WO2006134702A1 - 機械位置制御装置 - Google Patents
機械位置制御装置 Download PDFInfo
- Publication number
- WO2006134702A1 WO2006134702A1 PCT/JP2006/306829 JP2006306829W WO2006134702A1 WO 2006134702 A1 WO2006134702 A1 WO 2006134702A1 JP 2006306829 W JP2006306829 W JP 2006306829W WO 2006134702 A1 WO2006134702 A1 WO 2006134702A1
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- WIPO (PCT)
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- signal
- load
- motor
- transfer function
- torque
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Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D3/00—Control of position or direction
- G05D3/12—Control of position or direction using feedback
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/18—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form
- G05B19/19—Numerical control [NC], i.e. automatically operating machines, in particular machine tools, e.g. in a manufacturing environment, so as to execute positioning, movement or co-ordinated operations by means of programme data in numerical form characterised by positioning or contouring control systems, e.g. to control position from one programmed point to another or to control movement along a programmed continuous path
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
- H02P6/00—Arrangements for controlling synchronous motors or other dynamo-electric motors using electronic commutation dependent on the rotor position; Electronic commutators therefor
- H02P6/14—Electronic commutators
- H02P6/16—Circuit arrangements for detecting position
Definitions
- the present invention relates to a machine position control device that controls the position of a mechanical system by driving using an actuator such as an electric motor such as a machine tool or a component mounting machine.
- a conventional machine position control device applies a high-pass filter to a signal obtained by applying a lowpass filter to a load position signal that is a detected value of a load position, and to a motor position signal that is a detected value of an electric motor position.
- a signal using the motor position signal is used as a feedback signal to the position controller, so that the control system can be stabilized (for example, Patent Document 1).
- a precompensation unit is provided, and a signal obtained by multiplying the second-order differential value of the input variable based on the position command signal by the gain is added to the input variable as a feedforward compensation value. It is configured to compensate for deformation errors in the moving direction and to enable high-precision control (for example, Patent Document 2).
- Patent Document 1 Japanese Patent Application Laid-Open No. 2004-334772 (FIG. 1)
- Patent Document 2 JP-A-11-184529 (Figs. 3 and 4)
- the feedforward compensation value is calculated and added based on the second-order differential value of the input variable based on the position command signal.
- a machine position control device provides a position command signal indicating a target value of a load position, an electric motor position signal indicating a current position of the electric motor, and an electric motor indicating the current speed of the electric motor
- the control target position signal which is reference information related to the current position of the motor and the load, is fed back to calculate a torque command signal indicating the target value of the torque that the motor drives the load.
- the position signal to be controlled is a compensated load position signal that is a measured value of the current position of the load, based on the transfer function that advances the phase, and is applied to the stabilization compensation circuit to compensate for the phase delay.
- the position signal synthesizing circuit synthesizes the signal composed of the low frequency component and the signal composed of the high frequency component of the motor position signal.
- the load position control performed by feeding back the load position signal is equivalent to the semi-closed control in which only the motor position signal is fed back. This makes it possible to control the position of the load with high accuracy.
- FIG. 1 is a block diagram showing a machine position control device according to a first embodiment of the present invention.
- FIG. 2 is a diagram showing a frequency response of a control target.
- FIG. 3 is a block diagram showing a machine position control device using semi-closed control.
- FIG. 4 is a block diagram showing an internal configuration of a position signal synthesis circuit.
- FIG. 5 is a block diagram showing an internal configuration of a stability compensation circuit.
- FIG. 6 is a block diagram showing an internal configuration of an attenuation compensation circuit.
- FIG. 7 is a block diagram showing a machine position control device according to Embodiment 3 of the present invention.
- FIG. 8 is a block diagram showing a machine position control device according to Embodiment 4 of the present invention. Explanation of symbols
- Attenuation compensation circuit as attenuation compensation means
- FIG. 1 is a block diagram showing a machine position control apparatus according to Embodiment 1 of the present invention.
- the controlled object 10 includes an electric motor 30 or the like that drives the load 20, and the electric motor 30 drives the load 20 via a timing belt, a ball screw, and the connected torque transmission mechanism 40, and the torque ⁇ of the electric motor 30 is a torque.
- the control circuit 50 matches the torque command signal ⁇ .
- the current position of the motor 30 is detected by the motor position detector 60 such as an encoder attached to the motor 30 and output as the motor position signal X.
- load position detector 70 such as
- the stabilization compensation circuit 80 receives the load position signal X as an input and delays the phase of the load position signal X.
- control target position signal ⁇ that is a feedback signal related to the position of the motor and load
- the speed calculation circuit 100 receives the motor position signal X and inputs the current value of the motor speed.
- the motor speed signal V shown is output.
- Position speed control circuit 110 receives position command signal X and control target position signal X as inputs.
- the basic control torque mr which is the basis for the calculation of the torque command signal ⁇ , is input using the position gain circuit 120 that outputs the speed command, which is the target speed value, and the speed command and the motor speed signal V as inputs.
- a speed PI control circuit 130 for outputting a signal ⁇ .
- the damping compensation circuit 140 is a basic control torque signal based on a damping adjustment parameter ⁇ that sets an external force with the position command signal X, the motor position signal X, and the load position signal X as input r m 1 forces.
- the signal obtained by adding c to the basic control torque signal ⁇ is the torque command signal ⁇ .
- the position gain circuit 120 calculates the position gain r fb based on the deviation between the position command signal X and the control target position signal X.
- the signal multiplied by k is output as the speed command v. That is, the following equation is calculated.
- the speed calculation circuit 100 differentiates the motor position signal X as expressed by the following equation: m
- speed PI control circuit 130 receives speed command V and motor speed signal V as input, and speed r m
- the basic control torque signal ⁇ is output by the ⁇ (proportional integral) calculation expressed by the following equation.
- the controlled object 10 When the mechanical rigidity of the controlled object 10 is low, the controlled object 10 is low and has a characteristic having a mechanical resonance of a frequency (several Hz to several tens Hz). Focusing on the mechanical resonance characteristics of the lowest frequency, the controlled object 10 is approximated as a two-inertia system in which the motor 30 and the load 20 are connected by a torque transmission mechanism 40 that is a panel, and the response of the torque control circuit 50 is sufficient.
- Transfer function G (s) from torque command signal ⁇ to motor position signal X and transfer to load position signal X rmp 1 Each reaching function G (s) is expressed as follows.
- J represents the overall inertia of the controlled object 10
- ⁇ represents the antiresonance frequency
- ⁇ represents the resonance frequency ⁇ ⁇ number.
- FIG. 2 shows the frequency response of the transfer function of the controlled object 10 shown in the equations (4) and (5). From Fig. 2, the transfer function G (s) from the torque command signal ⁇ to the motor position signal X does not delay the rmp phase from 180 degrees, but the transfer function G (s) to the load position signal X is
- Fig. 3 is a block diagram showing the configuration of the semi-closed control system. Compared with the configuration of Fig. 1, the load position detector 70 and the load position signal X
- the position signal synthesis circuit 90, the stability compensation circuit 80, and the attenuation compensation circuit 140 are not provided, and the motor position signal X is input to the position gain circuit 120 as the control target position signal X as it is. Is.
- the semi-closed control system in FIG. 3 does not feed back the load position signal X, so
- the position gain k of the position gain circuit is relatively large while maintaining the stability of the control system.
- the response of controlling the motor position signal X can be made high.
- the open loop transfer function L (s) also called the cyclic transfer function, hereinafter simply called the open loop transfer function
- the open loop transfer function L (s) obtained by opening the entire control loop at the torque command signal ⁇ ⁇ is Using the speed gain k and the speed integral gain ⁇ ,
- the open loop transfer function L (s) of the semi-closed control includes the transfer function G (s) of the controlled object 10 up to the motor position signal X even as a torque command signal. That
- the anti-resonance point z force included in G (s) is included as it is as the zero point of the open-loop transfer function.
- the zeros other than the antiresonance point in the open loop transfer function are the real zeros of ⁇ and ⁇ k set by the speed PI control circuit 130 and the position gain circuit 120.
- the attenuation compensation circuit 140 is removed to make the attenuation compensation torque signal ⁇ 0, and the stability compensation circuit 80 is removed to replace the compensation load position signal X.
- Position signal X and motor position X are synthesized by position signal synthesis circuit 90 and position gain circuit 120
- FIG. 4 is a block diagram showing the internal configuration of the position signal synthesis circuit 90. As shown in FIG.
- the motor position filter 91 receives the motor position signal X as input and sets the filter frequency to ⁇ .
- a sum signal of the output of the motor position filter 91 and the output of the load position filter 92 is output as the control target position signal X by the position signal synthesis circuit 90.
- the position signal synthesis circuit 90 performs an operation represented by the following equation.
- the position signal synthesizing circuit 90 generates the low frequency component of the load position signal X and the motor position lc.
- the control target position signal X is synthesized from the high-frequency component of the signal X.
- control target position signal X is generated by synthesizing the frequency fb m 1 number components of the motor position signal X and the load position signal X.
- the control target position f is generated by synthesizing the frequency fb m 1 number components of the motor position signal X and the load position signal X.
- the position gain k in the position gain circuit 120 is sufficiently large.
- the response r 1 response G (s) of the load position signal X to the torque command signal ⁇ is more in phase than the response G (s) of the motor position signal X to the torque command signal ⁇ .
- the phase delay of the load position signal X is reduced as follows.
- FIG. 5 is a block diagram showing the internal configuration of the stability compensation circuit 80.
- the second-order differentiation circuit 81 outputs a signal obtained by second-order differentiation of the load position signal X. Also stable
- the compensation gain circuit 82 is connected to the output of the second-order differentiation circuit 81 from the stabilization compensation gain set externally. Outputs the signal multiplied by IN.
- the stabilization compensation circuit 80 has a stability compensation gain time st
- the sum signal of the output of the path 82 and the load position signal X is output as the compensation load position signal X.
- the stability compensation circuit 80 performs an operation represented by the following transfer function C (s).
- the stability compensation circuit 80 Since the stability compensation circuit 80 operates as described above, the compensation load position signal X is generated after the torque command signal.
- the stability compensation gain K is set as follows using the anti-resonance frequency ⁇ of the controlled object 10.
- the anti-resonance frequency ⁇ is estimated by a method such as measuring the frequency response of the controlled object 10 or measuring the vibration frequency of the controlled object 10 when the speed gain k of the speed ⁇ control circuit 130 is increased. be able to.
- the transfer function from ic p r to the compensation load position signal X also matches G (s).
- the stability equivalent to the semi-closed control can be ensured by using the stability compensation circuit 80, and the position gain k in the position gain circuit 120 and the position signal synthesizing can be ensured.
- the filter frequency ⁇ in the circuit 90 can be made sufficiently large.
- the anti-resonance point z of the controlled object 10 shown in Eq. (6) is included in the zero point of the open loop transfer function.
- the stabilization compensation circuit 80 calculates the compensation load level by an operation including the second derivative of the load position signal X.
- Position signal X is output via the load position filter 92.
- control target position signal X should not be extremely noisy.
- the position compensation signal 140, the motor position signal X, and the load position are detected by the attenuation compensation circuit 140.
- Attenuation compensation calculated from the signal ⁇ based on the attenuation adjustment parameter ⁇ set from the outside.
- the torque command signal ⁇ is obtained by adding the compensation torque signal ⁇ to the basic control torque signal ⁇ .
- FIG. 6 is a block diagram showing the internal configuration of the attenuation compensation circuit 140.
- the first attenuation gain circuit 141 generates a difference signal between the load position signal X and the motor position signal X.
- the load position differentiating circuit 142 differentiates the difference signal between the position command signal X and the load position signal X.
- the second attenuation gain circuit 143 is connected to the output of the load position differentiating circuit 142.
- the signal multiplied by the second attenuation gain K is output as the second attenuation compensation signal X.
- Attenuation gain circuit 144 applies a third attenuation to the difference signal between position command signal X and load position signal X.
- the 5 includes a first attenuation compensation signal X, a second attenuation compensation signal X, and a third attenuation compensation signal X.
- the attenuation compensation circuit 140 performs the following calculation.
- the attenuation compensation circuit 140 the first attenuation gain K, the second attenuation gain ⁇ , and the third reduction gain
- the attenuation gain K is a constant set by the speed ⁇ control circuit 130 and position gain circuit 120.
- ⁇ ⁇ 2 k v (k p + ⁇ ⁇ ) (1 7 /
- the antiresonance point in the open-loop transfer function is expressed by the following equation from z expressed by equation (6).
- the damping coefficient at the antiresonance point increases as the damping parameter oc is increased as shown in the equation (22).
- the other zeros in the open loop transfer function L (s) are real numbers ⁇ and k.
- the attenuation adjustment parameter ⁇ it is sufficient to set the attenuation adjustment parameter ⁇ to a large value so that the attenuation coefficient ⁇ expressed by the equation (22) is about 0.5, and the adjustment prospect is also good.
- the speed gain k, the speed integral gain ⁇ , and the position gain k may be increased in the same manner as the adjustment method in the normal semi-closed control.
- the attenuation compensation circuit 140 the load obtained by second-order differentiation of the load position signal X
- the first attenuation compensation signal X is calculated by multiplying the difference signal by the first attenuation gain K so that noise problems do not occur.
- the attenuation adjustment parameter O which is a parameter to be adjusted from the outside, is adjusted to an appropriate value while being adjusted by the same adjustment method as the semi-closed control.
- the control accuracy of the load position signal X is improved, and vibration is suppressed against disturbance applied to the control target 10.
- Such a control system can be realized.
- the attenuation compensation circuit 140 performs the calculation of the block diagram shown in FIG. 6, that is, the calculation shown in the equation (14), but this is expressed by the following equation: Even if the calculation to obtain the attenuation compensation torque signal ⁇ directly from the input signal to the attenuation compensation circuit 1 40 is the same An effect is obtained.
- the principle of the effect obtained by the attenuation compensation circuit 140 is that the attenuation coefficient of the closed-loop pole is increased by increasing the attenuation coefficient of the anti-resonance point in the open-loop transfer function as shown in Equation (22). Is to suppress vibration. Therefore, the calculation operation for the position command signal X in the attenuation compensation circuit 140 may be configured to be different from those in the above-described equations (14) and (23) if the open-loop transfer function is the same.
- the position command signal X input to the attenuation compensation circuit 140 is replaced with a signal obtained by applying a low-pass filter to the position command signal X, and the change of the attenuation compensation torque signal ⁇ with respect to the change of the position command signal X is changed. It may be smooth.
- the command acceleration signal a which is a signal obtained by second-order differentiation of the position command signal X is calculated, and the command acceleration signal a is multiplied by an appropriate gain and an attenuation parameter oc. Even if it is configured so that the response of the motor position signal X to the change of the position command signal X becomes as fast as possible when the damping parameter a is increased by adding the above signal to the damping compensation torque signal.
- the calculation of the attenuation compensation circuit 140 may be the same as described above.
- the transfer function from the torque finger signal command ⁇ force to the basic control torque signal ⁇ is
- the calculation of the attenuation compensation circuit 140 can be changed accordingly.
- the speed calculation circuit 100 uses a speed filter F (s as shown in (24) instead of the differential calculation in (4). ) If the motor speed signal V is calculated by calculating The transfer function up to the control torque signal ⁇ is given by equation (25).
- the attenuation compensation torque signal in the attenuation compensation circuit 140 is calculated using the first attenuation gain K set by Equation (16) and the third attenuation gain set by Equation (18).
- K and the attenuation parameter ⁇ the newly introduced fourth attenuation gain K, the fifth attenuation gain ⁇ , and the same transfer function F (s) as the velocity filter in equation (25), Good.
- the 4th attenuation gain K and the 5th attenuation gain K are set as follows.
- the attenuation adjustment parameter ⁇ can be increased to an appropriate value as in Embodiment 1,
- the attenuation coefficient of the closed loop pole can be increased. This makes it possible to suppress vibration even when a disturbance is applied to the controlled object 10, and to control the position of the motor 30 or the position of the load 20 with high accuracy by simple adjustment. Become.
- the load position signal X is second-order differentiated.
- FIG. 7 is a block diagram showing a machine position control apparatus according to Embodiment 3 of the present invention. However, the damping compensation circuit 140 in Embodiment 1 shown in FIG. 1 is omitted, and the basic control torque signal ⁇
- the configuration is r.
- an operation represented by the following transfer function is performed using the stability compensation gain K and the filter time constant t.
- Equation (30) is obtained by adding a second-order low-pass filter to the calculation of the stability compensation circuit 80 in the first embodiment, and the resolution of the load position detector 70 is particularly coarse. The effect of reducing noise increases when generating noise.
- the stability compensation gain K is set to a value close to the equation (11) used in the first embodiment.
- the filter time constant t should be less than the square root of the stability compensation gain K.
- the denominator numerator has a phase advance characteristic using a second-order transfer function. For example, as shown in the following equation, even if the denominator numerator is a first-order transfer function, Resonance frequency The effect of advancing the phase in the vicinity of the number ⁇ and the resonance frequency ⁇ is
- the position gain k and the filter frequency ⁇ can be increased.
- the stability compensation circuit 80a receives the load position signal x as an input
- the position signal synthesizing circuit 90 is connected to the motor position signal X.
- the torque is based on the position command signal X and the control target position signal X.
- the stability compensation circuit 80a feeds back the control target position signal X whose phase is advanced as compared with the wireless configuration. Even if the mechanical rigidity of the control target 10 is low, the position signal fb
- the operation of the attenuation compensation circuit 140 is as follows.
- FIG. 8 is a block diagram showing a machine position control apparatus according to the fourth embodiment.
- the configuration compensation circuit 80 and the position signal synthesis circuit 90 shown in FIG. 1 are omitted, and the position gain circuit 120 includes , Control target position signal X
- the open-loop transfer function is expressed by equation (20) as in the first embodiment. It is configured to change only the damping coefficient ⁇ of the anti-resonance point in the open-loop transfer function by changing the damping adjustment parameter ⁇ .
- the attenuation coefficient of the closed loop pole can be increased simply by increasing the attenuation adjustment parameter ⁇ to an appropriate value, and even when disturbance is applied to the controlled object 10. Vibrations can be suppressed.
- the operation is performed so that the motor position signal X matches the position command signal X. rm
- the speed gain k and position gain k can be increased and attenuated with a simple control system configuration.
- the function of the compensation circuit 140 can suppress the vibration by increasing the damping coefficient of the antiresonance point in the open loop transfer function, and can control the position of the motor 30 with high accuracy. As a result, the position of the load 20 can be controlled without any problem. Therefore, the position of the electric motor 30 and the load 20 can be controlled with high accuracy by simple adjustment.
- Embodiments 1 to 4 can be configured in the same manner as in Embodiment 4.
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- Physics & Mathematics (AREA)
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- Automation & Control Theory (AREA)
- Power Engineering (AREA)
- Human Computer Interaction (AREA)
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- Control Of Position Or Direction (AREA)
- Feedback Control In General (AREA)
Abstract
Description
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Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/917,423 US7911172B2 (en) | 2005-06-17 | 2006-03-31 | Machine position control device |
DE112006001583T DE112006001583T5 (de) | 2005-06-17 | 2006-03-31 | Maschinenpositionsregelvorrichtung |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2005-177845 | 2005-06-17 | ||
JP2005177845A JP4577107B2 (ja) | 2005-06-17 | 2005-06-17 | 機械位置制御装置 |
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WO2006134702A1 true WO2006134702A1 (ja) | 2006-12-21 |
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PCT/JP2006/306829 WO2006134702A1 (ja) | 2005-06-17 | 2006-03-31 | 機械位置制御装置 |
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US (1) | US7911172B2 (ja) |
JP (1) | JP4577107B2 (ja) |
KR (1) | KR100951754B1 (ja) |
CN (1) | CN100578412C (ja) |
DE (1) | DE112006001583T5 (ja) |
TW (1) | TWI325523B (ja) |
WO (1) | WO2006134702A1 (ja) |
Families Citing this family (19)
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JP5422789B2 (ja) * | 2008-10-27 | 2014-02-19 | 歸山 敏之 | Mems微小構造体駆動制御方法と制御装置 |
US8876453B2 (en) * | 2010-01-12 | 2014-11-04 | Hitachi Kokusai Electric Inc. | Substrate processing apparatus and method of manufacturing semiconductor device |
JP5645423B2 (ja) * | 2010-02-23 | 2014-12-24 | キヤノン株式会社 | 回転駆動装置及びロボットアーム |
JP2012130214A (ja) * | 2010-12-17 | 2012-07-05 | Sanyo Denki Co Ltd | モータ制御装置及びモータ制御方法 |
WO2012086550A1 (ja) * | 2010-12-20 | 2012-06-28 | 三菱電機株式会社 | モータ制御装置 |
JP5707129B2 (ja) * | 2010-12-28 | 2015-04-22 | Thk株式会社 | モータ制御装置、モータ制御方法、及び制御プログラム |
WO2013054662A1 (ja) * | 2011-10-13 | 2013-04-18 | 三菱電機株式会社 | サーボ制御装置 |
KR20140121853A (ko) * | 2012-02-24 | 2014-10-16 | 가부시키가이샤 야스카와덴키 | 모터 제어 장치 |
US9139222B2 (en) * | 2012-03-30 | 2015-09-22 | Deere & Company | Self tuning universal steering control system, method, and apparatus for off-road vehicles |
WO2014167852A1 (ja) * | 2013-04-11 | 2014-10-16 | パナソニック株式会社 | モータ駆動装置 |
JP6362019B2 (ja) * | 2013-12-09 | 2018-07-25 | 株式会社ニコン | 駆動システム及び駆動方法、露光装置及び露光方法、並びに防振装置及び防振方法 |
JP5850960B2 (ja) * | 2014-02-06 | 2016-02-03 | ファナック株式会社 | 位置検出器の内挿誤差を補正するモータ制御装置 |
JP6046182B2 (ja) * | 2015-02-27 | 2016-12-14 | ファナック株式会社 | 振動を抑制する機能を備えたモータ制御装置 |
JP2017175890A (ja) * | 2016-03-25 | 2017-09-28 | ファナック株式会社 | 振動を抑制する機能を有するモータ制御装置 |
JP6497408B2 (ja) * | 2017-04-14 | 2019-04-10 | 株式会社明電舎 | 電気慣性制御装置 |
JP6731666B2 (ja) | 2017-12-19 | 2020-07-29 | 国立大学法人神戸大学 | 設計支援装置、設計支援方法、及び設計支援プログラム |
DE102018200551A1 (de) * | 2018-01-15 | 2019-07-18 | Festool Gmbh | Bearbeitungsvorrichtung |
CN110609517B (zh) * | 2019-08-03 | 2020-11-03 | 津上精密机床(浙江)有限公司 | 丝杆热形变自校正方法 |
EP3961320B1 (de) * | 2020-08-26 | 2024-06-26 | Siemens Aktiengesellschaft | Verfahren und eine einrichtung zur bewegungsführung eines bewegbaren maschinenelements einer maschine |
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2005
- 2005-06-17 JP JP2005177845A patent/JP4577107B2/ja active Active
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2006
- 2006-03-17 TW TW095109141A patent/TWI325523B/zh active
- 2006-03-31 US US11/917,423 patent/US7911172B2/en active Active
- 2006-03-31 CN CN200680021679A patent/CN100578412C/zh active Active
- 2006-03-31 KR KR1020077029388A patent/KR100951754B1/ko active IP Right Grant
- 2006-03-31 DE DE112006001583T patent/DE112006001583T5/de not_active Withdrawn
- 2006-03-31 WO PCT/JP2006/306829 patent/WO2006134702A1/ja active Application Filing
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JPS5814376A (ja) * | 1981-07-17 | 1983-01-27 | Fujitsu Ltd | 位置信号検出方式 |
JP2004171333A (ja) * | 2002-11-21 | 2004-06-17 | Fuji Electric Fa Components & Systems Co Ltd | 機械制御装置 |
JP2005275588A (ja) * | 2004-03-23 | 2005-10-06 | Yaskawa Electric Corp | 電動機制御装置制御パラメータ感度解析装置 |
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TW200700946A (en) | 2007-01-01 |
TWI325523B (en) | 2010-06-01 |
KR100951754B1 (ko) | 2010-04-08 |
KR20080016865A (ko) | 2008-02-22 |
JP4577107B2 (ja) | 2010-11-10 |
CN101198917A (zh) | 2008-06-11 |
CN100578412C (zh) | 2010-01-06 |
US20090284208A1 (en) | 2009-11-19 |
US7911172B2 (en) | 2011-03-22 |
JP2006350792A (ja) | 2006-12-28 |
DE112006001583T5 (de) | 2008-04-30 |
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