WO2005028992A3 - Line profile asymmetry measurement - Google Patents
Line profile asymmetry measurement Download PDFInfo
- Publication number
- WO2005028992A3 WO2005028992A3 PCT/US2004/030115 US2004030115W WO2005028992A3 WO 2005028992 A3 WO2005028992 A3 WO 2005028992A3 US 2004030115 W US2004030115 W US 2004030115W WO 2005028992 A3 WO2005028992 A3 WO 2005028992A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- microelectronic
- array
- light
- features
- line profile
- Prior art date
Links
- 238000005259 measurement Methods 0.000 title 1
- 238000004377 microelectronic Methods 0.000 abstract 4
- 238000000034 method Methods 0.000 abstract 3
- 238000003491 array Methods 0.000 abstract 1
- 230000000295 complement effect Effects 0.000 abstract 1
- 230000000737 periodic effect Effects 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/12—Generating the spectrum; Monochromators
- G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
- G01J3/24—Generating the spectrum; Monochromators using diffraction elements, e.g. grating using gratings profiled to favour a specific order
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
- G01B11/306—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces for measuring evenness
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
- G01J3/28—Investigating the spectrum
- G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70605—Workpiece metrology
- G03F7/70616—Monitoring the printed patterns
- G03F7/70625—Dimensions, e.g. line width, critical dimension [CD], profile, sidewall angle or edge roughness
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Abstract
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP04784089A EP1678466A4 (en) | 2003-09-12 | 2004-09-13 | Line profile asymmetry measurement |
US10/571,418 US7515279B2 (en) | 2001-03-02 | 2004-09-13 | Line profile asymmetry measurement |
JP2006526415A JP2007505322A (en) | 2003-09-12 | 2004-09-13 | Line profile asymmetry measurement |
KR1020067005109A KR101071654B1 (en) | 2003-09-12 | 2006-03-13 | Line Profile Asymmetry Measurement |
US12/418,535 US7639371B2 (en) | 2001-03-02 | 2009-04-03 | Line profile asymmetry measurement |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US50244403P | 2003-09-12 | 2003-09-12 | |
US60/502,444 | 2003-09-12 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/086,339 Continuation-In-Part US6856408B2 (en) | 2001-03-02 | 2002-02-28 | Line profile asymmetry measurement using scatterometry |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US10/571,418 A-371-Of-International US7515279B2 (en) | 2001-03-02 | 2004-09-13 | Line profile asymmetry measurement |
US12/418,535 Continuation US7639371B2 (en) | 2001-03-02 | 2009-04-03 | Line profile asymmetry measurement |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2005028992A2 WO2005028992A2 (en) | 2005-03-31 |
WO2005028992A3 true WO2005028992A3 (en) | 2005-10-13 |
Family
ID=34375259
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2004/030115 WO2005028992A2 (en) | 2001-03-02 | 2004-09-13 | Line profile asymmetry measurement |
Country Status (5)
Country | Link |
---|---|
EP (1) | EP1678466A4 (en) |
JP (1) | JP2007505322A (en) |
KR (1) | KR101071654B1 (en) |
CN (1) | CN1879004A (en) |
WO (1) | WO2005028992A2 (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7515279B2 (en) | 2001-03-02 | 2009-04-07 | Nanometrics Incorporated | Line profile asymmetry measurement |
US20080144036A1 (en) | 2006-12-19 | 2008-06-19 | Asml Netherlands B.V. | Method of measurement, an inspection apparatus and a lithographic apparatus |
US7791727B2 (en) | 2004-08-16 | 2010-09-07 | Asml Netherlands B.V. | Method and apparatus for angular-resolved spectroscopic lithography characterization |
US20060187466A1 (en) * | 2005-02-18 | 2006-08-24 | Timbre Technologies, Inc. | Selecting unit cell configuration for repeating structures in optical metrology |
NL1036018A1 (en) * | 2007-10-09 | 2009-04-15 | Asml Netherlands Bv | A method of optimizing a model, a method of measuring a property, a device manufacturing method, a spectrometer and a lithographic apparatus. |
JP5264374B2 (en) * | 2008-09-02 | 2013-08-14 | 東京エレクトロン株式会社 | Pattern shape inspection method and semiconductor device manufacturing method |
US9239522B2 (en) * | 2010-10-08 | 2016-01-19 | Kla-Tencor Corporation | Method of determining an asymmetric property of a structure |
US10215559B2 (en) * | 2014-10-16 | 2019-02-26 | Kla-Tencor Corporation | Metrology of multiple patterning processes |
US9650039B2 (en) * | 2015-03-20 | 2017-05-16 | Ford Global Technologies, Llc | Vehicle location accuracy |
CN105091780A (en) * | 2015-05-19 | 2015-11-25 | 哈尔滨工业大学 | Ultra-precision turning surface three-dimensional microscopic morphology measuring device based on characteristic of diffraction light spot of laser beam |
CN104897078B (en) * | 2015-05-19 | 2017-12-22 | 哈尔滨工业大学 | A kind of measuring method of the ultra-precise cutting finished surface three-dimensional micro-morphology based on visible reflectance spectrum characteristic |
CN105180825A (en) * | 2015-05-19 | 2015-12-23 | 哈尔滨工业大学 | 3D microscopic appearance measuring device of ultra-precise turning surface based on characteristic of visible-light reflection spectrum |
CN105004286B (en) * | 2015-05-19 | 2017-12-22 | 哈尔滨工业大学 | A kind of ultra-precise cutting finished surface three-dimensional micro-morphology measuring method based on laser beam diffraction hot spot characteristic |
CN112833790B (en) * | 2021-01-21 | 2023-03-14 | 中国科学院微电子研究所 | Method for reducing influence of asymmetry of phase grating on position measurement precision |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5963329A (en) * | 1997-10-31 | 1999-10-05 | International Business Machines Corporation | Method and apparatus for measuring the profile of small repeating lines |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4408884A (en) | 1981-06-29 | 1983-10-11 | Rca Corporation | Optical measurements of fine line parameters in integrated circuit processes |
US6900892B2 (en) * | 2000-12-19 | 2005-05-31 | Kla-Tencor Technologies Corporation | Parametric profiling using optical spectroscopic systems |
WO2002070985A1 (en) * | 2001-03-02 | 2002-09-12 | Accent Optical Technologies, Inc. | Line profile asymmetry measurement using scatterometry |
US6650422B2 (en) * | 2001-03-26 | 2003-11-18 | Advanced Micro Devices, Inc. | Scatterometry techniques to ascertain asymmetry profile of features and generate a feedback or feedforward process control data associated therewith |
US20030002043A1 (en) * | 2001-04-10 | 2003-01-02 | Kla-Tencor Corporation | Periodic patterns and technique to control misalignment |
JP2003224057A (en) * | 2002-01-30 | 2003-08-08 | Hitachi Ltd | Method of manufacturing semiconductor device |
-
2004
- 2004-09-13 CN CNA200480033229XA patent/CN1879004A/en active Pending
- 2004-09-13 EP EP04784089A patent/EP1678466A4/en not_active Withdrawn
- 2004-09-13 JP JP2006526415A patent/JP2007505322A/en active Pending
- 2004-09-13 WO PCT/US2004/030115 patent/WO2005028992A2/en active Application Filing
-
2006
- 2006-03-13 KR KR1020067005109A patent/KR101071654B1/en active IP Right Grant
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5963329A (en) * | 1997-10-31 | 1999-10-05 | International Business Machines Corporation | Method and apparatus for measuring the profile of small repeating lines |
Non-Patent Citations (1)
Title |
---|
See also references of EP1678466A4 * |
Also Published As
Publication number | Publication date |
---|---|
KR20060116797A (en) | 2006-11-15 |
JP2007505322A (en) | 2007-03-08 |
WO2005028992A2 (en) | 2005-03-31 |
EP1678466A4 (en) | 2008-07-30 |
EP1678466A2 (en) | 2006-07-12 |
KR101071654B1 (en) | 2011-10-11 |
CN1879004A (en) | 2006-12-13 |
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