WO2006001436A1 - 振動リニアアクチュエータ - Google Patents
振動リニアアクチュエータ Download PDFInfo
- Publication number
- WO2006001436A1 WO2006001436A1 PCT/JP2005/011780 JP2005011780W WO2006001436A1 WO 2006001436 A1 WO2006001436 A1 WO 2006001436A1 JP 2005011780 W JP2005011780 W JP 2005011780W WO 2006001436 A1 WO2006001436 A1 WO 2006001436A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- mover
- coil
- vibration
- linear actuator
- weight
- Prior art date
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Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K33/00—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system
- H02K33/16—Motors with reciprocating, oscillating or vibrating magnet, armature or coil system with polarised armatures moving in alternate directions by reversal or energisation of a single coil system
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/04—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism
- B06B1/045—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with electromagnetism using vibrating magnet, armature or coil system
Definitions
- the present invention relates to a small vibration device as a vibration alarm device, and more particularly, to a vibration linearizer mounted in an information terminal device such as a mobile phone, a portable electronic device, and a portable liquid crystal TV game machine.
- vibration calling functions such as silent mode and manner mode
- silent mode and manner mode notify the user of an incoming call by bodily vibration
- the vibration generator uses a cylindrical or flat compact vibration motor that rotates an eccentric weight, a speaker-driven multifunction device (MFD), or the like to generate vibration, sound, and sound.
- MFD speaker-driven multifunction device
- Application devices are generally well known, but with the recent trend toward miniaturization of portable information terminal bodies, the space that can be taken by vibration generators inside devices has become limited year by year.
- the vibration generator is reduced in size and power consumption is reduced, but a new structure that can generate a vibration force that allows a user to reliably recognize an incoming call. Development of vibration devices is desired.
- Patent Document 1 Japanese Unexamined Patent Publication No. 2003-154314
- the outer yoke which is a mover
- the general vibration motor as described above has a complicated structure with a large number of parts and vibrates at a high speed, which causes a problem in the reliability of the sliding portion.
- the multi-function device (MFD) adopts the basic structure of a speaker, the area of the amplitude of the magnetic circuit of the mover and the amplitude of the sound or sound diaphragm overlaps with little force. Thus, there was a problem that sufficient vibration force or acoustic characteristics could not be obtained within the limited thickness range.
- the present invention is characterized by a vibration generating function as a thin vibration device, has a simple structure and excellent durability, and makes the best use of a limited space so that the user can clearly see it. It is an object of the present invention to provide a small-diameter flat type vibration linear actuator capable of generating a recognizable vibration force.
- a mover including a permanent magnet, a housing main body that houses the mover, a thin plate-like elastic body that connects and supports the mover and the housing main body, and a stator for driving the mover
- a vibration device comprising a side coil
- the permanent magnet is magnetized in the amplitude direction of the mover, and a weight body serving as a weight is integrally provided on the outer periphery of the permanent magnet, and the opposing coils are slightly spaced on the inner diameter side of the permanent magnet.
- a cylindrical pole piece is provided on the inner diameter of the coil wound in a cylindrical shape so as to penetrate the center.
- the center position of the magnetic field which is the center of the permanent magnet in the thickness direction, and the center position of the magnetic field generated when the coil is energized do not coincide with each other in the amplitude direction. It is characterized by being offset at the part side.
- the gap between the outer peripheral surface of the mover and the inner surface of the side wall of the housing body, and the inner periphery of the mover is narrow within a range of 0.08 mm to 0.15 mm, and the upper surface side of the mover and the housing body change according to the movement of the mover
- An air damper for limiting the amount of air movement between the space formed by the inner wall of the upper surface and the space formed by the lower surface side of the mover and the terminal board serving as the lid of the housing body It is characterized by having a structure.
- the weight body is formed of a weight of a non-magnetic material whose main component is high specific weight gold having a specific gravity of 10 or more, such as tungsten or tantalum.
- the weight body is formed by a weight of a general non-magnetic material having a large specific gravity of 8 or less and less than 10 such as brass or copper! /
- the bottom surface side of the terminal board has a terminal board structure compatible with solder reflow.
- the terminal shape corresponding to the solder reflow of the terminal board is composed of a positive electrode (or negative electrode) located in the center and concentrically divided, and a negative electrode (or positive electrode) region of an annular band located on the outer periphery thereof. It is characterized by that.
- a mover supported by an elastic body and a stator side coil that generates a magnetic field that vibrates the mover are opposed to each other inside the housing body, and a magnetic field generated when a current flows through the coil, and the permanent magnet Due to the magnetic repulsion force or magnetic attraction force acting between the generated magnetic field and the magnetic attraction force, the mover portion resonates and vibrates in the thrust direction which is the thickness direction of the cylindrical housing body.
- a driving force is obtained by arranging the outer peripheral surface of the coil and the inner peripheral surface of the permanent magnet so as to have a slight gap and further providing a pole piece penetrating the center of the cylindrical coil. The improvement of magnetic efficiency can be expected.
- a weight body is integrally provided on the outer periphery of the movable permanent magnet so that sufficient vibration force can be obtained in a limited space in the housing body. It plays the role of weight as a moving child.
- the opposed cylindrical coil on the stator side with respect to the permanent magnet magnetized in the amplitude direction is located on the inner diameter side of the permanent magnet via a slight gap and is wound into the cylindrical shape.
- a columnar pole piece is provided in the inner diameter of the coil so that it passes through the center of the coil. Magnetic flux passes magnetically through the pole piece and narrows the gap. The density is improved, and the magnetic flux force from the stator side coil works efficiently on the permanent magnet on the mover side.
- the magnetic field of the permanent magnet and the magnetic field generated when a current is passed through the coil are different, the magnetic field of the permanent magnet and the magnetic field generated when a current is passed through the coil The magnetic force applied between them is energized to the coil without being balanced at that position, and at the same time, the mover quickly moves in one amplitude direction, reliably starts and repeats vibration. .
- the NS magnetic field force generated by the permanent magnet force The magnetic field center position M of the permanent magnet 2 and the coil have a positional relationship as shown in FIG. In the initial non-energized state where the magnetic field center position C of 5 coincides, the balance of magnetic balance is maintained at the time of starting the current, and the mover 9 does not operate. On the other hand, in the positional relationship shown in FIG. 5, the magnetic field center position M of the permanent magnet 2 of the mover 9 that translates in the axial direction in particular is offset with respect to the magnetic field center position C of the coil 5.
- the permanent magnet 2 Due to the NS magnetic flux generated at both ends of 5, the permanent magnet 2 itself receives a linear force in the axial direction, starts in the amplitude direction with the unloaded elastic body plane as the reference plane, and is supported by the elastic body 4. In the resonance point region, the mover 9 reciprocates on a straight line, thereby generating vibration force. Can be generated.
- the clearance between the outer peripheral surface of the mover and the inner wall of the housing body and the clearance between the inner peripheral surface of the mover and the outer peripheral surface of the coil are both within the range of 0.08 mm to 0.15 mm.
- the resonance frequency band is wide, the obtained peak can be obtained. Therefore, a stable vibration force can be obtained without the sudden decrease of the vibration force. Further, durability and reliability such as life are improved.
- the clearance between the outer peripheral surface of the mover and the inner wall of the side wall of the housing body, and the clearance between the inner peripheral surface of the mover and the outer peripheral surface of the coil are both 0.08 mm to 0.15 mm.
- the reason for this is that if the gap width is 0.08 mm or less, the mover side and the stator side will be buffered during operation, and conversely if the gap width is greater than 0.15 mm, the air damper will be effective. This is because no fruit can be obtained.
- the weight of the heavy body formed by a high specific gravity metal body containing a non-magnetic material whose main component is tungsten, tantalum or the like is larger by reciprocating integrally with a permanent magnet as a mover. Vibration force can be obtained.
- the weight body is formed by a weight of a metal body containing a non-magnetic material mainly composed of high specific polymerized gold having a specific gravity of 10 or more, such as tungsten or tantalum, so that it can move to the maximum extent in a limited small space. You can gain weight as a child.
- tungsten alloys, tantalum alloys, cobalt alloys, etc. can be used within the range of industrially usable metal materials.
- the specific gravity of brass, copper, etc. is a relatively large specific gravity of 8 or more and less than 10, and the weight of the weight formed by the metal body of non-magnetic material reciprocates integrally with the permanent magnet as a mover. A large vibration force can be obtained.
- the weight body is formed by a weight of a specific non-magnetic material such as brass or copper, and a specific gravity of 8 or more and less than 10, so an inexpensive material can be used in a limited space. The best mover weight can be obtained.
- the terminal board surface at the bottom of the housing main body can be directly solder-reflow-fixed on the circuit board, and the power supply land of the circuit board can be easily energized. This can reduce the man-hours in the assembly work process and can also be put on the solder reflow automation line in the mass production process.
- the reflow component can be easily arranged on the circuit board.
- an automatic machine such as a robot or an operator performs manual placement, but when the reflow parts to be placed are disc-shaped, the direction of the terminal position on the bottom side is difficult to identify.
- there is a defect such as inability to obtain electrical continuity even when the solder is fixed, and it is difficult to match the position of the power supply land on the circuit board on the side where it is placed.
- the center portion of the circular position of the terminal board and the concentric outer annular band portion are divided to correspond to the power feeding land, and the circular reflow component is independent of the force rotation direction. Can be aligned.
- the vibration linear actuator 1 includes a substantially cylindrical housing body 7 having a recess 7a at the center, and a rib 11 on one end side of the housing body 7 that is open.
- the base plate 10 is incorporated as a fitting guide to form an outer frame housing, and the terminal board 14 is arranged at the bottom.
- outer diameter ⁇ 15mn! ⁇ 10mm, thickness 5mn! It is designed as a vibration device with a small flat shape of ⁇ 3mm.
- the internal configuration is such that the annular surface corresponding to the bottom surface of the recess 7a on the inside of the housing body 7 has an outer diameter dimension close to the inner diameter side frame of the housing body 7 as shown in FIG.
- the plate-like elastic body 4 is concentrically fixed by the tip convex portion of the cylindrical main shaft 12 in the inner diameter hole 8 of the annular surface of the concave portion 7a.
- the main shaft 12 is formed integrally with the pole piece 3 standing perpendicular to the center bearing hole 10a of the plate surface of the base plate 10 and has the same coaxial diameter, and the main shaft 12 portion is made of a non-magnetic grease body. Is formed.
- the main shaft 12 has a structure for supporting and fixing the elastic body 4 with respect to the reference surface of the base plate 10 so as to keep the plate surface of the elastic body 4 horizontal.
- a weight body 6 formed in a substantially concave annular section having an outer diameter equal to that of the elastic body 4 is attached to the outer peripheral edge of the lower surface side of the elastic body 4 so as to be suspended, and its weight
- a thrust-oriented annular permanent magnet 2 is fitted and fixed within the same thickness range as the substantially concave bottom surface portion of the weight body 6 to constitute the entire movable element 9.
- the permanent magnet 2 is, for example, magnetized in the axial direction so that the upper surface side is N-pole and the lower-side force pole.
- the stator side coil 5 facing the permanent magnet 2 on the side of the mover 9 is wound around the outer periphery of the cylindrical pole piece 3 made of the magnetic material and is combined with the pole piece 3.
- the NS magnetic flux is substantially concentrated near both ends of the cylindrical coil 5 in the axial direction.
- the pole piece 3 is made of stainless steel (SUS420J) in this embodiment, which is preferably a ferromagnetic material.
- the material is not limited to this. Further, it may be a metal or alloy mainly composed of iron, cobalt and nickel.
- the pole piece 3 itself is supported by a bearing hole 10a in the center of the substantially disc-shaped base plate 10, and maintains the positional relationship between the stator side coil 5 and the mover side permanent magnet 2 while maintaining the tip of the pole piece 3 itself.
- the main shaft 12 positioned on the side, it plays a central role in the housing in which the housing body 7 and the base plate 10 are fitted.
- a permanent magnet 2 formed in an annular shape on the outer periphery of the coil 5 is slightly spaced from the outer peripheral surface of the coil 5, that is, magnetically. Installed through the gap. For this reason, the base plate 10 needs to be accurately assembled without variation with respect to the louvering body 7 so that there is no physical buffer between the mover side permanent magnet 2 and the stator side coil 5 during operation. .
- both the clearance between the outer peripheral surface of the movable element 9 and the inner surface of the side wall of the housing body 7, and the clearance between the inner peripheral surface of the movable element 9 and the outer peripheral surface of the coil 5 are both 0.08 mm to 0.15.
- An air damper structure is provided for restricting the amount of air movement between the space formed by the base plate 10 serving as the lid of the hooding main body 7 and the space.
- both the clearance between the outer peripheral surface of the mover and the inner surface of the side wall of the housing body, and the clearance between the inner peripheral surface of the mover and the outer peripheral surface of the coil are both 0.08 mm to 0.15 mm.
- the gap between the movable element and the stator is 0.08mn!
- the air in the space above and below the mover 9 suppresses the vertical movement of the mover 9 so that the air from the space to the space The amount of movement can be limited.
- an air damper effect works, and the resonance frequency band required for the movable element 9 to obtain a vibration force exceeding a necessary level is substantially expanded.
- Fig. 10 is a graph comparing the air damper structure with and without the air damper structure.
- the horizontal axis shows the relationship between the input frequency (Hz) and the vertical axis shows the acceleration (G). .
- ⁇ The curve F has an air damper structure.
- the acceleration G at peak F0 is The curve P is 1.0G, whereas the curve F is 0.9G, which is slightly inferior in acceleration. If the resonance frequency fluctuates and the resonance frequency fluctuates up to the resonance frequency of F1 or F2, for example, the acceleration G at that time is 0.8G for curve F, and 0.6G for curve P, which is larger at 0.8G. The width falls and the drop from the peak F0 value becomes intense.
- the permanent magnet 2 and the coil 5 have the following positional relationship. Is desirable in design.
- the center position M of the magnetic field that is the center in the thickness direction of the permanent magnet 2 and the center position C of the magnetic field that is generated when the coil 5 is energized do not coincide with each other in the amplitude direction. Therefore, it is necessary to place them so that they are offset toward the end of one coil 5.
- the NS magnetic force generated from the permanent magnet 2 When the NS magnetic poles at both ends of the coil 5 wound in a cylindrical shape have a positional relationship as shown in FIG. 6, for example, the magnetic field of the permanent magnet 2 In the initial non-energized state where the center position M and the magnetic field center position C of the coil 5 coincide.
- the magnetic balance is always maintained, and the mover 9 does not operate.
- the magnetic field center position C of the permanent magnet 2 of the mover 9 that translates in the axial direction is lowered by structurally lowering the height of the magnetic field center position C of the coil 5.
- the magnetic attractive force and repulsive force due to NS magnetic flux generation at both ends of the coil 5 act on the magnetic field on the permanent magnet 2 side of the mover 9 and move in the axial direction.
- a linear force is applied, and the elastic body 4 in the unloaded state is used as a reference plane, and starts downward in the direction of the arrow in the figure. Generate power.
- Symbol S3 indicates the depth dimension of the annular weight body 6 that is recessed into the concave shape on the upper surface side, and the arm portion 4a of the elastic body 4 when this bending elastically deforms due to the vertical movement of the mover 9. It is structured to avoid contact and buffering.
- the weight body 6 employs a tungsten sintered alloy having a specific gravity of 18 and a high specific gravity made of a nonmagnetic material.
- the weight 6 to be added to the permanent magnet 2 of the mover 9 is a weight of a non-magnetic material whose main component is a high specific gravity gold with a specific gravity of 10 or more, such as tungsten or tantalum, which is preferred for a material having a large specific gravity. It is an important element that leads to an increase in vibration power.
- a weight increase is realized compared to a general non-magnetic material having a specific gravity of 8 or more and less than 10 such as brass or copper.
- a terminal board 14 for supplying current to the coil 5 is provided, and the bottom side of the terminal board 14 is This is a planar terminal structure compatible with solder reflow.
- the shape of the flat terminals 14A and 14B corresponding to solder reflow of the terminal substrate 14 is such that the positive electrode (or negative electrode) located at the center of the concentric section and the negative electrode (or positive electrode) of the annular band located on the outer periphery ) Area and A flat terminal portion is formed.
- the terminal board 14 attached to the bottom of the louvering body 7 includes a flat terminal 14A located at the center of the concentric section and an annular band located on the outer periphery thereof. With the flat terminal 14B, two regions are fixed by solder reflow. Incidentally, the planar terminals 14A and 14B of the terminal board 14 are provided through the through hole H so that the wiring patterns on the front and back sides can be conducted, and the end portions of the wire 5 of the coil 5 are shown in FIG. 7 (B). When connected to one of the auxiliary wiring terminal surfaces 14A and 14B, wiring is made simultaneously to the planar terminals 14A and 14B on the back surface thereof.
- terminal board 13 shown in FIG. 8 Another example of the terminal board having a slightly different shape is the terminal board 13 shown in FIG.
- the shape of the terminal board 14 is completely circular, whereas the terminal board 13 shown in FIG. 8 is a positive electrode (or negative electrode) planar terminal 13A located at the center and a negative electrode located in one direction on the outer periphery thereof.
- the flat terminals 13A and 13B are composed of the (or positive) flat terminal 13B region, and in this case, just place the mounting direction of the flat terminal 13B on the outer peripheral side in line with the power supply land pattern on the circuit board! ,.
- the vibration linear actuator 1 is directly solder-fixed to the power feeding land surface on the plate surface of the circuit board 50 to be installed in the equipment housing 100 shown in FIG.
- heat treatment by solder reflow can be performed at the same time. This eliminates the problem of the installation space on the equipment casing 100 side, eliminates the need for a holding accessory for installation, and makes it possible to incorporate it in an automated line during the manufacturing process.
- the vibration linear actuator 1 includes a permanent magnet 2, a weight body 6, and an elastic body 4 on the movable element 9 side.
- the stator side is coil 5, It comprises a roll piece 3, a housing body 7, a base plate 10, a main shaft 12, and a terminal board 14.
- Figure 5 shows an enlarged view of the movement of the mover 9 due to the internal structure and magnetic flux generation.
- the permanent magnet 2 is assumed to be magnetized in an axial direction in which the upper part is an N pole and the lower part is an S pole.
- FIGS. 1 and 5 both show the initial state of no load before the coil 5 is elastically deformed when the coil 5 is not energized.
- the positional relationship with the magnetic pole of the permanent magnet 2 in the initial state is as follows.
- the N pole on the permanent magnet side is magnetically attracted, and below, the N pole on the coil 5 side and the S pole on the permanent magnet side are magnetically attracted.
- the entire mover 9 is activated downward in the figure.
- the moving width of the mover 9 is supported by the balance between the magnetic attraction force and the elastic deformation holding force of the elastic body 4, and in terms of operation, as shown in FIG.
- the mover 9 moves down to the position closest to the surface.
- the frequency of the current flowing in the coil 5 is determined by the natural frequency (resonance frequency) determined by the total weight of the mover 9 including the permanent magnet 2 and the weight body 6 and the panel constant of the elastic body 4. ),
- the vibration linear actuator of the present embodiment 1 can obtain the maximum acceleration, that is, the vibration amount as a vibration device.
- an alternating current having a frequency characteristic such as a sine wave or a rectangular wave flows through the coil 5, and the total weight of the mover 9 including the permanent magnet 2 and the weight body 6 and the elastic body 4
- the maximum vibration force can be obtained in terms of the correlation between the wall constant and the resonance frequency determined by the overall natural frequency after the vibration linear actuator 1 is assembled.
- the total weight of the device itself is 100 g or less, and in general, the vibration force with a resonance frequency of around 140 Hz is felt most sensibly.
- the entire movable element 9 with the weight repeats a linear reciprocating motion by a series of magnetic action 'reactions', so that the inside of the limited housing composed of the housing body 7 and the base plate 10 In the space, the center of gravity of the mover 9 moves up and down while obtaining the maximum acceleration, and the moment of the force is transmitted to the mover 9 side force, the main shaft 12 that supports it, and from the main shaft 12 to the entire housing, Finally, the vibration linear actuator 1 vibrates strongly.
- the weight body 6 made of high-specific-polymerization gold is used as a part of the mover 9, and the mover 9 can move within the housing body 7.
- the area can be expanded, and even in a limited space, the maximum possible stroke of the mover 9 can be secured, and the user can clearly recognize it even though the entire device is small. Sufficient vibration force can be obtained.
- the elastic body 4 is sandwiched between the main shaft 12 at the tip of the pole piece 3 serving as the central axis and the bottom surface inner diameter hole 8 of the recess 7a formed in the annular surface of the housing body 7. Since the mover 9 is supported, the volume of the space in which the mover 9 can move in the space inside the housing 7 can be increased, and the amplitude of the mover 9 can be reduced while downsizing the device body. The maximum vibration force can be obtained.
- the coil 5 is energized, the coil 5 is energized promptly and surely to start and stand up, and always obtain a good vibration force without variation. Can do.
- the housing body 7 and the base By limiting the amount of air moving back and forth between the two upper and lower sealed spaces sandwiching the mover 9 relative to the mover 9 moving in the space sealed by the plate 10, the curve F in FIG. As shown in the resonance frequency characteristics, a gentle frequency band can be realized by expanding the frequency band. As a result, even if the value of the resonance frequency is slightly changed, the predetermined vibration can be stably obtained without a sudden decrease in the obtained vibration force.
- the structure is simple, the durability is excellent, the magnetic drive parts can be arranged efficiently, and the number of parts is further reduced to the minimum necessary. As a result, the number of man-hours in the assembly manufacturing process, the manufacturing cost, and the labor of parts management can be greatly reduced.
- FIG. 1 is a cross-sectional view showing the outline of the internal structure of a vibration linear actuator according to the present invention.
- FIG. 2 is a perspective exploded view showing an outline of an internal structure and component configuration of a vibration linear actuator according to the present invention.
- FIG. 3 is a cross-sectional view schematically showing the movement of the mover in the internal structure of the vibration linear actuator according to the present invention.
- FIG. 4 is a cross-sectional view schematically showing the movement of the mover in the internal structure of the vibration linear actuator according to the present invention.
- FIG. 5 is an enlarged cross-sectional view showing an outline of the positional relationship between the mover and the coil and the movement of the mover in the internal structure of the vibration linear actuator according to the present invention.
- FIG. 6 is an enlarged sectional view showing an outline as a bad example in the positional relationship between the mover and the coil in the internal structure of the vibration linear actuator according to the present invention.
- FIG. 7 is a schematic diagram (A) showing a planar terminal shape of the terminal board viewed from the bottom force of the vibration linear actuator according to the present invention, and a schematic diagram (B) on the spare wiring terminal side of the terminal board.
- FIG. 8 is a schematic diagram showing a planar terminal shape on the terminal board as seen from the bottom force of the vibration linear actuator according to the present invention.
- FIG. 9 shows a vibration linear actuator according to the present invention on a circuit board inside a portable device casing. Image diagram when installed.
- FIG. 10 is a diagram schematically showing acceleration with respect to an input frequency in the vicinity of a resonance frequency band of 140 Hz for the vibration linear actuator according to the present invention.
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Reciprocating, Oscillating Or Vibrating Motors (AREA)
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
- Connection Of Motors, Electrical Generators, Mechanical Devices, And The Like (AREA)
Abstract
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Applications Claiming Priority (2)
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JP2004191100A JP2006007161A (ja) | 2004-06-29 | 2004-06-29 | 振動リニアアクチュエータ |
JP2004-191100 | 2004-06-29 |
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WO2006001436A1 true WO2006001436A1 (ja) | 2006-01-05 |
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US10573139B2 (en) | 2015-09-16 | 2020-02-25 | Taction Technology, Inc. | Tactile transducer with digital signal processing for improved fidelity |
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CN113954591A (zh) * | 2021-09-23 | 2022-01-21 | 北京航空航天大学 | 一种电磁驱动的微型水陆两栖机器人 |
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