WO2008011970A3 - Movable workpiece support for a machine, and machining system comprising a corresponding workpiece support - Google Patents

Movable workpiece support for a machine, and machining system comprising a corresponding workpiece support Download PDF

Info

Publication number
WO2008011970A3
WO2008011970A3 PCT/EP2007/005992 EP2007005992W WO2008011970A3 WO 2008011970 A3 WO2008011970 A3 WO 2008011970A3 EP 2007005992 W EP2007005992 W EP 2007005992W WO 2008011970 A3 WO2008011970 A3 WO 2008011970A3
Authority
WO
WIPO (PCT)
Prior art keywords
work table
support area
workpiece support
machine
support
Prior art date
Application number
PCT/EP2007/005992
Other languages
German (de)
French (fr)
Other versions
WO2008011970A2 (en
Inventor
Berthold Matzkovits
Kurt Brenner
Original Assignee
Zeiss Ind Messtechnik Gmbh
Berthold Matzkovits
Kurt Brenner
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zeiss Ind Messtechnik Gmbh, Berthold Matzkovits, Kurt Brenner filed Critical Zeiss Ind Messtechnik Gmbh
Publication of WO2008011970A2 publication Critical patent/WO2008011970A2/en
Publication of WO2008011970A3 publication Critical patent/WO2008011970A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q1/00—Members which are comprised in the general build-up of a form of machine, particularly relatively large fixed members
    • B23Q1/25—Movable or adjustable work or tool supports
    • B23Q1/26—Movable or adjustable work or tool supports characterised by constructional features relating to the co-operation of relatively movable members; Means for preventing relative movement of such members
    • B23Q1/34—Relative movement obtained by use of deformable elements, e.g. piezoelectric, magnetostrictive, elastic or thermally-dilatable elements
    • B23Q1/36—Springs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/04—Ball or roller bearings
    • F16C29/045—Ball or roller bearings having rolling elements journaled in one of the moving parts
    • F16C29/046—Ball or roller bearings having rolling elements journaled in one of the moving parts with balls journaled in pockets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
    • F16M7/00—Details of attaching or adjusting engine beds, frames, or supporting-legs on foundation or base; Attaching non-moving engine parts, e.g. cylinder blocks
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2322/00—Apparatus used in shaping articles
    • F16C2322/39—General build up of machine tools, e.g. spindles, slides, actuators

Abstract

The invention relates to a workpiece support (27) for a machine, comprising a work table (4) with a support area (28) for mounting a workpiece, and at least three bearing elements (7a, 7b, 7c) which rest upon a base (5) and are used for mounting the work table (4) on the base (5). At least one of said bearing elements is embodied in a longitudinally adjustable manner in order to be able to tilt the work table about at least one axis that extends parallel to the support area and/or modify the position of the work table perpendicular to the support area. In order to prevent hysteresis effects when the work table is adjusted, a guide, e.g. a leaf spring (8), is additionally provided which absorbs transversal forces parallel to the support area, thus preventing the work table from moving in directions that run parallel to the support area while allowing tilting about the at least one axis which extends parallel to the support area and/or allowing the entire work table to be moved perpendicular to the support area.
PCT/EP2007/005992 2006-07-26 2007-07-06 Movable workpiece support for a machine, and machining system comprising a corresponding workpiece support WO2008011970A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102006034455.3 2006-07-26
DE102006034455A DE102006034455A1 (en) 2006-07-26 2006-07-26 Positionable workpiece support for a machine and processing system with a corresponding workpiece support

Publications (2)

Publication Number Publication Date
WO2008011970A2 WO2008011970A2 (en) 2008-01-31
WO2008011970A3 true WO2008011970A3 (en) 2008-03-20

Family

ID=38544303

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2007/005992 WO2008011970A2 (en) 2006-07-26 2007-07-06 Movable workpiece support for a machine, and machining system comprising a corresponding workpiece support

Country Status (2)

Country Link
DE (1) DE102006034455A1 (en)
WO (1) WO2008011970A2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107101073A (en) * 2016-02-19 2017-08-29 卡尔蔡司工业测量技术有限公司 Compensating element, coordinate measuring apparatus and installation method

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5489000B2 (en) * 2010-08-31 2014-05-14 株式会社安川電機 Working device and component picking system
DE102011005157A1 (en) * 2011-03-04 2012-09-27 JRT Photovoltaics GmbH & Co. KG Processing station for flat substrates, in particular solar cells
DE102013205024A1 (en) 2013-03-21 2014-09-25 Carl Zeiss Industrielle Messtechnik Gmbh Compensation element, coordinate measuring machine and method of assembly
DE102014225270A1 (en) * 2014-12-09 2016-06-09 Gebr. Schmid Gmbh Contact frame for electrochemical substrate coating

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4770531A (en) * 1986-05-23 1988-09-13 Nippon Kogaku K. K. Stage device with levelling mechanism
EP0503712A1 (en) * 1991-03-08 1992-09-16 Koninklijke Philips Electronics N.V. Support device with a tiltable object table, and optical lithographic device provided with such a support device
WO1993022616A1 (en) * 1992-05-04 1993-11-11 New Focus, Inc. Precision micropositioner
US5740699A (en) * 1995-04-06 1998-04-21 Spar Aerospace Limited Wrist joint which is longitudinally extendible
EP1111471A2 (en) * 1999-12-21 2001-06-27 Asm Lithography B.V. Lithographic projection apparatus with collision preventing positioning device
US6336375B1 (en) * 1994-03-02 2002-01-08 Renishaw, Plc Coordinate positioning machine
EP1276015A2 (en) * 2001-07-09 2003-01-15 Canon Kabushiki Kaisha Stage apparatus and method of driving the same

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4770531A (en) * 1986-05-23 1988-09-13 Nippon Kogaku K. K. Stage device with levelling mechanism
EP0503712A1 (en) * 1991-03-08 1992-09-16 Koninklijke Philips Electronics N.V. Support device with a tiltable object table, and optical lithographic device provided with such a support device
WO1993022616A1 (en) * 1992-05-04 1993-11-11 New Focus, Inc. Precision micropositioner
US6336375B1 (en) * 1994-03-02 2002-01-08 Renishaw, Plc Coordinate positioning machine
US5740699A (en) * 1995-04-06 1998-04-21 Spar Aerospace Limited Wrist joint which is longitudinally extendible
EP1111471A2 (en) * 1999-12-21 2001-06-27 Asm Lithography B.V. Lithographic projection apparatus with collision preventing positioning device
EP1276015A2 (en) * 2001-07-09 2003-01-15 Canon Kabushiki Kaisha Stage apparatus and method of driving the same

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107101073A (en) * 2016-02-19 2017-08-29 卡尔蔡司工业测量技术有限公司 Compensating element, coordinate measuring apparatus and installation method
CN107101073B (en) * 2016-02-19 2019-08-20 卡尔蔡司工业测量技术有限公司 Compensating element, coordinate measuring apparatus and installation method

Also Published As

Publication number Publication date
DE102006034455A1 (en) 2008-01-31
WO2008011970A2 (en) 2008-01-31

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