WO2006112065A1 - Electrolytic bath for producing alkaline reduced water - Google Patents

Electrolytic bath for producing alkaline reduced water Download PDF

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Publication number
WO2006112065A1
WO2006112065A1 PCT/JP2005/019127 JP2005019127W WO2006112065A1 WO 2006112065 A1 WO2006112065 A1 WO 2006112065A1 JP 2005019127 W JP2005019127 W JP 2005019127W WO 2006112065 A1 WO2006112065 A1 WO 2006112065A1
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WIPO (PCT)
Prior art keywords
chamber
force sword
electrode
anode
reduced water
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PCT/JP2005/019127
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French (fr)
Japanese (ja)
Inventor
Jae Yong Lee
Original Assignee
Ebara Jitsugyo Co., Ltd.
Nihon Yakuhin Hanbai Co., Ltd.
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Publication date
Application filed by Ebara Jitsugyo Co., Ltd., Nihon Yakuhin Hanbai Co., Ltd. filed Critical Ebara Jitsugyo Co., Ltd.
Priority to JP2007521071A priority Critical patent/JPWO2006112065A1/en
Publication of WO2006112065A1 publication Critical patent/WO2006112065A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D61/00—Processes of separation using semi-permeable membranes, e.g. dialysis, osmosis or ultrafiltration; Apparatus, accessories or auxiliary operations specially adapted therefor
    • B01D61/42—Electrodialysis; Electro-osmosis ; Electro-ultrafiltration; Membrane capacitive deionization
    • B01D61/44—Ion-selective electrodialysis
    • B01D61/46—Apparatus therefor
    • B01D61/48—Apparatus therefor having one or more compartments filled with ion-exchange material, e.g. electrodeionisation
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
    • C02F1/46104—Devices therefor; Their operating or servicing
    • C02F1/4618—Devices therefor; Their operating or servicing for producing "ionised" acidic or basic water
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
    • C02F1/46104—Devices therefor; Their operating or servicing
    • C02F1/46109—Electrodes
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
    • C02F1/46104—Devices therefor; Their operating or servicing
    • C02F1/46109—Electrodes
    • C02F2001/46152—Electrodes characterised by the shape or form
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F1/00—Treatment of water, waste water, or sewage
    • C02F1/46—Treatment of water, waste water, or sewage by electrochemical methods
    • C02F1/461—Treatment of water, waste water, or sewage by electrochemical methods by electrolysis
    • C02F1/46104—Devices therefor; Their operating or servicing
    • C02F1/4618—Devices therefor; Their operating or servicing for producing "ionised" acidic or basic water
    • C02F2001/4619—Devices therefor; Their operating or servicing for producing "ionised" acidic or basic water only cathodic or alkaline water, e.g. for reducing
    • C—CHEMISTRY; METALLURGY
    • C02—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F—TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
    • C02F2201/00—Apparatus for treatment of water, waste water or sewage
    • C02F2201/46—Apparatus for electrochemical processes
    • C02F2201/461—Electrolysis apparatus
    • C02F2201/46105—Details relating to the electrolytic devices
    • C02F2201/4618—Supplying or removing reactants or electrolyte
    • C02F2201/46185—Recycling the cathodic or anodic feed

Definitions

  • the present invention relates to an electrolytic cell, and more particularly to an electrolytic cell suitable for producing alkaline reduced water using pure water or ultrapure water as raw water without adding chemicals.
  • a two-chamber electrolytic cell consisting of two is known.
  • Reference numerals 1 and 7 are inlets for pure water, and reference numerals 3 and 9 are outlets for electrolytic water.
  • Patent Document 1 Japanese Patent Laid-Open No. 10-286573
  • the present invention was created to solve the above-described problems, and an object of the present invention is to provide an electrolytic cell that generates alkaline water that can be easily reused in a factory without the addition of chemicals. Is to provide.
  • an electrolytic cell for producing alkaline reduced water has an area of a force sword electrode in contact with the electrolytic solution and an area of the anode electrode in contact with the electrolytic solution. It is characterized by being formed larger.
  • the anode electrode is disposed in an anode chamber having an open top, and the force sword chamber in which the cathode electrode is disposed is continuously disposed on a side surface of the anode chamber.
  • the outlet formed in the force sword chamber is formed so as to communicate with the entrance of the adjacent force sword chamber, and the outlet of the (n-1) th force sword chamber arranged continuously is adjacent to n.
  • the second power is characterized in that it communicates with the entrance of the sword chamber.
  • the force sword chamber is filled with an ion exchange resin.
  • the electrolytic cell devised by the above-described configuration of the present invention is used, It is possible to change the liquidity without it.
  • the alkaline reduced water produced in this way is useful for cleaning fine particles on the surface of semiconductor wafers, photomasks, etc. Since only ultrapure water or pure water is used as raw material water, pattern damage and surface acidification are prevented. In particular, the drainage water can be reused at low cost, and the environmental problems can be reduced.
  • FIG. 1 is a cross-sectional view of an electrolytic cell by a conventional diaphragm electrolysis method.
  • FIG. 2 is a cross-sectional view of an electrolytic cell according to one embodiment of the present invention.
  • force sword electrode area Is desired to be increased In order to simply increase the electrode area of the force sword pole, it is understood that the force sword chamber should be increased to two or more chambers. In other words, by increasing the force sword chamber, the electrode area of the force sword pole is simply increased.
  • FIG. 2 is a cross-sectional view of an electrolytic cell according to an embodiment of the present invention.
  • the electrolytic cell according to the present invention illustrated by reference numeral 10 has a structure in which one anode chamber and n force sword chambers are continuously connected. Since each force sword electrode and diaphragm are arranged in the force sword chamber, n force sword electrodes and n diaphragms are attached to n force sword chambers.
  • Reference numeral 110 is an anode chamber
  • reference numerals 120, 130, and 180 are first, second, and third force sword chambers
  • reference numeral 190 is an nth force sword chamber.
  • Reference numeral 119 denotes a diaphragm, which is installed so as to be in close contact with the anode electrode (115) and the force sword electrode (125).
  • Reference numerals 127, 137, and 187 are ion exchange resins
  • reference numerals 125, 135, and 185 are first, second, and third force sword electrodes
  • reference numeral 195 is an nth force sword electrode. .
  • an ion exchange resin (127, 137, 187) is filled between the force sword electrode denoted by reference numeral 125 and the nth force sword electrode illustrated by reference numeral 195 in order to ensure conductivity.
  • Reference numerals 1 29, 139, and 189 are diaphragms. If the force sword electrodes illustrated by reference numerals 135, 185, and 195 are installed in close contact with each other, the electrode area of the force sword increases and the electric field in the diaphragm Strength is lowered.
  • ultrapure water was supplied to the anode chamber (110) and the force sword chamber (120) through the inlet (121).
  • the quality of ultrapure water is as follows.
  • Electrode A platinum plated titanium electrode was used. Ultrapure water is passed at a flow rate of lL / min, and four force sword chambers are formed. A DC voltage of about 50 V is applied to both ends of the anode electrode (115) and the force sword electrode (195). Changes in pH and ORP were confirmed while varying the voltage. The results are shown in Table 1.
  • C V is the first force sword voltage
  • C V, C V, and C V are the cathodes of the second, third, and fourth chambers, respectively.
  • Each force sword voltage is an absolute value based on the voltage of the anode electrode (115).

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Water Supply & Treatment (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Hydrology & Water Resources (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • Electrochemistry (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Urology & Nephrology (AREA)
  • Water Treatment By Electricity Or Magnetism (AREA)
  • Electrolytic Production Of Non-Metals, Compounds, Apparatuses Therefor (AREA)

Abstract

An electrolytic bath for producing alkaline reduced water in which a cathode electrode in contact with an electrolyte solution has an area larger than that of an anode electrode in contact with the electrolyte solution, the anode electrode is arranged in an anode chamber with open top, the cathode electrode is arranged in a cathode chamber located continuously to the side face of the anode chamber, an outlet formed in the anode chamber communicates with the inlet of an adjacent cathode chamber, and the outlet of an (n-1)th cathode chamber arranged continuously communicates with the inlet of an adjacent n-th cathode chamber.

Description

明 細 書  Specification
アルカリ性還元水を生成する電解槽  Electrolyzer that produces alkaline reduced water
技術分野  Technical field
[0001] 本発明は電解槽に関するもので、特に化学薬品の添加無しで純水あるいは超純水 を原水としてアルカリ性還元水を生成するのに適合した電解槽に関するものである。 背景技術  The present invention relates to an electrolytic cell, and more particularly to an electrolytic cell suitable for producing alkaline reduced water using pure water or ultrapure water as raw water without adding chemicals. Background art
[0002] 一般的に半導体などのハイテク部品の洗浄には超純水に少量の化学薬品を添カロ した酸性またはアルカリ性の酸化、還元洗浄水が使用されている。例えばシリコンゥ エーハの洗浄には水素を溶解させ微量の NH OHを添加した弱アルカリ性還元水が  In general, for cleaning high-tech parts such as semiconductors, acidic or alkaline oxidizing and reducing cleaning water obtained by adding a small amount of chemicals to ultrapure water is used. For example, for cleaning silicon wafers, weak alkaline reduced water dissolved in hydrogen and added with a small amount of NH OH is used.
4  Four
使用されている。そして最近では半導体工場内で使用した排水は工場内で浄ィ匕し再 使用する傾向である。  in use. Recently, the wastewater used in semiconductor factories has a tendency to be purified and reused in the factories.
[0003] そのようにするためには排水の浄ィ匕が容易なものが必要であり、可能な限り化学薬 品を添加しない洗浄システムが要望される。すなわち、化学薬品を全く添加しないで 超純水または純水だけで電気分解することができるアルカリ性還元水の生成技術が 開発されたら、この技術は排水再利用に有効な手段になる。  [0003] In order to do so, it is necessary to easily clean the waste water, and there is a demand for a cleaning system that does not contain chemicals as much as possible. In other words, if a technology for producing alkaline reduced water that can be electrolyzed with ultrapure water or pure water without adding any chemicals is developed, this technology will be an effective means for recycling wastewater.
[0004] 超純水または純水を電気分解する技術としては、図 1のように弗素系イオン交換膜 6の両側に力ソード電極 5とアノード電極 4とを配置した力ソード室 8とアノード室 2から なる 2室型電解槽が知られている。符号 1、 7はそれぞれ純水の入口であり，符号 3、 9はそれぞれ電解水の出口である。  As a technique for electrolyzing ultrapure water or pure water, a force sword chamber 8 and an anode chamber in which a force sword electrode 5 and an anode electrode 4 are arranged on both sides of a fluorine-based ion exchange membrane 6 as shown in FIG. A two-chamber electrolytic cell consisting of two is known. Reference numerals 1 and 7 are inlets for pure water, and reference numerals 3 and 9 are outlets for electrolytic water.
[0005] 基本的な電気分解反応は以下のようである。  [0005] The basic electrolysis reaction is as follows.
[0006] アノード室  [0006] Anode chamber
2H 0→ 2H+ + 0 + 2e" 2H 0 → 2H + + 0 + 2e "
2 2  twenty two
力ソード室  Force sword room
[0007] 2H 0 + 2e"→ H + 20H"  [0007] 2H 0 + 2e "→ H + 20H"
2 2  twenty two
この他に、力ソード電極とアノード電極間の弗素系イオン交換膜内部で以下のよう な水の解離反応が起こる。この解離反応は電界強度に依存して反応が進行される。  In addition, the following water dissociation reaction takes place inside the fluorine ion exchange membrane between the force sword electrode and the anode electrode. This dissociation reaction proceeds depending on the electric field strength.
[0008] H 0→ H+ + OH" この解離反応で生成されたプロトンが力ソード電極に移動して還元され、以下のよう に水素ガスが生成される。 [0008] H 0 → H + + OH " Protons generated by this dissociation reaction move to the force sword electrode and are reduced, and hydrogen gas is generated as follows.
[0009] 2H+ + 2e"→ H  [0009] 2H + + 2e "→ H
2  2
すなわち、力ソード電極ではプロトンの還元反応と水の還元分解反応が同時に起こ る。  That is, at the force sword electrode, proton reduction reaction and water reductive decomposition reaction occur simultaneously.
特許文献 1：特開平 10-286573号公報  Patent Document 1: Japanese Patent Laid-Open No. 10-286573
発明の開示  Disclosure of the invention
発明が解決しょうとする課題  Problems to be solved by the invention
[0010] 水の分解反応効率が高いときに電気分解された水の液性はアルカリ性になる。しか し、従来技術による電解槽においては、ほとんど液性の変化が現れないという問題点 かあつた。 [0010] When the water decomposition reaction efficiency is high, the liquidity of the electrolyzed water becomes alkaline. However, the electrolytic cell according to the prior art has a problem that almost no change in liquidity appears.
[0011] したがって、本発明は上述したような問題点を解決するために創案されたもので、 本発明の目的は化学薬品の添加無しで、工場で再活用しやすいアルカリ水を生成 する電解槽を提供することにある。  [0011] Accordingly, the present invention was created to solve the above-described problems, and an object of the present invention is to provide an electrolytic cell that generates alkaline water that can be easily reused in a factory without the addition of chemicals. Is to provide.
課題を解決するための手段  Means for solving the problem
[0012] このような上記目的は本発明により達成され、本発明の一面は、アルカリ性還元水 を生成する電解槽は、電解液に接する力ソード電極の面積が電解液に接するァノー ド電極の面積より大きく形成されることを特徴とする。  [0012] The above object is achieved by the present invention, and one aspect of the present invention is that an electrolytic cell for producing alkaline reduced water has an area of a force sword electrode in contact with the electrolytic solution and an area of the anode electrode in contact with the electrolytic solution. It is characterized by being formed larger.
[0013] 本発明において、アノード電極は上部が開放されたアノード室に配置され、カソー ド電極が配置される力ソード室はアノード室の側面に連続的に配置されることを特徴 とする。 In the present invention, the anode electrode is disposed in an anode chamber having an open top, and the force sword chamber in which the cathode electrode is disposed is continuously disposed on a side surface of the anode chamber.
[0014] また、力ソード室に形成された出口は隣接した力ソード室の入り口と連通されるよう に形成され、連続的に配置される n-1番目の力ソード室の出口は隣接した n番目の力 ソード室の入り口と連通されることを特徴とする。  [0014] The outlet formed in the force sword chamber is formed so as to communicate with the entrance of the adjacent force sword chamber, and the outlet of the (n-1) th force sword chamber arranged continuously is adjacent to n. The second power is characterized in that it communicates with the entrance of the sword chamber.
[0015] そして、力ソード室にはイオン交換樹脂が充填されることを特徴としている。  [0015] The force sword chamber is filled with an ion exchange resin.
発明の効果  The invention's effect
[0016] 本発明の上記のような構成により考案された電解槽を使用すると、化学薬品の添カロ 無しで液性の変化が可能になる。このように生成されたアルカリ性還元水は半導体ゥ エーハ、フォトマスクなどの表面微粒子洗浄に有用であり、超純水または純水のみを 原料水として使用したため、パターンのダメージ及び表面の酸ィ匕防止を解決できる 効果があり、特に排水された水を低費用で再使用できるため環境問題を軽減できる 効果が発生する。 [0016] When the electrolytic cell devised by the above-described configuration of the present invention is used, It is possible to change the liquidity without it. The alkaline reduced water produced in this way is useful for cleaning fine particles on the surface of semiconductor wafers, photomasks, etc. Since only ultrapure water or pure water is used as raw material water, pattern damage and surface acidification are prevented. In particular, the drainage water can be reused at low cost, and the environmental problems can be reduced.
図面の簡単な説明  Brief Description of Drawings
[0017] [図 1]図 1は従来の隔膜電解法による電解槽の断面図である。  FIG. 1 is a cross-sectional view of an electrolytic cell by a conventional diaphragm electrolysis method.
[図 2]図 2は本発明の一実施例による電解槽の断面図である。  FIG. 2 is a cross-sectional view of an electrolytic cell according to one embodiment of the present invention.
符号の説明  Explanation of symbols
[0018] 10 : 電解槽 [0018] 10: Electrolytic cell
110 : アノード室  110: Anode chamber
111 : アノード、室入り口  111: Anode, chamber entrance
112 : アノード室出口  112: Anode chamber outlet
115 : アノード電極  115: Anode electrode
125, 135, 145 : 力ソード電極  125, 135, 145: force sword electrode
195 : n番目力ソード電極  195: nth power sword electrode
120, 130 : 力ソード室  120, 130: Power sword room
180 : n- 1番目力ソード室  180: n- 1st power sword room
190 : n番目力ソード室  190: nth power sword room
119, 129, 139, 189 : 隔膜  119, 129, 139, 189: diaphragm
121, 131, 181, 191 : 力ソード室入り口  121, 131, 181, 191: Power sword room entrance
122, 132, 182 : 力ソード、室出口  122, 132, 182: Power sword, room exit
127, 137, 187 : イオン交換榭  127, 137, 187: ion exchange
発明を実施するための最良の形態  BEST MODE FOR CARRYING OUT THE INVENTION
[0019] 以下、添付した図面を参照しながら本発明の好適な実施例を記載する。 Hereinafter, preferred embodiments of the present invention will be described with reference to the accompanying drawings.
[0020] 先ず、液性を変化させるためにはイオン交換膜内の水の解離反応を制御する必要 がある。すなわち、イオン交換膜内の電界強度を低減させる必要があり、電界強度を 低減させるためには電流密度を低くする必要がある。したがって、力ソード電極面積 を増大させることが要望される。単に力ソード極の電極面積を増大させるためには、力 ソード室を 2個室以上に増やせば良いがわかる。すなわち、力ソード室を増やすこと により力ソード極の電極面積は単純に増大される。 First, in order to change the liquid property, it is necessary to control the dissociation reaction of water in the ion exchange membrane. That is, it is necessary to reduce the electric field strength in the ion exchange membrane, and in order to reduce the electric field strength, it is necessary to reduce the current density. Therefore, force sword electrode area Is desired to be increased. In order to simply increase the electrode area of the force sword pole, it is understood that the force sword chamber should be increased to two or more chambers. In other words, by increasing the force sword chamber, the electrode area of the force sword pole is simply increased.
[0021] 力ソード室を増やす方法として、力ソード室を 2個以上配置することが考えられる。こ のようにすると電解効率が高くなり液性が変わるようになって、アルカリ性還元水を生 成できる。 [0021] As a method of increasing the force sword chamber, it is conceivable to arrange two or more force sword chambers. In this way, the electrolytic efficiency increases and the liquidity changes, so that alkaline reduced water can be generated.
[0022] 図 2は本発明の一実施例による電解槽の断面図である。  FIG. 2 is a cross-sectional view of an electrolytic cell according to an embodiment of the present invention.
[0023] 図 2に図示したように図面符号 10で図示した本発明による電解槽は、 1つのァノー ド室と n個の力ソード室が連続的に連結された構造になっており、各々の力ソード室に はそれぞれの力ソード電極と隔膜が配置されているため、 n個の力ソード室には n個の 力ソード電極と n個の隔膜が装着される。  [0023] As shown in Fig. 2, the electrolytic cell according to the present invention illustrated by reference numeral 10 has a structure in which one anode chamber and n force sword chambers are continuously connected. Since each force sword electrode and diaphragm are arranged in the force sword chamber, n force sword electrodes and n diaphragms are attached to n force sword chambers.
[0024] 図面符号 110はアノード室であり、図面符号 120, 130, 180は第 1、第 2、第 3の力 ソード室であり、図面符号 190は n番目の力ソード室である。図面符号 119は隔膜で あり、アノード電極（115)と力ソード電極（125)に密着されるように設置する。図面符 号 127, 137, 187はイオン交換榭脂であり、図面符号 125, 135, 185は第 1、第 2 、第 3の力ソード電極であり、図面符号 195は n番目力ソード電極である。また、図面 符号 125の力ソード電極と図面符号 195で図示した n番目の力ソード電極の間には 伝導性を確保するためにイオン交換榭脂（127, 137, 187)を充填する。図面符号 1 29, 139, 189は隔膜であり、図面符号 135, 185, 195で図示した力ソード電極に それぞれを密着させて設置すると、力ソードの電極面積が増大することになり隔膜内 の電界強度が低くなる。  Reference numeral 110 is an anode chamber, reference numerals 120, 130, and 180 are first, second, and third force sword chambers, and reference numeral 190 is an nth force sword chamber. Reference numeral 119 denotes a diaphragm, which is installed so as to be in close contact with the anode electrode (115) and the force sword electrode (125). Reference numerals 127, 137, and 187 are ion exchange resins, reference numerals 125, 135, and 185 are first, second, and third force sword electrodes, and reference numeral 195 is an nth force sword electrode. . In addition, an ion exchange resin (127, 137, 187) is filled between the force sword electrode denoted by reference numeral 125 and the nth force sword electrode illustrated by reference numeral 195 in order to ensure conductivity. Reference numerals 1 29, 139, and 189 are diaphragms. If the force sword electrodes illustrated by reference numerals 135, 185, and 195 are installed in close contact with each other, the electrode area of the force sword increases and the electric field in the diaphragm Strength is lowered.
[0025] すなわち、水の分解反応の効率が高くなり OHイオンが増加され液性 (pH)はアル力 リ性になる。また、アノード電極（115)と力ソード電極（195)に直流電圧を付加し各々 の力ソード電極（125, 135, 185)にはそれぞれ分圧された電圧が付加されるように し、力ソード室（120)の出口（122)は隣接した力ソード室（130)の入り口（131)に連 通され、 n-1番目力ソード室（180)の出口（182)は n番目力ソード室（190)の入り口（ 191)に連通されるように連結する。すなわち、各々の力ソード室（120, 130, 180, 190)は互いに直列で連結され、電気分解すると各々の力ソード室力 段階的に電 解効率が高くなり、 pHはだんだん強いアルカリ性になる。 [0025] That is, the efficiency of water decomposition reaction is increased, OH ions are increased, and the liquidity (pH) is improved. In addition, a DC voltage is applied to the anode electrode (115) and the force sword electrode (195), and a divided voltage is applied to each force sword electrode (125, 135, 185). The outlet (122) of the chamber (120) is connected to the entrance (131) of the adjacent force sword chamber (130), and the outlet (182) of the n-1st force sword chamber (180) is connected to the nth force sword chamber ( Connect to the entrance (191) of 190). That is, each force sword chamber (120, 130, 180, 190) is connected in series with each other, and when electrolyzed, each force sword chamber power is gradually increased. Decomposition efficiency increases and pH becomes increasingly alkaline.
[0026] 以上のような電解槽の特性を確認するため、電圧による pH, ORP変化を確認した。 [0026] In order to confirm the characteristics of the electrolytic cell as described above, changes in pH and ORP due to voltage were confirmed.
[0027] (実施例） [0027] (Example)
図 2に図示した電解槽を使用してアノード室（110)と力ソード室（ 120)に入り口（ 12 1)を通じて超純水を供給した。超純水の水質は以下のようである。  Using the electrolytic cell shown in FIG. 2, ultrapure water was supplied to the anode chamber (110) and the force sword chamber (120) through the inlet (121). The quality of ultrapure water is as follows.
比抵抗： 18M Q cm  Specific resistance: 18M Q cm
水温： 20°C  Water temperature: 20 ° C
電極：白金鍍金チタニウム電極を使用した。通水速度は lL/minの流速で超純水を 通水し、 4個室の力ソード室を構成しアノード電極 (115)と力ソード電極（ 195)両端 に 50v程度の直流電圧を付加し、電圧を可変しながら pH及び ORPの変化を確認した 。実施結果を表 1に表示する。  Electrode: A platinum plated titanium electrode was used. Ultrapure water is passed at a flow rate of lL / min, and four force sword chambers are formed. A DC voltage of about 50 V is applied to both ends of the anode electrode (115) and the force sword electrode (195). Changes in pH and ORP were confirmed while varying the voltage. The results are shown in Table 1.
[0028] 表 1で C Vは第 1の力ソード電圧、 C V , C V , C Vはそれぞれ第 2, 3, 4室のカソ [0028] In Table 1, C V is the first force sword voltage, and C V, C V, and C V are the cathodes of the second, third, and fourth chambers, respectively.
1 1 2 2 3 3 4 4  1 1 2 2 3 3 4 4
ード電圧である。各力ソード電圧は、アノード電極（115)の電圧を基準とした絶対値 し/こ。  Voltage. Each force sword voltage is an absolute value based on the voltage of the anode electrode (115).
[表 1]  [table 1]
Figure imgf000007_0001
Figure imgf000007_0001
以上で説明したのは本発明によるアルカリ性還元水を生成する電解槽を実施する ための一実施例に過ぎなぐ本発明は上記実施例に限定されるものではない。以下 の特許請求範囲で請求することのように本発明の要旨力 離れることなぐ当該発明 が属する分野で通常の知識を持つものならだれでも多様な変形実施が可能な範囲 まで本発明の技術的思想が及ぶと言えるだろう。 What has been described above is only one example for carrying out the electrolytic cell for producing alkaline reduced water according to the present invention, and the present invention is not limited to the above-described example. The gist of the present invention as claimed in the following claims. It can be said that the technical idea of the present invention extends to the extent that various modifications can be carried out by anyone who has ordinary knowledge in the field to which he belongs.

Claims

請求の範囲 The scope of the claims
[1] アノード電極と力ソード電極により電気分解を行う電解槽であって、  [1] An electrolytic cell that performs electrolysis with an anode electrode and a force sword electrode,
電解液に接する力ソード電極の面積は電解液に接するアノード電極の面積より大き く形成されることを特徴とするアルカリ性還元水を生成する電解槽。  An electrolytic cell for producing alkaline reduced water, characterized in that the area of the force sword electrode in contact with the electrolytic solution is formed larger than the area of the anode electrode in contact with the electrolytic solution.
[2] 請求項 1において、前記アノード電極は上部が開放されたアノード室に配置され、 前記力ソード電極が配置される力ソード室は前記アノード室の側面に連続的に配置 されることを特徴とするアルカリ性還元水を生成する電解槽。  [2] In Claim 1, the anode electrode is disposed in an anode chamber having an open top, and the force sword chamber in which the force sword electrode is disposed is continuously disposed on a side surface of the anode chamber. An electrolytic cell that produces alkaline reduced water.
[3] 請求項 2にお 、て、前記力ソード室に形成された出口は隣接した前記力ソード室の 入り口と連通されるように形成されることを特徴とするアルカリ性還元水を生成する電 解槽。 [3] In claim 2, the outlet formed in the force sword chamber is formed so as to communicate with the entrance of the adjacent force sword chamber. Demolition tank.
[4] 請求項 2ないし請求項 3において、連続的に配置される n-1番目の前記力ソード室 の出口は隣接した n番目の前記力ソード室の入り口と連通されることを特徴とするアル カリ性還元水を生成する電解槽。  [4] In Claims 2 to 3, the outlet of the (n-1) th force sword chamber arranged continuously is connected to the entrance of the adjacent nth power sword chamber. An electrolyzer that produces alkaline reduced water.
[5] 請求項 2な 、し請求項 3にお 、て、前記力ソード室にはイオン交換樹脂が充填され ることを特徴とするアルカリ性還元水を生成する電解槽。  [5] The electrolytic cell for producing alkaline reduced water according to claim 2, wherein the force sword chamber is filled with an ion exchange resin.
PCT/JP2005/019127 2005-03-30 2005-10-18 Electrolytic bath for producing alkaline reduced water WO2006112065A1 (en)

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