WO2005087391A3 - Asymmetric membrane cmut devices and fabrication methods - Google Patents
Asymmetric membrane cmut devices and fabrication methods Download PDFInfo
- Publication number
- WO2005087391A3 WO2005087391A3 PCT/US2005/008259 US2005008259W WO2005087391A3 WO 2005087391 A3 WO2005087391 A3 WO 2005087391A3 US 2005008259 W US2005008259 W US 2005008259W WO 2005087391 A3 WO2005087391 A3 WO 2005087391A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- membrane
- asymmetric
- fabrication methods
- varied
- electrode element
- Prior art date
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Transducers For Ultrasonic Waves (AREA)
Abstract
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007503069A JP2008510324A (en) | 2004-03-11 | 2005-03-11 | Asymmetric thin film cMUT element and method of manufacturing |
EP05725443A EP1725343A2 (en) | 2004-03-11 | 2005-03-11 | Asymmetric membrane cmut devices and fabrication methods |
Applications Claiming Priority (14)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US55208204P | 2004-03-11 | 2004-03-11 | |
US60/552,082 | 2004-03-11 | ||
US11/053,672 | 2005-02-07 | ||
USPCT/US2005/003898 | 2005-02-07 | ||
US11/053,672 US20050177045A1 (en) | 2004-02-06 | 2005-02-07 | cMUT devices and fabrication methods |
PCT/US2005/003898 WO2005077012A2 (en) | 2004-02-06 | 2005-02-07 | Cmut devices and fabrication methods |
USPCT/US2005/006408 | 2005-02-28 | ||
USPCT/US2005/006474 | 2005-02-28 | ||
US11/068,005 US8008835B2 (en) | 2004-02-27 | 2005-02-28 | Multiple element electrode cMUT devices and fabrication methods |
PCT/US2005/006408 WO2005084267A2 (en) | 2004-02-27 | 2005-02-28 | Harmonic cmut devices and fabrication methods |
US11/068,129 | 2005-02-28 | ||
US11/068,129 US7612483B2 (en) | 2004-02-27 | 2005-02-28 | Harmonic cMUT devices and fabrication methods |
US11/068,005 | 2005-02-28 | ||
PCT/US2005/006474 WO2005084284A2 (en) | 2004-02-27 | 2005-02-28 | Multiple element electrode cmut devices and fabrication methods |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005087391A2 WO2005087391A2 (en) | 2005-09-22 |
WO2005087391A3 true WO2005087391A3 (en) | 2006-04-27 |
Family
ID=34963871
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2005/008259 WO2005087391A2 (en) | 2004-03-11 | 2005-03-11 | Asymmetric membrane cmut devices and fabrication methods |
Country Status (2)
Country | Link |
---|---|
EP (1) | EP1725343A2 (en) |
WO (1) | WO2005087391A2 (en) |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI260940B (en) * | 2005-06-17 | 2006-08-21 | Ind Tech Res Inst | Method for producing polymeric capacitive ultrasonic transducer |
WO2007024909A1 (en) | 2005-08-23 | 2007-03-01 | Analog Devices, Inc. | Multi-microphone system |
CN101291744B (en) * | 2005-10-19 | 2011-10-05 | 皇家飞利浦电子股份有限公司 | 2d ultrasound transducer for radial application and method |
JP4958631B2 (en) * | 2007-05-14 | 2012-06-20 | 株式会社日立製作所 | Ultrasonic transmitting / receiving device and ultrasonic probe using the same |
GB2459866B (en) * | 2008-05-07 | 2011-08-31 | Wolfson Microelectronics Plc | Mems transducer |
ES2458629T3 (en) * | 2009-06-19 | 2014-05-06 | Sonovia Holdings Llc | Dual Frequency Ultrasound Transducer |
CN107405130B (en) | 2015-03-05 | 2021-06-22 | 皇家飞利浦有限公司 | Ultrasound system and method |
US9900707B1 (en) | 2016-11-29 | 2018-02-20 | Cirrus Logic, Inc. | Biasing of electromechanical systems microphone with alternating-current voltage waveform |
GB2557367A (en) * | 2016-11-29 | 2018-06-20 | Cirrus Logic Int Semiconductor Ltd | Mems device |
WO2019032938A1 (en) | 2017-08-11 | 2019-02-14 | North Carolina State University | Optically transparent micromachined ultrasonic transducer (cmut) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030114760A1 (en) * | 2001-12-19 | 2003-06-19 | Robinson Andrew L. | Micromachined ultrasound transducer and method for fabricating same |
-
2005
- 2005-03-11 EP EP05725443A patent/EP1725343A2/en not_active Withdrawn
- 2005-03-11 WO PCT/US2005/008259 patent/WO2005087391A2/en active Application Filing
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20030114760A1 (en) * | 2001-12-19 | 2003-06-19 | Robinson Andrew L. | Micromachined ultrasound transducer and method for fabricating same |
Non-Patent Citations (1)
Title |
---|
MCLEAN J ET AL: "Capacitive micromachined ultrasonic transducers with asymmetric membranes for microfluidic applications", 2001 IEEE ULTRASONICS SYMPOSIUM. PROCEEDINGS. AN INTERNATIONAL SYMPOSIUM (CAT. NO.01CH37263) IEEE PISCATAWAY, NJ, USA, vol. 2, 2001, pages 925 - 928 vol.2, XP002337241, ISBN: 0-7803-7177-1 * |
Also Published As
Publication number | Publication date |
---|---|
WO2005087391A2 (en) | 2005-09-22 |
EP1725343A2 (en) | 2006-11-29 |
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