WO2004036611A3 - Neutral particle beam processing apparatus with enhanced conversion performance from plasma ions to neutral particles - Google Patents
Neutral particle beam processing apparatus with enhanced conversion performance from plasma ions to neutral particles Download PDFInfo
- Publication number
- WO2004036611A3 WO2004036611A3 PCT/KR2003/002146 KR0302146W WO2004036611A3 WO 2004036611 A3 WO2004036611 A3 WO 2004036611A3 KR 0302146 W KR0302146 W KR 0302146W WO 2004036611 A3 WO2004036611 A3 WO 2004036611A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- neutral
- neutral particle
- processing apparatus
- beam processing
- particle beam
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32082—Radio frequency generated discharge
- H01J37/321—Radio frequency generated discharge the radio frequency energy being inductively coupled to the plasma
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
- H01J37/32357—Generation remote from the workpiece, e.g. down-stream
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/06—Sources
- H01J2237/08—Ion sources
Abstract
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2003269548A AU2003269548A1 (en) | 2002-10-15 | 2003-10-15 | Neutral particle beam processing apparatus with enhanced conversion performance from plasma ions to neutral particles |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2002-0062648 | 2002-10-15 | ||
KR10-2002-0062648A KR100476903B1 (en) | 2002-10-15 | 2002-10-15 | Neutral particle beam processing apparatus with enhanced conversion performance from plasma ions to neutral particles |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2004036611A2 WO2004036611A2 (en) | 2004-04-29 |
WO2004036611A3 true WO2004036611A3 (en) | 2004-06-24 |
Family
ID=32105580
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/KR2003/002146 WO2004036611A2 (en) | 2002-10-15 | 2003-10-15 | Neutral particle beam processing apparatus with enhanced conversion performance from plasma ions to neutral particles |
Country Status (3)
Country | Link |
---|---|
KR (1) | KR100476903B1 (en) |
AU (1) | AU2003269548A1 (en) |
WO (1) | WO2004036611A2 (en) |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100555849B1 (en) | 2003-11-27 | 2006-03-03 | 주식회사 셈테크놀러지 | Neutral particle beam processing apparatus |
KR100714898B1 (en) | 2005-01-21 | 2007-05-04 | 삼성전자주식회사 | Substrate processing apparatus for using neutral beam and its processing methods |
KR100851902B1 (en) | 2005-01-27 | 2008-08-13 | 삼성전자주식회사 | An ion beam neutralizing apparatus |
KR100702010B1 (en) | 2005-03-07 | 2007-03-30 | 삼성전자주식회사 | Reflector, substrate processing apparatus employing the same, and substrate processing methods using the same |
KR100714895B1 (en) * | 2005-03-15 | 2007-05-04 | 삼성전자주식회사 | Reflector for generating neutral beam and substrate processing apparatus including the same |
KR100722821B1 (en) * | 2005-03-22 | 2007-05-30 | 성균관대학교산학협력단 | Neutral beam etching system having improved reflector |
US7358484B2 (en) * | 2005-09-29 | 2008-04-15 | Tokyo Electron Limited | Hyperthermal neutral beam source and method of operating |
CN102290314B (en) * | 2011-09-26 | 2013-12-25 | 中国科学院微电子研究所 | Device for producing neutral particle beam and method thereof |
KR101816861B1 (en) | 2016-10-21 | 2018-01-10 | (주)제이하라 | Surface treatment apparatus using plasma |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07273072A (en) * | 1994-03-30 | 1995-10-20 | Rikagaku Kenkyusho | Processing neutral beam generating method |
JPH1083899A (en) * | 1996-09-09 | 1998-03-31 | Ebara Corp | Neutral particle beam source |
US20020060201A1 (en) * | 2000-11-22 | 2002-05-23 | Yeom Geun-Young | Method of etching semiconductor device using neutral beam and apparatus for etching the same |
JP2002289399A (en) * | 2001-03-26 | 2002-10-04 | Ebara Corp | Neutral particle beam treatment apparatus |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05326452A (en) * | 1991-06-10 | 1993-12-10 | Kawasaki Steel Corp | Equipment and method for plasma treatment |
US5519213A (en) * | 1993-08-20 | 1996-05-21 | Ebara Corporation | Fast atom beam source |
JP3328498B2 (en) * | 1996-02-16 | 2002-09-24 | 株式会社荏原製作所 | Fast atom beam source |
KR100367662B1 (en) * | 2000-05-02 | 2003-01-10 | 주식회사 셈테크놀러지 | Hyperthermal Neutral Particle Beam Source and Neutral Particle Beam Processing Apparatus Employing the Same |
KR100412953B1 (en) * | 2001-11-26 | 2003-12-31 | 학교법인 성균관대학 | Etching apparatus using neutral beam |
-
2002
- 2002-10-15 KR KR10-2002-0062648A patent/KR100476903B1/en active IP Right Grant
-
2003
- 2003-10-15 WO PCT/KR2003/002146 patent/WO2004036611A2/en not_active Application Discontinuation
- 2003-10-15 AU AU2003269548A patent/AU2003269548A1/en not_active Abandoned
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07273072A (en) * | 1994-03-30 | 1995-10-20 | Rikagaku Kenkyusho | Processing neutral beam generating method |
JPH1083899A (en) * | 1996-09-09 | 1998-03-31 | Ebara Corp | Neutral particle beam source |
US20020060201A1 (en) * | 2000-11-22 | 2002-05-23 | Yeom Geun-Young | Method of etching semiconductor device using neutral beam and apparatus for etching the same |
JP2002289399A (en) * | 2001-03-26 | 2002-10-04 | Ebara Corp | Neutral particle beam treatment apparatus |
Also Published As
Publication number | Publication date |
---|---|
KR100476903B1 (en) | 2005-03-17 |
AU2003269548A8 (en) | 2004-05-04 |
KR20040033524A (en) | 2004-04-28 |
AU2003269548A1 (en) | 2004-05-04 |
WO2004036611A2 (en) | 2004-04-29 |
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