WO2007115419A3 - Bauteilverschleissschutzschicht, bauteilverschleissschutzbeschichtungsverfahren und vorrichtung zur durchführung eines bauteilverschleissschutzbeschichtungsverfahrens - Google Patents
Bauteilverschleissschutzschicht, bauteilverschleissschutzbeschichtungsverfahren und vorrichtung zur durchführung eines bauteilverschleissschutzbeschichtungsverfahrens Download PDFInfo
- Publication number
- WO2007115419A3 WO2007115419A3 PCT/CH2007/000167 CH2007000167W WO2007115419A3 WO 2007115419 A3 WO2007115419 A3 WO 2007115419A3 CH 2007000167 W CH2007000167 W CH 2007000167W WO 2007115419 A3 WO2007115419 A3 WO 2007115419A3
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- wear
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
- C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
- C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
- C23C14/025—Metallic sublayers
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0605—Carbon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/0635—Carbides
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
- C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
- C23C14/325—Electric arc evaporation
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
- C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
- C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
Abstract
Gegenstand der Erfindung ist ein Schichtstoff, der Bauteile gegen Verschleiss schützt, ein neuartiges Verfahren für die Verschleissschutzbeschichtung von Bauteilen, sowie eine Vorrichtung die es erlaubt diesen Schichtstoff mit dem erfindungsgemässen Verfahren auf Bauteiloberflächen aufzutragen. Bei dem Schichtstoff handelt es sich um einen mehrphasigen Werkstoff, der aus einer Hartstoffverbindung und einem freien Metalloid besteht, der einen niedrigen Reibkoeffizienten und einen sehr hohen Widerstand gegen Gleitverschleiss aufweist. Bei dem Verfahren handelt es sich um die reaktive Abscheidung von mehrphasigen Werkstoffen, bei der die beiden Komponenten der Verbindung mit physikalischen Dampfquellen erzeugt werden. Die zur Durchführung des Verfahrens nötige Anlage umfasst wenigstens 2 physikalische Dampfquellen, die in besonderer Weise angeordnet sind sowie einen speziellen Drehtisch.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009503387A JP2009532581A (ja) | 2006-04-07 | 2007-04-02 | コンポーネント摩耗防護層、コンポーネント摩耗防護コーティング法、およびコンポーネント摩耗防護コーティング法を実施する装置 |
EP07720066A EP2007922A2 (de) | 2006-04-07 | 2007-04-02 | Bauteilverschleissschutzschicht, bauteilverschleissschutzbeschichtungsverfahren und vorrichtung zur durchführung eines bauteilverschleissschutzbeschichtungsverfahrens |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH573/06 | 2006-04-07 | ||
CH5732006 | 2006-04-07 |
Publications (3)
Publication Number | Publication Date |
---|---|
WO2007115419A2 WO2007115419A2 (de) | 2007-10-18 |
WO2007115419A3 true WO2007115419A3 (de) | 2008-07-31 |
WO2007115419A9 WO2007115419A9 (de) | 2009-03-05 |
Family
ID=38037449
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/CH2007/000167 WO2007115419A2 (de) | 2006-04-07 | 2007-04-02 | Bauteilverschleissschutzschicht, bauteilverschleissschutzbeschichtungsverfahren und vorrichtung zur durchführung eines bauteilverschleissschutzbeschichtungsverfahrens |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP2007922A2 (de) |
JP (1) | JP2009532581A (de) |
WO (1) | WO2007115419A2 (de) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE102006029415B4 (de) * | 2006-06-27 | 2023-07-06 | Schaeffler Technologies AG & Co. KG | Verschleißfeste Beschichtung sowie Herstellverfahren hierfür |
DE102008042896A1 (de) * | 2008-10-16 | 2010-04-22 | Federal-Mogul Burscheid Gmbh | Verfahren zur Beschichtung eines Gleitelements und Gleitelement, insbesondere Kolbenring oder Zylinderlaufbuchse eines Verbrennungsmotors |
DE102008062220B4 (de) * | 2008-12-13 | 2021-04-22 | Mahle International Gmbh | Gleitschicht, deren Verwendung an oder mit einem Gleitelement und Verfahren zur Herstellung einer Gleitschicht |
DE102012020757A1 (de) | 2012-10-23 | 2014-05-08 | Mahle International Gmbh | Bauteil mit einer Beschichtung und Verfahren zu seiner Herstellung |
DE102012020756A1 (de) * | 2012-10-23 | 2014-04-24 | Mahle International Gmbh | Bauteil mit einer Beschichtung und Verfahren zu seiner Herstellung |
DE102017205028A1 (de) * | 2017-03-24 | 2018-09-27 | Robert Bosch Gmbh | Verschleißschutzbeschichtetes metallisches Bauteil hieraus bestehende Bauteilanordnung |
CN112481591B (zh) * | 2020-11-11 | 2023-03-24 | 中国科学院宁波材料技术与工程研究所 | 自适应耐高低温循环低摩擦功能防护涂层及其制法与应用 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1123990A1 (de) * | 2000-02-09 | 2001-08-16 | Hauzer Techno Coating Europe Bv | Verfahren zur PVD-Beschichtung |
JP2003082458A (ja) * | 2001-09-10 | 2003-03-19 | Sumitomo Electric Ind Ltd | 非晶質炭素被膜の形成装置及び形成方法 |
WO2004061150A1 (fr) * | 2002-12-27 | 2004-07-22 | Commissariat A L'energie Atomique | Procede de realisation d’un revetement anti-usure multicouche |
US20040144318A1 (en) * | 2001-02-02 | 2004-07-29 | Thomas Beck | Device for ceramic-type coating of a substrate |
US20050170162A1 (en) * | 2004-02-02 | 2005-08-04 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) | Hard laminated film, method of manufacturing the same and film-forming device |
WO2006027016A1 (en) * | 2004-09-08 | 2006-03-16 | Bic-Violex Sa | Method for deposition of a layer on a razor blade edge and razor blade |
-
2007
- 2007-04-02 JP JP2009503387A patent/JP2009532581A/ja not_active Withdrawn
- 2007-04-02 EP EP07720066A patent/EP2007922A2/de not_active Withdrawn
- 2007-04-02 WO PCT/CH2007/000167 patent/WO2007115419A2/de active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1123990A1 (de) * | 2000-02-09 | 2001-08-16 | Hauzer Techno Coating Europe Bv | Verfahren zur PVD-Beschichtung |
US20040144318A1 (en) * | 2001-02-02 | 2004-07-29 | Thomas Beck | Device for ceramic-type coating of a substrate |
JP2003082458A (ja) * | 2001-09-10 | 2003-03-19 | Sumitomo Electric Ind Ltd | 非晶質炭素被膜の形成装置及び形成方法 |
WO2004061150A1 (fr) * | 2002-12-27 | 2004-07-22 | Commissariat A L'energie Atomique | Procede de realisation d’un revetement anti-usure multicouche |
US20050170162A1 (en) * | 2004-02-02 | 2005-08-04 | Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) | Hard laminated film, method of manufacturing the same and film-forming device |
WO2006027016A1 (en) * | 2004-09-08 | 2006-03-16 | Bic-Violex Sa | Method for deposition of a layer on a razor blade edge and razor blade |
Also Published As
Publication number | Publication date |
---|---|
WO2007115419A9 (de) | 2009-03-05 |
WO2007115419A2 (de) | 2007-10-18 |
EP2007922A2 (de) | 2008-12-31 |
JP2009532581A (ja) | 2009-09-10 |
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