WO2005096337A1 - Procede pour nettoyer une piece au plasma et dispositif approprie pour la mise en oeuvre dudit procede - Google Patents

Procede pour nettoyer une piece au plasma et dispositif approprie pour la mise en oeuvre dudit procede Download PDF

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Publication number
WO2005096337A1
WO2005096337A1 PCT/DE2005/000543 DE2005000543W WO2005096337A1 WO 2005096337 A1 WO2005096337 A1 WO 2005096337A1 DE 2005000543 W DE2005000543 W DE 2005000543W WO 2005096337 A1 WO2005096337 A1 WO 2005096337A1
Authority
WO
WIPO (PCT)
Prior art keywords
hollow body
working gas
cleaning
plasma
workpiece
Prior art date
Application number
PCT/DE2005/000543
Other languages
German (de)
English (en)
Inventor
Axel Arndt
Ursus KRÜGER
Uwe Pyritz
Original Assignee
Siemens Aktiengesellschaft
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Aktiengesellschaft filed Critical Siemens Aktiengesellschaft
Publication of WO2005096337A1 publication Critical patent/WO2005096337A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38—Exhausting, degassing, filling, or cleaning vessels
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B08—CLEANING
    • B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
    • B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
    • B08B7/0035—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by radiant energy, e.g. UV, laser, light beam or the like
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32798—Further details of plasma apparatus not provided for in groups H01J37/3244 - H01J37/32788; special provisions for cleaning or maintenance of the apparatus
    • H01J37/32816—Pressure
    • H01J37/32834—Exhausting
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/32—Processing objects by plasma generation
    • H01J2237/33—Processing objects by plasma generation characterised by the type of processing
    • H01J2237/335—Cleaning

Definitions

  • the invention relates to a method for plasma cleaning of a workpiece, in which the workpiece is placed in a cleaning chamber, the cleaning chamber is filled with a working gas while setting a predetermined pressure and a plasma cleaning the workpiece is ignited in the working gas, the workpiece being a hollow body and the working gas is passed through the hollow body with the formation of the predetermined pressure.
  • a method for plasma cleaning is for example in the
  • a workpiece can then be placed in a cleaning chamber, which is evacuated after being closed and then filled with hydrogen as the working gas while maintaining a predetermined pressure.
  • a plasma is then ignited in the hydrogen by adjusting the ion energy so that the ions are suitable for cleaning residues from the workpiece surface.
  • a further method in which a tubular lamp body is connected to two connecting lines with the input and output in order to generate a cleaning plasma inside.
  • a plasma gas is fed in via a storage container via the one connecting line, the pressure prevailing in the lamp body being controlled by means of a pump connected to the other connecting line.
  • the lamp body is immersed in a reaction gas that is free of reaction gas. chamber in which a cleaning plasma can be ignited by microwaves in the reaction gas contained in the lamp body.
  • a method for treating an annular hollow body in which this hollow body is placed in a suitable receptacle in a reaction chamber.
  • the receptacle is adapted to the component to be treated in such a way that in the area of the receptacle both
  • a vacuum pump is connected to the suction, with the help of which the pressure in the treatment tank is kept at the level required for plasma cleaning.
  • the object of the invention is to provide a method for plasma cleaning workpieces, which is also suitable for workpieces with cavities and can be carried out with comparatively little effort.
  • This object is achieved in that a back pressure is built up in the hollow body with the working gas introduced into it. This is achieved in that a sufficiently high flow resistance is opposed to the working gas when it flows out of the hollow body before it escapes from the hollow body into the cleaning chamber. If the flow resistance resulting from the geometry of the hollow body is not sufficient, the formation of a dynamic pressure in the hollow body can be particularly advantageously increased by introducing a throttle element into the flow path of the working gas.
  • the dynamic pressure leads to the fact that a pressure drop forms between the cavity of the hollow body and its surroundings in the cleaning chamber, which pressure gradient can advantageously be used so that the pressure conditions of the working gas are only suitable for igniting a plasma in the cavity.
  • the hollow body can be selectively cleaned in the interior with a minimal expenditure of energy, while the formation of a plasma in the working gas is prevented in the vicinity of the hollow body.
  • a method is thus specified with which the surfaces in the cavity of a hollow body can also be selectively cleaned.
  • the constant purging of the hollow body with working gas advantageously ensures that the residues detaching from the walls are flushed out of the hollow body with the working gas.
  • the hollow body has an inlet and an outlet and the working gas is conducted from the inlet to the outlet. If the hollow body has an inlet and an outlet, the working gas can advantageously be passed through the hollow body via a defined flow path.
  • a single opening in the hollow body is also sufficient for the passage of working gas guarantee. This could then be introduced, for example, by means of a tube protruding into the interior of the hollow body and discharged again through the single opening.
  • the hollow body is a lamp bulb for a gas discharge lamp.
  • the problem must be solved that water accumulated inside the lamp bulb must be removed completely, since this would significantly shorten the service life when the gas discharge lamp was in operation.
  • plasma cleaning the lamp bulb the water molecules in the plasma are broken down and transported out of the lamp bulb with the working gas.
  • time-consuming drying processes can advantageously be omitted, in which an inert gas with high temperatures of typically 300 to 400 ° C. is passed through the lamp bulb.
  • the method according to the invention is therefore more economical because of the shorter treatment time of the lamp bulbs and the lower energy consumption.
  • the cleaning process is monitored with an emission spectroscope.
  • the invention further relates to a plasma cleaning device with a cleaning chamber in which a receptacle for a workpiece to be cleaned is provided.
  • the plasma cleaning device also has a feed and a suction for working gas, the receptacle being equipped with the feed for a working gas, such that a workpiece designed as a hollow body and placed in the receptacle is flowed through via the feed with the working gas.
  • a plasma cleaning device is generally described in the aforementioned US 2003/0047191 AI. This has a cleaning chamber in which a plate-shaped receptacle is provided for the workpiece to be cleaned.
  • the cleaning chamber is surrounded by an induction coil, which can generate a high-frequency electric field for igniting a plasma in the working gas in the cleaning chamber.
  • a plasma cleaning device with a reaction chamber into which a hollow body can be inserted into a suitable receptacle for cleaning. Both a feed for the reaction gas and a suction device are provided within this receptacle, the pressure conditions required for the formation of a plasma in the hollow body being regulated by the suction power of a vacuum pump at the suction device.
  • the object of the invention is to provide a comparatively simple plasma cleaning device with which workpieces with cavities can be cleaned.
  • the receptacle can be accommodated on an interchangeable workpiece carrier with a connection for the working gas leading to the supply.
  • Different workpiece carriers can thus advantageously be used as an adapter for workpieces of different geometries, the workpiece carriers being used in a correspondingly designed interface in the cleaning chamber.
  • the connection for the working gas is automatically connected to an inlet opening in the cleaning chamber. It is particularly advantageous to accommodate a plurality of receptacles with associated feeders on the workpiece carrier, so that in each case a plurality of hollow bodies can be cleaned at the same time. This advantageously further increases the economy of the plasma cleaning process.
  • the single figure shows an exemplary embodiment of the plasma cleaning device according to the invention for carrying out the method for plasma cleaning according to the invention in a schematic section.
  • a plasma cleaning device has a cleaning chamber 11, in which a workpiece carrier 12 with receptacles 13 for hollow bodies 14 is inserted.
  • the hollow bodies 14 are glass lamp bulbs, such as those used in gas discharge lamps for motor vehicle headlights. These hollow bodies are placed in the receptacles 13 in such a way that their end forming an entrance 15 is located above a feed 16 for a working gas, for example argon.
  • the feeds 16 of the workpiece carrier 12 are guided via a channel system 17 to a connection 18, via which the central introduction of the working gas can take place.
  • the respective other end of the hollow body 14 opens into the interior of the cleaning chamber 11 and thus forms an outlet 19 for the working gas.
  • These outputs 19 of the hollow bodies can be provided with a throttle element 20 to support the formation of a dynamic pressure in the hollow bodies 14, which can have the shape of a pierced plug, for example.
  • the workpiece carrier 12 with the hollow bodies 14 is placed in the cleaning chamber 11 in the manner described, such that the connection 18 is connected to a storage container 21 for the argon working gas.
  • the cleaning chamber 11 is then closed (not shown) and evacuated by opening a valve 22a with a vacuum pump 23.
  • the working gas can be introduced into the cleaning chamber 11 in a controlled manner through the hollow body 14 via the channel system.
  • a predetermined pressure of the working gas (10 ⁇ 3 mbar to 10 mbar) is set in the hollow bodies, which enables the ignition of a plasma in the hollow bodies.
  • a high-frequency electric field with a frequency of, for example, 13 to 14 MHz is generated by means of a high-frequency generator 24 and a grounded induction coil 25 that runs around the cleaning chamber 11.
  • a high-frequency generator 24 and a grounded induction coil 25 that runs around the cleaning chamber 11.
  • the contaminated working gas can be continuously sucked off by means of the vacuum pump 23, so that the pressure in the cleaning chamber outside the hollow body is not sufficient to ignite a plasma.
  • a water film (not shown) is removed from the inner walls of the hollow bodies 14.
  • the working gas contaminated with water components oxygen and / or hydrogen radicals
  • the cleaning process is terminated and the cleaned hollow bodies 14 are sent for further processing.
  • the hollow bodies 14 designed as lamp bodies could be transferred via a lock to a downstream PVD coating device, where further coatings which influence the function would be applied to the lamp body (not shown).

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Manufacturing & Machinery (AREA)
  • Cleaning In General (AREA)

Abstract

L'invention concerne un procédé pour nettoyer un corps creux au plasma et un dispositif pour mettre en oeuvre ce procédé. Selon l'invention, des logements (13) pour le corps creux à nettoyer (14), par exemple un corps de lampe pour des lampes à décharge gazeuse, sont ménagés dans une chambre de nettoyage (11) du dispositif, le corps creux étant pourvu d'un élément d'alimentation (16) pour un gaz de travail (21). Ce dernier peut ainsi être acheminé directement à la cavité à nettoyer du corps creux (14) pendant le nettoyage. Un plasma utilisé pour réaliser le nettoyage est allumé dans le gaz de travail se trouvant dans cette cavité au moyen d'une bobine d'induction (25). Il est ainsi possible de produire, de manière avantageuse, un plasma localisé uniquement dans la zone intérieure du corps creux (14). Le gaz de travail acheminé permet simultanément une évacuation fiable des résidus produits lors du nettoyage.
PCT/DE2005/000543 2004-03-24 2005-03-23 Procede pour nettoyer une piece au plasma et dispositif approprie pour la mise en oeuvre dudit procede WO2005096337A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE200410015226 DE102004015226B3 (de) 2004-03-24 2004-03-24 Verfahren zum Plasmareinigen eines Werkstücks und zu dessen Durchführung geeignete Vorrichtung
DE102004015226.8 2004-03-24

Publications (1)

Publication Number Publication Date
WO2005096337A1 true WO2005096337A1 (fr) 2005-10-13

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Country Status (2)

Country Link
DE (1) DE102004015226B3 (fr)
WO (1) WO2005096337A1 (fr)

Cited By (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9776960B2 (en) 2013-03-15 2017-10-03 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US9981939B2 (en) 2013-03-15 2018-05-29 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US10017491B2 (en) 2013-03-15 2018-07-10 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US10034879B2 (en) 2011-12-28 2018-07-31 Global Blood Therapeutics, Inc. Substituted benzaldehyde compounds and methods for their use in increasing tissue oxygenation
US10077249B2 (en) 2016-05-12 2018-09-18 Global Blood Therapeutics, Inc. Process for synthesizing 2-hydroxy-6-((2-(1-isopropyl-1H-pyrazol-5-yl)-pyridin-3-yl)methoxy)benzaldehyde
US10100043B2 (en) 2013-03-15 2018-10-16 Global Blood Therapeutics, Inc. Substituted aldehyde compounds and methods for their use in increasing tissue oxygenation
US10100040B2 (en) 2013-03-15 2018-10-16 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US10137118B2 (en) 2014-02-07 2018-11-27 Global Blood Therapeutics, Inc. Crystalline polymorphs of the free base of 2-hydroxy-6-((2-(1-isopropyl-1H-pyrazol-5-yl)pyridin-3-yl)methoxy)benzaldehyde
US10266551B2 (en) 2013-03-15 2019-04-23 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US10377741B2 (en) 2011-12-28 2019-08-13 Global Blood Therapeutics, Inc. Substituted heteroaryl aldehyde compounds and methods for their use in increasing tissue oxygenation
US10450269B1 (en) 2013-11-18 2019-10-22 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US10493035B2 (en) 2016-10-12 2019-12-03 Global Blood Therapeutics, Inc. Tablets comprising 2-hydroxy-6-((2-(1-isopropyl-1H-pyrazol-5-yl)pyridin-3-yl)methoxy)benzaldehyde
US11014884B2 (en) 2018-10-01 2021-05-25 Global Blood Therapeutics, Inc. Modulators of hemoglobin
US11020382B2 (en) 2015-12-04 2021-06-01 Global Blood Therapeutics, Inc. Dosing regimens for 2-hydroxy-6-((2-(1-isopropyl-1h-pyrazol-5-yl)pyridin-3-yl)methoxy)benzaldehyde
US11053195B2 (en) 2013-03-15 2021-07-06 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US11236109B2 (en) 2013-03-15 2022-02-01 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin

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JPH03108234A (ja) * 1989-09-20 1991-05-08 Toshiba Lighting & Technol Corp 管球の製造方法
US5871658A (en) * 1997-01-13 1999-02-16 Taiwan Semiconductor Manufacturing Company, Ltd. Optical emisson spectroscopy (OES) method for monitoring and controlling plasma etch process when forming patterned layers
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US6046796A (en) * 1998-04-22 2000-04-04 Advanced Micro Devices, Inc. Methodology for improved semiconductor process monitoring using optical emission spectroscopy
US6162405A (en) * 1998-02-24 2000-12-19 Ruediger Haaga Gmbh Arrangement for sterilizing a container with low-pressure plasma
EP1253616A2 (fr) * 2001-04-24 2002-10-30 Osram-Sylvania Inc. Ampoule de lampe à haute pression et procédé de scellage par induction

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DE69706573T2 (de) * 1996-02-15 2002-07-11 Bridgestone Corp Verfahren zum Reinigen einer Vulkanisationsform
US6758793B2 (en) * 2000-11-27 2004-07-06 Scott Eldridge Sports and recreation apparatus

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US5871658A (en) * 1997-01-13 1999-02-16 Taiwan Semiconductor Manufacturing Company, Ltd. Optical emisson spectroscopy (OES) method for monitoring and controlling plasma etch process when forming patterned layers
US6162405A (en) * 1998-02-24 2000-12-19 Ruediger Haaga Gmbh Arrangement for sterilizing a container with low-pressure plasma
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EP1253616A2 (fr) * 2001-04-24 2002-10-30 Osram-Sylvania Inc. Ampoule de lampe à haute pression et procédé de scellage par induction

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Cited By (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10377741B2 (en) 2011-12-28 2019-08-13 Global Blood Therapeutics, Inc. Substituted heteroaryl aldehyde compounds and methods for their use in increasing tissue oxygenation
US10822326B2 (en) 2011-12-28 2020-11-03 Global Blood Therapeutics, Inc. Substituted heteroaryl aldehyde compounds and methods for their use in increasing tissue oxygenation
US10806733B2 (en) 2011-12-28 2020-10-20 Global Blood Therapeutics, Inc. Substituted benzaldehyde compounds and methods for their use in increasing tissue oxygenation
US10034879B2 (en) 2011-12-28 2018-07-31 Global Blood Therapeutics, Inc. Substituted benzaldehyde compounds and methods for their use in increasing tissue oxygenation
US10829470B2 (en) 2013-03-15 2020-11-10 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US9981939B2 (en) 2013-03-15 2018-05-29 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US10100040B2 (en) 2013-03-15 2018-10-16 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US11053195B2 (en) 2013-03-15 2021-07-06 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US10266551B2 (en) 2013-03-15 2019-04-23 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US10315991B2 (en) 2013-03-15 2019-06-11 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US10100043B2 (en) 2013-03-15 2018-10-16 Global Blood Therapeutics, Inc. Substituted aldehyde compounds and methods for their use in increasing tissue oxygenation
US10435393B2 (en) 2013-03-15 2019-10-08 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US10858317B2 (en) 2013-03-15 2020-12-08 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US9776960B2 (en) 2013-03-15 2017-10-03 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US11530191B2 (en) 2013-03-15 2022-12-20 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US11236109B2 (en) 2013-03-15 2022-02-01 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US10017491B2 (en) 2013-03-15 2018-07-10 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US10450269B1 (en) 2013-11-18 2019-10-22 Global Blood Therapeutics, Inc. Compounds and uses thereof for the modulation of hemoglobin
US10722502B2 (en) 2014-02-07 2020-07-28 Global Blood Therapeutics, Inc. Crystalline polymorphs of the free base of 2-hydroxy-6-((2-(1-isopropyl-1H-pyrazol-5-yl)pyridin-3-yl)methoxy)benzaldehyde
US11452720B2 (en) 2014-02-07 2022-09-27 Global Blood Therapeutics, Inc. Crystalline polymorphs of the free base of 2-hydroxy-6-((2-(1-isopropyl-1H-pyrazol-5-yl)pyridin-3-yl)methoxy)benzaldehyde
US10137118B2 (en) 2014-02-07 2018-11-27 Global Blood Therapeutics, Inc. Crystalline polymorphs of the free base of 2-hydroxy-6-((2-(1-isopropyl-1H-pyrazol-5-yl)pyridin-3-yl)methoxy)benzaldehyde
US11944612B2 (en) 2015-12-04 2024-04-02 Global Blood Therapeutics, Inc. Dosing regimens for 2-hydroxy-6-((2-(1-isopropyl-1H-pyrazol-5-yl)pyridin-3-yl)methoxy)benzaldehyde
US11020382B2 (en) 2015-12-04 2021-06-01 Global Blood Therapeutics, Inc. Dosing regimens for 2-hydroxy-6-((2-(1-isopropyl-1h-pyrazol-5-yl)pyridin-3-yl)methoxy)benzaldehyde
US10077249B2 (en) 2016-05-12 2018-09-18 Global Blood Therapeutics, Inc. Process for synthesizing 2-hydroxy-6-((2-(1-isopropyl-1H-pyrazol-5-yl)-pyridin-3-yl)methoxy)benzaldehyde
US10577345B2 (en) 2016-05-12 2020-03-03 Global Blood Therapeutics, Inc. Process for synthesizing 2-hydroxy-6-((2-(1-isopropyl-1H-pyrazol-5-yl)-pyridin-3-yl)methoxy)benzaldehyde
US10493035B2 (en) 2016-10-12 2019-12-03 Global Blood Therapeutics, Inc. Tablets comprising 2-hydroxy-6-((2-(1-isopropyl-1H-pyrazol-5-yl)pyridin-3-yl)methoxy)benzaldehyde
US11014884B2 (en) 2018-10-01 2021-05-25 Global Blood Therapeutics, Inc. Modulators of hemoglobin

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