WO2007067838A3 - One dimensional nanostructure spiral inductors - Google Patents

One dimensional nanostructure spiral inductors Download PDF

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Publication number
WO2007067838A3
WO2007067838A3 PCT/US2006/060936 US2006060936W WO2007067838A3 WO 2007067838 A3 WO2007067838 A3 WO 2007067838A3 US 2006060936 W US2006060936 W US 2006060936W WO 2007067838 A3 WO2007067838 A3 WO 2007067838A3
Authority
WO
WIPO (PCT)
Prior art keywords
inductor
dimensional nanostructure
spiral inductors
inductance
substrate
Prior art date
Application number
PCT/US2006/060936
Other languages
French (fr)
Other versions
WO2007067838A2 (en
Inventor
Shawn G Thomas
Vida Ilderem
Papu D Maniar
George N Maracas
Original Assignee
Motorola Inc
Shawn G Thomas
Vida Ilderem
Papu D Maniar
George N Maracas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc, Shawn G Thomas, Vida Ilderem, Papu D Maniar, George N Maracas filed Critical Motorola Inc
Publication of WO2007067838A2 publication Critical patent/WO2007067838A2/en
Publication of WO2007067838A3 publication Critical patent/WO2007067838A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/58—Structural electrical arrangements for semiconductor devices not otherwise provided for, e.g. in combination with batteries
    • H01L23/64—Impedance arrangements
    • H01L23/645—Inductive arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type 
    • H01F17/0006—Printed inductances
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/5227—Inductive arrangements or effects of, or between, wiring layers
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/52—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/522—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body
    • H01L23/532—Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames including external interconnections consisting of a multilayer structure of conductive and insulating layers inseparably formed on the semiconductor body characterised by the materials
    • H01L23/53204—Conductive materials
    • H01L23/53276—Conductive materials containing carbon, e.g. fullerenes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type 
    • H01F17/0006—Printed inductances
    • H01F2017/0046—Printed inductances with a conductive path having a bridge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/3011—Impedance

Abstract

A method is provided for making an inductor comprising forming a catalytic material (14) over a substrate (12); and creating a network of one dimensional nanostructures (30) on the catalytic material, the network providing an inductance when a voltage is applied thereacross. This inductor is described in three applications: as an on-chip inductor for electronic circuitry, as a magnetic sensor, and as an environmental sensor. Several embodiments are described herein for forming networks of nanostructures on or above the substrate that provide an inductance having a high Q and a reduced die size for RF circuits. Several embodiments are also described for use of the nanostructure to sense gasses, radiation, a magnetic field, and the like.
PCT/US2006/060936 2005-12-06 2006-11-15 One dimensional nanostructure spiral inductors WO2007067838A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US29600305A 2005-12-06 2005-12-06
US11/296,003 2005-12-06

Publications (2)

Publication Number Publication Date
WO2007067838A2 WO2007067838A2 (en) 2007-06-14
WO2007067838A3 true WO2007067838A3 (en) 2007-12-21

Family

ID=38123583

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/060936 WO2007067838A2 (en) 2005-12-06 2006-11-15 One dimensional nanostructure spiral inductors

Country Status (2)

Country Link
CN (1) CN101326535A (en)
WO (1) WO2007067838A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150173380A1 (en) * 2012-07-06 2015-06-25 Pier RUBESA Method and apparatus for the amplification of electrical charges in biological systems or bioactive matter using an inductive disk with a fixed geometric trace
CN102881651B (en) * 2012-10-25 2015-10-28 天津理工大学 A kind of method improving electrical interconnection characteristic of carbon nano tube
CN104614403B (en) * 2015-01-22 2017-05-24 江西师范大学 Sensor, forming method of sensor, and method for defecting gas

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040112964A1 (en) * 2002-09-30 2004-06-17 Nanosys, Inc. Applications of nano-enabled large area macroelectronic substrates incorporating nanowires and nanowire composites

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040112964A1 (en) * 2002-09-30 2004-06-17 Nanosys, Inc. Applications of nano-enabled large area macroelectronic substrates incorporating nanowires and nanowire composites

Also Published As

Publication number Publication date
CN101326535A (en) 2008-12-17
WO2007067838A2 (en) 2007-06-14

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