WO2007115419A3 - Bauteilverschleissschutzschicht, bauteilverschleissschutzbeschichtungsverfahren und vorrichtung zur durchführung eines bauteilverschleissschutzbeschichtungsverfahrens - Google Patents

Bauteilverschleissschutzschicht, bauteilverschleissschutzbeschichtungsverfahren und vorrichtung zur durchführung eines bauteilverschleissschutzbeschichtungsverfahrens Download PDF

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Publication number
WO2007115419A3
WO2007115419A3 PCT/CH2007/000167 CH2007000167W WO2007115419A3 WO 2007115419 A3 WO2007115419 A3 WO 2007115419A3 CH 2007000167 W CH2007000167 W CH 2007000167W WO 2007115419 A3 WO2007115419 A3 WO 2007115419A3
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WO
WIPO (PCT)
Prior art keywords
wear
resistant layer
coating
parts
carrying
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PCT/CH2007/000167
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English (en)
French (fr)
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WO2007115419A9 (de
WO2007115419A2 (de
Inventor
Erich Bergmann
Original Assignee
Ecole D Ingenieurs De Geneve E
Erich Bergmann
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Application filed by Ecole D Ingenieurs De Geneve E, Erich Bergmann filed Critical Ecole D Ingenieurs De Geneve E
Priority to JP2009503387A priority Critical patent/JP2009532581A/ja
Priority to EP07720066A priority patent/EP2007922A2/de
Publication of WO2007115419A2 publication Critical patent/WO2007115419A2/de
Publication of WO2007115419A3 publication Critical patent/WO2007115419A3/de
Publication of WO2007115419A9 publication Critical patent/WO2007115419A9/de

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C30/00—Coating with metallic material characterised only by the composition of the metallic material, i.e. not characterised by the coating process
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • C23C14/0057—Reactive sputtering using reactive gases other than O2, H2O, N2, NH3 or CH4
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/02—Pretreatment of the material to be coated
    • C23C14/024—Deposition of sublayers, e.g. to promote adhesion of the coating
    • C23C14/025—Metallic sublayers
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0605—Carbon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/0635—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
    • C23C14/325—Electric arc evaporation
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C23C14/352—Sputtering by application of a magnetic field, e.g. magnetron sputtering using more than one target
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/044—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material coatings specially adapted for cutting tools or wear applications

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

Gegenstand der Erfindung ist ein Schichtstoff, der Bauteile gegen Verschleiss schützt, ein neuartiges Verfahren für die Verschleissschutzbeschichtung von Bauteilen, sowie eine Vorrichtung die es erlaubt diesen Schichtstoff mit dem erfindungsgemässen Verfahren auf Bauteiloberflächen aufzutragen. Bei dem Schichtstoff handelt es sich um einen mehrphasigen Werkstoff, der aus einer Hartstoffverbindung und einem freien Metalloid besteht, der einen niedrigen Reibkoeffizienten und einen sehr hohen Widerstand gegen Gleitverschleiss aufweist. Bei dem Verfahren handelt es sich um die reaktive Abscheidung von mehrphasigen Werkstoffen, bei der die beiden Komponenten der Verbindung mit physikalischen Dampfquellen erzeugt werden. Die zur Durchführung des Verfahrens nötige Anlage umfasst wenigstens 2 physikalische Dampfquellen, die in besonderer Weise angeordnet sind sowie einen speziellen Drehtisch.
PCT/CH2007/000167 2006-04-07 2007-04-02 Bauteilverschleissschutzschicht, bauteilverschleissschutzbeschichtungsverfahren und vorrichtung zur durchführung eines bauteilverschleissschutzbeschichtungsverfahrens WO2007115419A2 (de)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2009503387A JP2009532581A (ja) 2006-04-07 2007-04-02 コンポーネント摩耗防護層、コンポーネント摩耗防護コーティング法、およびコンポーネント摩耗防護コーティング法を実施する装置
EP07720066A EP2007922A2 (de) 2006-04-07 2007-04-02 Bauteilverschleissschutzschicht, bauteilverschleissschutzbeschichtungsverfahren und vorrichtung zur durchführung eines bauteilverschleissschutzbeschichtungsverfahrens

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CH573/06 2006-04-07
CH5732006 2006-04-07

Publications (3)

Publication Number Publication Date
WO2007115419A2 WO2007115419A2 (de) 2007-10-18
WO2007115419A3 true WO2007115419A3 (de) 2008-07-31
WO2007115419A9 WO2007115419A9 (de) 2009-03-05

Family

ID=38037449

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PCT/CH2007/000167 WO2007115419A2 (de) 2006-04-07 2007-04-02 Bauteilverschleissschutzschicht, bauteilverschleissschutzbeschichtungsverfahren und vorrichtung zur durchführung eines bauteilverschleissschutzbeschichtungsverfahrens

Country Status (3)

Country Link
EP (1) EP2007922A2 (de)
JP (1) JP2009532581A (de)
WO (1) WO2007115419A2 (de)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006029415B4 (de) * 2006-06-27 2023-07-06 Schaeffler Technologies AG & Co. KG Verschleißfeste Beschichtung sowie Herstellverfahren hierfür
DE102008042896A1 (de) * 2008-10-16 2010-04-22 Federal-Mogul Burscheid Gmbh Verfahren zur Beschichtung eines Gleitelements und Gleitelement, insbesondere Kolbenring oder Zylinderlaufbuchse eines Verbrennungsmotors
DE102008062220B4 (de) * 2008-12-13 2021-04-22 Mahle International Gmbh Gleitschicht, deren Verwendung an oder mit einem Gleitelement und Verfahren zur Herstellung einer Gleitschicht
DE102012020757A1 (de) 2012-10-23 2014-05-08 Mahle International Gmbh Bauteil mit einer Beschichtung und Verfahren zu seiner Herstellung
DE102012020756A1 (de) * 2012-10-23 2014-04-24 Mahle International Gmbh Bauteil mit einer Beschichtung und Verfahren zu seiner Herstellung
DE102017205028A1 (de) * 2017-03-24 2018-09-27 Robert Bosch Gmbh Verschleißschutzbeschichtetes metallisches Bauteil hieraus bestehende Bauteilanordnung
CN112481591B (zh) * 2020-11-11 2023-03-24 中国科学院宁波材料技术与工程研究所 自适应耐高低温循环低摩擦功能防护涂层及其制法与应用

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1123990A1 (de) * 2000-02-09 2001-08-16 Hauzer Techno Coating Europe Bv Verfahren zur PVD-Beschichtung
JP2003082458A (ja) * 2001-09-10 2003-03-19 Sumitomo Electric Ind Ltd 非晶質炭素被膜の形成装置及び形成方法
WO2004061150A1 (fr) * 2002-12-27 2004-07-22 Commissariat A L'energie Atomique Procede de realisation d’un revetement anti-usure multicouche
US20040144318A1 (en) * 2001-02-02 2004-07-29 Thomas Beck Device for ceramic-type coating of a substrate
US20050170162A1 (en) * 2004-02-02 2005-08-04 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Hard laminated film, method of manufacturing the same and film-forming device
WO2006027016A1 (en) * 2004-09-08 2006-03-16 Bic-Violex Sa Method for deposition of a layer on a razor blade edge and razor blade

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1123990A1 (de) * 2000-02-09 2001-08-16 Hauzer Techno Coating Europe Bv Verfahren zur PVD-Beschichtung
US20040144318A1 (en) * 2001-02-02 2004-07-29 Thomas Beck Device for ceramic-type coating of a substrate
JP2003082458A (ja) * 2001-09-10 2003-03-19 Sumitomo Electric Ind Ltd 非晶質炭素被膜の形成装置及び形成方法
WO2004061150A1 (fr) * 2002-12-27 2004-07-22 Commissariat A L'energie Atomique Procede de realisation d’un revetement anti-usure multicouche
US20050170162A1 (en) * 2004-02-02 2005-08-04 Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.) Hard laminated film, method of manufacturing the same and film-forming device
WO2006027016A1 (en) * 2004-09-08 2006-03-16 Bic-Violex Sa Method for deposition of a layer on a razor blade edge and razor blade

Also Published As

Publication number Publication date
WO2007115419A9 (de) 2009-03-05
WO2007115419A2 (de) 2007-10-18
EP2007922A2 (de) 2008-12-31
JP2009532581A (ja) 2009-09-10

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