WO2006042065A3 - Method to form microptips - Google Patents

Method to form microptips Download PDF

Info

Publication number
WO2006042065A3
WO2006042065A3 PCT/US2005/036075 US2005036075W WO2006042065A3 WO 2006042065 A3 WO2006042065 A3 WO 2006042065A3 US 2005036075 W US2005036075 W US 2005036075W WO 2006042065 A3 WO2006042065 A3 WO 2006042065A3
Authority
WO
WIPO (PCT)
Prior art keywords
posts
microtip
ring structure
etchant
microptips
Prior art date
Application number
PCT/US2005/036075
Other languages
French (fr)
Other versions
WO2006042065A2 (en
Inventor
Keith Joseph Thompson
Robert Matthew Ulfig
Scott Albert Wiener
Original Assignee
Imago Scient Instr Corp
Keith Joseph Thompson
Robert Matthew Ulfig
Scott Albert Wiener
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Imago Scient Instr Corp, Keith Joseph Thompson, Robert Matthew Ulfig, Scott Albert Wiener filed Critical Imago Scient Instr Corp
Publication of WO2006042065A2 publication Critical patent/WO2006042065A2/en
Publication of WO2006042065A3 publication Critical patent/WO2006042065A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01Q—SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
    • G01Q70/00—General aspects of SPM probes, their manufacture or their related instrumentation, insofar as they are not specially adapted to a single SPM technique covered by group G01Q60/00
    • G01Q70/16—Probe manufacture

Abstract

A method of forming microtips is described. The method includes a microtip with a flattened upper surface, a ring structure (30) that has been deposited on layer (20). The ring structure can be on the perimeter of the flat top of the microtip or located at a point inward from the peripheral edge of the top. The method further includes forming one or more posts in a sample (10), each post having an elongated, acicular body terminating in a tip; and subjecting at least the body of the posts to an etchant, wherein the etchant removes material from the posts. .
PCT/US2005/036075 2004-10-08 2005-10-07 Method to form microptips WO2006042065A2 (en)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US61727004P 2004-10-08 2004-10-08
US60/617,270 2004-10-08
US70335605P 2005-07-28 2005-07-28
US60/703,356 2005-07-28

Publications (2)

Publication Number Publication Date
WO2006042065A2 WO2006042065A2 (en) 2006-04-20
WO2006042065A3 true WO2006042065A3 (en) 2007-01-25

Family

ID=36148931

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/036075 WO2006042065A2 (en) 2004-10-08 2005-10-07 Method to form microptips

Country Status (1)

Country Link
WO (1) WO2006042065A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009086534A1 (en) 2007-12-28 2009-07-09 Veeco Instruments Inc. Method of fabricating a probe device for a metrology instrument and probe device produced thereby
US11002758B2 (en) * 2016-04-25 2021-05-11 Unm Rainforest Innovations Rugged, single crystal wide-band-gap-material scanning-tunneling-microscopy/lithography tips

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6358426B1 (en) * 1996-03-08 2002-03-19 Seiko Instruments Inc. Method of fabricating probe force atomic force microscope
US20050082475A1 (en) * 2003-10-15 2005-04-21 Doan Trung T. Methods for preparing samples for atom probe analysis

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6358426B1 (en) * 1996-03-08 2002-03-19 Seiko Instruments Inc. Method of fabricating probe force atomic force microscope
US20050082475A1 (en) * 2003-10-15 2005-04-21 Doan Trung T. Methods for preparing samples for atom probe analysis
US6956210B2 (en) * 2003-10-15 2005-10-18 Micron Tchnology, Inc. Methods for preparing samples for atom probe analysis

Also Published As

Publication number Publication date
WO2006042065A2 (en) 2006-04-20

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