WO2005008330A1 - 2次元画像形成装置 - Google Patents
2次元画像形成装置 Download PDFInfo
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- WO2005008330A1 WO2005008330A1 PCT/JP2004/010746 JP2004010746W WO2005008330A1 WO 2005008330 A1 WO2005008330 A1 WO 2005008330A1 JP 2004010746 W JP2004010746 W JP 2004010746W WO 2005008330 A1 WO2005008330 A1 WO 2005008330A1
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- Prior art keywords
- diffusion plate
- dimensional image
- image forming
- forming apparatus
- light
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/02—Diffusing elements; Afocal elements
- G02B5/0205—Diffusing elements; Afocal elements characterised by the diffusing properties
- G02B5/021—Diffusing elements; Afocal elements characterised by the diffusing properties the diffusion taking place at the element's surface, e.g. by means of surface roughening or microprismatic structures
- G02B5/0221—Diffusing elements; Afocal elements characterised by the diffusing properties the diffusion taking place at the element's surface, e.g. by means of surface roughening or microprismatic structures the surface having an irregular structure
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N9/00—Details of colour television systems
- H04N9/12—Picture reproducers
- H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
- H04N9/3141—Constructional details thereof
- H04N9/315—Modulator illumination systems
- H04N9/3161—Modulator illumination systems using laser light sources
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0052—Optical details of the image generation
- G02B21/0056—Optical details of the image generation based on optical coherence, e.g. phase-contrast arrangements, interference arrangements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
- G02B27/102—Beam splitting or combining systems for splitting or combining different wavelengths for generating a colour image from monochromatic image signal sources
- G02B27/1046—Beam splitting or combining systems for splitting or combining different wavelengths for generating a colour image from monochromatic image signal sources for use with transmissive spatial light modulators
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/10—Beam splitting or combining systems
- G02B27/14—Beam splitting or combining systems operating by reflection only
- G02B27/149—Beam splitting or combining systems operating by reflection only using crossed beamsplitting surfaces, e.g. cross-dichroic cubes or X-cubes
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/48—Laser speckle optics
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/02—Diffusing elements; Afocal elements
- G02B5/0273—Diffusing elements; Afocal elements characterized by the use
- G02B5/0278—Diffusing elements; Afocal elements characterized by the use used in transmission
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N9/00—Details of colour television systems
- H04N9/12—Picture reproducers
- H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
- H04N9/3102—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators
- H04N9/3105—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM] using two-dimensional electronic spatial light modulators for displaying all colours simultaneously, e.g. by using two or more electronic spatial light modulators
-
- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
- H04N9/00—Details of colour television systems
- H04N9/12—Picture reproducers
- H04N9/31—Projection devices for colour picture display, e.g. using electronic spatial light modulators [ESLM]
- H04N9/3141—Constructional details thereof
- H04N9/315—Modulator illumination systems
- H04N9/3152—Modulator illumination systems for shaping the light beam
Definitions
- the present invention relates to a two-dimensional image forming apparatus, and more particularly, to an image display apparatus such as a television receiver and a video projector, and an image forming apparatus such as a semiconductor exposure apparatus.
- an image display apparatus such as a television receiver and a video projector
- an image forming apparatus such as a semiconductor exposure apparatus.
- FIG. 7 is a diagram showing a schematic configuration of a conventional laser display.
- This laser display 100 has laser light sources 1 O la to 101 c corresponding to three colors of RGB, and laser light L a to l 0 output from the laser light sources 101 a to 101 c. It has optical modulators 106 a to 106 c for intensity-modulating L c according to primary color signals S a to S c of the input video signal.
- the laser display 100 is composed of a mirror 103 that reflects the laser light La modulated by the optical modulator 106 a and a laser light Lb that is modulated by the optical modulator 106 b.
- the laser display 100 has a condenser lens 107 for condensing the laser light multiplexed by the dichroic mirror 110b, and a condenser lens 107 for condensing the laser light.
- the laser beams L a to L c from the laser light sources 101 a to l 01 c corresponding to the three RGB colors are converted into optical modulators 106 a according to the primary color signals S a to S c of the input video signal.
- the intensity is modulated by .about.106 c and multiplexed by an optical system consisting of a mirror 103 and dichroic mirrors 102a and 102b.
- the laser beam condensed by the condenser lens 107 The light is scanned in the X direction by the polygon scanner 104 and in the y direction by the galvano scanner 105, and a two-dimensional image is displayed on the screen 108.
- the conventional laser display 100 since the light emitted from the RGB laser light sources 101a to 101c is monochromatic light, a laser light source with an appropriate wavelength must be used. This makes it possible to display vivid images with high color purity.
- a conventional laser display has a problem that so-called speckle noise occurs because a laser light source that outputs highly coherent light is used as the light source. This speckle noise is minute noise generated when the laser light is scattered by the screen 108 and the scattered lights scattered by each part on the screen 108 interfere with each other.
- a method for removing such speckle noise is disclosed in, for example, Japanese Patent Application Laid-Open No. Hei 7-29711, in which a diffusing plate is arranged on the optical path of a condensing optical system. Then, a method of removing the speckle noise by rotating the diffusion plate is described.
- the present invention has been made in view of the above-described problems, and prevents image degradation due to speckle noise using a diffusion plate without significantly increasing the device scale. It is an object of the present invention to obtain a two-dimensional image forming apparatus capable of displaying a bright image while effectively suppressing loss of the image. Disclosure of the invention
- the two-dimensional image forming apparatus is an apparatus for forming a two-dimensional image by light modulation, comprising: a coherent light source; a diffuser for diffusing light; and the coherent light source.
- An illumination optical system that irradiates light from a light source to the diffusion plate; a diffusion plate swinging unit that swings the diffusion plate; and the coherent light source that is installed close to the diffusion plate and diffused by the diffusion plate.
- a spatial light modulator that modulates light from the light source.
- the diffuser is swung at a speed that satisfies the following equation, V> dX30 (millimeter Z seconds).
- the two-dimensional image forming apparatus is an apparatus for forming a two-dimensional image by light modulation, comprising: a coherent light source; and a diffusing plate for diffusing light.
- An illumination optical system for irradiating the light from the coherent light source to the diffusion plate; and a space installed near the diffusion plate and modulating the light from the coherent light source diffused by the diffusion plate.
- a light modulation element, and a projection lens for projecting an image obtained by light modulation by the spatial light modulation element onto a certain surface in space, wherein the diffusion plate has a diffusion angle that is substantially equal to the illumination optical system. It is determined based on the typical numerical aperture and the brightness of the projection lens.
- the diffusion angle of the diffusion plate, the substantial numerical aperture of the illumination optical system, and the brightness of the projection lens are in an appropriate relationship, preventing loss of light amount due to shaking of the projection lens and enabling bright image display. This has the effect.
- the two-dimensional image forming apparatus according to claim 3 of the present invention is the two-dimensional image forming apparatus according to claim 2, wherein the diffusion plate has a diffusion angle of 0 and the illumination optics.
- the relationship of ⁇ Z 2 + S in — 1 (NA in) ⁇ 2 XT an — 1 (1/2 f) exists between the effective numerical aperture NA in of the system and the brightness f of the projection lens. It holds.
- the two-dimensional image forming apparatus is an apparatus for forming a two-dimensional image by light modulation, comprising: a coherent light source; a diffusion plate for diffusing light; An illumination optical system that irradiates the light from the coherent light source to the diffusion plate; and a spatial light modulation element that is installed close to the diffusion plate and modulates the light from the coherent light source diffused by the diffusion plate.
- the diffusion angle of the diffuser, the substantial numerical aperture of the illumination optical system, and the screen size in the diagonal direction of the spatial light modulator are in an appropriate relationship. This has the effect of preventing light from being scattered down to a point, and reducing the total light quantity loss in the light transmission path from the coherent light source to the screen.
- the two-dimensional image forming apparatus according to claim 5 of the present invention is the two-dimensional image forming apparatus according to claim 4, wherein the diffusion plate has a diffusion angle of 0 and the illumination optics.
- the relation of XL ⁇ DZ 3 holds.
- the two-dimensional image forming apparatus is an apparatus for forming a two-dimensional image by light modulation, comprising: a coherent light source; a diffusion plate for diffusing light; An illumination optical system for irradiating the light from the coherent light source to the diffuser; and a spatial light modulator installed near the diffuser and modulating the light from the coherent light source diffused by the diffuser. And a projection lens for projecting an image of the spatial light modulator on a certain surface in space, wherein the spatial light modulator and the diffuser have a pitch of transmittance unevenness of the diffuser, and an illumination. They are spaced apart by a g separation, which is determined based on the actual numerical aperture of the optical system.
- the diffusion angle of the diffusion plate, the pitch of the transmittance unevenness of the diffusion plate, the actual numerical aperture of the illumination optical system, and the distance between the diffusion plate and the spatial light modulator become an appropriate relationship, and the local distribution of the diffusion plate This has the effect of preventing deterioration of the image due to uneven transmittance and enabling high-quality image display.
- the two-dimensional image forming apparatus according to claim 7 of the present invention is the two-dimensional image forming apparatus according to claim 6, wherein the pitch P of the transmittance unevenness of the diffusion plate;
- the substantial numerical aperture NA in of the illumination optical system, the spatial light modulator and the above The relationship LX NA i n> P is established between the distance L and the diffusion plate.
- the two-dimensional image forming apparatus according to claim 8 of the present invention is the two-dimensional image forming apparatus according to any one of claims 1 to 7, wherein the illumination optical system includes: It includes an optical integrator.
- the two-dimensional image forming apparatus according to claim 9 of the present invention is the two-dimensional image forming apparatus according to claim 8, wherein the optical integrator includes at least two lens arrays. It consists of
- the two-dimensional image forming apparatus according to claim 10 of the present invention is the two-dimensional image forming apparatus according to claim 8, wherein the optical integrator is a rod-type optical integrator. It consists of one night.
- the two-dimensional image forming apparatus according to claim 11 of the present invention is the two-dimensional image forming apparatus according to any one of claims 1 to 7, wherein the diffusion plate is: It is made of a pseudo-random diffuser plate whose surface has been processed to obtain a desired diffusion angle.
- the two-dimensional image forming apparatus according to claim 12 of the present invention is the two-dimensional image forming apparatus according to claim 11, wherein the pseudorandom diffusion plate includes a transparent substrate. A cell region partitioned on the surface in a lattice shape is processed so that adjacent cell regions have different heights.
- the diffusion angle of the light passing through the diffusion plate can be strictly controlled according to the size of the cell, and the light use efficiency can be improved.
- the two-dimensional image forming apparatus according to claim 13 of the present invention is the two-dimensional image forming apparatus according to claim 12, wherein the two-dimensional image forming apparatus is a pseudo-random image obtained by processing the transparent substrate.
- the diffusing plate is set so that the height difference between adjacent cell regions shifts the phase of light passing through these cell regions by ⁇ / 4.
- the diffusion plate can be manufactured so that the diffusion angle is constant, and there is an effect that the light use efficiency can be improved.
- the two-dimensional image forming apparatus according to claim 14 of the present invention is the two-dimensional image forming apparatus according to claim 11, wherein the pseudo-random diffusion plate has a surface. It has an uneven surface shape whose height changes continuously.
- FIG. 1 is a diagram illustrating a two-dimensional image forming apparatus according to Embodiment 1 of the present invention.
- FIG. 2 is a diagram illustrating an illumination optical system in the two-dimensional image forming apparatus according to the first embodiment.
- FIG. 3 (a) shows the numerical aperture of the illumination light, the numerical aperture of the light emitted from the spatial light modulator, the distance between the diffusion plate and the spatial light modulator in the two-dimensional image forming apparatus of the first embodiment.
- FIG. 3 (b) is a diagram showing a diffusion angle of a diffusion plate in the two-dimensional image forming apparatus of the first embodiment.
- FIG. 4 (a) is a diagram illustrating a numerical aperture of illumination light and a numerical aperture of light emitted from a spatial light modulator in a two-dimensional image forming apparatus according to Embodiment 2 of the present invention.
- FIG. 4 (b) is a diagram illustrating a divergence angle of a diffusion plate in the two-dimensional image forming apparatus according to the second embodiment.
- FIG. 5 is a view for explaining a two-dimensional image forming apparatus according to Embodiment 3 of the present invention, and shows a pseudo random diffusion plate used in the two-dimensional image forming apparatus.
- FIG. 6 (a) is a diagram illustrating a two-dimensional image forming apparatus according to a fourth embodiment of the present invention, and is a plan view illustrating a pseudo random diffusion plate used in the two-dimensional image forming device.
- FIG. 6 (b) is a cross-sectional view illustrating a pseudo random diffusion plate used in the two-dimensional image forming apparatus according to the fourth embodiment.
- FIG. 7 is a schematic configuration diagram showing a conventional two-dimensional image forming apparatus. BEST MODE FOR CARRYING OUT THE INVENTION
- FIG. 1 is a schematic configuration diagram illustrating a two-dimensional image forming apparatus according to Embodiment 1 of the present invention.
- the two-dimensional image forming apparatus 110 shown in FIG. 1 includes laser light sources 1 a to lc corresponding to each of the three primary color signals of RGB, which are coherent light sources, and diffusion plates 6 a to 6 for diffusing light, An illumination optical system for irradiating the laser beams L1a to L1c output from the laser light sources 1a to 1c to the diffusion plates 6a to 6c, respectively. Also, the two-dimensional image forming apparatus 110 is provided with a diffusion plate swinging part 13 a to 13 c for swinging each of the diffusion plates 6 a to 6 c, and a diffusion by the diffusion plates 6 a to 6 c.
- the above laser light sources 1a to 1 pass through the spatial light modulators 7a to 7c, which modulate the light from Lc and are constituted by liquid crystal panels and the like, and the spatial light modulators 7a to 7c.
- the laser light source 1a is a red laser light source that outputs a red laser light L1a
- the laser light source 1b is a green laser light source that outputs a green laser light L1b
- the laser light source lc is a blue laser. It is a blue laser light source that outputs light L1c.
- laser light sources 1a to: Lc include gas lasers such as He—Ne laser, He_Cd laser, and Ar laser, and A1GaI] 1? It is possible to use & ⁇ type semiconductor lasers or SHG (Second Harmonic Generation) lasers that use the output light of a solid-state laser as a fundamental wave.
- the illumination optical system corresponding to the red laser light source 1a is configured to two-dimensionally separate the beam expander 2a for expanding the light from the laser light source 1a and the light expanded by the beam expander 2a.
- an optical integrator 3a for enlarged projection.
- the optical system includes a condenser lens 12a for condensing the light enlarged and projected by the optical integrator 3a, a mirror 15a for reflecting the condensed light, and the mirror 15a.
- a field lens 8a for converting the reflected light from the lens and irradiating the light to the diffusion plate 6a.
- the field lens 8a converts the light incident on the spatial light modulator 7a through the diffusion plate 6a into a convergent beam so that the light can efficiently pass through the opening of the projection lens 10. It is something to convert.
- the illumination optical system corresponding to the green laser light source 1b is configured to two-dimensionally separate the beam expander 2 for expanding the light from the laser light source lb and the light expanded by the beam expander 2b. And an optical integrator 3b for enlarging and projecting.
- the optical system includes a condenser lens 12 for condensing the light enlarged and projected by the light integrator 3b, and a field lens 8 for converting the condensed light and irradiating the light to the diffusion plate 6b. b.
- the field lens 8b converts the light incident on the spatial light modulator 7b via the diffusion plate 6b into a convergent beam so that the light can efficiently pass through the opening of the projection lens 10. Is what you do.
- the illumination optical system corresponding to the blue laser light source 1c is configured to two-dimensionally separate the beam expander 2c for expanding the light from the laser light source 1 and the light expanded by the beam expander 2c. 3c for optical projection.
- the optical system includes a condenser lens 12b for condensing the light enlarged and projected by the optical integrator 3c, a mirror 15c for reflecting the condensed light, and a mirror 15c. and a field lens 8c for converting the reflected light from c and irradiating the light to the diffusion plate 6c.
- the field lens 8c converts the light incident on the spatial light modulator 7c via the diffusion plate 6c into a convergent beam so that the light can efficiently pass through the opening of the projection lens 10. Is what you do.
- FIG. 2 is a schematic diagram showing a simplified illumination optical system corresponding to the red laser light source 1a in the two-dimensional image forming apparatus shown in FIG. Note that the same symbols as in Fig. 1 The symbols indicate the same components.
- the illumination optical system corresponding to the green laser light source 1b and the illumination optical system corresponding to the blue laser light source 1c have the same configuration as the illumination optical system corresponding to the red laser light source 1a. is there.
- the beam expander 2a includes a magnifying lens 21 into which light from a light source is incident, and a collimator lens 22 that converts light emitted from the magnifying lens 21 into a parallel light beam.
- the optical integrator optical system 3a includes two two-dimensional lens arrays 4 and 5.
- the lens array 4 includes a plurality of element lenses 41 arranged in a matrix
- the lens array 5 includes a plurality of element lenses 51 arranged in a matrix.
- Each of the lens arrays 4 and 5 is arranged such that the image of the element lens 41 on the light source side is formed on the spatial light modulation element 7a by the element lens 51 on the spatial light modulation element side. Are placed.
- the collimated light from the collimating lens 22 is distributed such that it is bright near the center on the lens array 4 and dark around it.
- the light irradiated on the lens array 4 is cut by each element lens 41 corresponding to a minute area of the lens array 4, and the light cut by each element lens 41 is all spatial light.
- the light intensity distribution on the spatial light modulator 7 is made uniform by superimposing on the modulator 7a.
- the diffuser oscillating section 13a oscillates the diffuser 6a so as to reduce speckle noise existing in the image projected on the screen. Speckle noise can be effectively reduced by defining operating conditions and the like for swinging the.
- the light that has passed through each of the spatial light modulators 7a to 7c is multiplexed by the dichroic prism 9, and the multiplexed light is transmitted to the screen 1 by the projection lens 10. Projected onto one.
- the light from the laser light source la is expanded by the beam expander 2a, and the expanded light is output by the light integrator 3a.
- Enlarged projection is performed two-dimensionally.
- the light enlarged and projected by the light integrator 3a is condensed by the condenser lens 12a, and enters the diffusion plate 6a via the mirror 15a and the field lens 8a.
- the field lens 8a the light incident on the spatial light modulator 7a via the diffusion plate is converted into a convergent beam so that the light efficiently passes through the opening of the projection lens 10.
- the illumination optical system corresponding to the green laser light source 1b unlike the illumination optical system corresponding to the red laser light source la, the light condensed by the condenser lens 12b is directly applied to the field lens 8a. Incident. In the illumination optical system corresponding to the blue laser light source 1c, the light output from the laser light source 1c is guided to the diffusion plate 6c in exactly the same manner as the illumination optical system corresponding to the red laser light source 1a.
- the diffuser swing units 13a to 13c swing the corresponding diffusers 6a to 6c while projecting the modulated laser light onto the screen. Operate to reciprocate in a certain direction.
- FIG. 3 (a) shows an illumination optical system corresponding to the red laser light source 1a in the two-dimensional image forming apparatus 110 of the first embodiment, and shows a numerical aperture NA in of the illumination optical system, spatial light modulation.
- FIG. 9 is a diagram showing a numerical aperture NA out of light emitted from an element 7a, and a distance L between the diffusion plate 6a and the spatial light modulator 7a.
- FIG. 3 (b) is a diagram showing a diffusion angle 0 of the diffusion plate 6a.
- the same reference numerals as those in FIG. 1 indicate the same parts.
- the operating conditions of the diffuser are the same as those of the illumination optical system corresponding to the red laser light source 1a. Identical.
- the light passing through the diffusion plate 6a is applied to the spatial light modulator 7a, a speckle pattern corresponding to the granularity of the diffuser 6a is formed on the spatial light modulator 7a.
- the speckle noise is suppressed by oscillating the diffusion plate 6a using the diffusion plate oscillating portion 13a. That is, the swing of the diffusion plate 6a causes the speckle pattern to move parallel to the spatial light modulator 7a, and the speckles in the observed image are averaged. At this time, the swing speed of the diffusion plate 6a is defined by its granularity.
- the swing speed of the diffusion plate 6a is determined by the particle size d determined by the granularity of the diffusion plate 6a, for example, the distance between peaks or valleys or valleys in the random surface shape of the diffusion plate 6a. This is the speed at which d can be moved during the afterimage time (about 1/30 second), which is a characteristic of the human eye. Therefore, the swing speed V (mm / s) of the diffuser 6a is
- the rocking speed of the diffusion plate 6a is several hundred micrometers per second to several hundred micrometers. Millimeters per second may be used.
- the swing speed of the diffusion plates 6b and 6c is set in the same manner as the swing speed of the diffusion plate 6a.
- the diffusion angle 0 of the diffusion plate 6 a is limited by the f-number of the projection lens 10. That is, light rays incident at an angle exceeding lZf radians with respect to the f-value of the projection lens 10 are blocked by the projection lens 10. Therefore, in order to sufficiently secure the light use efficiency, the numerical aperture NAout of the light emitted from the spatial light modulator 7a needs to be 1 / f or less. That is, between the diffusion angle ⁇ of the diffusion plate 6 a, the substantial numerical aperture NA in of the illumination optical system including the light integrator 3 a, and the brightness f of the projection lens 10,
- the diffusion angle 0 is defined as an angle (full angle) at which the intensity of the outgoing light when parallel light enters the diffusion plate becomes 1Z2 of the central intensity.
- the projection lens 10 may be about f5.
- the diffusion angles of the diffusion plates 6b and 6c are set in the same manner as the diffusion angle of the diffusion plate 6a.
- the distance between the diffusion plate 6a and the spatial light modulator 7a is determined.
- the distance must be specified.
- part of the light scattered by the diffuser 6a extends to the outside of the image display portion of the spatial light modulator 7a. Scattered, resulting in total light loss.
- the distance L between the diffuser 6a and the spatial light modulator 7a must be such that the diffusion angle of the diffuser 6a is 0 and the illumination optics including the light integrator 3a A substantial numerical aperture NA in the system, a distance L between the diffuser 6a and the spatial light modulator 7a, and a diagonal length D of the image display range of the spatial light modulator 7a,
- the diffusion plate 6a When a structure having a random uneven pattern formed on the surface is used as the diffusion plate 6a, the local diffusion angle and transmittance differ depending on the location on the diffusion plate 6a. For this reason, if the diffusion plate 6a is located near the spatial light modulator 7a, the uneven distribution of the transmittance causes a variation in the light intensity distribution on the spatial light modulator 7a, and The movement of the brightness unevenness corresponding to the movement of the plate 6a appears on the screen and is superimposed on the image. In order to prevent this, the diffusion plate 6a must be installed at a certain distance or more from the spatial light modulator 7a.
- the diffusion plate 6a and the spatial light modulator 7a By taking a sufficient distance L between them, the brightness unevenness due to the light from each element lens diffused by the diffusion plate 6a is averaged. That is, the distance L between the diffusion plate 6a and the spatial light modulator 7a is determined by the pitch P of the transmittance unevenness of the diffusion plate 6a and the light input The difference between the substantial numerical aperture NA in of Tegray 3a and the S giant separation L between the diffuser 6a and the spatial light modulator 7a,
- the distance L between the diffusion plate 6a and the spatial light modulator 7a is calculated from the above (Equation 3) and (Equation 4)
- the pitch P of the transmittance unevenness of a normal diffuser is less than 10 times the granularity d of the diffuser 6a, for example, an illumination optical system including a light integrator 3a with a numerical aperture of 0.1 was used.
- the distance between the diffusion plate 6a and the spatial light modulator 7a is several hundred micrometers to 10 millimeters or more. Should be kept apart.
- the distance between the diffuser 6b and the spatial light modulator 7b and the distance between the diffuser 6c and the spatial light modulator 7c are also the distance between the diffuser 6a and the spatial light modulator 7a.
- the laser light sources 1 a to lc of three colors of RGB, the diffusion plates 6 a to 6 c for diffusing light, and the light from the laser light source 1 are applied to the diffusion plate.
- the swing speed of the diffusion plates 6 a to 6 c is set between the particle size d of the diffusion plate and the speed V of swinging the diffusion plates 6 a to 6 c. > Since dX 30 (millimetres / second) is established, speckle noise in the image projected on the screen 11 can be effectively reduced.
- the diffusion angle 0 of the diffusion plates 6 a to 6 c is determined based on the substantial numerical aperture NA in of the illumination optical system and the brightness f of the projection lens 10.
- NA in of the illumination optical system the substantial numerical aperture NA in of the illumination optical system
- the brightness f of the projection lens 10 the diffusion angle of the diffuser, the effective numerical aperture of the illumination optical system, and the brightness of the projection lens are in an appropriate relationship, preventing loss of light amount due to shaking by the projection lens, and displaying a bright image. It is possible.
- the distance L between the spatial light modulators 7a to 7c and the diffusion plates 6a to 6c is defined as a diffusion angle ⁇ of the diffusion plate
- the numerical aperture NA in and the screen size D in the diagonal direction of the spatial light modulator are determined based on the actual numerical aperture NA in, the diffusion angle of the diffuser, the actual numerical aperture of the illumination optical system, and the space.
- the screen size in the diagonal direction of the light modulator is in an appropriate relationship, preventing light from being scattered outside the image display part of the spatial light modulator by the diffuser, and transmitting light from the laser light source to the screen. It is possible to reduce the total light amount loss in the route.
- the distance L between the spatial light modulators 7a to 7c and the diffusion plates 6a to 6c is defined as the pitch of the transmittance unevenness of the diffusion plate, and the illumination optics.
- the actual numerical aperture of the system is determined based on NA in, so the diffusion angle of the diffuser, the pitch of the transmittance unevenness of the diffuser, the substantial numerical aperture of the illumination optical system, the diffuser and the spatial light.
- the distance from the modulating element is in an appropriate relationship, preventing image deterioration due to local transmittance unevenness of the diffusion plate, and enabling high-quality image display.
- the illumination optical system includes an optical integrator, uniform illumination on the spatial light modulator can be realized.
- FIGS. 4 (a) and 4 (b) are diagrams for explaining a two-dimensional image forming apparatus according to Embodiment 2 of the present invention
- FIG. 4 (a) is a diagram showing a numerical aperture of illumination light. NA in and the numerical aperture NA out of the light emitted from the spatial light modulator 7a are shown.
- FIG. 4 (b) shows the diffusion angle 0 of the diffusion plate 6a.
- the same or corresponding components as those in FIG. 3 are denoted by the same reference numerals, and description thereof will be omitted.
- the illumination optical system corresponding to the red laser light source 1a of the two-dimensional image forming apparatus 120 of the second embodiment corresponds to the red laser light source 1a of the two-dimensional image forming apparatus 110 of the first embodiment. It has a rod-type optical integrator 14a and a projection lens 15a instead of the optical integrator 3a and the condenser lens 12a of the illumination optical system.
- the rod-type optical integrator 14a is a rectangular This is a transparent medium having a cross section, in which a reflection surface for reflecting light is formed. Inside the medium, the light magnified by the magnifying lens 21 is internally reflected, and its light intensity distribution is uniform at the exit end face. The light is emitted as a uniform distribution.
- the projection lens 15a modulates the light from the rod-type optical integrator 14a such that the light-emitting end face of the light is in one-to-one correspondence with the image display portion of the spatial light modulator 7a. It is projected onto the element 7.
- the illumination optical system corresponding to the green laser light source 1b and the blue laser light source 1c of the two-dimensional image forming apparatus 120 of the second embodiment is the same as that of the second embodiment.
- the light of the illumination optical system corresponding to the green laser light source 1b and the blue laser light source 1c of the two-dimensional image forming apparatus 110 of the first embodiment It has a rod-type optical integrator and a projection lens instead of the integrators 3b and 3c and the condenser lenses 12b and 12c.
- light emitted from the red laser light source, the green laser light source, and the blue laser light source is The light enters the diffuser through the corresponding illumination optical system, and is diffused by the diffuser.
- the spatial light modulator is illuminated by the laser light diffused by the diffuser, and a two-dimensional image is formed on each spatial light modulator.
- the light passing through each spatial light modulator is multiplexed by a dichroic prism, and the multiplexed light is projected on a screen by a projection lens.
- the light from the laser light source la enters the rod-type optical integrator 14a via the magnifying lens 21 and the rod-type optical integrator 1a. Internal reflection is repeated within 4a, and the light is emitted with a uniform light intensity distribution on the emission end face.
- the emitted light is projected by the projection lens 15a onto the spatial light modulator 7a such that the exit side end face thereof corresponds to the image display portion of the spatial light modulator 7a on a one-to-one basis.
- the light illuminating the spatial light modulator 7a has a uniform light intensity distribution.
- the illumination optical system corresponding to the green laser light source is different from the illumination optical system corresponding to the red laser light source la, as shown in Fig. 1, and condensed by a condenser lens 12b.
- the emitted light directly enters the field lens 8a.
- the illumination optical system corresponding to the blue laser light source 1c the light output from the laser light source 1c is guided to the diffusion plate 6c in exactly the same manner as the illumination optical system corresponding to the red laser light source la.
- a bright and noise-free high-quality image display can be performed by defining the operating conditions and the like for swinging the diffusion plates 6a to 6c.
- the illumination optical system is made of a transparent medium such as glass having a rectangular cross section instead of the optical integrator having the two two-dimensional lens arrays 4 and 5 of the first embodiment. Since it includes a rod-type light integrator, uniform illumination on the spatial light modulator can be achieved with a simple configuration.
- FIG. 5 is a view for explaining a two-dimensional image forming apparatus according to Embodiment 3 of the present invention, and shows a diffusion plate constituting the two-dimensional image forming apparatus.
- Embodiments 1 and 2 The difference from Embodiments 1 and 2 is that, in Embodiments 1 and 2, a frosted glass-like diffusion plate having a random irregular shape on the surface is used as the diffusion plate. Is that a pseudo-random diffuser plate 18 having a regular uneven surface is used.
- the diffusion plates of Embodiments 1 and 2 are usually manufactured by randomly roughening the surface of a transparent substrate such as glass or resin, whereas the pseudo-random diffusion plate 18 of Embodiment 3 is The surface of the transparent substrate is divided into a lattice shape, and each of the divided small regions is processed so that its height is different from the height of an adjacent small region, and irregularities are formed in the surface region. That is, the surface of the pseudo-random diffuser plate 18 is divided into two-dimensional lattice cells 19, and the height thereof is set randomly so that the phase of light passing through each cell changes randomly. You.
- the two-dimensional image forming apparatus of the third embodiment differs from the two-dimensional image forming apparatuses of the first and second embodiments only in that a pseudo random diffusion plate is used as a diffusion plate.
- a pseudo random diffusion plate is used as a diffusion plate.
- the advantage of using the pseudo-random diffusion plate 18 shown in FIG. 5 is that the diffusion angle of light passing through the pseudo-random diffusion plate 18 can be strictly controlled by the size of the cell. That is, light passing through the pseudo-random diffuser 18 is diffused according to the following intensity distribution represented by (Equation 6).
- dc is the cell pitch of the grid cells 19, and 0 is the diffusion angle.
- the cell pitch dc the cell pitch dc
- the pseudo-random diffuser plate 18 can be manufactured using a photolithography method and an etching method used in a normal semiconductor process. In this case, a method of forming a concavo-convex pattern on a glass plate can be used, in which case, as shown in Fig.
- the depth of the lattice cell 19 is equivalent to a phase shift of 0,% / 2, and 3 vertices / 4. If the depth is set to the desired value, the surface of the glass plate will be etched twice, that is, equivalent to tZ4 and phase shift. And etching process to a depth etched by the etching process to a depth etching corresponding to 7T / 2 phase shift, the pseudorandom diffuser 1 8 can be easily manufactured.
- the pseudo random diffusion plate 18 is used as the diffusion plate, a uniform diffusion angle and transmittance can be realized, and a bright image with less noise can be realized. Display becomes possible.
- the diffusion plate 18 since the cell regions partitioned in a grid on the surface of the pseudo random diffusion plate 18 are processed so that adjacent cell regions have different heights, the diffusion plate 18 The diffusion angle of light passing through the cell can be strictly controlled by the size of the cell, and this has the effect of improving light use efficiency.
- the difference in height between adjacent cell regions on the surface of the pseudo random diffusion plate 18 is set so that the phase of light passing through these cell regions is shifted by 7TZ4. Therefore, the diffusion plate can be manufactured stably so that the diffusion angle becomes constant, and there is an effect that the light use efficiency can be improved.
- FIG. 6 (a) and 6 (b) are diagrams illustrating a two-dimensional image forming apparatus according to Embodiment 4 of the present invention
- FIG. 6 (a) is a diagram illustrating the two-dimensional image forming apparatus
- FIG. 6 (b) is a plan view showing a diffuser plate included therein
- FIG. 6 (b) is a view showing a cross section taken along AA ′ of FIG. 6 (a).
- the two-dimensional image forming apparatus according to the fourth embodiment is different from the two-dimensional image forming apparatus according to the third embodiment in that the pseudorandom diffusion plate 18 has a structure in which the unevenness of the surface is smooth. 0 is used.
- the two-dimensional image forming apparatus according to the fourth embodiment uses a pseudo random diffusion plate 20 having a different surface shape from the diffusion plate of the two-dimensional image forming apparatus according to the third embodiment. Since this embodiment is different from the third embodiment, advantages of using the pseudo random diffusion plate 20 will be described below.
- the diffraction angle of the diffracted light depends on the size d of the granularity of the uneven shape.
- the diffraction angle can be suppressed to a certain value or less by setting the graininess size d to be a certain value or less, and as a result, the f value of the projection lens 10 is exceeded. There is no light and the light utilization efficiency is improved.
- the pseudo random diffusion plate 20 having a concave and convex shape that smoothly changes first, the glass substrate surface is randomly distributed so that the glass substrate surface becomes a step shape having a random in-plane distribution. It is processed so as to have a finished surface shape.
- a photoresist is spin-coated on the surface of a glass substrate, and a resist pattern having a random in-plane distribution is produced by a photolithography method.
- the fabricated resist pattern is transferred to the surface shape of the glass substrate by a method such as ion beam etching or wet etching.
- the surface of the glass substrate manufactured in this manner has a step shape in which concave portions and convex portions are randomly distributed.
- the surface of the glass substrate is polished so that the unevenness of the surface becomes smooth.
- a soft material such as puff is used for the polishing plate, as shown in Fig. 6 (b)
- the step shape on the substrate surface where the concaves and convexes are randomly distributed changes the height of the surface. Has a gradual uneven shape.
- the depth of the recesses on the substrate surface decreases, so in order to obtain the desired depth Dx of the recesses, the depth of the recesses on the substrate surface prepared by etching should be reduced to the desired depth DX 2 to 3 times better.
- the pseudo-random diffusion plate 20 having a structure in which the unevenness of the surface is smooth is used as the diffusion plate, a large difference caused by a step between adjacent uneven portions on the surface of the diffusion plate.
- the generation of high-order diffracted light scattered at an angle can be avoided, and the light use efficiency can be improved by eliminating the loss of the light amount due to the shaking in the projection lens 10.
- a color image projection device has been described as an example.
- the present invention is also applicable to a monochromatic laser image projection device, for example, a semiconductor exposure device.
- the two-dimensional image forming apparatus is a projection type display in which a projection optical system and a screen are provided separately.
- Rear-projection type two-dimensional image forming apparatus in which an image forming apparatus and a transmission screen are combined.
- the two-dimensional image forming apparatus of the present invention enables bright and noise-free high-quality image display, and is used in image forming apparatuses such as television receivers and video projectors and image forming apparatuses such as semiconductor exposure apparatuses. It is useful.
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Multimedia (AREA)
- Signal Processing (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Projection Apparatus (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
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US10/565,390 US7271962B2 (en) | 2003-07-22 | 2004-07-22 | Two-dimensional image formation apparatus |
JP2005511943A JP4158987B2 (ja) | 2003-07-22 | 2004-07-22 | 2次元画像形成装置 |
EP04771006A EP1655636B1 (en) | 2003-07-22 | 2004-07-22 | Two-dimensional image forming apparatus |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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JP2003-277378 | 2003-07-22 | ||
JP2003277378 | 2003-07-22 |
Publications (1)
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WO2005008330A1 true WO2005008330A1 (ja) | 2005-01-27 |
Family
ID=34074636
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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PCT/JP2004/010746 WO2005008330A1 (ja) | 2003-07-22 | 2004-07-22 | 2次元画像形成装置 |
Country Status (6)
Country | Link |
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US (1) | US7271962B2 (ja) |
EP (1) | EP1655636B1 (ja) |
JP (1) | JP4158987B2 (ja) |
KR (1) | KR20060037389A (ja) |
CN (1) | CN100524000C (ja) |
WO (1) | WO2005008330A1 (ja) |
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JP2019061269A (ja) * | 2013-07-09 | 2019-04-18 | Agc株式会社 | 光学素子及び投影装置 |
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KR102690986B1 (ko) * | 2016-03-23 | 2024-08-02 | 삼성디스플레이 주식회사 | 헤드 마운트 장치 및 표시 장치 |
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Also Published As
Publication number | Publication date |
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EP1655636B1 (en) | 2011-12-07 |
US7271962B2 (en) | 2007-09-18 |
JP4158987B2 (ja) | 2008-10-01 |
KR20060037389A (ko) | 2006-05-03 |
EP1655636A1 (en) | 2006-05-10 |
CN1826557A (zh) | 2006-08-30 |
US20060227293A1 (en) | 2006-10-12 |
JPWO2005008330A1 (ja) | 2006-09-07 |
EP1655636A4 (en) | 2006-11-15 |
CN100524000C (zh) | 2009-08-05 |
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