WO2004050959A2 - Reduction of surface oxidation during electroplating - Google Patents
Reduction of surface oxidation during electroplating Download PDFInfo
- Publication number
- WO2004050959A2 WO2004050959A2 PCT/US2003/036845 US0336845W WO2004050959A2 WO 2004050959 A2 WO2004050959 A2 WO 2004050959A2 US 0336845 W US0336845 W US 0336845W WO 2004050959 A2 WO2004050959 A2 WO 2004050959A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- metal
- phosphorus
- deposit
- substrate
- metal coating
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D3/00—Electroplating: Baths therefor
- C25D3/02—Electroplating: Baths therefor from solutions
- C25D3/56—Electroplating: Baths therefor from solutions of alloys
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B15/00—Layered products comprising a layer of metal
- B32B15/01—Layered products comprising a layer of metal all layers being exclusively metallic
- B32B15/013—Layered products comprising a layer of metal all layers being exclusively metallic one layer being formed of an iron alloy or steel, another layer being formed of a metal other than iron or aluminium
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/24—Reinforcing the conductive pattern
- H05K3/244—Finish plating of conductors, especially of copper conductors, e.g. for pads or lands
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12708—Sn-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12708—Sn-base component
- Y10T428/12715—Next to Group IB metal-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12708—Sn-base component
- Y10T428/12722—Next to Group VIII metal-base component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/12—All metal or with adjacent metals
- Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
- Y10T428/12771—Transition metal-base component
Definitions
- the present invention relates to a solution and process for reducing or minimizing surface oxidation of a metal deposit provided by a plating process such as electroplating.
- the solutions and processes also provide improved deposit properties including appearance and solderability.
- Electroplated tin and tin alloy coatings have been used in electronics and other applications such as wire, and continued steel strip for many years. In electronics, they have been used as a solderable and corrosion resistive surface finish for contacts and connectors. They are also used a lead finish for integrated circuit ("IC") fabrication. In addition, a thin layer of tin or tin alloy is applied as the final step for passive components such as capacitors and transistors.
- solderability defined as the ability of the surface finish to melt and make a good solder joint to other components without defects that would impair the electrical or mechanical connection.
- Codeposited carbon is determined by the plating chemistry one chooses to use.
- Bright finishes contain higher carbon contents than matte finishes. Matte finishes are normally rougher than the bright finishes, and provide an increased surface area that results in the formation of more surface oxides than typically are formed with a bright finish.
- the plater thus has a trade off between potential amount of surface oxide and surface finish.
- Intermetallic compound formation is a chemical reaction between the tin or tin alloy coating and the substrate. The rate of formation depends on temperature and time as well. Higher temperatures and longer times result in a thicker layer of intermetallic compounds.
- the temperature and time of subsequent part treatment after plating of a tin or tin alloy deposit is normally dictated by the assembly specifications and existing manufacturing layout and practice. For example, in "two tone" leadframe technology, after the tin or tin alloy plating, the entire package will have to go through many process steps (i.e., a long period of time for such treatments) which require multiple thermal excursions at temperatures as high as 175°C. Inevitably, more and/or thicker surface oxides form, and this in turn reduces the solderability of the tin or tin alloy deposit. In current processing, it is not possible to omit these additional steps since the final components or assemblies will not be complete.
- One known way to do this is to introduce a conformal coating on the surface of the tin or tin alloy deposit.
- This technology can be summarized in two general categories: one that applies a precious metal coating and the other that applies an organic coating.
- the first category is undesirable for protection of tin or tin alloy deposits because it introduces an expensive, extra process step.
- the second category is also undesirable because it will inevitably introduce impurities onto other critical areas of the leadframe or electrical component due to the non-selective nature of the organic coating that is deposited. These impurities have proven to be detrimental to the subsequent leadframe and IC assembly processes.
- the invention generally relates to methods of providing improved metal coatings or metal deposits on a substrate and to articles of the metal-coated substrates.
- the invention relates to a method for enhancing the solderability of a metal coating on a substrate by incorporating trace amounts of phosphorus in the metal coating to reduce surface oxide formation during subsequent heating and thus enhance long term solderability of the metal coating.
- the phosphorus is advantageously provided in the metal coating by incorporating a source of phosphorus in a solution that is used to provide the metal coating on the substrate, so that the phosphorus is provided with the metal coating on the substrate from the solution.
- the metal coating is a metal deposit provided by electroplating and the source of phosphorus is added to a solution of ions of the metal so that phosphorus can be co-deposited along with the metal during electroplating.
- the source of phosphorus is typically a compound of phosphorus that is soluble in the solution and which provides ppm levels of phosphorus in the metal deposit.
- the metal deposit is produced by electroplating at a current density of no greater than about 2000 ASF.
- Another embodiment of the invention relates to the plating solution that is used to provide a metal deposit on a substrate.
- This solution incorporates a source of phosphorus therein in an amount to provide trace amounts of phosphorus in the metal deposit to reduce surface oxide formation and thus enhance long term solderability of the metal deposit.
- the phosphorus is typically present in the resulting metal deposit in a detectable amount but less than about 200 ppm. It can also be much lower than this in certain metal deposits.
- the invention also relates to an article comprising a metal coating on a substrate wherein the metal coating includes trace amounts of phosphorus therein to reduce surface oxide formation and thus enhance long term solderability of the metal deposit.
- the article is produced by electroplating.
- the metal of the metal coating, metal deposit or articles of the invention preferably comprises tin or a tin alloy, since these are typically utilized when soldering of the article is necessary for further manufacture. Deposits of nickel, cobalt, copper or their alloys are also desirable.
- This invention realizes the importance of incorporating trace amounts or ppm levels of phosphorus in metal or metal alloy deposits or plated coatings. This element significantly reduces surface oxidation of such coatings or deposits therefore improving long term solderability. Since phosphorus preferably can be added to the metal coating or deposit through the same manufacturing step that is used to deposit the metal, it does not require additional processing steps nor does it introduce impurities onto the entire package.
- trace amounts is used to mean a detectable amount of an element such as phosphorus that is present in a metal deposit and which amount provides a measurable improvement in the long term solderability of the metal deposit.
- ppm levels stands for the amount in parts per million range of an element such as phosphorus that is present in a metal deposit to provide a measurable improvement in the long term solderability of the metal deposit.
- the trace amounts or ppm levels can vary widely depending upon the specific metal deposit. For example, in nickel deposits the amount will be on the order of 200 ppm or less while for tin and tin alloys it will be on the order of 50 ppm or less.
- This additive can be used for any metal deposit that is to be soldered. This includes, among others, tin, nickel, copper, cobalt, tungsten, zinc, or one of their alloys. Soldering is basically an attachment procedure that usually involves three materials: (1) the substrate; (2) the component or other device which is desired to be attached to the substrate; and (3) the soldering material itself.
- the soldering material itself usually is a tin or tin alloy, but the substrate or component/device can be made of other metals.
- phosphorous is added to the metal deposit to improve the solderability properties of substrates that contain such deposits and/or the components/devices to be attached to them.
- the substrate or component/device material comprises an electroplatable material such as copper, steel, or stainless steel.
- the invention reduces the surface oxidation of the substrate and/or device which improves its ability to be soldered with the soldering material. It can also reduce the formation of intermetallic compounds for his purpose. Tin and tin alloy deposits are preferred as metal deposits since they act as solders on their own or can be subjected to reflow when heated above their relatively low melting temperatures. However, the reductions in surface oxidation is useful for the other metals recited since it is easier for solders to adhere to those metals due to reduced interference from oxidized surfaces. For example, when phosphorus is present in a nickel deposit, it may eliminate the need for a further coating of tin, a tin alloy or a precious metal.
- Tin and tin alloys are known to have various plating chemistries that can produce various characteristics in the resulting plated deposits. These include appearances of matte, bright and others (e.g., satin bright). These can be achieved by a number of known chemistries based on sulfonates, mixed acids, sulfates, halogens, fluoborates, gluconates, citrates and the like. For environmental reasons, sulfonic acids, such as alkyl or alkylol sulfonic acids (e.g., methane sulfonic acid), are preferred. In addition, the skilled artisan would know that these baths may contain various additives to facilitate or enhance plating performance.
- sulfonic acids such as alkyl or alkylol sulfonic acids (e.g., methane sulfonic acid)
- these baths may contain various additives to facilitate or enhance plating performance.
- Examples of preferred chemistries include US patents 6,251,253; 6,248,228; 6,183,619; and 6,179,185; the content of each of which is expressly incorporated herein by reference thereto. These patents also disclose plating solutions and processes for other metals besides tin.
- the plating solution can be modified with the addition of a small amount of a source of phosphorus.
- the phosphorus source can be an organic or inorganic phosphorus compound that is at least partially and preferably highly or fully soluble in the plating solution.
- Various alkali or alkaline earth phosphites or phosphates can be used, with hypophosphites being preferred.
- Hypophosphorous acid as well as pyrophosphides can be used, if desired. These compounds can be used in a wide rage of concentrations, and the skilled artisan can conduct routine tests to determine the optimum concentration for any particular bath formulation.
- phosphorus can be deposited over a wide range of electroplating conditions depending upon the specific metal to be plated. Generally, current densities of less than about 2000ASF are used. Depending upon the specific plating equipment, current densities of less than 1000 ASF, less than 500ASF or even between 25 and 150ASF can be used. With higher current densities, metal deposits are made more quickly so that lower amounts of phosphorus found in the deposit.
- the bath formulator should add a sufficient amount of the phosphorus source so that the amount of phosphorus in the deposit is detectable. One way to do this is to increase the amount of phosphorus source in the bath, but this is not preferred since it can affect bath stability of other performance criteria. Instead, it is much easier to control the current density to the desirable ranges mentioned above since small amounts of the phosphorus source can be used without affecting or significantly impacting overall bath chemistry.
- the substrates to be plated can vary over a wide variety.
- the usual metal substrates such as copper steel or stainless steel are typically used, but the invention is also operable on composite substrates that include conductive and non-conductive or electroplatable and non-electroplatable portions. This provides the plater with a number of options for manufacturing may different types of parts or articles with the phosphorus containing deposits of the invention.
- the resulting plated products can be used in a number of different applications in the fields of electronics, wire coating, steel plating, tinplate and others where enhanced solderability of reflow properties are needed. It has been found that incorporating phosphorus in the deposit helps to significantly reduce surface oxidation in deposits that have matte or bright finishes. As noted, this results in improved solderability performance.
- Example 1 The following electroplating solution was prepared for obtaining a satin/matte tin deposit:
- Example 3 The following electroplating solution was prepared for obtaining a bright tin deposit:
- Example 4 The following electroplating solution was prepared for obtaining a bright tin-lead deposit:
- Hull cell plating 5 A, 1 minute at 110°F with paddle agitation, copper and steel Hull cell panels
- Leadf ame plating 75 ASF: copper alloy and stainless steel substrates. Two sets of samples were plated: controls and samples containing P. The control samples were obtained from respective baths without the addition of the phosphorus source (NaH 2 PO 2 ). The NaH 2 PO 2 concentrations that were found to be beneficial in these examples are between 1-5 g/1.
- P content determination A wet method was used where the deposit is dissolved in nitric acid and ICP detection techniques are used to measure phosphorus content. The results showed that phosphorus content in each sample ranged from 1 to 7 ppm. In addition, reduced surface oxidation was encountered.
- solderability Measures of solderability were determined using the Dip and Look, Wetting Balance and Surface Mount Solderability Test method per IPC/JEDEC Industry Standard J-STD-002A.
- the control strips i.e., the ones with deposits that did not have added phosphorus, showed discoloration after 5 hrs, and the discoloration was worse when the plating current density was below 100 ASF.
- the stainless steel strips bearing deposits that contained phosphorus did not change color under the same conditions across the entire Hull cell panel. Furthermore, these strips did not change color after 7 hrs.
- the copper Hull cell panels with the phosphorus containing deposits showed a little yellowish color at current densities below 100 ASF, but they looked appreciably better than the controls.
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Electroplating Methods And Accessories (AREA)
- Electroplating And Plating Baths Therefor (AREA)
- Other Surface Treatments For Metallic Materials (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Lead Frames For Integrated Circuits (AREA)
Abstract
Description
Claims
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004557216A JP2006508252A (en) | 2002-11-27 | 2003-11-18 | Reduction of surface oxidation during electroplating |
AU2003291062A AU2003291062A1 (en) | 2002-11-27 | 2003-11-18 | Reduction of surface oxidation during electroplating |
EP03783649A EP1576203A4 (en) | 2002-11-27 | 2003-11-18 | Reduction of surface oxidation during electroplating |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/305,547 | 2002-11-27 | ||
US10/305,547 US6982030B2 (en) | 2002-11-27 | 2002-11-27 | Reduction of surface oxidation during electroplating |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2004050959A2 true WO2004050959A2 (en) | 2004-06-17 |
WO2004050959A3 WO2004050959A3 (en) | 2005-02-24 |
Family
ID=32325454
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2003/036845 WO2004050959A2 (en) | 2002-11-27 | 2003-11-18 | Reduction of surface oxidation during electroplating |
Country Status (7)
Country | Link |
---|---|
US (2) | US6982030B2 (en) |
EP (1) | EP1576203A4 (en) |
JP (1) | JP2006508252A (en) |
KR (1) | KR20050075445A (en) |
CN (1) | CN100478492C (en) |
AU (1) | AU2003291062A1 (en) |
WO (1) | WO2004050959A2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1716949A1 (en) | 2005-04-20 | 2006-11-02 | Rohm and Haas Electronic Materials, L.L.C. | Immersion method |
EP1762640A2 (en) | 2005-09-07 | 2007-03-14 | Rohm and Haas Electronic Materials LLC | Metal duplex and method |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6982030B2 (en) * | 2002-11-27 | 2006-01-03 | Technic, Inc. | Reduction of surface oxidation during electroplating |
KR20070006747A (en) * | 2004-01-21 | 2007-01-11 | 엔쏜 인코포레이티드 | Preserving solderability and inhibiting whisker growth in tin surfaces of electronic components |
US20050249969A1 (en) * | 2004-05-04 | 2005-11-10 | Enthone Inc. | Preserving solderability and inhibiting whisker growth in tin surfaces of electronic components |
US20050268991A1 (en) * | 2004-06-03 | 2005-12-08 | Enthone Inc. | Corrosion resistance enhancement of tin surfaces |
WO2006113816A2 (en) * | 2005-04-20 | 2006-10-26 | Technic, Inc. | Underlayer for reducing surface oxidation of plated deposits |
JP2009500527A (en) * | 2005-07-11 | 2009-01-08 | テクニック・インコーポレイテッド | Tin electrodeposition with properties or characteristics that minimize tin whisker growth |
US9175400B2 (en) * | 2009-10-28 | 2015-11-03 | Enthone Inc. | Immersion tin silver plating in electronics manufacture |
CN104060309A (en) * | 2014-06-13 | 2014-09-24 | 安徽省宁国天成电工有限公司 | Surface tinning method of metallic copper wire |
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JPS54115787A (en) * | 1978-02-28 | 1979-09-08 | Tokyo Tokushu Densen Kk | Tin plated conductor |
US4822560A (en) * | 1985-10-10 | 1989-04-18 | The Furukawa Electric Co., Ltd. | Copper alloy and method of manufacturing the same |
JPH04267009A (en) * | 1991-02-22 | 1992-09-22 | Hitachi Cable Ltd | Tin or solder plated copper wire |
US5486721A (en) * | 1993-04-10 | 1996-01-23 | W.C. Heraeus Gmbh | Lead frame for integrated circuits |
US6099624A (en) * | 1997-07-09 | 2000-08-08 | Elf Atochem North America, Inc. | Nickel-phosphorus alloy coatings |
JP2002180226A (en) * | 2000-12-12 | 2002-06-26 | Totoku Electric Co Ltd | Lead-free tin alloy solder plated wire |
US6673470B2 (en) * | 2000-11-08 | 2004-01-06 | Kawasaki Steel Corporation | Surface treated tin-plated steel sheet and surface treatment solution |
US6726827B2 (en) * | 2002-01-17 | 2004-04-27 | Lucent Technologies Inc. | Electroplating solution for high speed plating of tin-bismuth solder |
US6730209B2 (en) * | 2002-02-22 | 2004-05-04 | Lucent Technologies Inc. | Solder electroplating bath including brighteners having reduced volatility |
US6808614B2 (en) * | 2002-01-17 | 2004-10-26 | Lucent Technologies Inc. | Electroplating solution for high speed plating of tin-copper solder |
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JPS60121293A (en) * | 1983-12-03 | 1985-06-28 | Kawasaki Steel Corp | Manufacture of zn-fe alloy galvanized steel plate consisting essentially of zn-fe alloy |
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-
2002
- 2002-11-27 US US10/305,547 patent/US6982030B2/en not_active Expired - Fee Related
-
2003
- 2003-11-18 WO PCT/US2003/036845 patent/WO2004050959A2/en active Application Filing
- 2003-11-18 EP EP03783649A patent/EP1576203A4/en not_active Withdrawn
- 2003-11-18 CN CNB2003801040059A patent/CN100478492C/en not_active Expired - Fee Related
- 2003-11-18 KR KR1020057009261A patent/KR20050075445A/en not_active Application Discontinuation
- 2003-11-18 AU AU2003291062A patent/AU2003291062A1/en not_active Abandoned
- 2003-11-18 JP JP2004557216A patent/JP2006508252A/en active Pending
-
2005
- 2005-09-23 US US11/233,622 patent/US20060016692A1/en not_active Abandoned
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JPS54115787A (en) * | 1978-02-28 | 1979-09-08 | Tokyo Tokushu Densen Kk | Tin plated conductor |
US4822560A (en) * | 1985-10-10 | 1989-04-18 | The Furukawa Electric Co., Ltd. | Copper alloy and method of manufacturing the same |
JPH04267009A (en) * | 1991-02-22 | 1992-09-22 | Hitachi Cable Ltd | Tin or solder plated copper wire |
US5486721A (en) * | 1993-04-10 | 1996-01-23 | W.C. Heraeus Gmbh | Lead frame for integrated circuits |
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US6673470B2 (en) * | 2000-11-08 | 2004-01-06 | Kawasaki Steel Corporation | Surface treated tin-plated steel sheet and surface treatment solution |
JP2002180226A (en) * | 2000-12-12 | 2002-06-26 | Totoku Electric Co Ltd | Lead-free tin alloy solder plated wire |
US6726827B2 (en) * | 2002-01-17 | 2004-04-27 | Lucent Technologies Inc. | Electroplating solution for high speed plating of tin-bismuth solder |
US6808614B2 (en) * | 2002-01-17 | 2004-10-26 | Lucent Technologies Inc. | Electroplating solution for high speed plating of tin-copper solder |
US6730209B2 (en) * | 2002-02-22 | 2004-05-04 | Lucent Technologies Inc. | Solder electroplating bath including brighteners having reduced volatility |
Non-Patent Citations (1)
Title |
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See also references of EP1576203A2 * |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1716949A1 (en) | 2005-04-20 | 2006-11-02 | Rohm and Haas Electronic Materials, L.L.C. | Immersion method |
EP1762640A2 (en) | 2005-09-07 | 2007-03-14 | Rohm and Haas Electronic Materials LLC | Metal duplex and method |
US7615255B2 (en) | 2005-09-07 | 2009-11-10 | Rohm And Haas Electronic Materials Llc | Metal duplex method |
Also Published As
Publication number | Publication date |
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AU2003291062A1 (en) | 2004-06-23 |
CN100478492C (en) | 2009-04-15 |
JP2006508252A (en) | 2006-03-09 |
US20060016692A1 (en) | 2006-01-26 |
EP1576203A2 (en) | 2005-09-21 |
WO2004050959A3 (en) | 2005-02-24 |
US20040099340A1 (en) | 2004-05-27 |
US6982030B2 (en) | 2006-01-03 |
AU2003291062A8 (en) | 2004-06-23 |
CN1714170A (en) | 2005-12-28 |
KR20050075445A (en) | 2005-07-20 |
EP1576203A4 (en) | 2007-10-24 |
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