WO2004088715A3 - Tapered structure for providing coupling between external optical device and planar optical waveguide and method of forming the same - Google Patents
Tapered structure for providing coupling between external optical device and planar optical waveguide and method of forming the same Download PDFInfo
- Publication number
- WO2004088715A3 WO2004088715A3 PCT/US2004/009086 US2004009086W WO2004088715A3 WO 2004088715 A3 WO2004088715 A3 WO 2004088715A3 US 2004009086 W US2004009086 W US 2004009086W WO 2004088715 A3 WO2004088715 A3 WO 2004088715A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- tapered
- silicon
- substrate
- coupling
- forming
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/122—Basic optical elements, e.g. light-guiding paths
- G02B6/1228—Tapered waveguides, e.g. integrated spot-size transformers
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B6/13—Integrated optical circuits characterised by the manufacturing method
- G02B6/136—Integrated optical circuits characterised by the manufacturing method by etching
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/30—Optical coupling means for use between fibre and thin-film device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
- G02B2006/12166—Manufacturing methods
- G02B2006/12195—Tapering
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/34—Optical coupling means utilising prism or grating
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4214—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms the intermediate optical element having redirecting reflective means, e.g. mirrors, prisms for deflecting the radiation from horizontal to down- or upward direction toward a device
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Optical Integrated Circuits (AREA)
- Optical Couplings Of Light Guides (AREA)
Abstract
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US45850303P | 2003-03-28 | 2003-03-28 | |
US60/458,503 | 2003-03-28 | ||
US10/775,872 | 2004-02-10 | ||
US10/775,872 US6993225B2 (en) | 2004-02-10 | 2004-02-10 | Tapered structure for providing coupling between external optical device and planar optical waveguide and method of forming the same |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2004088715A2 WO2004088715A2 (en) | 2004-10-14 |
WO2004088715A3 true WO2004088715A3 (en) | 2005-09-09 |
Family
ID=33135101
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2004/009086 WO2004088715A2 (en) | 2003-03-28 | 2004-03-25 | Tapered structure for providing coupling between external optical device and planar optical waveguide and method of forming the same |
Country Status (1)
Country | Link |
---|---|
WO (1) | WO2004088715A2 (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7454102B2 (en) * | 2006-04-26 | 2008-11-18 | Honeywell International Inc. | Optical coupling structure |
JP6730801B2 (en) * | 2015-12-03 | 2020-07-29 | 新光電気工業株式会社 | Method of manufacturing optical waveguide |
EP3339923B1 (en) | 2016-12-22 | 2022-03-09 | IMEC vzw | Optical interconnect with high tolerance |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5513288A (en) * | 1992-06-15 | 1996-04-30 | Robert Bosch Gmbh | Optical polymer element for coupling photoelements onto integrated-optical circuits |
US5515464A (en) * | 1992-07-06 | 1996-05-07 | Sheem Sang K | Optical fiber interconnections using self-aligned core-extensions |
US5910012A (en) * | 1995-11-30 | 1999-06-08 | Nec Corporation | Waveguide type semiconductor photodetecting device method for fabricating |
US6760529B2 (en) * | 2001-12-11 | 2004-07-06 | Intel Corporation | Three-dimensional tapered optical waveguides and methods of manufacture thereof |
-
2004
- 2004-03-25 WO PCT/US2004/009086 patent/WO2004088715A2/en active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5513288A (en) * | 1992-06-15 | 1996-04-30 | Robert Bosch Gmbh | Optical polymer element for coupling photoelements onto integrated-optical circuits |
US5515464A (en) * | 1992-07-06 | 1996-05-07 | Sheem Sang K | Optical fiber interconnections using self-aligned core-extensions |
US5910012A (en) * | 1995-11-30 | 1999-06-08 | Nec Corporation | Waveguide type semiconductor photodetecting device method for fabricating |
US6760529B2 (en) * | 2001-12-11 | 2004-07-06 | Intel Corporation | Three-dimensional tapered optical waveguides and methods of manufacture thereof |
Also Published As
Publication number | Publication date |
---|---|
WO2004088715A2 (en) | 2004-10-14 |
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