WO2007141885A1 - イオン発生装置 - Google Patents
イオン発生装置 Download PDFInfo
- Publication number
- WO2007141885A1 WO2007141885A1 PCT/JP2006/312873 JP2006312873W WO2007141885A1 WO 2007141885 A1 WO2007141885 A1 WO 2007141885A1 JP 2006312873 W JP2006312873 W JP 2006312873W WO 2007141885 A1 WO2007141885 A1 WO 2007141885A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- ion generator
- photoreceptor
- electrode
- metal oxide
- oxide semiconductor
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01T—SPARK GAPS; OVERVOLTAGE ARRESTERS USING SPARK GAPS; SPARKING PLUGS; CORONA DEVICES; GENERATING IONS TO BE INTRODUCED INTO NON-ENCLOSED GASES
- H01T23/00—Apparatus for generating ions to be introduced into non-enclosed gases, e.g. into the atmosphere
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/04—Carrying-off electrostatic charges by means of spark gaps or other discharge devices
Definitions
- the present invention relates to an ion generation apparatus for processing an object to be processed by blowing ionized gas onto the object to be processed.
- a conventional ion generator has a discharge needle, and by applying an AC voltage to the discharge needle, a corona discharge is caused via air, and a corona discharge is generated. Oxygen in the air is ionized by the electric field.
- Patent Document 1 Japanese Patent Laid-Open No. 2003-243199
- An object of the present invention is to provide an ion generating apparatus capable of generating a clean ionized gas without contamination.
- the ion generator of the present invention irradiates a photoreceptor having a metal oxide semiconductor such as titanium oxide on the surface with ultraviolet rays, and the surrounding gas of the photoreceptor is charged with positive charged particles and negative charged particles.
- an ultraviolet ray source that is ionized
- an electrode that is connected to a power source and that forms an electric field in a space containing the ionized gas and ionizes the charged particles, and a blowing unit that blows ions onto the object to be processed.
- the ion generator of the present invention uses the power source as an AC power source, generates positive ions by a positive electric field formed by the electrodes, and generates negative ions by a negative electric field formed by the electrodes. It is characterized by.
- the ion generator of the present invention uses the power source as a DC power source, and has a positive electrode connected to the positive terminal of the power source and a negative electrode connected to the negative terminal, and the positive electrode Positive ions are generated by a positive electric field formed by the negative electrode, and negative ions are generated by a negative electric field formed by the negative electrode.
- the ion generator of the present invention comprises a metal oxide semiconductor coating layer formed on a surface of a base material of a sheet-like conductive material having a through hole, and the photoreceptor and the electrode are formed by the base material. And the ions are supplied to the object to be processed by a gas that passes through the through hole and is blown onto the object to be processed.
- a coating layer of a metal oxide semiconductor is formed on the surface of a sheet-like photoreceptor having a through hole, the electrode is disposed adjacent to the photoreceptor, The ions are supplied to the object to be processed by a gas that passes through a through hole and is blown onto the object to be processed.
- the ion generator of the present invention is characterized in that the electrode is disposed by being exposed to an air flow along a surface formed on the photoreceptor by the metal oxide semiconductor coating layer.
- the photoreceptor is formed of an ultraviolet transmissive material, and the ultraviolet light source is transmitted through the photoreceptor to irradiate the metal oxide semiconductor with ultraviolet rays. It is characterized by.
- the ion generator of the present invention includes a first photoreceptor formed of an ultraviolet transmitting material and having a transparent metal oxide semiconductor coating layer on the surface, and a metal oxide semiconductor coating layer on the surface.
- a second photoreceptor that is provided and irradiated with ultraviolet light that has passed through the first photoreceptor; It is characterized by having.
- the ion generator of the present invention is characterized in that an electrode made of a transparent material is attached to the surface of the first photoreceptor.
- the ion generator of the present invention includes a first photoreceptor in which a coating layer of a metal oxide semiconductor is formed on the surface of a sheet-like base material having a through hole, and a metal participant semiconductor on the surface.
- a coating layer is formed, disposed opposite to the first photoreceptor via a gas passage space, and irradiated with ultraviolet rays that have passed through the through hole of the first photoreceptor.
- each of the first and second photoreceptors is an electrode.
- the ion generator of the present invention includes a first photoreceptor having a metal oxide semiconductor coating layer formed on a surface of a sheet-like base material having a through-hole, and a sheet-like sheet having a through-hole.
- a coating layer of a metal oxide semiconductor is formed on the surface of the base material, and has a second light receiver disposed opposite to the first light receiver via a gas passage space.
- Each of the two photoreceptors is an electrode.
- the metal oxide semiconductor such as titanium oxide is irradiated with ultraviolet rays, and the gas is ionized into plasma and ionized by an electric field. Therefore, foreign matter is mixed in the ionized gas. A clean ionic gas can be generated. Since the gas is ionized into plasma by the ultraviolet rays, the region of the photoreceptor that is irradiated with the ultraviolet rays can be used as a surface, can be ionized in a wide range, and a large amount of ionized air can be generated. it can.
- FIG. 1 is a schematic diagram showing a basic structure of an ion generator according to an embodiment of the present invention.
- FIG. 2 is a schematic view showing a basic structure of an ion generator according to another embodiment of the present invention.
- FIG. 3 is a schematic diagram showing a basic structure of an ion generator according to another embodiment of the present invention.
- FIG. 4 is a schematic view showing a basic structure of an ion generator according to another embodiment of the present invention.
- FIG. 5 is a schematic view showing a basic structure of an ion generator according to another embodiment of the present invention.
- FIG. 6 is a schematic view showing a basic structure of an ion generator according to another embodiment of the present invention.
- FIG. 7 is a schematic view showing a basic structure of an ion generator according to another embodiment of the present invention.
- FIG. 8 is a schematic view showing a basic structure of an ion generator according to another embodiment of the present invention.
- FIG. 9 is a schematic view showing a basic structure of an ion generator according to another embodiment of the present invention.
- FIGS. 1 to 9 are schematic views showing the basic structure of an ion generator according to an embodiment of the present invention.
- members having common functions are denoted by the same reference numerals. It is attached.
- the ion generator 10a shown in FIG. 1 has a photoreceptor 11a.
- This photoreceptor 11a has a sheet-like or mesh-like base material 13 in which a large number of through-holes 12 are formed, which is also a metal net material, and has a coating layer 14 of titanium oxide ( ⁇ 02) on its surface. Is formed.
- the base material 13 is energized as an anode in the electrolytic solution to cover the surface of the base material 13 with the titanium oxide titanium layer.
- Layer 14 can be generated.
- the coating layer 14 may be formed on the surface of the base material 13 by a vacuum contact technique such as vacuum deposition or sputtering. Further, the photoreceptor 11a itself may be formed of a ceramic of titanium oxide.
- the surface of the photoreceptor 11a is irradiated with light having an ultraviolet wavelength of 400 nm or less from the ultraviolet ray generation source 15, and an ultraviolet LED is used as the ultraviolet ray generation source 15.
- an ultraviolet LED is used as the ultraviolet ray generation source 15.
- other ultraviolet ray source such as black light may be used instead of the ultraviolet LED.
- the coating layer 14 of titanium oxide which is a metal oxide semiconductor
- the titanium oxide is excited by receiving the ultraviolet rays.
- the air around the photoreceptor 11a is ionized into ions, that is, positively charged particles, and electrons, that is, negatively charged particles, to become plasma 16.
- the plasma 16 is shown with a dot.
- metal oxide semiconductor excited by ultraviolet rays a force in which titanium oxide is used.
- other oxides such as iron oxide, tungsten oxide, zinc oxide, and strontium titanate are used.
- Metal oxide semiconductors may be used.
- a linear electrode 17 is arranged, and a high-voltage alternating current is connected to power supply cable 19 from power source 18 on electrode 17. It is supposed to be supplied via.
- a positive electric field is applied to the electrode 17
- electrons in the plasma 16 that is, negatively charged particles, are attracted to the electrode 17 by the Coulomb force to be neutralized, and positively charged particles in the plasma 16 are It is released to the outer space so as to be separated from the electrode 17 due to the Coulomb force of it, and is combined with other atoms and molecules in the air to become positive ions.
- the ion generating device 10a In order to blow ions released into the outer space toward the workpiece W, the ion generating device 10a has a blower 20, and the blower 20 faces the photoreceptor 11a. The air blown from the air passes through the through hole 12 and is blown to the workpiece W. As a result, positive ions and negative ions are sprayed onto the workpiece W, and even if the workpiece W is charged with static electricity, the static electricity is neutralized.
- the photoreceptor 11a is irradiated with ultraviolet rays to ionize and ionize the air, generation of particles can be eliminated during ionization compared to the case of ionizing air by corona discharge. .
- the photoreceptor 11a By making the photoreceptor 11a into a sheet shape, a large amount of ionized air can be generated in a wider area than in the case of corona discharge using needle-like electrodes.
- the base material 13 of the photoreceptor l ib also serves as an electrode.
- the titanium oxide coating layer 14 is irradiated with light having an ultraviolet wavelength of 400 nm or less from the ultraviolet ray source 15
- the titanium oxide is excited by receiving ultraviolet rays.
- the air around the photoreceptor l ib is ionized into positively charged particles and negatively charged particles to become plasma 16.
- the power source 18 to the base material 13 made of conductive material and driving the blower 20
- positive ions and negative ions are treated as in the case shown in FIG. Even if the workpiece W is sprayed on the object W and is charged with static electricity, the electrostatic charge is neutralized.
- the sheet-like photoreceptor 10b also serves as an electrode, ions can be efficiently released.
- the photoreceptor 11c has a plate shape, and a coating layer 14 of titanium oxide is provided on the surface of the plate-like base material 13.
- An air flow is supplied from the blower 20 along the surface of the photoreceptor 1 lc, and the electrode 17 is disposed so as to be exposed to the air flow.
- positive ions and negative ions can be sprayed onto the workpiece W, and the amount of air from the blower 20 is less than that in the case where the air passes through the through hole 12.
- the workpiece W can be sprayed by resistance.
- an ultraviolet ray generation source 15 is accommodated in a container 21, and a plate-shaped light receiving body id is attached to the container 21.
- the base material 13 of the photoreceptor l id is made of an ultraviolet light transmitting material, and a coating layer 14 of titanium oxide is provided on the outer surface thereof. As described above, when the ultraviolet light source 15 is incorporated in the container 21, it is possible to prevent dust from adhering to the ultraviolet light source 15.
- An ion generation device 10e shown in FIG. 5 has a container 21 that contains an ultraviolet ray generation source 15 in the same manner as the ion generation device 10d shown in FIG. 4, and the container 21 has a lid member made of an ultraviolet transmission material cover. 2 2 is installed.
- the light receiver 1 lei is arranged as a first light receiver so as to face the lid member 22, and this light receiver 1 lei is formed on the surface of the base material 13 made of an ultraviolet transmitting material, like the light receiver l id.
- a titanium coating layer 14 is provided.
- a photoreceptor lle2 is arranged as a second photoreceiver facing the photoreceptor 1lei via a space, and the photoreceptor lle2 is a plate-like base material having a ceramic power of titanium oxide.
- a titanium oxide coating layer 14 is provided on the surface of the substrate.
- the coating layer 14 of titanium oxide has transparency, and light including the ultraviolet wavelength from the ultraviolet ray generation source 15 receives the lid member 22, the photoreceptor llel, and The light passes through the coating layer 14 of the photoreceptor 1 lei and is applied to the coating layer 14 of the photoreceptor 1 le2.
- the electrode 17 is provided on the coating layer 14 provided on the surface of the photoreceptor 1 If 1. If the electrode 17 is formed of titanium oxide in the same manner as the coating layer 14, the coating layer 14 and the electrode can be formed integrally. Photoreceptor 1 as the first photoreceiver 1 Photoreceptor 1 If2 as the second photoreceiver in line with If 1 Opposite the photoreceiver 1 If 1 via a space, this photoreceiver 1 A coating layer 14 is provided on the surface of the ridge 2. By using the same structure as the photoreceptor 1 If 1 as the photoreceptor 1 ⁇ 2, an ion generator having two electrodes 17 corresponding to each photoreceptor as in the case shown in FIG. It can be.
- the ultraviolet ray generation source 15 may be accommodated in a container. Even in the case of the ion generator shown in FIG. 2, the ultraviolet ray generation source 15 may be accommodated in the container.
- the ion generator 10g shown in Fig. 7 includes a photoreceptor l lgl that also serves as an electrode and a photoreceptor l lg2 that also serves as an electrode.
- the photoreceptors l lgl and l lg2 are parallel to each other through a space.
- Photoreceptor l lg2 is provided with a coating layer 14 of titanium oxide on the surface of a flat base material, and ultraviolet rays from ultraviolet source 15 irradiate coating layer 14 provided on the surface of photoreceptor l lgl. At the same time, the light passes through the through hole 12 and is applied to the coating layer 14 of the photoreceptor 1 lg2.
- Each of the photoreceptors llgl and llg2 is connected to a power source 18, and an electric field is formed by both electrodes in a space having ionized air by the power applied from the power source 18.
- each of the ion generators 10h shown in Fig. 8 has photoreceptors llhl and llh2 that also serve as electrodes. There are two UV sources 15 corresponding to 1 lh2.
- An ion generator 10i shown in FIG. 9 is a modification of the ion generator 10h shown in FIG. 8, and is similar to the ion generator 10b shown in FIG. l li2.
- This ion generator 10i has a pipe 24 for supplying air instead of the blower 20 shown in FIG.
- Each pipe 24 is formed with an ejection hole 25 for ejecting air, and an air flow is formed by the air from the ejection hole 25 to blow ions to the object to be processed.
- the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the scope of the invention.
- air is ionized, but the present invention can also be applied to the case of ionizing other gases other than air.
- a force direct current applied to the electrode 17 from the power source 18 may be applied.
- the positive electrode connected to the positive terminal of the power supply and the negative electrode connected to the negative terminal are arranged adjacent to the photoreceptor as the electrodes, and are formed by the positive electrodes. Positive ions are generated by a positive electric field, and negative ions are generated by a negative electric field formed by a negative electrode.
- the ion generator of the present invention is used to blow ionized air onto a portion from which static electricity is removed in a production line for manufacturing and assembling electromagnetic components.
Landscapes
- Elimination Of Static Electricity (AREA)
- Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Catalysts (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US12/303,564 US20100172808A1 (en) | 2006-06-07 | 2006-06-28 | Ion generator |
EP06767490.3A EP2023695B1 (en) | 2006-06-07 | 2006-06-28 | Ion generator |
CN200680054739.4A CN101449628B (zh) | 2006-06-07 | 2006-06-28 | 离子发生装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2006-158072 | 2006-06-07 | ||
JP2006158072A JP4838637B2 (ja) | 2006-06-07 | 2006-06-07 | イオン発生装置 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2007141885A1 true WO2007141885A1 (ja) | 2007-12-13 |
Family
ID=38801156
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2006/312873 WO2007141885A1 (ja) | 2006-06-07 | 2006-06-28 | イオン発生装置 |
Country Status (7)
Country | Link |
---|---|
US (1) | US20100172808A1 (ja) |
EP (1) | EP2023695B1 (ja) |
JP (1) | JP4838637B2 (ja) |
KR (1) | KR101023896B1 (ja) |
CN (1) | CN101449628B (ja) |
TW (1) | TWI397230B (ja) |
WO (1) | WO2007141885A1 (ja) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN104779526A (zh) * | 2014-01-13 | 2015-07-15 | 孙茂华 | 空气净化材料的应用、方法及离子发生器和空气处理设备 |
KR101622320B1 (ko) * | 2014-06-16 | 2016-05-18 | 한국기초과학지원연구원 | 이온 빔 공급 장치 및 이를 포함하는 고진공 정전기 제거 시스템 |
US10980911B2 (en) | 2016-01-21 | 2021-04-20 | Global Plasma Solutions, Inc. | Flexible ion generator device |
US11695259B2 (en) | 2016-08-08 | 2023-07-04 | Global Plasma Solutions, Inc. | Modular ion generator device |
US11283245B2 (en) | 2016-08-08 | 2022-03-22 | Global Plasma Solutions, Inc. | Modular ion generator device |
KR20230085946A (ko) | 2018-02-12 | 2023-06-14 | 글로벌 프라즈마 솔루션스, 인코포레이티드 | 셀프 클리닝 이온 발생기 장치 |
JP7475115B2 (ja) * | 2019-05-29 | 2024-04-26 | ダイキン工業株式会社 | 放電ユニット、及び空気清浄機 |
US11581709B2 (en) | 2019-06-07 | 2023-02-14 | Global Plasma Solutions, Inc. | Self-cleaning ion generator device |
CN115209598A (zh) * | 2022-08-03 | 2022-10-18 | 深圳奥拦科技有限责任公司 | 静电消除装置及方法和蒸镀设备 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001029778A (ja) * | 1999-07-22 | 2001-02-06 | Ebara Corp | 光電子放出材とそれを用いた負イオン発生装置 |
JP2001075338A (ja) * | 1999-09-08 | 2001-03-23 | Ricoh Co Ltd | 画像形成装置 |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3405439B2 (ja) * | 1996-11-05 | 2003-05-12 | 株式会社荏原製作所 | 固体表面の清浄化方法 |
JP2002239412A (ja) | 2001-02-06 | 2002-08-27 | Tatsumi Ushida | 気体清浄装置 |
JP2004079387A (ja) | 2002-08-20 | 2004-03-11 | Hisanaga Denki:Kk | マイナスイオン発生装置 |
US7063820B2 (en) * | 2003-06-16 | 2006-06-20 | University Of Florida Research Foundation, Inc. | Photoelectrochemical air disinfection |
US7821412B2 (en) * | 2006-09-15 | 2010-10-26 | Applied Nanotech Holdings, Inc. | Smoke detector |
US8440144B2 (en) * | 2006-10-11 | 2013-05-14 | Helder Pedro | Metallic photocatalytic oxidation reflector coated with titanium dioxide |
-
2006
- 2006-06-07 JP JP2006158072A patent/JP4838637B2/ja not_active Expired - Fee Related
- 2006-06-28 WO PCT/JP2006/312873 patent/WO2007141885A1/ja active Application Filing
- 2006-06-28 EP EP06767490.3A patent/EP2023695B1/en not_active Expired - Fee Related
- 2006-06-28 US US12/303,564 patent/US20100172808A1/en not_active Abandoned
- 2006-06-28 CN CN200680054739.4A patent/CN101449628B/zh not_active Expired - Fee Related
- 2006-06-28 KR KR1020087029162A patent/KR101023896B1/ko not_active IP Right Cessation
-
2007
- 2007-04-02 TW TW096111589A patent/TWI397230B/zh not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001029778A (ja) * | 1999-07-22 | 2001-02-06 | Ebara Corp | 光電子放出材とそれを用いた負イオン発生装置 |
JP2001075338A (ja) * | 1999-09-08 | 2001-03-23 | Ricoh Co Ltd | 画像形成装置 |
Non-Patent Citations (1)
Title |
---|
See also references of EP2023695A4 * |
Also Published As
Publication number | Publication date |
---|---|
KR101023896B1 (ko) | 2011-03-22 |
TW200807834A (en) | 2008-02-01 |
KR20090009928A (ko) | 2009-01-23 |
EP2023695A4 (en) | 2011-12-21 |
TWI397230B (zh) | 2013-05-21 |
CN101449628B (zh) | 2013-01-02 |
JP4838637B2 (ja) | 2011-12-14 |
EP2023695B1 (en) | 2014-08-13 |
JP2007328970A (ja) | 2007-12-20 |
US20100172808A1 (en) | 2010-07-08 |
EP2023695A1 (en) | 2009-02-11 |
CN101449628A (zh) | 2009-06-03 |
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