WO2006119748A1 - Verfahren zur bestimmung der absoluten dicke von nicht transparenten und transparenten proben mittels konfokaler messtechnik - Google Patents
Verfahren zur bestimmung der absoluten dicke von nicht transparenten und transparenten proben mittels konfokaler messtechnik Download PDFInfo
- Publication number
- WO2006119748A1 WO2006119748A1 PCT/DE2006/000806 DE2006000806W WO2006119748A1 WO 2006119748 A1 WO2006119748 A1 WO 2006119748A1 DE 2006000806 W DE2006000806 W DE 2006000806W WO 2006119748 A1 WO2006119748 A1 WO 2006119748A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- microscope
- microscopes
- sample
- thickness
- measuring
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0028—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders specially adapted for specific applications, e.g. for endoscopes, ophthalmoscopes, attachments to conventional microscopes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
- G01B2210/40—Caliper-like sensors
- G01B2210/44—Caliper-like sensors with detectors on both sides of the object to be measured
Definitions
- the method described here is used for the high-precision determination of the absolute layer thickness of samples.
- the thickness of both transparent and non-transparent samples can be determined directly with the height resolution customary in confocal microscopes. This is made possible by a fully automatic calibration of the system without the aid of reference standards. This calibration takes less than a minute and can therefore be carried out at short intervals in industrial applications.
- samples can be measured on a plane surface and a thickness can be calculated via the measured height.
- a disadvantage of this method is the possibility of occurring bulges on the underside of the sample and large influences of errors in mounting the sample on the measurement result.
- the layer thickness of transparent layers can be determined, for example, by means of optical transmitted-light methods, although exact knowledge of the refractive index and the usable numerical aperture of the objective used is necessary for this purpose. Nevertheless, occasionally problems can arise during the evaluation, which lead to wrong results.
- the method described here does not exploit the transparency of layers, but is based on the measurement of the sample surfaces from two opposite sides. Due to thermal expansion effects, this method requires regular calibration to a reference thickness when using the linearity of the measuring heads.
- a new method for calibration to a reference thickness without the use of reference samples is described. With this method it is possible to determine the absolute thickness of samples up to almost twice as thick as the measuring range of the single microscope with nanometer resolution. In this case, the measuring range is, for example, 250 ⁇ m or 500 ⁇ m, which leads to a maximum measurable sample thickness of almost 0.5 mm or 1 mm. Show it:
- Fig.l Schematic diagram of the operation of confocal measurement technology
- Fig. 1 shows the usual beam path.
- the light source (1) illuminates the Nipkow disc (4) located in the intermediate image plane via a lens system (2) and a beam splitter (3).
- the pinholes are diffraction-limited to the sample surface by means of a lens (5), from where the reflection from the same lens is imaged onto the same pinholes.
- the light transmitted through the pinholes is imaged onto the CCD camera chip (8) via imaging optics (7).
- the Nipkow disc rotates so that the CCD camera always picks up a flat confocal microscope image.
- the objective (5) is moved vertically in a linear movement (z-direction) via a micro-adjuster, while a measuring computer stores the image sequence of the CCD camera and subsequently evaluates it.
- An algorithm calculates the z-position of the intensity maximum for each pixel, which is defined as the position of the surface to be measured.
- FIG. 2 shows the measuring principle for thickness determination by means of two identical confocal microscopes operating according to FIG. Both microscopes have separate control electronics and are controlled by a common measuring computer.
- the left microscope with the designations of FIG. 1 measures the left sample surface (6).
- the right microscope measures the right sample surface.
- the measured topographies are summed and the measured thickness subtracted from an infinitesimal thin sample. The result is the absolute thickness of the measured sample.
- FIG. 3 shows the technical realization of the measuring principle from FIG. 2, wherein the overall system is shown on the left and the region of the lens-sample on the right.
- FIG. 4 shows, with the designations from FIG. 2, the principle for calibrating the lateral image sections of the two microscopes with respect to one another.
- a transparent thin sample (6) e.g. A cover glass with a thickness of 170 ⁇ m can be used to set the position of the camera image fields using characteristic points. This is done by measuring the same surface from both sides. If one looks at characteristic points, they must be in the same place in the picture. Possible deviations can be adapted to one another by appropriately shifting, rotating and changing the magnification. The parameters found in this way are used in each subsequent measurement. This calibration only needs to be performed when it is set up and when needed, and the correctness of the parameters determined should be checked regularly.
- FIG. 5 shows the functional principle for calibrating the thickness measurement of thin samples.
- the other one is illuminated.
- the second microscope measures the vertical position of maximum intensity. This results in a virtual topography, which is interpreted as the position of the focal plane.
- a control measurement takes place in which the illumination microscope and the measuring microscope are exchanged.
- the piezo position (5) of head 1 is first set to a value of about 50 ⁇ m, whereby the position 0 ⁇ m in each case corresponds to the other measuring head is the closest position. Thereafter, measuring head 2 performs a measurement, wherein its light source (11) is turned off and the Nipkowlot (14) rotates. In the evaluation only points are taken into account whose intensity is very high, ie only the points illuminated by the opposite microscope are evaluated. So you get a mapping of the superposition of the focal planes. The infinitesimally thin sample is simulated by this measuring principle. A cross-check can be performed by performing the same procedure mirror-inverted.
- the Nipkow disc (14) of the right-hand measuring head is stopped and illuminated by the light source (11), while the confocal image stack is scanned by scanning the left-hand objective (5) via the rotating Nipkow disc (4) of the left-hand measuring head by means of a CCD camera (4). is recorded. From the results, the average height difference and the slopes in the x and y directions are calculated. On the basis of the correct basic calibration, the results should be identical within the measuring accuracy of the individual microscopes. In this way, the thickness determination can be calibrated by the measuring machine without further materials in a simple, automatable manner. In this way, the accuracy of the individual measuring devices can be transferred to the thickness measurement with both measuring devices.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Ophthalmology & Optometry (AREA)
- Radiology & Medical Imaging (AREA)
- Surgery (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Optics & Photonics (AREA)
- Microscoopes, Condenser (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US11/920,292 US20090059243A1 (en) | 2005-05-12 | 2006-05-11 | Method for determining the absolute thickness of non-transparent and transparent samples by means of confocal measurement technology |
DE112006001880T DE112006001880A5 (de) | 2005-05-12 | 2006-05-11 | Verfahren zur Bestimmung der absoluten Dicke von nicht Transparenten und transparenten Proben mittels konfokaler Messtechnik |
EP06742320A EP1880166A1 (de) | 2005-05-12 | 2006-05-11 | Verfahren zur bestimmung der absoluten dicke von nicht transparenten und transparenten proben mittels konfokaler messtechnik |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102005022819.4 | 2005-05-12 | ||
DE102005022819A DE102005022819A1 (de) | 2005-05-12 | 2005-05-12 | Verfahren zur Bestimmung der absoluten Dicke von nicht transparenten und transparenten Proben mittels konfokaler Messtechnik |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2006119748A1 true WO2006119748A1 (de) | 2006-11-16 |
Family
ID=36758393
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE2006/000806 WO2006119748A1 (de) | 2005-05-12 | 2006-05-11 | Verfahren zur bestimmung der absoluten dicke von nicht transparenten und transparenten proben mittels konfokaler messtechnik |
Country Status (4)
Country | Link |
---|---|
US (1) | US20090059243A1 (de) |
EP (1) | EP1880166A1 (de) |
DE (2) | DE102005022819A1 (de) |
WO (1) | WO2006119748A1 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7847943B2 (en) | 2007-08-31 | 2010-12-07 | Abb Ltd. | Web measurement device |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6149676B2 (ja) * | 2013-10-09 | 2017-06-21 | 富士通株式会社 | 画像処理装置、画像処理方法、及び、プログラム |
DE102019102873B4 (de) | 2019-02-06 | 2022-01-20 | Carl Mahr Holding Gmbh | Sensorsystem und Verfahren zur Bestimmung von geometrischen Eigenschaften eines Messobjekts sowie Koordinatenmessgerät |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3671726A (en) * | 1969-05-23 | 1972-06-20 | Morvue Inc | Electro-optical apparatus for precise on-line measurement of the thickness of moving strip material |
US4773760A (en) * | 1986-05-14 | 1988-09-27 | Tapio Makkonen | Procedure and means for measuring the thickness of a film-like or sheet-like web |
US20020167723A1 (en) * | 2000-09-11 | 2002-11-14 | Olympus Optical Co., Ltd. | Confocal microscope and height measurement method using the same |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE10242374A1 (de) * | 2002-09-12 | 2004-04-01 | Siemens Ag | Konfokaler Abstandssensor |
AU2005290314A1 (en) * | 2004-09-28 | 2006-04-06 | Singulex, Inc. | System and method for spectroscopic analysis of single particles |
KR101006423B1 (ko) * | 2005-01-20 | 2011-01-06 | 지고 코포레이션 | 객체 표면의 특성을 결정하기 위한 간섭계 |
-
2005
- 2005-05-12 DE DE102005022819A patent/DE102005022819A1/de not_active Withdrawn
-
2006
- 2006-05-11 US US11/920,292 patent/US20090059243A1/en not_active Abandoned
- 2006-05-11 DE DE112006001880T patent/DE112006001880A5/de not_active Withdrawn
- 2006-05-11 WO PCT/DE2006/000806 patent/WO2006119748A1/de active Application Filing
- 2006-05-11 EP EP06742320A patent/EP1880166A1/de not_active Withdrawn
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3671726A (en) * | 1969-05-23 | 1972-06-20 | Morvue Inc | Electro-optical apparatus for precise on-line measurement of the thickness of moving strip material |
US3671726B1 (de) * | 1969-05-23 | 1984-02-21 | ||
US4773760A (en) * | 1986-05-14 | 1988-09-27 | Tapio Makkonen | Procedure and means for measuring the thickness of a film-like or sheet-like web |
US20020167723A1 (en) * | 2000-09-11 | 2002-11-14 | Olympus Optical Co., Ltd. | Confocal microscope and height measurement method using the same |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7847943B2 (en) | 2007-08-31 | 2010-12-07 | Abb Ltd. | Web measurement device |
US7889342B2 (en) | 2007-08-31 | 2011-02-15 | Abb Ltd. | Web measurement device |
Also Published As
Publication number | Publication date |
---|---|
DE102005022819A1 (de) | 2006-11-16 |
EP1880166A1 (de) | 2008-01-23 |
DE112006001880A5 (de) | 2008-04-17 |
US20090059243A1 (en) | 2009-03-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
EP2893556B1 (de) | Vorrichtung und verfahren zum ausrichten von substraten | |
EP1618426B1 (de) | Verfahren und anordnung zur bestimmung der fokusposition bei der abbildung einer probe | |
DE102016124549B4 (de) | Messsystem | |
EP1407224B1 (de) | Verfahren zur messung von oberflächeneigenschaften sowie koordinatenmessgerät | |
DE102004023739A1 (de) | Messgerät und Verfahren zum Betreiben eines Messgeräts zur optischen Inspektion eines Objekts | |
DE102013014475A1 (de) | Verfahren zur Kalibrierung einer optischen Messvorrichtung, optisches Messverfahren und optische Messvorrichtung | |
CN105136024B (zh) | 光路切换装置及集成多个测头的微纳米测量*** | |
WO2006119748A1 (de) | Verfahren zur bestimmung der absoluten dicke von nicht transparenten und transparenten proben mittels konfokaler messtechnik | |
DE102007000981B4 (de) | Vorrichtung und Verfahren zum Vermessen von Strukturen auf einer Maske und zur Berechnung der aus den Strukturen resultierenden Strukturen in einem Photoresist | |
DE102008025896A1 (de) | Verfahren zur Ermittlung der Messunsicherheit bei der Geometriemessung | |
EP3303990B1 (de) | Beleuchtungssteuerung beim einsatz von optischen messgeräten | |
EP2847542B1 (de) | Vorrichtung mit interner optischer referenz | |
CN114577796A (zh) | 光学偏差识别方法及装置、染色体扫描装置及存储介质 | |
US20240019678A1 (en) | Autofocus system and method | |
DE102007036815B4 (de) | Verfahren zur Bestimmung des durch die Substrattopologie und eine Koordinaten-Messmaschine bedingten systematischen Fehlers bei der Vermesung von Positionen von Kanten von Strukturen eines Substrats | |
JP6094457B2 (ja) | 硬さ試験機 | |
CN110567391B (zh) | 一种计算机图像测量***及测量方法 | |
DE102006036172B4 (de) | Optische Anordnung zur sequentiellen Positionierung von Arbeitsfeldern auf einem Objekt | |
EP1179748B1 (de) | Kombination von abtastenden und abbildenden Methoden bei der Überprüfung von Photomasken | |
DE102022115020B3 (de) | Tiefenscanmesssystem, Tiefenscanmessvorrichtung, Kalibriereinheit und Verfahren zur Kalibrierung einer Tiefenscanmessvorrichtung | |
DE102017205105A1 (de) | Antastelement, Lichtanzeiger, Koordinatenmessgerät und Verfahren zur Bestimmung einer Lage einer Referenzoberfläche zu einer mechanischen Referenz | |
DE3801889A1 (de) | Verfahren zur vermessung von brillenglaesern | |
DE102014203117B4 (de) | Vorrichtung zum Bestimmen einer Topographie einer Objektoberfläche | |
DE102008002779B4 (de) | Verfahren zum Bestimmen des Verfahrbereichs für die Fokussierung auf ein Substrat | |
WO2014023333A1 (de) | Koordinatenmessgerät zur bestimmung von raumkoordinaten an einem messobjekt |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWE | Wipo information: entry into national phase |
Ref document number: 11920292 Country of ref document: US |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2006742320 Country of ref document: EP |
|
NENP | Non-entry into the national phase |
Ref country code: RU |
|
WWW | Wipo information: withdrawn in national office |
Country of ref document: RU |
|
WWE | Wipo information: entry into national phase |
Ref document number: 1120060018809 Country of ref document: DE |
|
WWP | Wipo information: published in national office |
Ref document number: 2006742320 Country of ref document: EP |
|
REF | Corresponds to |
Ref document number: 112006001880 Country of ref document: DE Date of ref document: 20080417 Kind code of ref document: P |