 富士胶片株式会社 着色感光性树脂组合物、滤色器及液晶显示装置
JP2012022189A (ja) * 2010-07-15 2012-02-02 Dainippon Printing Co Ltd 光学積層体、偏光板及び画像表示装置
CN102520585A (zh) * 2010-08-20 2012-06-27 株式会社田村制作所 碱溶性透明树脂组合物

Also Published As

Publication number Publication date
TWI413858B (zh) 2013-11-01
US8216750B2 (en) 2012-07-10
KR20090122184A (ko) 2009-11-26
CN101595406A (zh) 2009-12-02
CN101595406B (zh) 2011-05-04
US20090311479A1 (en) 2009-12-17
TW200903158A (en) 2009-01-16

Similar Documents

Publication Publication Date Title
WO2008084853A1 (ja) 着色組成物、カラーフィルタ、及びその製造方法
WO2009078407A1 (ja) 着色組成物、カラーフィルタの製造方法およびカラーフィルタ
WO2006057745A3 (en) Direct imprinting of etch barriers using step and flash imprint lithography
WO2008114644A1 (ja) レジストパターン形成方法及びそれに用いるレジストパターン不溶化樹脂組成物
WO2006083284A3 (en) A material composition for nano- and micro-lithography
JP2008287213A5 (ja)
TW200633791A (en) Method for fabricating nano-adhesive
WO2005045524A3 (en) A method of forming a patterned layer on a substrate
DE602006014229D1 (de) Tintenzusammensetzung, Tintenstrahldruckverfahren, bedrucktes Material, Verfahren zur Herstellung einer lithographischen Druckplatte, lithographische Druckplatte
DE102011082316A1 (de) Verfahren zur Erzeugung von Bildern auf Substraten mit einer Tintenteilaushärtung und mit einer Einebnung durch Kontakt und Vorrichtung zur Erzeugung von Bildern auf Substraten
DE602007000321D1 (de) Tintenzusammensetzung, Tintenstrahlaufzeichnungsverfahren, Druckmaterial und Verfahren zur Herstellung einer Lithographiedruckplatte
WO2008060266A3 (en) Nanotemplate arbitrary-imprint lithography
EP1845416A3 (en) Coating compositions for photolithography
WO2004102624A3 (en) Unitary dual damascene process using imprint lithography
WO2008111247A1 (ja) 感光性組成物、感光性フィルム、永久パターンの形成方法、及びプリント基板
EP1801145A4 (en) PROCESS FOR PRODUCING CURED PRODUCT OF PHOTOSENSITIVE RESIN
DE602006004392D1 (de) Tintenzusammensetzung, Verfahren zur Tintenstrahlaufzeichnung und Verfahren zur Herstellung einer lithographischen Druckplatte
TW200708893A (en) Pigment-dispersing type radiation-sensitive resin composition and method of forming colored pattern
MX2020009708A (es) Metodo para producir una lente de plastico que tiene una capa de recubrimiento.
TW200745741A (en) Method of repairing a polymer mask
WO2005109515A3 (en) System and method for making nanoparticles with controlled emission properties
ATE434203T1 (de) Lithographiedruckplattenvorläufer und verfahren zur herstellung einer lithographiedruckplatte
JP2008298962A5 (ja)
ATE525220T1 (de) Glanzsteuerung von uv-härtbaren formulierungen mittels mikrostruktur
TW200641073A (en) Polymer for forming anti-reflective coating layer

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200880002129.9

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08703140

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 1020097014493

Country of ref document: KR

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08703140

Country of ref document: EP

Kind code of ref document: A1