WO2004034046A2 - Electrochemical cell comprising solid electrolyte sensing portion and substrate with same coefficients of thermal expansion - Google Patents

Electrochemical cell comprising solid electrolyte sensing portion and substrate with same coefficients of thermal expansion Download PDF

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Publication number
WO2004034046A2
WO2004034046A2 PCT/GB2003/004344 GB0304344W WO2004034046A2 WO 2004034046 A2 WO2004034046 A2 WO 2004034046A2 GB 0304344 W GB0304344 W GB 0304344W WO 2004034046 A2 WO2004034046 A2 WO 2004034046A2
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WO
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Prior art keywords
zirconia
electrochemical cell
substrate
spinel
magnesia
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PCT/GB2003/004344
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French (fr)
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WO2004034046A3 (en
Inventor
Deepak Jawahurlall Gopaul
William Charles Maskell
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Sensox Limited
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Publication date
Application filed by Sensox Limited filed Critical Sensox Limited
Priority to EP03753747A priority Critical patent/EP1549936A2/en
Priority to AU2003271908A priority patent/AU2003271908A1/en
Publication of WO2004034046A2 publication Critical patent/WO2004034046A2/en
Publication of WO2004034046A3 publication Critical patent/WO2004034046A3/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/4075—Composition or fabrication of the electrodes and coatings thereon, e.g. catalysts

Definitions

  • the present invention relates to zirconia sensors; zirconia sensors are used for the detection of oxygen, carbon dioxide, water vapour etc.
  • Amperometric (two-electrode) zirconia sensors are solid state electrochemical devices that have been developed and used principally for measuring oxygen in gas mixtures. Work has been reported where use has been extended to include measurement of water vapour or carbon dioxide. Adding a further pair of electrodes to the sensor enables it to be operated as a pump-gauge device which can still be used in the amperometric mode while providing additional information for analytical purposes via the gauge.
  • Zirconia is an oxygen ion conductor at elevated temperatures (>300°C) and its conductivity increases as the temperature is raised.
  • porous electronically-conducting electrodes such as platinum
  • a current flows and oxygen is electrochemically pumped through the zirconia (amperometric mode); or, if the disc is in contact with gases having different oxygen partial pressures at each electrode then the system is a concentration cell and a Nernst EMF is generated between the two electrodes (potentiometric mode).
  • Thick-film amperometric oxygen sensors have been constructed using an ink prepared from a powder of yttria-stabilized cubic zirconia with 150 run particle size; the construction consists of layers of electrode (cathode), zirconia, electrode (anode) printed onto an alumina substrate.
  • the zirconia performs the dual role of diffusion barrier (by virtue of its porosity) and electrolyte.
  • these sensors display characteristics typical of an amperometric sensor but the diffusion barrier (electrolyte) becomes more restrictive as the temperature is raised.
  • Preparation techniques for the sensor involve high temperatures, e.g. of the order of 1450°C and elevated operating temperatures, e.g. of the order of 700°C.
  • cracks in the zirconia film arise from the differential thermal expansion coefficient of the thick film and the substrate. Diffusion of oxygen to the cathode occurs via the porosity of the zirconia between the cracks but also via the cracks which open and close as the temperature is, respectively, lowered and raised.
  • an electrochemical cell which comprises sequentially layers comprising (i) a substrate; (ii) a first electrode (cathode); (iii) a zirconia layer and (iv) a second electrode (anode) in which the substrate has substantially the same temperature coefficient of expansion as the said zirconia layer.
  • the zirconia layer is larger than at least the first electrode in at least one planar dimension (i.e. other than thickness) so that the zirconia layer is in direct contact with the substrate.
  • the zirconia layer (iii) can be described as a thick-film zirconia electrolyte layer.
  • the layers are preferably formed on the substrate by printing sequentially and the zirconia layer forms a strong bond with the substrate.
  • the zirconia layer can be formed by printing with an ink prepared from a powder of zirconia.
  • the ink can be prepared using tetragonal, cubic or partially-stabilised zirconia and cubic zirconia is the preferred form.
  • the zirconia is stabilised and the stabiliser used may be any of the well-known two- or three-valent oxides normally used for this purpose, including yttria, gadolinia, erbia or calcia etc.; yttria is the preferred stabiliser.
  • the substrate is preferably a spinel- metal oxide ceramic.
  • Spinel is the name given to a group of minerals which are double oxides of divalent and trivalent metals. Spinel is also the name given to a particular member of the group. Henceforth, spinel is used to describe the group of minerals and spinel* is used to describe the particular member, magnesium aluminium oxide. Where the spinel is spinel* the preferred metal oxide is magnesia.
  • the preferred spinel is magnesium aluminium oxide and is a well known compound. It is a complex of aluminium oxide (A1 2 0 3 ) and magnesium oxide (MgO) having the stoichiometric formula MgAl 2 O 4 .
  • a ceramic of the required specification based upon alumina and magnesia is commercially available from the company Advanced Ceramics of Stafford, UK.
  • the substrate is preferably 0.3 to 1mm thick.
  • the substrate can be made from a mixture of magnesia and alumina powders which is compacted and fired at high temperature to form the spinel*-magnesia ceramic substrate.
  • the amount of magnesia powder is in the range of 36 to 80 weight percent based upon the total weight of the mix, the remainder being alumina, resulting after firing in spinel* contents of 90 and 28 weight percentages respectively at the range limits, the remainder being magnesia.
  • a preferred composition is 70 weight percent magnesia and 30 weight percent alumina resulting in a spinel* weight percent after firing of 42.
  • a second preferred substrate is zirconia.
  • This substrate can be made from a zirconia powder which is compacted and fired at high temperature.
  • the zirconia can be of any of the forms tetragonal, cubic or partially-stabilized.
  • a third preferred substrate is made from a mixture of zirconia and alumina powders which is compacted and fired at high temperature to form the zirconia-alumina ceramic substrate.
  • Suitable zirconia-alumina mixed powders are available from the Daichi company of Japan.
  • the zirconia used in the thick-film zirconia electrolyte layer is preferably cubic zirconia and preferably it is stabilized with yttria.
  • At least the second electrode is porous so that oxygen can diffuse through the electrode and then through the thick-film zirconia electrolyte layer.
  • the electrodes are made of a porous platinum or a porous platinum-zirconia cermet and are printed on either side of the thick film zirconia electrolyte layer, e.g. from an ink of powder of the electrode material.
  • the electrochemical cell can be used as an oxygen senor and preferably comprises sequentially a heater element (optional); (i) the substrate; (ii) a first electrode; (iii) the zirconia layer and a (iv) the second electrode.
  • a heater element optionally a heater element (optional); (i) the substrate; (ii) a first electrode; (iii) the zirconia layer and a (iv) the second electrode.
  • the rate of diffusion of oxygen first through the second electrode and then through the zirconia layer to the first electrode varies with the oxygen concentration in the gas so, by monitoring the current flowing which is proportional to the rate of diffusion of oxygen to the first electrode, a measure of oxygen concentration in the gas is obtained.
  • the sensor can be previously calibrated so that a precise measurement of oxygen concentration can be obtained.
  • Fig. 1 shows a schematic representation of a sensor and Fig. 2 shows a cut-away perspective view of the sensor
  • the sensor comprises a substrate (1), a zirconia layer (2) and electrodes (3).
  • the preferred composition of substrate is spinel* -magnesia, and the zircoma layer is formed by printing an ink prepared from powdered zirconia and firing to form a strong bond of a zirconia thick-film to the substrate; porous platinum or porous platinum-zirconia cermet electrodes (3) are also printed to form layers on each side of the thick-film zirconia electrolyte layer (2).
  • the coefficient of thermal expansion of the substrate is preferably in the range (9-12) x 10 " K " ; this compares with the coefficient of thermal expansion of the zirconia thick-film layer which is (lO-l ⁇ x lO ⁇ K "1 .
  • the senor consists of an optional platinum heater (4), a substrate (1), a preferred composition of which is spinel*-magnesia, an inner electrode (6) the thick-film zirconia electrolyte (2) and outer electrode (8).
  • the electrodes (6) and (8) correspond to electrodes (3) of fig. 1.
  • the sensor In use, to measure the oxygen concentration in a gas, the sensor, which had previously been calibrated, is placed in the gas and the sensor is heated up to an operating temperature (in excess of 350°C), a potential difference is applied between electrodes (6) and (8), where the former is held at a negative potential with respect to the latter, and the current measured. Oxygen diffuses through the porous electrode (8) and then through the porous zirconia element (2). The measured current is proportional to the rate of oxygen diffusion to electrode (6) which in turn depends upon the oxygen concentration in the gas adjacent to the sensor.

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Biochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
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  • Measuring Oxygen Concentration In Cells (AREA)
  • Fuel Cell (AREA)
  • Compositions Of Oxide Ceramics (AREA)

Abstract

The substrate in an electrochemical cell is (i) a spinel-metal oxide ceramic which can be made from a mix of magnesia and alumina powders compacted and fired to form a spinel*-magnesia ceramic, where spinel* is the particular spinel, magnesia-alumina, or (ii) a zirconia ceramic, or (iii) a zirconia-alumina ceramic, which has the same coefficient of thermal expansion as the zirconia thick-film electrolyte/diffusion barrier.

Description

Sensors
The present invention relates to zirconia sensors; zirconia sensors are used for the detection of oxygen, carbon dioxide, water vapour etc.
Amperometric (two-electrode) zirconia sensors are solid state electrochemical devices that have been developed and used principally for measuring oxygen in gas mixtures. Work has been reported where use has been extended to include measurement of water vapour or carbon dioxide. Adding a further pair of electrodes to the sensor enables it to be operated as a pump-gauge device which can still be used in the amperometric mode while providing additional information for analytical purposes via the gauge.
Zirconia is an oxygen ion conductor at elevated temperatures (>300°C) and its conductivity increases as the temperature is raised. Thus, by applying porous electronically-conducting electrodes, such as platinum, to the two surfaces of a disc of the ceramic, and imposing a voltage between the electrodes, a current flows and oxygen is electrochemically pumped through the zirconia (amperometric mode); or, if the disc is in contact with gases having different oxygen partial pressures at each electrode then the system is a concentration cell and a Nernst EMF is generated between the two electrodes (potentiometric mode).
Thick-film amperometric oxygen sensors have been constructed using an ink prepared from a powder of yttria-stabilized cubic zirconia with 150 run particle size; the construction consists of layers of electrode (cathode), zirconia, electrode (anode) printed onto an alumina substrate. The zirconia performs the dual role of diffusion barrier (by virtue of its porosity) and electrolyte. At a fixed temperature these sensors display characteristics typical of an amperometric sensor but the diffusion barrier (electrolyte) becomes more restrictive as the temperature is raised. Preparation techniques for the sensor involve high temperatures, e.g. of the order of 1450°C and elevated operating temperatures, e.g. of the order of 700°C. In using thick-film screen-printing technology for manufacturing zirconia oxygen gas sensors, cracks in the zirconia film (visible by Scanning Electron Microscopy) arise from the differential thermal expansion coefficient of the thick film and the substrate. Diffusion of oxygen to the cathode occurs via the porosity of the zirconia between the cracks but also via the cracks which open and close as the temperature is, respectively, lowered and raised.
We have now devised a zirconia sensor construction which reduces this problem.
According to the invention there is provided an electrochemical cell which comprises sequentially layers comprising (i) a substrate; (ii) a first electrode (cathode); (iii) a zirconia layer and (iv) a second electrode (anode) in which the substrate has substantially the same temperature coefficient of expansion as the said zirconia layer.
Preferably the zirconia layer is larger than at least the first electrode in at least one planar dimension (i.e. other than thickness) so that the zirconia layer is in direct contact with the substrate.
The zirconia layer (iii) can be described as a thick-film zirconia electrolyte layer.
The layers are preferably formed on the substrate by printing sequentially and the zirconia layer forms a strong bond with the substrate. The zirconia layer can be formed by printing with an ink prepared from a powder of zirconia.
The ink can be prepared using tetragonal, cubic or partially-stabilised zirconia and cubic zirconia is the preferred form. Preferably the zirconia is stabilised and the stabiliser used may be any of the well-known two- or three-valent oxides normally used for this purpose, including yttria, gadolinia, erbia or calcia etc.; yttria is the preferred stabiliser. The substrate is preferably a spinel- metal oxide ceramic. Spinel is the name given to a group of minerals which are double oxides of divalent and trivalent metals. Spinel is also the name given to a particular member of the group. Henceforth, spinel is used to describe the group of minerals and spinel* is used to describe the particular member, magnesium aluminium oxide. Where the spinel is spinel* the preferred metal oxide is magnesia.
The preferred spinel is magnesium aluminium oxide and is a well known compound. It is a complex of aluminium oxide (A1203) and magnesium oxide (MgO) having the stoichiometric formula MgAl2O4. A ceramic of the required specification based upon alumina and magnesia is commercially available from the company Advanced Ceramics of Stafford, UK.
The substrate is preferably 0.3 to 1mm thick. The substrate can be made from a mixture of magnesia and alumina powders which is compacted and fired at high temperature to form the spinel*-magnesia ceramic substrate. Preferably the amount of magnesia powder is in the range of 36 to 80 weight percent based upon the total weight of the mix, the remainder being alumina, resulting after firing in spinel* contents of 90 and 28 weight percentages respectively at the range limits, the remainder being magnesia. A preferred composition is 70 weight percent magnesia and 30 weight percent alumina resulting in a spinel* weight percent after firing of 42.
A second preferred substrate is zirconia. This substrate can be made from a zirconia powder which is compacted and fired at high temperature. The zirconia can be of any of the forms tetragonal, cubic or partially-stabilized.
A third preferred substrate is made from a mixture of zirconia and alumina powders which is compacted and fired at high temperature to form the zirconia-alumina ceramic substrate. Suitable zirconia-alumina mixed powders are available from the Daichi company of Japan. The zirconia used in the thick-film zirconia electrolyte layer is preferably cubic zirconia and preferably it is stabilized with yttria.
At least the second electrode is porous so that oxygen can diffuse through the electrode and then through the thick-film zirconia electrolyte layer. Preferably the electrodes are made of a porous platinum or a porous platinum-zirconia cermet and are printed on either side of the thick film zirconia electrolyte layer, e.g. from an ink of powder of the electrode material.
The electrochemical cell can be used as an oxygen senor and preferably comprises sequentially a heater element (optional); (i) the substrate; (ii) a first electrode; (iii) the zirconia layer and a (iv) the second electrode. When the sensor is exposed to a gas containing oxygen and a potential difference is applied with appropriate polarity between the electrodes, the rate of diffusion of oxygen first through the second electrode and then through the zirconia layer to the first electrode varies with the oxygen concentration in the gas so, by monitoring the current flowing which is proportional to the rate of diffusion of oxygen to the first electrode, a measure of oxygen concentration in the gas is obtained. The sensor can be previously calibrated so that a precise measurement of oxygen concentration can be obtained.
The invention is illustrated in the accompanying drawing in which:
Fig. 1 shows a schematic representation of a sensor and Fig. 2 shows a cut-away perspective view of the sensor
Referring to fig. 1 the sensor comprises a substrate (1), a zirconia layer (2) and electrodes (3). The preferred composition of substrate is spinel* -magnesia, and the zircoma layer is formed by printing an ink prepared from powdered zirconia and firing to form a strong bond of a zirconia thick-film to the substrate; porous platinum or porous platinum-zirconia cermet electrodes (3) are also printed to form layers on each side of the thick-film zirconia electrolyte layer (2). The coefficient of thermal expansion of the substrate is preferably in the range (9-12) x 10" K" ; this compares with the coefficient of thermal expansion of the zirconia thick-film layer which is (lO-l ^ x lO^ K"1.
Referring to fig. 2, the sensor consists of an optional platinum heater (4), a substrate (1), a preferred composition of which is spinel*-magnesia, an inner electrode (6) the thick-film zirconia electrolyte (2) and outer electrode (8). The electrodes (6) and (8) correspond to electrodes (3) of fig. 1.
In use, to measure the oxygen concentration in a gas, the sensor, which had previously been calibrated, is placed in the gas and the sensor is heated up to an operating temperature (in excess of 350°C), a potential difference is applied between electrodes (6) and (8), where the former is held at a negative potential with respect to the latter, and the current measured. Oxygen diffuses through the porous electrode (8) and then through the porous zirconia element (2). The measured current is proportional to the rate of oxygen diffusion to electrode (6) which in turn depends upon the oxygen concentration in the gas adjacent to the sensor.

Claims

Claims
1. An electrochemical cell which comprises sequentially layers comprising (i) a substrate; (ii) a first electrode (cathode); (iii) a zirconia layer; and (iv) a second electrode (anode) in which the substrate has substantially the same temperature coefficient of expansion as the said zirconia layer.
2. An electrochemical cell as claimed in claim 1 in which the zirconia layer is larger than the first electrode in at least one planar dimension (i.e. other than thickness) so that the zirconia layer is in direct contact with the substrate.
3. An electrochemical cell as claimed in claim 1 in which the layers are formed on the substrate by printing sequentially and the zirconia layer forms a strong bond with the substrate.
4. An electrochemical cell as claimed in claim 3 in which the zirconia layer is formed by printing with an ink prepared from a powder of zirconia and firing the zirconia.
5. An electrochemical cell as claimed in any one of the preceding claims in which the substrate is a spinel- metal oxide ceramic.
6. An electrochemical cell as claimed in claim 5 in which the spinel is magnesium- aluminium oxide, henceforth identified as spinel*, and has the stoichiometric formula MgAl2O4 and the metal oxide is magnesia.
7. An electrochemical cell as claimed in claim 6 in which the amount of spinel* in the spinel*-magnesia substrate is in the range of 90 to 28 weight per cent based upon the total weight of the substrate and the remainder is magnesia.
8. An electrochemical cell as claimed in claim 6 or 7 in which the amount of magnesia powder used in a magnesia-alumina mix to make the spinel*-magnesia substrate is in the range of 36 to 80 weight per cent based upon the total weight of the magnesia-alumina mix and the remainder is alumina.
9. An electrochemical cell as claimed in claims 6 to 8 in which the composition of the spinel* -magnesia substrate is 70 weight percent magnesia and 30 weight percent alumina resulting in a spinel* weight percent after firing of 42.
10. An electrochemical cell as claimed in any one of the claims 1 to 4 in which the substrate is a zirconia ceramic.
11. An electrochemical cell as claimed in any one of the claims 1 to 4 in which the substrate is a zirconia-alumina ceramic.
12. An electrochemical cell as claimed in any one of the preceding claims in which the substrate is in the range 0.3 to 1mm thick.
13. An electrochemical cell as claimed in any one of claims 4 to 11 in which the zirconia powder used to prepare the ink to print the thick-film zirconia electrolyte layer is a tetragonal, cubic or partially-stabilised zirconia.
14. An electrochemical cell as claimed in claim 12 in which the stabiliser used in the zirconia powder used to prepare the ink to print the thick-film zirconia electrolyte layer is a two or three valent metal oxide.
15. An electrochemical cell as claimed in any one of claims 4 to 11 in which the zirconia powder used to prepare the ink to print the thick-film zirconia electrolyte layer is a cubic zirconia.
16. An electrochemical cell as claimed in claim 14 in which the zirconia powder used to prepare the ink to print the thick-film zirconia electrolyte layer is stabilised with yttria.
17. An electrochemical cell as claimed in any one of claims 4 or 12 to 15 in which the zirconia powder used in the preparation of the ink to print the thick-film zirconia electrolyte layer has a mean particle size in the range from 50 to 1000 nm.
18. An electrochemical cell as claimed in any one of the preceding claims in which the electrodes are porous platinum or a porous platinum-zirconia cermet.
19. An electrochemical cell as claimed in any one of the preceding claims in which the electrodes are printed to form layers on each side of the thick-film zirconia electrolyte layer.
20. An electrochemical cell as claimed in any one of the preceding claims in which the coefficient of thermal expansion of substrate is in the range (9-12) x 10"6 K'1.
21. A sensor which comprises a cell as claimed in any one of the preceding claims incorporating sequentially a heater element (optional), (i) a substrate, (ii) a first electrode, (iii) a thick-film zirconia electrolyte layer and (iv) a second electrode.
PCT/GB2003/004344 2002-10-08 2003-10-08 Electrochemical cell comprising solid electrolyte sensing portion and substrate with same coefficients of thermal expansion WO2004034046A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP03753747A EP1549936A2 (en) 2002-10-08 2003-10-08 Electrochemical cell comprising solid electrolyte sensing portion and substrate with same coefficients of thermal expansion
AU2003271908A AU2003271908A1 (en) 2002-10-08 2003-10-08 Electrochemical cell comprising solid electrolyte sensing portion and substrate with same coefficients of thermal expansion

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GB0223273.4 2002-10-08
GB0223273A GB0223273D0 (en) 2002-10-08 2002-10-08 Sensors

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WO2004034046A2 true WO2004034046A2 (en) 2004-04-22
WO2004034046A3 WO2004034046A3 (en) 2004-07-01

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010057867A2 (en) * 2008-11-20 2010-05-27 Robert Bosch Gmbh Sensor element comprising a carrier element

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US4193857A (en) * 1976-12-07 1980-03-18 Commonwealth Scientific And Industrial Research Organization Oxygen sensors
US4240891A (en) * 1978-06-06 1980-12-23 Commonwealth Scientific And Industrial Research Organization Oxygen sensors
GB2087569A (en) * 1980-11-12 1982-05-26 Nissan Motor Oxygen sensor element having thin layer of stabilized zirconia sintered on substrate
US4559126A (en) * 1983-08-09 1985-12-17 Ngk Insulators, Ltd. Electrochemical device
EP0526031A1 (en) * 1991-07-30 1993-02-03 British Gas plc Oxygen sensor
DE4303633A1 (en) * 1993-02-09 1994-08-11 Bosch Gmbh Robert Solid electrolyte sensor with integrated heater
DE19937163A1 (en) * 1999-08-06 2001-02-08 Bosch Gmbh Robert Screen-printing paste used to make flat ceramic components for lambda sensors used especially in vehicles, includes magnesium titanate or its mixture with spinel, forsterite or magnesia

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JP3873302B2 (en) * 1995-07-13 2007-01-24 株式会社デンソー Stacked oxygen sensor element

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Publication number Priority date Publication date Assignee Title
US4193857A (en) * 1976-12-07 1980-03-18 Commonwealth Scientific And Industrial Research Organization Oxygen sensors
US4240891A (en) * 1978-06-06 1980-12-23 Commonwealth Scientific And Industrial Research Organization Oxygen sensors
GB2087569A (en) * 1980-11-12 1982-05-26 Nissan Motor Oxygen sensor element having thin layer of stabilized zirconia sintered on substrate
US4559126A (en) * 1983-08-09 1985-12-17 Ngk Insulators, Ltd. Electrochemical device
EP0526031A1 (en) * 1991-07-30 1993-02-03 British Gas plc Oxygen sensor
DE4303633A1 (en) * 1993-02-09 1994-08-11 Bosch Gmbh Robert Solid electrolyte sensor with integrated heater
DE19937163A1 (en) * 1999-08-06 2001-02-08 Bosch Gmbh Robert Screen-printing paste used to make flat ceramic components for lambda sensors used especially in vehicles, includes magnesium titanate or its mixture with spinel, forsterite or magnesia

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Title
DATABASE WPI Section Ch, Week 199714 Derwent Publications Ltd., London, GB; Class E36, AN 1997-150788 XP002272435 & JP 09 026409 A (NIPPONDENSO CO LTD), 28 January 1997 (1997-01-28) -& PATENT ABSTRACTS OF JAPAN vol. 1997, no. 05, 30 May 1997 (1997-05-30) & JP 09 026409 A (NIPPONDENSO CO LTD), 28 January 1997 (1997-01-28) *

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010057867A2 (en) * 2008-11-20 2010-05-27 Robert Bosch Gmbh Sensor element comprising a carrier element
WO2010057867A3 (en) * 2008-11-20 2010-10-21 Robert Bosch Gmbh Sensor element comprising a substrate

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GB0223273D0 (en) 2002-11-13
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EP1549936A2 (en) 2005-07-06
AU2003271908A8 (en) 2004-05-04

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