WO2005093441A1

WO2005093441A1 - Line defect testing-repairing device and method

Info

Publication number: WO2005093441A1
Application number: PCT/CN2004/000262
Authority: WO
Inventors: Guoting Liao; Guokui Li; Junjie Zhu
Original assignee: Quanta Display Inc.
Priority date: 2004-03-26
Filing date: 2004-03-26
Publication date: 2005-10-06

Abstract

The invention relates to a process equipment for LCD, which especially have line defect testing and corresponding laser repairing functions for glass baseplate. The process equipment includes a table base; a baseplate supporter for placing and supporting glass baseplate; a probe-testing module having contacting probes and contacting probes actuating system; an uncontact testing module having uncontact sensors and uncontact testing actuating system; and a laser repairing module, which have laser repairing head and laser repairing actuating system and repair line defect on the glass baseplate by means of laser. The invention also relates to a method for testing and repairing line defect on glass baseplate.

Description

线路缺陷检测维修设备及方法 Line defect detection and maintenance equipment and method

【技术领域】 [Technical Field]

本发明涉及一种液晶显示器的制程设备，特别是该设备同时具备玻璃基板线路缺陷检测及以激光修补该线路缺陷的功能以提高产能，降低不良率及节省无尘室空间。 The invention relates to a process equipment for a liquid crystal display, and in particular, the equipment has the functions of glass substrate circuit defect detection and laser repairing of the circuit defect to improve the productivity, reduce the defect rate and save the clean room space.

【背景技术】【Background technique】

请参考图 1及图 2，液晶显示面板于矩阵制程 (Array process)后，于玻璃基板 10上会形成如矩阵状的金属线路，包括资料线 (即源极线) 11 及扫瞄线 12等，线与线之间常因制程的不良而发生短路缺陷 (Short defect) 30, 或开路缺陷 (Open defect)20等线路缺陷，检测此种线路不良缺陷的制程工站一般习称开路 /短路检测机 (Open/Short Inspection machine), 其检测方式通常可区分为非接触式检测及接触式检测，非接触式检测通常包括两个非接触式感测器 13、 14, 其形式可为静电电容耦合式 (Electrostatic Capacitory Coupling style), 其中一感测器为讯号输出端，另一感测器为讯号接收端，运作时感测器贴近玻璃基板距离约 100 微米;以玻璃基板源极线 (Source line)的线路缺陷检査为例，两感测器同步移动可先检查出线路缺陷点所在的线路缺陷线位置 (line position), 之后讯号输出端的感测器停留于线路缺陷线位置不动，讯号接收端感测器沿着此具有线路缺陷点的线路往讯号输出端感测器移动，即可侦测出线路开路缺陷点 20的位置 (如图 1所示);或于侦测出线路缺陷线位置 (line position) j5, 使用一对接触探针 50与玻璃基板上的金属线路接触垫 40接触，另外再配合非接触式感测器 13即可检测出线路短路缺陷点 30的位置 (如图 2所示)。 Please refer to FIG. 1 and FIG. 2. After the liquid crystal display panel is subjected to an Array process, metal lines such as data lines (ie, source lines) 11 and scan lines 12 are formed on the glass substrate 10 as a matrix. Short circuit defects (Short defect) 30, or Open defect 20, often occur between lines due to poor manufacturing processes. Process stations that detect such line defects are commonly referred to as open / short detection. (Open / Short Inspection machine), the detection methods can usually be divided into non-contact detection and contact detection, non-contact detection usually includes two non-contact sensors 13, 14, which can be in the form of electrostatic capacitance coupling Electrostatic Capacitory Coupling style, where one sensor is a signal output terminal and the other sensor is a signal receiving terminal. The sensor is close to the glass substrate at a distance of about 100 microns during operation; the source line of the glass substrate is used. As an example, the line defect inspection of the two sensors can be synchronized to check the line position of the line defect point, and then detect the signal output end. Stay at the position of the line defect line, the signal receiving end sensor moves along the line with the line defect point toward the signal output end sensor, and the position of the open circuit defect point 20 can be detected (as shown in Figure 1). (Shown); or when a line defect line position j5 is detected, use a pair of contact probes 50 to contact the metal line contact pads 40 on the glass substrate, and then cooperate with the non-contact sensor 13 to detect The position of the short circuit defect point 30 (as shown in FIG. 2).

在现有的制程顺序中，开路 /短路检测机所测得的不良品需交由另一激光修补机来修补金属线与线之间短路不良，以提高整体制程良率；而先前经检测机工站检测的资料，如线路缺陷的位置座标、线路缺陷的影像等系先储存于检测机的一记忆单元，随后将此资料通过网路或磁片传送至激光修补机，至于待修的玻璃基板不良品则需另外利用机械手臂将玻璃基板取出后放置至运输车，运输车运送至激光修补机后再由另一机械手臂将玻璃基板取出放置到激光修补机，玻璃基板于激光修补机重新进行夹持对位并配合检测机传送过来的资料进行线路缺陷修补。 In the existing process sequence, the defective product measured by the open / short circuit detector needs to be submitted to another laser repairing machine to repair the short circuit between the metal wire and the wire to improve the overall process yield. The data previously detected by the testing machine station, such as the position coordinates of the line defect, and the image of the line defect, are stored in a memory unit of the testing machine, and then this data is transmitted to the laser repairing machine through the network or magnetic disk. As for the defective glass substrate to be repaired, it is necessary to use a robotic arm to remove the glass substrate and place it on a transportation vehicle. After the transportation vehicle is transported to the laser repairing machine, the glass substrate is taken out and placed on the laser repairing machine by another robotic arm. The substrate is clamped and aligned again in the laser repairing machine, and the line defect is repaired with the data transmitted by the inspection machine.

这样的现有制程下，线路缺陷检测及激光修补二种动作分属不同的机台，基板的载入载出需靠机械手臂及搬运车，如此不仅费时，而且产品制程动线拉长，徒增产生不良品的风险，并占用宝贵无尘室空间，此外玻璃基板需于两机台分别重新定位夹持，不仅造成作业工时延长，两次定位的座标系亦不同，造成整体精度下降，不利于线宽曰益縮小的趋势，及线路缺陷检测与激光修补全程自动化的目标。 Under such an existing process, the two actions of line defect detection and laser repair belong to different machines. The loading and unloading of substrates requires a robot arm and a truck. This is not only time consuming, but also the product process line is elongated. It increases the risk of defective products and occupies valuable clean room space. In addition, the glass substrate needs to be repositioned and clamped separately on the two machines, which not only results in prolonged working hours, but also has different coordinate systems for the two positioning, which reduces the overall accuracy. It is not conducive to the trend of shrinking line width and the goal of full automation of line defect detection and laser repair.

另一方面，请参考图 3， US Pat.5164565公开一种激光修补机台，其运作方式为基板 10放置并夹持于于 X-Y传动平台 60，修补线路缺陷时 X-Y运动平台 60带动基板 10移动，而激光修补头 70不动，缺陷检测机亦常见这样的设计，然而随着基板面积增大，对于此两种设备而言，这样的设计方式将占据太多空间，造成设备成本的增加及机台整体精度的下降而渐不可行，比较可行的方式是采取基板不动而激光修补头 70移动，同样的，对于线路缺陷检测机的传动设计方式，比较可行的方式亦是玻璃基板不动而接触探针 50及非接触式感测器 13、 14 移动。 On the other hand, referring to FIG. 3, US Pat. 5164565 discloses a laser repairing machine. The operation mode is that the substrate 10 is placed and clamped on the XY transmission platform 60. The XY movement platform 60 drives the substrate 10 to move when repairing a line defect. While the laser repair head 70 does not move, this design is also common for defect inspection machines. However, as the area of the substrate increases, for these two types of equipment, this design method will occupy too much space, causing an increase in equipment costs and The overall accuracy of the machine has declined and it is becoming infeasible. The more feasible way is to use a fixed substrate and the laser repair head 70 to move. Similarly, for the transmission design of the line defect detection machine, the more feasible way is to use a glass substrate. The contact probe 50 and the non-contact sensors 13 and 14 move.

因此在这样的相同的设计趋势下，两种机台之间存在许多相同的定位及传动构件，所不同之处，仅是另外配置的是线路缺陷检测模组或激光修补模组的不同而己，因此将两种功能的机台设计为同一机台，是可行的，若分设于两种机台，反而浪费无尘室宝贵空间，及设备购置成本的大幅增加。基于上述现有技术的缺点且为节省制程时间，本发明人对制程设备进行广泛研究，因而完成本发明。 Therefore, under this same design trend, there are many identical positioning and transmission components between the two types of machines. The only difference is that the line defect detection module or the laser repair module is additionally configured. Therefore, it is feasible to design the two functions of the machine as the same machine. If the two machines are separately installed, the valuable space of the clean room is wasted, and the equipment purchase cost increases significantly. Based on the shortcomings of the prior art mentioned above and in order to save process time, the present inventors have conducted extensive research on process equipment and thus completed the present invention.

【发明内容】 [Summary of the Invention]

本发明主要目的是提供一种兼具线路缺陷检测及激光修补功能且所占空间更为精简的单一设备。 The main object of the present invention is to provide a single device that has both line defect detection and laser repair functions and takes up less space.

本发明另一目的是提供一种玻璃基板线路缺陷的检测与修补方法。 Another object of the present invention is to provide a method for detecting and repairing a glass substrate circuit defect.

为了达到上述目的及其他目的，本发明提供一种线路缺陷检测及激光修补设备，该设备包括一机台底座，用以支撑构件；一基板承载台，设置于该机台底座上，用以放置及承载玻璃基板;一接触探针检测模组，具有接触探针，及接触探针传动***，该接触探针传动***系用以带动该接触探针，使该接触探针接触该玻璃基板的线路，以检测线路缺陷;一非接触式检测模组，具有非接触式感测器，及非接触检测传动系统，该非接触检测传动***系用以带动该非接触式感测器，以非接触方式检测该玻璃基板的该线路缺陷，并与该接触探针检测模组共同决定线路缺陷位置;及一激光修补模组，具有激光修补头及激光修补传动 ***，该激光修补传动***系用以带动激光修补头，至该线路缺陷位置，并以激光方式修补该玻璃基板的该线路缺陷。 In order to achieve the above-mentioned object and other objects, the present invention provides a line defect detection and laser repairing device. The device includes a machine base for supporting members, and a substrate bearing platform disposed on the machine base for placing. And a bearing glass substrate; a contact probe detection module having a contact probe and a contact probe drive system, the contact probe drive system is used to drive the contact probe so that the contact probe contacts the glass substrate; Line to detect line defects; a non-contact detection module with a non-contact sensor and a non-contact detection drive system, the non-contact detection drive system is used to drive the non-contact sensor to non-contact Detecting the line defect of the glass substrate by a contact method, and determining the position of the line defect together with the contact probe detection module; and a laser repair module, which has a laser repair head and a laser repair transmission system, and the laser repair transmission system is used for The laser repair head is driven to the position of the line defect, and the line defect of the glass substrate is repaired by laser.

依据上述目的，本发明又提供一种平面显示器玻璃基板的线路缺陷检测及激光修补的方法，包括下列步骤： According to the above objective, the present invention further provides a method for detecting line defects and laser repairing of a glass substrate of a flat display, including the following steps:

放置并夹持待检测的该玻璃基板于基板承载台;移动接触探针以及移动非接触式感测器以检测出线路缺陷，并决定线路缺陷位置;移动激光修补头至该线路缺陷位置，并以激光方式修补该线路缺陷;及将检测及修补完毕的该玻璃基板移出该基板承载台。 Place and hold the glass substrate to be detected on the substrate carrier; move the contact probe and mobile non-contact sensor to detect the line defect and determine the line defect position; move the laser repair head to the line defect position, and Laser repairing the line defect; and removing the glass substrate that has been inspected and repaired from the substrate carrier.

【图式简单说明】图 1为现有技术使用非接触式感测器检测基板线路开路缺陷的示意图。图 2为现有技术使用接触式探针搭配非接触式感测器检测基板线路短路缺陷的示意图。 [Schematic description] FIG. 1 is a schematic diagram of detecting a substrate circuit open circuit defect using a non-contact sensor in the prior art. FIG. 2 is a schematic diagram of detecting a short circuit defect of a substrate circuit using a contact probe and a non-contact sensor in the prior art.

图 3为现有技术的激光修补***。 FIG. 3 is a prior art laser repair system.

图 4为本发明的线路缺陷检测修补设备的立体视图。 FIG. 4 is a perspective view of a line defect detection and repair device of the present invention.

图 5为本发明的接触探针检测模组的立体视图。 FIG. 5 is a perspective view of a contact probe detection module of the present invention.

图 6为本发明的接触探针检测模组的垂直运动传动模组放大立体视图。图 7为本发明的本发明的接触探针检测模组的前后传动模组的侧视图。图 8为本发明的非接触式检测模组的立体视图。 FIG. 6 is an enlarged perspective view of a vertical motion transmission module of the contact probe detection module of the present invention. FIG. 7 is a side view of a front and rear transmission module of the contact probe detection module of the present invention. FIG. 8 is a perspective view of a non-contact detection module of the present invention.

图 9为本发明的非接触式检测模组的立体视图的垂直运动传动模组放大立体视图。 FIG. 9 is an enlarged perspective view of a vertical motion transmission module in a perspective view of a non-contact detection module of the present invention.

图 10为本发明的激光修补模组的立体视图。 FIG. 10 is a perspective view of a laser repair module of the present invention.

图 11为本发明依据步骤一以检测及修补线路缺陷的设备动作立体视图。 FIG. 11 is a perspective view of the operation of a device for detecting and repairing line defects according to the first step of the present invention.

图 12为本发明依据步骤二以检测及修补线路缺陷的设备动作立体视图。 FIG. 12 is a perspective view of the operation of the device for detecting and repairing a line defect according to the second step of the present invention.

图 13为本发明依据步骤三以检测及修补线路缺陷的设备动作立体视图。 FIG. 13 is a perspective view of the operation of a device for detecting and repairing a line defect according to step 3 of the present invention.

图 14为本发明依据步骤四以检测及修补线路缺陷的设备动作立体视图。 FIG. 14 is a perspective view of the operation of a device for detecting and repairing a line defect according to step 4 of the present invention.

【具体实施方式】【detailed description】

本发明的上述目的及其他目的将由下列较佳具体例配合附图详细说明变得更显而易见。 The above and other objects of the present invention will become more apparent from the detailed description of the following preferred embodiments in conjunction with the accompanying drawings.

首先介绍本发明设备的硬体构件，现在请参见图 4，为本发明线路缺陷检测修补设备的立体视图，包含有机台底座 101，基板承载台 200，接触探针检测模组 300，非接触式检测模组 400及激光修补模组 500; 机台底座 101及机台支撑座 102形成整体机台的主要支撑，提供其他构成模组的置放空间，马达支撑座 103用来支撑并架高马达。 First, the hardware components of the device of the present invention will be introduced. Now referring to FIG. 4, it is a perspective view of a line defect detection and repair device of the present invention, including an organic base 101, a substrate carrier 200, a contact probe detection module 300, and a non-contact type. Detection module 400 and laser repair module 500; The machine base 101 and the machine support base 102 form the main support of the whole machine, and provide a space for placing other modules. The motor support base 103 is used to support and elevate the motor.

基板承载台 200，大体为矩型平板状，用来放置及夹持玻璃基板，，其材料通常为透明材质如玻璃或压克力所构成，透明材质可方便于需要时，可于下方另外设置光源模组 (未绘于图示)，可对基板进行背面照光处理，以增加影像对比。 The substrate carrier 200 is generally a rectangular flat plate for placing and holding a glass substrate. Its material is usually made of a transparent material such as glass or acrylic. The transparent material can be conveniently located when needed. The light source module (not shown in the figure) can be used for back-lighting the substrate to increase image contrast.

请参考图 4、图 5及图 6，接触探针检测模组 300，通常具有两组，对称配置，接触探针 305，置于感测测头 305a内，用以接触玻璃基板线路，以确认基板的不良缺陷处，该接触探针 305及感测测头 305a系由垂直运动传动模组 301所带动，而可在垂直上下方向运动，该垂直运动传动模组 301的主要组成元件包含第一底板 301a，线性滑轨组 301b, 伺服旋转马达 301c，滚珠导螺杆 301d，第二底板 301e，透过线性滑块 (未绘于图示)与线性滑轨组 301b相连接，连结板 301f连结第二底板 301e及探针模组感测器 304;于是透过伺服旋转马达 301c的带动可使接触探针 305相对玻璃基板做垂直上下的移动。 Please refer to FIG. 4, FIG. 5, and FIG. 6. The contact probe detection module 300 usually has two groups, symmetrically arranged, and the contact probes 305 are placed in the sensor head 305 a to contact the glass substrate circuit to confirm. For the defective part of the substrate, the contact probe 305 and the sensing head 305a are driven by the vertical movement transmission module 301 and can move vertically. The main constituent elements of the vertical movement transmission module 301 include the first The bottom plate 301a, the linear slide group 301b, the servo rotary motor 301c, the ball lead screw 301d, and the second bottom plate 301e are connected to the linear slide group 301b through a linear slider (not shown), and the connecting plate 301f is connected to the first The second base plate 301e and the probe module sensor 304; therefore, the contact probe 305 can be moved vertically up and down relative to the glass substrate by the drive of the servo rotation motor 301c.

接触探针 305除需相对基板可上下运动外，亦需相对基板可进行水平移动，一水平运动传动模组 302，可用来达成此功能，其主要组成包括支撑横梁 3021 , 线性滑轨组 3022，线性滑块组 3023，及一线性马达定位传动*** 3024，其中线性马达定位传动*** 3024的主要组成包括马达本体 3024a，动子 3024b，及相对应的驱动电路*** (未绘于图示：)，线性马达本体 3024a则又内含线性滑块组 (未绘于图示)、位置感测器 (未绘于图示)及马达定子 (未绘于图示)。一般习称的线性马达主要可分为线性步进马达，及线性伺服马达;线性步进马达虽然推力较小，但可以开路控制方式 (Open-loop control)进行定位控制，结构较简单，线性伺服马达，主要组成元件通常包括成直线状排列由材料为永久磁铁的马达定子，位置感测器如光学尺，滑轨滑块组等支称件，驱动系统及硅钢片内置线圈所组成的动子等元件所组成，动子系与滑轨、滑块等支称件连结，可相对定子滑动，驱动***透过动子内的线圈输入电压、电流等驱动讯号给动子，并使动子与定子的磁场产生作用力，驱动动子前进，并通过位置感测器的回馈讯号，调整驱动电压或电流以形成一闭回路定位控制*** (Close-loop control system：)。 The contact probe 305 needs to move up and down with respect to the substrate. It also needs to move horizontally with respect to the substrate. A horizontal motion transmission module 302 can be used to achieve this function. Its main components include a support beam 3021 and a linear slide group 3022. The linear slider group 3023 and a linear motor positioning transmission system 3024, wherein the main components of the linear motor positioning transmission system 3024 include a motor body 3024a, a mover 3024b, and a corresponding driving circuit system (not shown in the figure :), The linear motor body 3024a includes a linear slider group (not shown in the figure), a position sensor (not shown in the figure), and a motor stator (not shown in the figure). Generally known linear motors can be divided into linear stepping motors and linear servo motors. Although linear stepping motors have small thrust, they can be used for open-loop control for positioning control. The structure is simpler and linear servos The main components of a motor usually include a linearly arranged motor stator made of permanent magnets, position sensors such as optical rulers, slide blocks and other supporting parts, a drive system and a mover composed of built-in coils of silicon steel sheets. Composed of other elements, mover system and slide rail, slide Blocks and other scales are connected, which can slide relative to the stator. The drive system sends drive signals to the mover through the coil input voltage and current in the mover, and causes the mover and the stator's magnetic field to generate a force to drive the mover forward. Through the feedback signal from the position sensor, the driving voltage or current is adjusted to form a closed-loop control system (Close-loop control system :).

综上所述，动子 3024b经由驱动电路***驱动而相对马达本体 3024a移动，又动子 3024b，与垂直运动传动模组 301的第一底板 301a 相连结，故整个垂直运动传动模组 301，可被水平运动传动 302所带动，而使接触探针 305，相对玻璃基板做水平左右的移动。 In summary, the mover 3024b moves relative to the motor body 3024a through the driving circuit system, and the mover 3024b is connected to the first base plate 301a of the vertical motion transmission module 301. Therefore, the entire vertical motion transmission module 301 can be Driven by the horizontal motion transmission 302, the contact probe 305 moves horizontally to the left and right relative to the glass substrate.

接着，请参考图 7，接触探针 305可通过线性马达定位传动*** 303而相对基板前后运动，该线性马达定位传动*** 303，对秤配置基板承载台外侧，对秤中心大致为基板的中心线，其中的主要构件，又包括马达本体 3031，动子 3032及其相对应的驱动电路*** (未绘于图示)，动子 3033及其相对应的驱动电路*** (未绘于图示)；如同前述水平运动传动模组 302的线性马达定位传动*** 3024的马达本体 3024a，马达本体 3031的组成亦包括滑轨滑块组 (未绘制于图示)、位置感测器 (未绘制于图示)及马达定子 (未绘制于图示)，而线性马达定位传动*** 303 与线性马达定位传动*** 3024的不同处在于，线性马达定位传动*** 303于单一马达本体 3031中连结两个动子 3032以及 3033及其分别相对应的驱动电路*** (未绘于图示)，而动子 3032、 3033可分别独立受其驱动电路***驱动，亦即可分别独立相对马达本体 3031运动，即一般业界所称的单轴双载子技术;相较于传统的滚珠导螺杆配合旋转马达形式的线性传动***，运用线性马达定位传动***的单轴双载子技术将大大减少机台所占的面积。 Next, referring to FIG. 7, the contact probe 305 can be moved back and forth relative to the substrate through a linear motor positioning transmission system 303. The linear motor positioning transmission system 303 is configured on the outside of the substrate bearing platform and the center of the scale is approximately the centerline of the substrate. The main components thereof include the motor body 3031, the mover 3032 and its corresponding drive circuit system (not shown in the figure), and the mover 3033 and its corresponding drive circuit system (not shown in the figure); Like the motor body 3024a of the linear motor positioning transmission system 3024 of the horizontal motion transmission module 302, the composition of the motor body 3031 also includes a slide block (not shown in the figure), a position sensor (not shown in the figure) ) And a motor stator (not shown in the figure), and the linear motor positioning transmission system 303 differs from the linear motor positioning transmission system 3024 in that the linear motor positioning transmission system 303 connects two movers 3032 and 3031 in a single motor body 3031 and 3033 and its corresponding driving circuit system (not shown in the figure), and the movers 3032 and 3033 can be driven by them independently. It is driven by the circuit system, that is, it can independently move relative to the motor body 3031, which is the so-called single-axis dual-carrier technology generally known in the industry; compared with the traditional ball screw with a linear motor in the form of a rotary motor, the linear motor is used for positioning and transmission The system's single-axis dual-carrier technology will greatly reduce the area occupied by the machine.

线性马达定位传动*** 303及水平运动传动模组 302，可透过连结支撑座 304加以连结，连结支撑座 304分别连接线性马达定位传动 *** 303的动子 3032、 3033及水平运动传动模组 302的支撑横梁 3021 使线性马达定位传动*** 303能带动整个水平运动传动模组 302前后运动;综上所述，接触探针 305可通过探针垂直运动传动模组 301，水平运动传动模组 302及线性马达定位传动*** 303而相对玻璃基板上下前后左右移动，使接触探针 305能随不同的线路设计状况而能与基板上的线路保持良好接触，提供准确的量测品质。 The linear motor positioning transmission system 303 and the horizontal motion transmission module 302 can be connected through a connection support base 304. The connection support base 304 is connected to the movers 3032, 3033 and the horizontal motion transmission module 302 of the linear motor positioning transmission system 303, respectively. The support beam 3021 enables the linear motor positioning transmission system 303 to drive the entire horizontal motion transmission module 302 In summary, the contact probe 305 can be moved up, down, left, and right relative to the glass substrate through the probe vertical movement transmission module 301, horizontal movement transmission module 302, and linear motor positioning transmission system 303, so that the contact probe 305 can It can maintain good contact with the circuit on the substrate according to different circuit design conditions, and provide accurate measurement quality.

现请参考图 8、图 9及图 10，静电电容耦合式感测器 401，系由致动器 402的伸缩杆 4021所带动而可贴近基板或远离基板，致动器 402 与线性马达定位传动*** 403的动子 4031连结，该线性马达定位传动 *** 403，使用单轴双载子技术使之可分别具有两动子与致动器连结，其主要组成包括定子 4033，线性滑轨 4032，及线性滑块 (未绘于图示)，底座 4034，线性马达定位传动*** 403，可带动感测器 401 水平左右移动。 Please refer to FIG. 8, FIG. 9 and FIG. 10. The electrostatic capacitance coupling sensor 401 is driven by the telescopic rod 4021 of the actuator 402 to be close to or away from the substrate. The actuator 402 and the linear motor are positioned and driven. The mover 4031 of the system 403 is connected. The linear motor positioning transmission system 403 uses single-axis and dual-carrier technology to make it possible to have two movers and actuators connected to each other. Its main components include a stator 4033, a linear slide 4032, and The linear slider (not shown in the figure), the base 4034, and the linear motor positioning transmission system 403 can move the sensor 401 horizontally to the left and right.

线性马达定位传动*** 403，与另一线性马达定位传动*** 404 连结，线性马达定位传动*** 404，亦采用前述的单轴双动子技术其主要组成包括马达本体 4041，及两对动子 4042(如图 8所示)以及 4043(如图 10所示)及其相对应的驱动电路*** (未绘制于图示)，马达本体 4041 的组成亦包括滑轨滑块组 (未绘制于图示)、位置感测器 (未绘制于图示）及马达定子 (未绘制于图示)，而线性马达定位传动*** 403的底座 4034 即与线性马达定位传动*** 404的其中一对动子 4042相连结，使线性马达定位传动*** 404，得以驱动线性马达定位传动*** 403进而可带动感测器前后移动。 The linear motor positioning transmission system 403 is connected to another linear motor positioning transmission system 404. The linear motor positioning transmission system 404 also adopts the aforementioned single-axis dual-mover technology. Its main components include a motor body 4041 and two pairs of movers 4042 ( (As shown in FIG. 8) and 4043 (as shown in FIG. 10) and their corresponding drive circuit systems (not shown in the figure), the composition of the motor body 4041 also includes a slide block (not shown in the figure) , Position sensor (not shown in the figure) and motor stator (not shown in the figure), and the base 4034 of the linear motor positioning transmission system 403 is connected to one pair of movers 4042 of the linear motor positioning transmission system 404 The linear motor positioning transmission system 404 can be driven to drive the linear motor positioning transmission system 403 and then drive the sensor to move forward and backward.

经由上述的非接触式感测器或搭配接触探针检测出线路缺陷点座标后，可使用激光方式对于该线路缺陷点座标的短路缺陷 (Short defect) 切断造成短路的异物，进而修补基板。 After detecting the coordinates of a line defect point through the above-mentioned non-contact sensor or a contact probe, a laser method can be used to cut off a short circuit of the line defect point coordinate, thereby repairing the substrate.

请参考图 10，激光修补头 501，其内含激光产生***，用以产生具功率的激光以切断短路金属异物，其中亦可再包括光学显微放大组件 (未绘于图示)，以提供切断时的影像，激光修补头 501，需要一传动 ***连结带动至线路缺陷点位置以发挥其功能，激光修补头 501与一线性马达定位传动*** 502的动子 5021连结，该线性马达定位传动系统 502，其主要组成包括定子 5022，滑轨 5023, 及滑块，底座 5024，线性马达定位传动*** 502，可带动激光修补头 501水平左右移动。 Please refer to FIG. 10, a laser repairing head 501, which includes a laser generating system for generating a laser with a power to cut off a short-circuited metal foreign body, which may further include an optical microscope magnification component (not shown in the figure) to provide When the image is cut, the laser repairing head 501 needs a transmission system to be connected to the line defect point to perform its function. The laser repairing head 501 and a The linear motor positioning transmission system 502 is connected with a mover 5021. The linear motor positioning transmission system 502 mainly includes a stator 5022, a slide rail 5023, and a slider, a base 5024, and a linear motor positioning transmission system 502, which can drive a laser repair head. 501 moves left and right horizontally.

线性马达定位传动*** 502，与另一线性马达定位传动*** 404 连结，进而可带动激光修补头 501前后移动。 The linear motor positioning transmission system 502 is connected to another linear motor positioning transmission system 404, which can further drive the laser repairing head 501 to move forward and backward.

另外线性马达定位传动*** 404，透过动子 4042、 4043分别连结线性马达定位传动*** 502及线性马达定位传动*** 403，故于单一马达本体 4041可分别独立驱动控制静电电容耦合式感测器 401及激光修补头 501，相对玻璃基板移动，相较于一般惯用的旋转马达加上滚珠导螺杆的组合，可大幅节省传动所需构件，进而减小机台尺寸，节省无尘室空间。 In addition, the linear motor positioning transmission system 404 is connected to the linear motor positioning transmission system 502 and the linear motor positioning transmission system 403 through movers 4042 and 4043, respectively. Therefore, a single motor body 4041 can independently drive and control the electrostatic capacitance coupling sensor 401. And the laser repair head 501, which moves relative to the glass substrate, can greatly save the components required for transmission, compared with the combination of a commonly used rotary motor and a ball lead screw, thereby reducing the size of the machine and saving space in the clean room.

接下来介绍使用上述设备于液晶显示器玻璃基板线路缺陷检测及修补的方法，以线路的短路缺陷 (short defect)为例，请参考图 11至图 14。 Next, a method for detecting and repairing a circuit defect of a liquid crystal display glass substrate using the above device will be described. Taking a short defect of the circuit as an example, please refer to FIGS. 11 to 14.

(1)首先，如图 11所示，先通过传输***如机械手臂等将已完成金属线路，待检测的玻璃基板 10载入机台，放置并夹持于基板承载台 200。 (1) First, as shown in FIG. 11, the completed metal circuit and the glass substrate 10 to be inspected are loaded into a machine table by a transmission system such as a robot arm, and placed and held on the substrate carrier 200.

(2)参考图 12，利用传动*** 301、传动*** 302及传动*** 303 带动接触探针 305，以正确接触玻璃基板 10上的金属线路并使用传动 *** 402、传动*** 403及传动*** 404带动非接触式感测器 401能贴近玻璃基板 10至适当距离，以检测出线路短路缺陷，并决定线路缺陷位置。 (2) Referring to FIG. 12, the driving probe 305 is driven by the driving system 301, the driving system 302, and the driving system 303 to correctly contact the metal lines on the glass substrate 10, and the driving system 402, the driving system 403, and the driving system 404 are used to drive the non- The touch sensor 401 can be brought close to the glass substrate 10 to an appropriate distance to detect a short circuit defect and determine the position of the line defect.

(3)参考图 13，非接触式感测器 401以及接触探针 305退回原来位置之后，激光修补模头 501经由传动*** 502及传动*** 404带动至线路短路缺陷位置，以激光方式切断造成短路的异物，使该区域变成正常的区域。 (3) Referring to FIG. 13, after the non-contact sensor 401 and the contact probe 305 are returned to their original positions, the laser repairing die 501 is driven to the position of the line short-circuit defect via the transmission system 502 and the transmission system 404, and is cut off by laser to cause a short circuit. Foreign matter, making the area a normal area.

(4)参考图 14，修补完线路缺陷后，激光修补模头 501退回至原来位置，利用传输***如机械手臂等将玻璃基板 10移出，机台回至初始状态，等待下一片待测基板。 (4) Referring to FIG. 14, after repairing the line defect, the laser repairing die head 501 is returned to the original position, and the glass substrate 10 is removed by using a transmission system such as a robot arm, and the machine returns to the initial stage. Status, waiting for the next substrate to be tested.

因此通过上述的设备及方法，与现有的技术相比较，本发明具备下列优点： Therefore, compared with the prior art through the above-mentioned equipment and method, the present invention has the following advantages:

1.单一机台双种功能，节省制程步骤及工时。 1. Dual functions on a single machine, saving process steps and man-hours.

2.玻璃基板检测完毕至激光修补制程工序之间，无须搬运及载卸过程，可减少工程意外及不良率。 2. Between the inspection of the glass substrate and the laser repair process, there is no need for handling and loading and unloading processes, which can reduce engineering accidents and failure rates.

3.机台制作构件大量节省，可大幅降低建厂成本，适合标准量产线配置。 3. The machine can save a lot of manufacturing components, which can greatly reduce the construction cost and is suitable for standard mass production line configuration.

本发明已通过上述的较佳具体例以及附图加以详细说明，但所揭示的具体例仅用以说明本发明，不用以限制本发明的范围不以上述实施例为限。凡在本发明精神及申请范围内所作的各种变化、改良均属本发明的范围。 The present invention has been described in detail through the above-mentioned preferred specific examples and drawings, but the disclosed specific examples are only used to illustrate the present invention, and are not intended to limit the scope of the present invention, which is not limited to the above-mentioned embodiments. Various changes and improvements made within the spirit and scope of the present invention are within the scope of the present invention.

【图号简单说明】 [Illustration of drawing number]

10 玻璃基板 11 资料线 10 Glass substrate 11 Data cable

12 扫瞄线 20 线路开路缺陷点 12 Scanning line 20 Open circuit defect

30 线路短路缺陷点 13 感测器 30 Line short-circuit defect point 13 Sensor

14 感测器 40 接触垫 14 Sensor 40 Contact pad

50 接触探针 60 X-Y传动平台 50 contact probe 60 X-Y drive platform

70 激光修补头 101 机台底座 70 Laser repair head 101 Machine base

102机台支撑座 103 马达支撑座 102 machine support 103 motor support

200基板承载台 300 接触探针检测模组 200 substrate carrier 300 contact probe detection module

301垂直运动传动模组 301a 第一底板 301 vertical motion transmission module 301a first floor

301b 线性滑轨组 301c 伺服旋转马达 301b linear guide 301c servo rotary motor

301d 滚珠导螺杆 301e 第二底板 301d Ball screw 301e Second base plate

301b 线性滑轨组 301f 连结板 301b Linear Slide Set 301f Link Plate

302水平运动传动模组 3021 支撑横梁 3022 线性滑轨组 3023 线性滑块组302 horizontal motion transmission module 3021 support beam 3022 Linear Slide Set 3023 Linear Slide Set

3024 线性马达定位传动*** 3024a马达本体3024 linear motor positioning drive system 3024a motor body

3024b动子 3024b mover

303线性马达定位传动*** 3031 马达本体 3032 动子 3033 动子 304连结支撑座 303 linear motor positioning drive system 3031 motor body 3032 mover 3033 mover 304 connection support seat

305接触探针 305a 感测测头305 touch probe 305a sensing head

400 非接触式检测模组 400 non-contact detection module

401静电电容耦合式感测器 402 致动器 4021 伸缩杆 401 Capacitive coupling sensor 402 Actuator 4021 Telescopic rod

403 线性马达定位传动*** 403 Linear motor positioning drive system

4031 动子 4032 滑轨 4033 定子 4034 底座4031 mover 4032 slide 4033 stator 4034 base

404线性马达定位传动*** 4041 马达本体 4042 动子 4043 动子404 linear motor positioning drive system 4041 motor body 4042 mover 4043 mover

500 激光修补模组 500 Laser Repair Module

501 激光修补头 501 laser repair head

502 线性马达定位传动*** 502 linear motor positioning drive system

5021 动子 5022 定子 5021 mover 5022 stator

5023 滑轨 5024 底座 5023 Rail 5024 Base

Claims

权利要求 Rights request

1.一种用于平面显示器的线路缺陷检测及激光修补设备，用以检测玻璃基板的线路缺陷并对该线路缺陷进行激光修补，该设备包括：机台底座，用以支撑构件； 1. A line defect detection and laser repairing device for a flat panel display, for detecting a line defect of a glass substrate and performing laser repair on the line defect, the device comprising: a machine base for supporting a component;

基板承载台，设置于该机台底座上，用以放置及承载玻璃基板；接触探针检测模组，具有接触探针，及接触探针传动***，该接触探针传动***系用以带动该接触探针，使该接触探针接触该玻璃基板的线路，以检测线路缺陷； A substrate carrying platform is arranged on the base of the machine for placing and carrying a glass substrate; a contact probe detection module has a contact probe and a contact probe drive system, and the contact probe drive system is used to drive the A contact probe, so that the contact probe contacts a circuit of the glass substrate to detect a circuit defect;

非接触式检测模组，具有非接触式感测器，及非接触检测传动系统，该非接触检测传动***系用以带动该非接触式感测器，以非接触方式检测该玻璃基板的该线路缺陷，并与该接触探针检测模组共同决定线路缺陷位置;及 A non-contact detection module has a non-contact sensor and a non-contact detection drive system. The non-contact detection drive system is used to drive the non-contact sensor to detect the glass substrate in a non-contact manner. Line defect, and jointly determine the line defect location with the contact probe detection module; and

激光修补模组，具有激光修补头及激光修补传动***，该激光修补传动***系用以带动激光修补头，至该线路缺陷位置，并以激光方式修补该玻璃基板的该线路缺陷。 The laser repairing module has a laser repairing head and a laser repairing transmission system. The laser repairing transmission system is used to drive the laser repairing head to the position of the line defect, and repair the line defect of the glass substrate in a laser manner.

2.如权利要求 1所述的线路缺陷检测及激光修补设备，其特征在于，该接触探针传动***包括： 2. The line defect detection and laser repairing device according to claim 1, wherein the contact probe transmission system comprises:

接触探针垂直传动***，具有传动元件，用以带动该接触探针相对该玻璃基板垂直上下运动； The contact probe vertical transmission system has a transmission element for driving the contact probe to vertically move up and down relative to the glass substrate;

接触探针水平传动***，具有传动元件，用以带动该接触探针相对该玻璃基板水平左右运动；及 The horizontal transmission system of the contact probe has a transmission element for driving the contact probe to move horizontally to the left and right with respect to the glass substrate; and

接触探针前后传动模组，具有传动元件，用以带动该接触探针相对该玻璃基板前后运动。 The contact probe front-rear transmission module has a transmission element for driving the contact probe back and forth with respect to the glass substrate.

3. 如权利要求 1所述的线路缺陷检测及激光修补设备，其特征在于，该非接触检测传动***包括： 3. The line defect detection and laser repairing device according to claim 1, wherein the non-contact detection transmission system comprises:

非接触检测垂直传动***，具有传动元件，用以带动该非接触式感测器相对该玻璃基板垂直上下运动； Non-contact detection vertical transmission system with transmission elements for driving the non-contact type The sensor moves vertically up and down relative to the glass substrate;

非接触检测水平传动***，具有传动元件，用以带动该非接触式感测器相对该玻璃基板水平左右运动;及 A non-contact detection horizontal transmission system having a transmission element for driving the non-contact sensor to move horizontally left and right relative to the glass substrate; and

第一线性马达定位传动***，其中包括一马达本体、第一动子及第二动子，其中该第一动子与该非接触检测水平传动***连结。 The first linear motor positioning transmission system includes a motor body, a first mover, and a second mover, wherein the first mover is connected to the non-contact detection horizontal drive system.

4. 如权利要求 1所述的线路缺陷检测及激光修补设备，其特征在于，该激光修补传动***包括： 4. The line defect detection and laser repair equipment according to claim 1, wherein the laser repair transmission system comprises:

激光修补水平传动模组，具有传动元件，用以带动该激光修补头相对该玻璃基板水平左右运动;及 A laser repair horizontal transmission module having a transmission element for driving the laser repair head to move horizontally left and right relative to the glass substrate; and

第一线性马达定位传动***，其中包括一马达本体、第一动子及第二动子，其中该第二动子与该激光修补水平传动***连结。 The first linear motor positioning transmission system includes a motor body, a first mover, and a second mover, wherein the second mover is connected to the laser repair horizontal drive system.

5. 如权利要求 1所述的线路缺陷检测及激光修补设备，其特征在于，该非接触式感测器为静电电容耦合式。 5. The line defect detection and laser repairing device according to claim 1, wherein the non-contact sensor is an electrostatic capacitance coupling type.

6. 如权利要求 2所述的线路缺陷检测及激光修补设备，其特征在于，该接触探针垂直传动***的传动元件包括旋转马达、导螺杆及滑轨滑块组。 6. The line defect detection and laser repairing device according to claim 2, wherein the transmission elements of the contact probe vertical transmission system include a rotary motor, a lead screw, and a slide block.

7. 如权利要求 2所述的线路缺陷检测及激光修补设备，其特征在于，该接触探针水平传动***的传动元件包括线性马达。 7. The line defect detection and laser repair equipment according to claim 2, wherein the transmission element of the contact probe horizontal transmission system comprises a linear motor.

8. 如权利要求 2所述的线路缺陷检测及激光修补设备，其特征在于，该接触探针前后传动模组的传动元件包括线性马达。 8. The line defect detection and laser repairing device according to claim 2, wherein the transmission element of the front and rear transmission module of the contact probe comprises a linear motor.

9. 如权利要求 2所述的线路缺陷检测及激光修补设备，其特征在于，该接触探针前后传动模组的传动元件包括旋转马达、导螺杆及滑块滑轨组。 9. The line defect detection and laser repairing device according to claim 2, wherein the transmission elements of the front and rear transmission modules of the contact probe comprise a rotary motor, a lead screw, and a slide block set.

10. 如权利要求 3所述的线路缺陷检测及激光修补设备，其特征在于，该非接触检测垂直传动***的传动元件包括汽缸或线性致动器。 10. The line defect detection and laser repairing device according to claim 3, wherein the transmission element of the non-contact detection vertical transmission system comprises a cylinder or a linear actuator.

11. 如权利要求 3所述的线路缺陷检测及激光修补设备，其特征在于，该非接触检测水平传动***的传动元件包括线性马达。 11. The line defect detection and laser repairing device according to claim 3, wherein the transmission element of the non-contact detection horizontal transmission system comprises a linear motor.

12. 如权利要求 3所述的线路缺陷检测及激光修补设备，其特征在于，该激光修补水平传动模组的传动元件包括线性马达。 12. The line defect detection and laser repairing device according to claim 3, wherein a transmission element of the laser repairing horizontal transmission module comprises a linear motor.

13. 如权利要求 4所述的线路缺陷检测及激光修补设备，其特征在于，该激光修补水平传动模组的传动元件包括旋转马达、导螺杆及滑块滑轨组。 13. The line defect detection and laser repairing device according to claim 4, wherein the transmission elements of the laser repairing horizontal transmission module include a rotary motor, a lead screw, and a slider rail set.

14.一种用于平面显示器玻璃基板的线路缺陷检测及激光修补的方法，包括下列步骤： 14. A method for line defect detection and laser repair of a glass substrate of a flat display, comprising the following steps:

放置并夹持待检测的该玻璃基板于基板承载台； Placing and holding the glass substrate to be detected on a substrate carrier;

移动接触探针以及移动非接触式感测器以检测出线路缺陷，并决定线路缺陷位置； Move contact probes and non-contact sensors to detect line defects and determine line defect locations;

移动激光修补头至该线路缺陷位置，并以激光方式修补该线路缺陷;及 Move the laser repair head to the line defect location and repair the line defect by laser; and

将检测及修补完毕的该玻璃基板移出该基板承载台。 The glass substrate that has been inspected and repaired is removed from the substrate carrier.

15. 如权利要求 14所述的线路缺陷检测及激光修补的方法，其特征在于，该移动接触探针步骤系利用一接触探针传动***实现，其中该接触探针传动***包括： 15. The method for line defect detection and laser repair according to claim 14, wherein the step of moving the contact probe is implemented using a contact probe drive system, wherein the contact probe drive system comprises:

接触探针前后传动模组，具有传动元件，用以带动该接触探针相对该玻璃板前后运动。 The contact probe front and rear transmission module has a transmission element for driving the contact probe forward and backward relative to the glass plate.

16. 如权利要求 14所述的线路缺陷检测及激光修补的方法，其特征在于，该移动非接触式感测器步骤系利用一非接触检测传动***实现，其中该非接触检测传动***包括： 16. The method for line defect detection and laser repair according to claim 14, wherein the step of moving the non-contact sensor is implemented using a non-contact detection drive system, wherein the non-contact detection drive system comprises:

非接触检测垂直传动***，具有传动元件，用以带动该非接触式感测器相对该玻璃基板垂直上下运动；非接触检测水平传动***，具有传动元件，用以带动该非接触式感测器相对该玻璃基板水平左右运动;及 The non-contact detection vertical transmission system has a transmission element for driving the non-contact sensor to vertically move up and down relative to the glass substrate; A non-contact detection horizontal transmission system having a transmission element for driving the non-contact sensor to horizontally move left and right relative to the glass substrate; and

第一线性马达定位传动***，其中包括一马达本体、第一动子及第二动子，该第一动子与该非接触检测水平传动***连结。 A first linear motor positioning transmission system includes a motor body, a first mover, and a second mover, and the first mover is connected to the non-contact detection horizontal drive system.

17. 如权利要求 14所述的方法，其特征在于，该激光修补头系通过激光修补传动***所带动，该激光修补传动***包括： 17. The method of claim 14, wherein the laser repair head is driven by a laser repair drive system, and the laser repair drive system comprises:

激光修补水平传动模组，具有传动元件，用以带动该激光修补头，相对该玻璃基板水平左右运动;及 A laser repair horizontal transmission module having a transmission element for driving the laser repair head to move horizontally left and right relative to the glass substrate; and

第一线性马达定位传动***，其中包括一马达本体、第一动子及第二动子，该第二动子与该激光修补水平传动***连结。 A first linear motor positioning transmission system includes a motor body, a first mover, and a second mover, and the second mover is connected to the laser repair horizontal drive system.