WO2005087391A3 - Asymmetric membrane cmut devices and fabrication methods - Google Patents

Asymmetric membrane cmut devices and fabrication methods Download PDF

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Publication number
WO2005087391A3
WO2005087391A3 PCT/US2005/008259 US2005008259W WO2005087391A3 WO 2005087391 A3 WO2005087391 A3 WO 2005087391A3 US 2005008259 W US2005008259 W US 2005008259W WO 2005087391 A3 WO2005087391 A3 WO 2005087391A3
Authority
WO
WIPO (PCT)
Prior art keywords
membrane
asymmetric
fabrication methods
varied
electrode element
Prior art date
Application number
PCT/US2005/008259
Other languages
French (fr)
Other versions
WO2005087391A2 (en
Inventor
F Levent Degertekin
Jeffrey John Mclean
Joshua Glenn Knight
Original Assignee
Georgia Tech Res Inst
F Levent Degertekin
Jeffrey John Mclean
Joshua Glenn Knight
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US11/053,672 external-priority patent/US20050177045A1/en
Priority claimed from US11/068,005 external-priority patent/US8008835B2/en
Priority claimed from PCT/US2005/006408 external-priority patent/WO2005084267A2/en
Application filed by Georgia Tech Res Inst, F Levent Degertekin, Jeffrey John Mclean, Joshua Glenn Knight filed Critical Georgia Tech Res Inst
Priority to JP2007503069A priority Critical patent/JP2008510324A/en
Priority to EP05725443A priority patent/EP1725343A2/en
Publication of WO2005087391A2 publication Critical patent/WO2005087391A2/en
Publication of WO2005087391A3 publication Critical patent/WO2005087391A3/en

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
    • G01N29/22—Details, e.g. general constructional or apparatus details
    • G01N29/24—Probes
    • G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Transducers For Ultrasonic Waves (AREA)

Abstract

Asymmetric membrane capacitive micromachined ultrasonic transducer ('cMUT') devices and fabrication methods are provided. In a preferred embodiment, a cMUT device according to the present invention generally comprises a membrane having asymmetric properties. The membrane can have a varied width across its length so that its ends have different widths. The asymmetric membrane can have varied flex characteristics due to its varied width dimensions. In another preferred embodiment, a cMUT device according to the present invention generally comprises an electrode element having asymmetric properties. The electrode element can have a varied width across its length so that its ends have different widths. The asymmetric electrode element can have different reception and transmission characteristics due to its varied width dimensions. In another preferred embodiment, a mass load positioned along the membrane can alter the mass distribution of the membrane. Other embodiments are also claimed and described.
PCT/US2005/008259 2004-03-11 2005-03-11 Asymmetric membrane cmut devices and fabrication methods WO2005087391A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2007503069A JP2008510324A (en) 2004-03-11 2005-03-11 Asymmetric thin film cMUT element and method of manufacturing
EP05725443A EP1725343A2 (en) 2004-03-11 2005-03-11 Asymmetric membrane cmut devices and fabrication methods

Applications Claiming Priority (14)

Application Number Priority Date Filing Date Title
US55208204P 2004-03-11 2004-03-11
US60/552,082 2004-03-11
US11/053,672 2005-02-07
USPCT/US2005/003898 2005-02-07
US11/053,672 US20050177045A1 (en) 2004-02-06 2005-02-07 cMUT devices and fabrication methods
PCT/US2005/003898 WO2005077012A2 (en) 2004-02-06 2005-02-07 Cmut devices and fabrication methods
USPCT/US2005/006408 2005-02-28
USPCT/US2005/006474 2005-02-28
US11/068,005 US8008835B2 (en) 2004-02-27 2005-02-28 Multiple element electrode cMUT devices and fabrication methods
PCT/US2005/006408 WO2005084267A2 (en) 2004-02-27 2005-02-28 Harmonic cmut devices and fabrication methods
US11/068,129 2005-02-28
US11/068,129 US7612483B2 (en) 2004-02-27 2005-02-28 Harmonic cMUT devices and fabrication methods
US11/068,005 2005-02-28
PCT/US2005/006474 WO2005084284A2 (en) 2004-02-27 2005-02-28 Multiple element electrode cmut devices and fabrication methods

Publications (2)

Publication Number Publication Date
WO2005087391A2 WO2005087391A2 (en) 2005-09-22
WO2005087391A3 true WO2005087391A3 (en) 2006-04-27

Family

ID=34963871

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2005/008259 WO2005087391A2 (en) 2004-03-11 2005-03-11 Asymmetric membrane cmut devices and fabrication methods

Country Status (2)

Country Link
EP (1) EP1725343A2 (en)
WO (1) WO2005087391A2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI260940B (en) * 2005-06-17 2006-08-21 Ind Tech Res Inst Method for producing polymeric capacitive ultrasonic transducer
WO2007024909A1 (en) 2005-08-23 2007-03-01 Analog Devices, Inc. Multi-microphone system
CN101291744B (en) * 2005-10-19 2011-10-05 皇家飞利浦电子股份有限公司 2d ultrasound transducer for radial application and method
JP4958631B2 (en) * 2007-05-14 2012-06-20 株式会社日立製作所 Ultrasonic transmitting / receiving device and ultrasonic probe using the same
GB2459866B (en) * 2008-05-07 2011-08-31 Wolfson Microelectronics Plc Mems transducer
ES2458629T3 (en) * 2009-06-19 2014-05-06 Sonovia Holdings Llc Dual Frequency Ultrasound Transducer
CN107405130B (en) 2015-03-05 2021-06-22 皇家飞利浦有限公司 Ultrasound system and method
US9900707B1 (en) 2016-11-29 2018-02-20 Cirrus Logic, Inc. Biasing of electromechanical systems microphone with alternating-current voltage waveform
GB2557367A (en) * 2016-11-29 2018-06-20 Cirrus Logic Int Semiconductor Ltd Mems device
WO2019032938A1 (en) 2017-08-11 2019-02-14 North Carolina State University Optically transparent micromachined ultrasonic transducer (cmut)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030114760A1 (en) * 2001-12-19 2003-06-19 Robinson Andrew L. Micromachined ultrasound transducer and method for fabricating same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20030114760A1 (en) * 2001-12-19 2003-06-19 Robinson Andrew L. Micromachined ultrasound transducer and method for fabricating same

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MCLEAN J ET AL: "Capacitive micromachined ultrasonic transducers with asymmetric membranes for microfluidic applications", 2001 IEEE ULTRASONICS SYMPOSIUM. PROCEEDINGS. AN INTERNATIONAL SYMPOSIUM (CAT. NO.01CH37263) IEEE PISCATAWAY, NJ, USA, vol. 2, 2001, pages 925 - 928 vol.2, XP002337241, ISBN: 0-7803-7177-1 *

Also Published As

Publication number Publication date
WO2005087391A2 (en) 2005-09-22
EP1725343A2 (en) 2006-11-29

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