WO2004023012A1 - 制御器 - Google Patents
制御器 Download PDFInfo
- Publication number
- WO2004023012A1 WO2004023012A1 PCT/JP2003/010605 JP0310605W WO2004023012A1 WO 2004023012 A1 WO2004023012 A1 WO 2004023012A1 JP 0310605 W JP0310605 W JP 0310605W WO 2004023012 A1 WO2004023012 A1 WO 2004023012A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- casing
- piston
- valve stem
- valve
- controller
- Prior art date
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/16—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member
- F16K31/165—Actuating devices; Operating means; Releasing devices actuated by fluid with a mechanism, other than pulling-or pushing-rod, between fluid motor and closure member the fluid acting on a diaphragm
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H21/00—Gearings comprising primarily only links or levers, with or without slides
- F16H21/10—Gearings comprising primarily only links or levers, with or without slides all movement being in, or parallel to, a single plane
- F16H21/44—Gearings comprising primarily only links or levers, with or without slides all movement being in, or parallel to, a single plane for conveying or interconverting oscillating or reciprocating motions
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/50—Sealings between relatively-movable members, by means of a sealing without relatively-moving surfaces, e.g. fluid-tight sealings for transmitting motion through a wall
- F16J15/52—Sealings between relatively-movable members, by means of a sealing without relatively-moving surfaces, e.g. fluid-tight sealings for transmitting motion through a wall by means of sealing bellows or diaphragms
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/126—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/16—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being mechanically actuated, e.g. by screw-spindle or cam
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K7/00—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves
- F16K7/12—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm
- F16K7/14—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat
- F16K7/17—Diaphragm valves or cut-off apparatus, e.g. with a member deformed, but not moved bodily, to close the passage ; Pinch valves with flat, dished, or bowl-shaped diaphragm arranged to be deformed against a flat seat the diaphragm being actuated by fluid pressure
Definitions
- the present invention relates to a controller, and particularly to a controller having a booster for amplifying and transmitting a force applied to a piston to a valve stem and suitable for being used as a high-temperature valve.
- a controller having a booster for amplifying and transmitting a force applied to a piston to a valve stem and suitable for being used as a high-temperature valve.
- a valve box provided with a fluid passage, a casing provided above the valve box, and a valve arranged in the casing and reciprocating up and down to open and close the fluid passage through a valve element
- a piston which is vertically movable within the casing and forms a space for introducing compressed air between the casing and the top wall of the casing, and amplifies and transmits the force applied to the piston to the valve stem.
- a device having a booster and a booster is conventionally known (for example, see Japanese Patent Application Laid-Open No. 07-139648).
- a controller having such a booster is called a high-temperature valve and may be used under a condition of 150 ° C. or more, but is not sufficient in terms of heat resistance, and is particularly insufficient. At a high temperature of about 300 ° C., there were problems in the sealability and durability.
- An object of the present invention is to provide a controller having a booster and usable even at high temperatures. Disclosure of the invention
- a controller according to the present invention includes a valve box provided with a fluid passage, a casing provided at an upper portion of the valve box, and a fluid disposed via the valve body by being arranged in the casing and reciprocating up and down.
- a valve stem that opens and closes the passage, a piston that is vertically movable within the casing and forms a space for compressed air introduction between the casing top wall, and a force applied to the piston is applied to the valve stem.
- a booster for amplifying and transmitting the amplified power wherein the booster is arranged such that the outer end is located below the flange on the outer periphery of the piston and the inner end is located below the flange provided on the valve stem.
- a swinging body supported by the casing so as to be able to swing around a horizontal axis located near the inner end, and the outer periphery of the casing top wall. Space for introducing compressed air between Sealing metal base mouth over's are characterized in that you have been interposed.
- the controller of the present invention when the piston moves downward, the outer end of the oscillator of the booster moves downward, and accordingly, the oscillator swings around the horizontal axis, The inner end of the rocker moves upward, and the valve stem is moved upward. Since the horizontal axis is located closer to the inner end, the downward force of the piston is amplified and transmitted to the valve stem.
- a metal bellows to seal the space for introducing compressed air, there is no need to use parts having poor heat resistance, such as O-rings.
- the use of booster means can reduce the compressed air pressure applied to the valve, which makes it possible to achieve both heat resistance and pressure resistance, making it suitable for use as a high-temperature valve. A controller is obtained.
- FIG. 1 is a cross-sectional view showing one embodiment of a controller according to the present invention.
- BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. In the following description, left and right refer to the left and right of the figure.
- FIG. 1 shows an embodiment of the controller of the present invention.
- the controller (1) of this embodiment includes a valve box (2) provided with a fluid inflow passage (2a) and a fluid outflow passage (2b), and a peripheral portion of the fluid inflow passage (2a).
- a booster (11) provided below the stone (10) and amplifying and transmitting the force applied to the piston (10) to the valve stem (9).
- the valve box (2) has a recess (2c) opened upward, and the fluid inflow passage (2a) has one end opened leftward and the other end recessed. One end of the fluid outflow passage (2b) opens to the right and the other end opens to the right bottom of the recess (2c).
- the disk (5) is formed in a columnar shape and has a flange in the middle.
- the bonnet (6) is formed in a cylindrical shape, and a large-diameter guide portion (6a) for guiding a flange portion of the disk (5) is formed on an inner periphery of a lower portion of the bonnet (6). ing.
- the disc (5) is loosely fitted in the bonnet (6), that is, is vertically movably fitted.
- the bonnet (6) is pushed into the recess (2c) of the valve box (2) and is pressed downward by the lower casing (7), so that the bonnet (6) is pressed.
- the outer periphery of the diaphragm (4) is fixed to the valve box (2) via an adapter (12).
- the lower casing (7) includes a bottom wall (7a), a peripheral wall (7b) provided on the bottom wall (7a) in a rising shape, and having a threaded portion formed on an outer peripheral surface thereof.
- the bottom wall (7a) has a small-diameter cylindrical downward protruding portion (7c) having a female thread formed on the inner peripheral surface downward from the lower surface.
- the lower casing (7) is configured such that the female thread of the downward projecting portion (7c) is screwed into a male thread provided on the outer peripheral surface of the recess (2c) of the valve box (2). It is fixed to the valve box (2).
- a through-hole (13) for guiding the valve stem (9) up and down is provided.
- the upper casing (8) is composed of a cylindrical peripheral wall (8a) and a disc-shaped top wall (8b) provided at the upper end of the peripheral wall (8a) and screwed to the threaded portion.
- a thread portion is formed on the lower inner peripheral surface of the peripheral wall (8a), and the female screw portion is screwed to the external thread portion of the peripheral wall (7b) of the lower casing (7). Therefore, the upper casing (8) and the lower casing (7) are integrally formed so as to form a space inside.
- the top wall (8b) of the upper casing (8) is provided with a through hole (14) at the center thereof. Fitting for compressed air introduction (15) is installed.
- the valve stem (9) is composed of a large-diameter shaft portion (21) having a downwardly projecting portion (21a) fitted into the central through hole (13) of the lower casing (7) in a sliding manner, and a lower end portion. It has a thread part, and this male thread part is provided on the upper part of the large-diameter shaft part (21), and is integrated with the large-diameter shaft part (21) by being screwed into the screw. And a small-diameter shaft portion (22).
- the large-diameter shaft (21) has a flange (21b) located at the base end of the downward projecting portion (21a) and an upper end that is smaller in diameter than the other portions and abuts on the small-diameter shaft (22). (21c) and have.
- the small diameter shaft portion (22) has a flange portion (22a) at an intermediate portion thereof, which is slightly smaller in diameter than the upper end portion (21c) of the large diameter shaft portion (21).
- the piston (10) is formed in a disk shape consisting of a lower large-diameter portion (10a) and an upper small-diameter portion (10b).
- the piston (10) is formed on the outer periphery of the lower surface of the large-diameter portion (10a).
- the ring has an integral ring ring (23).
- a recess (24) is formed in the center of the lower surface of the top wall (8a) of the upper casing (8), and the upper casing (8) formed by the recess (24) is formed.
- the space between the top wall (8a) and the piston (10) is the space for compressed air introduction.
- a metal bellows (16) formed in a cylindrical shape as a whole is arranged around the outer periphery of the small diameter portion (10b) of the piston (10), and the lower end of the metal bellows (16) is large.
- the compressed air introduction space is sealed by being fixed to the upper surface of the diameter part (10a) and being fixed to the lower surface of the top wall (8a) of the upper casing (8) while being fixed at the upper surface. ing.
- the metal bellows (16) is called a welding bellows. The metal is punched into a disk to form a precise wavy plate, and the inner and outer peripheries of the wavy plate are welded. To do Has been produced.
- the booster (11) has a plurality of rockers (25) supported so as to be able to rock around the horizontal axis (26). ⁇
- the outer end of the moving body (25) is on the lower surface of the screw ring (23), and the inner end is on the lower surface of the flange (22a) of the small diameter shaft (22) of the valve stem (9).
- Each is abutted from below.
- the piston contact position at the outer end of the oscillator (25) is above the valve stem contact position at the inner end of the oscillator (25), and the axis of the horizontal shaft (26) is It is positioned closer to the inner end than the intermediate position between the contact point of the piston at the outer end of (25) and the valve stem at the inner end of the oscillator (25).
- the piston (10) moves downward
- the outer end of the oscillator (25) of the booster (11) moves downward
- the oscillator (25) responds accordingly. It swings around the horizontal axis (26)
- the inner end of the oscillator (25) moves upward
- the valve stem (9) moves upward. Since the horizontal shaft (26) is located near the inner end, the downward force of the piston (10) is amplified and transmitted to the valve stem (9).
- the amplification factor is (distance from the axis of the horizontal axis to the contact point of the piston at the outer end of the oscillator) / (distance from the axis of the horizontal axis to the valve stem contact position at the inner end of the oscillator) It has become.
- the horizontal shaft (26) is held by a cylindrical retainer (27) placed on the upper surface of the large-diameter shaft (21).
- the retainer (27) includes a perforated disk-shaped bottom wall (27a) and a peripheral wall (27b) having cutouts formed at predetermined intervals to allow the movable body (25) to move.
- a recess (25a) which is open upward, and is fitted into the recess (25a) so that it can roll.
- the inserted pin (28) comes into contact with the flange portion (22a) of the small diameter shaft portion (22) of the valve stem (9).
- the urging member (17) for urging the valve stem (9) downward is a disc spring, and is provided with a flange portion (21b) of the large-diameter shaft portion (21) of the valve stem (9). It is received by the bottom wall (27a) of the retainer (27) and is received.
- a metal seal (18) is interposed between the outer peripheral surface of the bottom wall (27a) of the retainer (27) and the inner peripheral surface of the peripheral wall (7b) of the lower casing (7).
- FIG. 1 the piston (10) is positioned upward, and the valve stem (9) biased by the biasing member (17) is positioned downward.
- compressed air is introduced from the compressed air introduction joint (15).
- the piston (10) moves downward, the valve rod (9) moves upward through the booster (11), and the diaphragm (4) moves the annular valve seat (3). ), And the channel is open.
- the metal bellows (16) is used to seal the space for introducing compressed air, and the rubber O-ring is not used. Therefore, it has excellent heat resistance and can sufficiently withstand a high temperature of about 300 ° C.
- the boosting means (11) even if the compressed air pressure to be introduced is reduced, a large diaphragm holding force can be obtained.
- the pressure applied to (16) can be reduced, and a high-temperature valve controller with excellent pressure resistance can be obtained.
- the controller of the present invention amplifies the force applied to the piston to the valve stem. It has a booster for transmitting the pressure and can be used even at high temperatures, and is suitable for being used as a high-temperature valve.
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Fluid-Driven Valves (AREA)
- Sealing Devices (AREA)
- Transmission Devices (AREA)
Abstract
Description
Claims
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1020057003461A KR100741335B1 (ko) | 2002-09-02 | 2003-08-22 | 제어기 |
CNA038207575A CN1678857A (zh) | 2002-09-02 | 2003-08-22 | 控制器 |
EP03794091A EP1548343A4 (en) | 2002-09-02 | 2003-08-22 | CONTROL |
AU2003254957A AU2003254957A1 (en) | 2002-09-02 | 2003-08-22 | Controller |
US10/525,954 US7159839B2 (en) | 2002-09-02 | 2003-08-22 | Control device |
CA002497390A CA2497390A1 (en) | 2002-09-02 | 2003-08-22 | Control device |
IL167025A IL167025A (en) | 2002-09-02 | 2005-02-22 | Control device |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2002256621A JP4300345B2 (ja) | 2002-09-02 | 2002-09-02 | 制御器 |
JP2002/256621 | 2002-09-02 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2004023012A1 true WO2004023012A1 (ja) | 2004-03-18 |
Family
ID=31972957
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2003/010605 WO2004023012A1 (ja) | 2002-09-02 | 2003-08-22 | 制御器 |
Country Status (10)
Country | Link |
---|---|
US (1) | US7159839B2 (ja) |
EP (1) | EP1548343A4 (ja) |
JP (1) | JP4300345B2 (ja) |
KR (1) | KR100741335B1 (ja) |
CN (1) | CN1678857A (ja) |
AU (1) | AU2003254957A1 (ja) |
CA (1) | CA2497390A1 (ja) |
IL (1) | IL167025A (ja) |
TW (1) | TWI293354B (ja) |
WO (1) | WO2004023012A1 (ja) |
Families Citing this family (25)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4529023B2 (ja) * | 2002-12-03 | 2010-08-25 | 株式会社フジキン | 制御器 |
JP4155066B2 (ja) * | 2003-03-12 | 2008-09-24 | トヨタ自動車株式会社 | 車両懸架装置 |
JP5613254B2 (ja) * | 2009-11-05 | 2014-10-22 | パーカー・ハニフィン・コーポレーション | 小型の倍力空気圧式作動装置 |
JP5613420B2 (ja) * | 2010-02-05 | 2014-10-22 | 株式会社フジキン | 流体制御器 |
GB201018553D0 (en) * | 2010-11-03 | 2010-12-15 | Aker Solutions Singapore Pte Ltd | Valve actuator |
JP6039664B2 (ja) | 2011-07-15 | 2016-12-07 | メカニック・アナリティック・インコーポレーテッド | アクチュエータ |
US9476516B2 (en) | 2011-07-15 | 2016-10-25 | Mecanique Analytique Inc. | Actuator |
US9568117B2 (en) * | 2012-11-16 | 2017-02-14 | Ge Oil & Gas Pressure Control Lp | Combination diaphragm piston actuator |
US11015733B2 (en) | 2012-12-31 | 2021-05-25 | Ge Oil & Gas Pressure Control Lp | No-bolt latching system |
US9759240B2 (en) | 2012-12-31 | 2017-09-12 | Ge Oil & Gas Pressure Control Lp | No-bolt security latching system |
US10480675B2 (en) | 2012-12-31 | 2019-11-19 | Ge Oil & Gas Pressure Control Lp | No-bolt security latching system |
US10132422B2 (en) | 2012-12-31 | 2018-11-20 | Ge Oil & Gas Pressure Control Lp | Compound express actuator connection |
US11326712B2 (en) | 2012-12-31 | 2022-05-10 | Baker Hughes Oilfield Operations Llc | No-bolt valve assembly system |
US11015732B2 (en) | 2012-12-31 | 2021-05-25 | Ge Oil & Gas Pressure Control Lp | Axially restricted pressure shuttle |
JP6280765B2 (ja) | 2014-02-20 | 2018-02-14 | 株式会社フジキン | 弁体および高温用弁 |
CA2963933C (en) * | 2014-09-12 | 2023-02-28 | Ge Oil & Gas Pressure Control Lp | Combination diaphragm piston actuator |
JP6530929B2 (ja) | 2015-02-27 | 2019-06-12 | 株式会社フジキン | 流体制御器 |
JP6941372B2 (ja) * | 2016-12-12 | 2021-09-29 | 株式会社フジキン | バルブおよび半導体製造装置 |
JP7148989B2 (ja) * | 2017-07-04 | 2022-10-06 | 株式会社フジキン | アクチュエータ、バルブ、流体供給システム、および半導体製造装置 |
CN111051754A (zh) * | 2017-09-28 | 2020-04-21 | 株式会社富士金 | 致动器、阀、以及流体控制装置 |
WO2020026580A1 (ja) * | 2018-07-31 | 2020-02-06 | 株式会社フジキン | アクチュエータ、バルブ、および流体制御装置 |
GB201816364D0 (en) | 2018-10-08 | 2018-11-28 | Rolls Royce Plc | A controller assembley |
US11466783B2 (en) | 2020-03-25 | 2022-10-11 | Baker Hughes Oilfield Operations Llc | Side entry valve |
US11920687B2 (en) | 2020-03-25 | 2024-03-05 | Baker Hughes Oilfield Operations Llc | Valve end replacement system and method |
GB202117158D0 (en) | 2021-11-29 | 2022-01-12 | Rolls Royce Plc | Valve assembly |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4684103A (en) * | 1986-08-25 | 1987-08-04 | Baumann Hans D | Lever-amplified actuating means for valves and other devices |
JPH039740Y2 (ja) * | 1986-06-10 | 1991-03-11 | ||
JPH05187572A (ja) * | 1992-01-08 | 1993-07-27 | Kiyohara Masako | 制御器 |
US5346172A (en) * | 1992-04-28 | 1994-09-13 | Gulde Regelarmaturen Gmbh & Co. Kg | Servo valve |
JPH07139648A (ja) | 1993-11-12 | 1995-05-30 | Kiyohara Masako | 制御器 |
JPH08303630A (ja) * | 1995-05-10 | 1996-11-22 | Fujikin:Kk | 制御器 |
JP2000009254A (ja) * | 1998-06-23 | 2000-01-11 | Fujikin Inc | 制御器 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4319576A (en) | 1980-02-26 | 1982-03-16 | Senco Products, Inc. | Intralumenal anastomosis surgical stapling instrument |
US4875404A (en) * | 1988-07-05 | 1989-10-24 | Ewal Manufacturing Co., Inc. | Compact fluid powered actuator |
JP3067977B2 (ja) * | 1995-07-10 | 2000-07-24 | 株式会社ベンカン | アクチュエータ |
-
2002
- 2002-09-02 JP JP2002256621A patent/JP4300345B2/ja not_active Expired - Fee Related
-
2003
- 2003-08-22 KR KR1020057003461A patent/KR100741335B1/ko active IP Right Grant
- 2003-08-22 CN CNA038207575A patent/CN1678857A/zh active Pending
- 2003-08-22 AU AU2003254957A patent/AU2003254957A1/en not_active Abandoned
- 2003-08-22 US US10/525,954 patent/US7159839B2/en not_active Expired - Lifetime
- 2003-08-22 EP EP03794091A patent/EP1548343A4/en not_active Withdrawn
- 2003-08-22 CA CA002497390A patent/CA2497390A1/en not_active Abandoned
- 2003-08-22 WO PCT/JP2003/010605 patent/WO2004023012A1/ja active Application Filing
- 2003-09-01 TW TW092124067A patent/TWI293354B/zh not_active IP Right Cessation
-
2005
- 2005-02-22 IL IL167025A patent/IL167025A/en active IP Right Grant
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH039740Y2 (ja) * | 1986-06-10 | 1991-03-11 | ||
US4684103A (en) * | 1986-08-25 | 1987-08-04 | Baumann Hans D | Lever-amplified actuating means for valves and other devices |
JPH05187572A (ja) * | 1992-01-08 | 1993-07-27 | Kiyohara Masako | 制御器 |
US5346172A (en) * | 1992-04-28 | 1994-09-13 | Gulde Regelarmaturen Gmbh & Co. Kg | Servo valve |
JPH07139648A (ja) | 1993-11-12 | 1995-05-30 | Kiyohara Masako | 制御器 |
JPH08303630A (ja) * | 1995-05-10 | 1996-11-22 | Fujikin:Kk | 制御器 |
JP2000009254A (ja) * | 1998-06-23 | 2000-01-11 | Fujikin Inc | 制御器 |
Also Published As
Publication number | Publication date |
---|---|
AU2003254957A1 (en) | 2004-03-29 |
IL167025A (en) | 2008-08-07 |
US20050269534A1 (en) | 2005-12-08 |
KR20050057037A (ko) | 2005-06-16 |
EP1548343A1 (en) | 2005-06-29 |
JP2004092825A (ja) | 2004-03-25 |
TWI293354B (en) | 2008-02-11 |
JP4300345B2 (ja) | 2009-07-22 |
CN1678857A (zh) | 2005-10-05 |
EP1548343A4 (en) | 2007-10-03 |
TW200415323A (en) | 2004-08-16 |
CA2497390A1 (en) | 2004-03-18 |
US7159839B2 (en) | 2007-01-09 |
KR100741335B1 (ko) | 2007-07-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2004023012A1 (ja) | 制御器 | |
JPS63115970A (ja) | ダイヤフラム弁 | |
JPH08303630A (ja) | 制御器 | |
JP3861206B2 (ja) | 流体制御器 | |
IL166866A (en) | Fluid control device | |
KR20160099696A (ko) | 밸브체 및 고온용 밸브 | |
JP2013007531A (ja) | ダイアフラム式流体制御弁 | |
JP2018048688A (ja) | ガラス玉式安全弁 | |
WO2019009107A1 (ja) | アクチュエータ、バルブ、および半導体製造装置 | |
JP2023083160A (ja) | ダイヤフラム弁 | |
JP2015007443A (ja) | 圧力作動弁 | |
JP2008121875A (ja) | 真空破壊弁 | |
JP6459381B2 (ja) | バルブ機構 | |
JP5764315B2 (ja) | ダイヤフラム弁 | |
WO2019009106A1 (ja) | アクチュエータ、バルブ、流体供給システム、および半導体製造装置 | |
CN110214244B (zh) | 阀用致动器和具备它的隔膜阀 | |
TWI850955B (zh) | 致動器及閥 | |
JP7262559B2 (ja) | バルブ用アクチュエータとこれを備えたダイヤフラムバルブ | |
JPH0211984A (ja) | 流体作動形弁アクチュエータ及び弁 | |
JPH05187572A (ja) | 制御器 | |
JP2007178013A (ja) | 膨張弁 | |
JP2007048130A (ja) | 減圧弁 | |
JPS6372984A (ja) | 流体制御器 | |
JP2015010655A (ja) | 圧力作動弁及び圧力作動弁における設定圧力の設定方法 | |
JP2024039790A (ja) | ダイヤフラム弁 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
AK | Designated states |
Kind code of ref document: A1 Designated state(s): AE AG AL AM AT AU AZ BA BB BG BR BY BZ CA CH CN CO CR CU CZ DE DK DM DZ EC EE ES FI GB GD GE GH GM HR HU ID IL IN IS KE KG KP KR KZ LC LK LR LS LT LU LV MA MD MG MK MN MW MX MZ NI NO NZ OM PG PH PL PT RO RU SC SD SE SG SK SL SY TJ TM TN TR TT TZ UA UG US UZ VC VN YU ZA ZM ZW |
|
AL | Designated countries for regional patents |
Kind code of ref document: A1 Designated state(s): GH GM KE LS MW MZ SD SL SZ TZ UG ZM ZW AM AZ BY KG KZ MD RU TJ TM AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LU MC NL PT RO SE SI SK TR BF BJ CF CG CI CM GA GN GQ GW ML MR NE SN TD TG |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application | ||
WWE | Wipo information: entry into national phase |
Ref document number: 167025 Country of ref document: IL |
|
WWE | Wipo information: entry into national phase |
Ref document number: 10525954 Country of ref document: US Ref document number: 1020057003461 Country of ref document: KR |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2497390 Country of ref document: CA Ref document number: 20038207575 Country of ref document: CN |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2003794091 Country of ref document: EP |
|
WWP | Wipo information: published in national office |
Ref document number: 1020057003461 Country of ref document: KR |
|
WWP | Wipo information: published in national office |
Ref document number: 2003794091 Country of ref document: EP |