WO2003007352A1

WO2003007352A1 - Apparatus for pellicle remove

Info

Publication number: WO2003007352A1
Application number: PCT/KR2002/000499
Authority: WO
Inventors: Sang-Duck Kim
Original assignee: Sang-Duck Kim
Priority date: 2001-07-11
Filing date: 2002-03-25
Publication date: 2003-01-23
Also published as: KR20040013140A; KR200248017Y1; KR100607138B1

Abstract

A pellicle removing apparatus includes a base plate, a mask accommodating member which accommodates a photomask to which a pellicle having a removal groove for removing adheres and having a movement prevention plate which approaches the photomask to contact a corner portion on an upper surface of the photomask to prevent movement of the photomask and separates from the photomask to allow the movement of the photomask, a mask fixing member coupled to both ends of the base plate to fix the mask accomodating member, a vertical fixing member coupled to a rear portion of the base plae to protrude upward from the base plate, a sixed plate member coupled to the vertical fixing member to be capable of moving up and own with respect to the vertical fixing member and disposed parallel to the base plate, a pair of pull handle members coupled to both ends of the fixed plate member, a central mobile plate member connected to the pull handle member to move upward as the pull handle member is pulled upward, and a removal groove insertion member coupled to the central mobile plate member and having a protrusion inserted into the removal groove of the pellicle. In the pellicle removing apparatus, as the pull handle member is pulled upward, the pellicle receives an upward directionnal force by the removal groove insertion protion so that the pellicle is separated from the photomask. Thus, the pellicle can be conveniently and quickly removed without leaving defects such as scratches on the upper surface of the photomask and the time for removing the pellicle can be saved.

Description

APPARATUS FOR PELLICLE REMOVE

Technical Field

The present invention relates to an apparatus for conveniently and quickly removing a pellicle adhering to a photomask without leaving defects such as scratches on the upper surface ofthe photomask.

Background Art

In general, a photomask is a plate formed of glass used in a photolithography process to transplant a pattern on a wafer during a semiconductor process. In particular, to prevent contamination or damage to the pattern, the photomask should be carefully handled and kept. Since the pattern printed on the photomask is transferred to a wafer as it is, scratches or defects on the photomask are transplanted on the wafer as they are. Thus, scratches or defects, except for a desired pattern, must not exist on the photomask. In the meantime, as shown in FIG. 1, a film that is referred to as a pellicle adheres on the upper surface of the photomask. The pellicle 2 is a thin and transparent film to protect the surface of the photomask 1 from particles in air or other contaminants. The pellicle 2 is first attached to metal, typically, an anodized aluminum frame, and firmly adheres to the photomask 1 by using an adhesive. Particles adhering on the surface of the pellicle 2 is disposed at a distance from the surface of the photomask, not affecting a wafer image.

However, the pellicle 2 sometimes needs to be removed from the photomask 1 for reasons of a change in pattern or a damage to the photomask. For this, a remove groove 3 for removing the pellicle 2 is formed in both side surfaces of the pellicle 2.

FIGS. 2 and 3 show a method of removing the pellicle. As shown in the drawings, the photomask 1 is kept in an additional case 4 and an attaching portion 5 where four corners of the photomask 1 are placed so that the photomask 1 is supported on the case 4is formed on the upper surface ofthe case 4.

To remove the pellicle 2, an end portion of a pellicle remove tool 6 having a hook shape is inserted in the remove groove 3 of the pellicle 2 and manually pressed downward. Here, the lower surface of a bent portion of the remove tool 6 is placed on the upper surface ofthe photomask 1.

When the remove tool 6 is pressed downward, as shown in FIG. 3, the end portion of the remove tool 6 pivots around a contact surface C where the remove tool 6 contacts the photomask 1. Accordingly, the pellicle 2 receives an upward force generated when the remove tool 6 pivots so that the pellicle 2 is separated from the photomask 1. Then, when the other side of the pellicle 2 is separated from the photomask 1 in the same manner, the pellicle 2 is completely removed from the photomask 1. However, the conventional pellicle removing tool 6 leaves an undesirable scratch on the upper surface ofthe photomask 1, as it is used, which will destroy the photomask 1. Also, a scratch like a point is necessarily generated on the contact point C where the removing tool 6 contacts the upper surface of the photomask 1.

Disclosure of the Invention

To solve the above and other problems, it is an objective of the present invention to provide a pellicle removing apparatus which can easily and quickly remove a pellicle without leaving a defect such as a scratch on the upper surface ofthe photomask and save time needed to remove the pellicle.

To achieve the above objective, the present invention provides a pellicle removing apparatus includes a base plate, a mask accommodating member which accommodates a photomask to which a pellicle having a removal groove for removing adheres and having a movement prevention plate which approaches the photomask to contact a corner portion on an upper surface of the photomask to prevent movement of the photomask and separates from the photomask to allow the movement of the photomask, a mask fixing member coupled to both ends of the base plate to fix the mask accommodating member, a vertical fixing member coupled to a rear portion of the base plate to protrude upward from the base plate, a fixed plate member coupled to the vertical fixing member to be capable of moving up and own with respect to the vertical fixing member and disposed parallel to the base plate, a pair of pull handle members coupled to both ends of the fixed plate member, a central mobile plate member connected to the pull handle member to move upward as the pull handle member is pulled upward, and a removal groove insertion member coupled to the central mobile plate member and having a protrusion inserted into the removal groove of the pellicle, wherein, as the pull handle member is pulled upward, the pellicle receives an upward directional force by the removal groove insertion portion so that the pellicle is separated from the photomask.

Brief Description ofthe Drawings

FIG. 1 is a view showing a pellicle adhering on a photomask; FIGS. 2 and 3 are views for explaining a conventional method of removing the pellicle;

FIG. 4 is a perspective view of a pellicle removing apparatus according to a preferred embodiment of the present invention;

FIG. 5 is an exploded perspective view of a mask accommodating member ofthe apparatus of FIG. 4;

FIG. 6 is a perspective view showing a mask fixing member and the mask accommodating member ofthe apparatus of FIG. 4;

FIG. 7 is a perspective view showing a vertical fixing member portion of the apparatus of FIG. 4;

FIG. 8 is a view showing the rear side of the vertical fixing member portion ofthe apparatus of FIG. 4;

FIG. 9 is a perspective view showing a vertical moving lever portion of the apparatus of FIG. 4;

FIG. 10 is a front view ofthe apparatus of FIG. 4;

FIG. 11 is a bottom perspective view showing a removal groove insertion member ofthe apparatus of FIG. 4;

FIGS. 12 and 13 are sectional views showing a rotational handle of the apparatus of FIG. 4;

FIG. 14 is an exploded perspective view showing an up/down fine adjustment portion ofthe apparatus of FIG. 4;

FIG. 15 is a front view showing the up/down fine adjustment portion of the apparatus of FIG. 4; FIG. 16 is an exploded perspective view showing a portion of a first rotation place and a second advancing plate ofthe apparatus of FIG. 4;

FIGS. 17 and 18 are views for explaining the operation of the mask accommodating member ofthe apparatus of FIG. 4;

FIGS. 19 through 21 are view for explaining the step in which the mask accommodating member is inserted in the mask fixing member in the apparatus of FIG. 4; and

FIGS. 22 through 34 are views for explaining the state of use of the apparatus of FIG. 4.

Best mode for carrying out the Invention

As shown in FIGS. 4 through 34, a pellicle removing apparatus 100 according to a preferred embodiment of the present invention includes a base plate 10, a mask accommodating member 20, a mask fixing member 30, a vertical fixing member 40, a fixed plate member 50, a pull handle member 60, a central mobile plate member 70, a removal groove insertion member 80, and an up/down fine adjustment portion 90.

The base plate 10 is formed of a large quadrangle plate. The mask accommodating member 20, as shown in FIG. 5A, accommodates the photomask 1 to which a pellicle having a removal groove 3 for removal is attached. The mask accommodating member 20 prevents movement of the photomask 1 by approaching the photomask 1 and contacting the upper surface of a corner portion of the photomask 1 and allows the movement of the photomask 1 by being separated from the photomask 1. In the present preferred embodiment, the mask accommodating member 20 includes a frame 21, a mask placing portion 22, a pair of side connection portions 23, a side portion coupling rod 26, and a frame spring 27.

The frame 21 forms a frame of the mask accommodating member 20 and includes a first frame 212 having a square shape and a second frame 214 having a rectangular shape and sharing one side of the first frame 212, so that the frame 21 has a rectangular shape as a whole. The first frame 212 is a portion where the mask placing portion 22 which will be described later is fixed and the second frame 214 serves as a handle when the mask accommodating member 20 is attached to and detached from the mask fixing member 30. Also, a frame groove 240 is formed at both ends of each outer side surface ofthe frame 21.

The mask placing portion 22 is coupled to the upper surface of the first frame 212 having a square shape and includes a placing groove 221 where the corner portion of the photomask 1 is accommodated. The side connection portions 23 are coupled to both side surfaces of the frame 21 and includes a movement prevention plate 24, a hook portion receiving groove 234, and a hook portion 25.

The movement prevention plate 24 is disposed on the upper surface of the mask placing portion 22 when the side connection portion 23 contacts the frame 21 and contacts the upper surface of the corner portion of the photomask 1 to prevent movement of the photomask 1.

The hook portion receiving groove 234 is formed in both of the side connection portions 23 at the outer surface of the side connection portion 23 with respect to the frame 21 and includes a vertical groove 244 and a horizontal groove 242 formed in the vertical surface and the horizontal surface of the groove, respectively.

The hook portion 25 is coupled to each to the side connection portions 23 by being inserted in the hook portion receiving groove 234 not to protrude from the side surface of the side connection portion 23. The hook portion 25 is coupled to the hook portion receiving groove 234 by a hook portion coupling screw 28 coupled to the vertical groove 244 of the hook portion receiving groove

234. The bottom surface of the end portion of the hook portion 25 is elastically biased upward by a hook portion spring 29 inserted in the horizontal groove 242 of the hook portion receiving groove 234. Also, a locking protrusion 252 and an unlocking protrusion 254 are formed at the hook portion 25 to protrude upward. The locking protrusion 252 has an inclined surface at about the middle portion of the hook portion 25 and the unlocking protrusion 254 is provided at the end of the hook portion 25.

In the meantime, a side connection portion penetrating hole 232 is formed to penetrate the side connection portion 23 at a position of the side connection portion 23 corresponding to the frame groove 240.

The side portion coupling rod 26 is to couple the side connection portions 23 to both sides of the frame 21 by penetrating the side connection portion penetrating hole 232 to be inserted in the frame groove 240.

The frame spring 27 is provided to facilitate separation between the side connection portion 23 and the frame 21 by being inserted around the outer circumference of the side portion coupling rod 26 and disposed between the side connection portion 23 and the frame 21.

The mask fixing member 30 for fixing the mask accommodating member 20 is fixed at both front ends of the base plate 10, has a particular length, and includes a pair of vertical wall portions 31 having an accommodating member receiving groove 32 indented to a predetermined length along the lengthwise direction thereof. The both ends of the mask accommodating member 20 are inserted in the accommodating member receiving groove 32 of the vertical wall portion 31 so that the mask accommodating member 20 is fixed therein. Also, a hook portion protrusion receiving groove 34 is formed upward at the entrance of the accommodating member receiving groove 32, as shown in FIG. 6. The locking protrusion 252 of the hook portion 25 is accommodated in the hook portion protrusion receiving groove 34.

In the meantime, in the present preferred embodiment, a hook portion spring 29, a stop portion 35, a stop portion spring 37, and a stop portion protrusion 38 are provided to facilitate coupling and releasing of the mask accommodating member 20 and the mask fixing member 30. Since the hook portion spring 29 is described in the description of the structure of the hook portion 25, a detailed description thereof will be omitted. The stop portion 35 is disposed at one end side of the mask fixing member 30 and fixed on the base plate 10. A stop portion groove 36 is formed in the front surface thereof toward the rear side thereof. The stop portion spring 37 is inserted in the stop portion groove 36. The stop portion protrusion 38 is inserted in the stop portion groove 36. One end of the stop portion protrusion 38 contacts the stop portion spring 37 and the other end of the stop portion protrusion 38 protrudes from the stop portion 35. When the mask accommodating member 20 is separated from the mask fixing member 30, the stop portion protrusion 38 pushes the frame 21 of the mask accommodating member 20. The vertical fixing member 40 includes a vertical column plate 41, a vertical guide rail 42, a vertical mobile plate 43, a connection plate 44, a vertical moving lever 45, and a vertical moving chain 47.

The vertical column plate 41 protrudes in a vertical direction at the rear position of the base plate 10 and is fixed on the base plate 10. the vertical guide rail 42 is coupled to the front surface of the vertical column plate 41 and has a guide groove 422. The vertical mobile plate 43 is coupled to the guide groove 422 of the vertical guide rail 42 and the vertical column plate 41 to be capable of sliding up and down along the vertical guide rail 42. The connection plate 44 is disposed at the opposite surface to a surface of the vertical column plate 41 to which the vertical guide rail 42 is coupled, and is connected to the vertical mobile plate 43 to move the vertical mobile plate 43 up and down. The vertical moving lever 45 is connected to the connection plate 44 by a connection pin 46 to move the connection plate 44 up and down. The vertical moving chain 47 couples the vertical mobile plate 43 and the connection plate 44. When the connection plate 44 moved downward, the vertical mobile plate 43 moves upward, and vice versa.

In the meantime, in the present preferred embodiment, the vertical fixing member 40 further includes a lower connection plate 442 and a weight 444 to prevent an undesirable movement of the vertical moving lever 45 when the vertical moving lever 45 is disposed at an arbitrary position.

The lower connection plate 44 is disposed at a position separated downward from the connection plate 44 and connected to the connection plate 44 by a connection rod 446. The weight 444 is disposed between the connection plate 44 and the lower connection plate 442 and has a predetermined weight. That is, the weight connected to the vertical mobile plate 43 and the weight connected to the connection plate 44 are balanced so that the vertical moving lever 45 is prevented from arbitrarily moving up and down. Also, in the present preferred embodiment, the vertical fixing member 40 further includes a protruding portion 49 and a stop member 412 as devices for restricting a downward movement of the vertical mobile plate 43. The protruding portion 49 is fixed at the side surface of the vertical mobile plate 43 by protruding therefrom and includes a protrusion coupling plate 492, a cylinder 494, and a protruding pin 496.

The protrusion coupling plate 492 is fixed at the side surface of the vertical mobile plate 43 and has a through hole 498. The cylinder 494 is inserted in the through hole 498 of the protrusion coupling plate 492 and has an inner space filled with a high pressure gas. The protruding pin 496 is inserted in the inner space of the cylinder 494. The impact between the protruding pin 496 and the stop member 412 is reduced by the high pressure gas in the inner space ofthe cylinder 494.

The stop member 412 is fixed to the surface of the vertical column plate 41 to which the vertical guide rail 42 is coupled, at the position separated from a lower end portion ofthe vertical guide rail 42, to prevent a downward movement of the protruding portion 49. The impact between the protruding pin 496 and the stop member 412 is reduced by the high pressure gas in the inner space of the cylinder 494. Also, in the present preferred embodiment, the vertical fixing member 40 further includes a catch protrusion 414 and a bent lever 452 to allow or prevent movement of the vertical moving lever 45 at the lowest end position of the vertical moving lever 45. The catch protrusion 414 is coupled to the side surface of the vertical column plate 41 to protrude therefrom. In the mean time, as shown in FIG. 9, a through hole 456 is formed in the vertical moving lever 45, and the bent lever 452 includes a parallel portion 453 penetrating the through hole 456 of the vertical moving lever 45 and a vertical portion 454 bent perpendicular to the parallel portion 453. That is, when the vertical moving lever 45 is moved upward from the lowest end position, the catch protrusion 414 is disposed on a proceeding path at an end portion of the vertical portion 454 of the bent lever 452 to restrict an upward movement of the vertical moving lever 45. When the parallel portion 453 of the bent lever 452 pivots to move the end portion of the vertical potion 454, the upward movement of the vertical moving lever 45 is allowed.

The fixed plate member 50 is formed of a quadrangle plate having a predetermined thickness and fixed to the vertical mobile plate 43. Thus, as the vertical mobile plate 43 is moved up and down, the fixed plate member 50 is moved up and down accordingly. Four fixed plate through holes 51 are formed at the central portion of the fixed plate member 50. As shown in FIG. 14, the four fixed plate through holes 51 are arranged to form a quadrangle having one central point. Also, a shock buffer packing 53 having a through hole having the same diameter as the fixed plate through hole 51 is fixed on the upper surface of the fixed plate member 50 at the position where the fixed plate through hole 51 is formed.

The pull handle member 60 includes a handle portion 61, a pull lever 62, a chain pulley 64, and a pull chain 66.

The handle portion 61 is provided as a pair and fixed to both ends of the fixed plate member 50. The pull lever 62 is hinge-coupled to the handle portion 61 and has a bent portion 622 bending from one end portion thereof, as shown in FIG. 10. The pull lever 62 pivots up and down around a hinge point 63.

The chain pulley 64 is fixed to the lower surface of the fixed plate member 50. The pull chain 66 is wound around the chain pulley 64. in the present preferred embodiment, one end of the pull chain 66 is fixed to the bent portion 622 of the pull lever 62 and the other end thereof is fixed to a first rotational plate 71 to be described later. Thus, when the pull lever 62 pivots upward, the first rotational plate 71 connected to the pull lever 62 by the pull chain 66 is moved upward.

The central mobile plate member 70 is connected to the pull handle member 60 by a connection shaft 72. When the pull lever 62 pivots upward, the central mobile plate member 70 is moved upward.

The removal groove insertion member 80 is coupled to the central mobile plate member 70 and inserted in the removal groove 3 of the pellicle 2. The removal groove insertion member 80 includes a central mobile plate guide 81, an upper plate 82, first and second insertion protruding portions 83 and 84, and an interval adjustment portion 86.

The central mobile plate guide 81 is fixed to both of left and right ends of a lower surface ofthe central mobile plate member 70 and installed in a direction parallel to the left and right directions, that is, a direction along the handle portion 61. The upper plate 82 is a rectangular plate and has an insertion guide rail

822 coupled to the central mobile plate guide 81 of the central mobile plate member 70 and fixed on the upper surface of the upper plate 82. The upper plate 82 is provided as a pair.

The first and second insertion protruding portions 83 and 84 are coupled to the lower surface of the upper plate 82 and respectively have a removal groove insertion protrusion 85 that is inserted in the removal groove 3 of the pellicle 2.

The interval adjustment portion 86 is to adjust an interval between the first and second insertion protruding portions 83 and 84 and includes first and second side plates 824 and 825, a central fixing portion 861, a central bearing 862, and a rotational rod assembly 870.

The first and second side plates 824 and 825 are fixed to both ends ofthe lower surface of the upper plate 82 and side plate through holes 824h and 825h are formed in the first and second side plates 824 and 825, respectively.

The central fixing portion 861 has a central through hole 861h at the central portion thereof and is fixed to the lower surface of the upper plate 82.

The central bearing 862 is inserted in the central through hole 861h of the central fixing portion 861.

The rotational rod assembly 870 includes a central rod 868, a first screw rod 864, a second screw rod 865, and a rotational handle 866.

The central rod 868 is inserted in the central bearing 74 and has no screw thread. The first screw rod 864 extends from the central rod 868 and one end of the first screw rod 864 is inserted in the side plate through hole 824h so as to be rotatably coupled to the first side plate 824. In the present embodiment, a right hand thread is formed on the first screw rod 864.

The second screw rod 865 extends from the central rod 868 in the opposite direction to a portion where the first screw rod 864 is disposed. One end of the second screw rod 865 is inserted in the side plate through hole 825h so as to be rotatably coupled to the second side plate 825. A left hand thread is formed on the second screw rod 865 in the opposite direction to the screw thread ofthe first screw rod 864. The rotational handle 866 is coupled to the second screw rod 865 and passes through the side plate through hole 825h of the second side plate 825 to protrude from the second side plate 825.

Also, a screw through hole 833 screwed to the screw thread formed on the first screw rod 864 is formed in the first insertion protruding portion 83 while a screw through hole 843 screwed to the screw thread formed on the second screw rod 865 is formed in the second insertion protruding portion 84. Thus, when the rotational handle 866 is rotated in one direction, the first and second insertion protruding portions 83 and 84 approach each other. When the rotational handle 866 is rotated in the other direction, the first and second insertion protruding portions 83 and 84 are separated from each other.

Also, to guide movements of the first and second insertion protruding portions 83 and 84, through holes are respectively formed in the first side plate 824, the second side plate 825, the first insertion protruding portion 83, the second protruding portion 84, and the central fixing portion 861. A guide rod

835 coupled by passing through the respective through holes is further provided.

In the meantime, in the present preferred embodiment, to prevent an undesired rotation of the rotational handle 866, a side plate protruding portion 868, a contact portion 869, and a rotation restricting rod 867 are provided.

The side plate protruding portion 868 is fixed to the second side plate 825 to protrude from the second side plate 825 and has a side plate protruding portion through hole 868h.

The contact portion 869 is disposed under the side plate protruding portion 868 and on the upper surface of a shaft of the rotational handle 866 and has a contact portion screw groove 869h capable of screw coupling.

The rotation restricting rod 867 is screwed to the contact portion screw groove 869h of the contact portion 869 by penetrating the side plate protruding portion through hole 868h ofthe side plate protruding portion 868. Thus, as the rotation restricting rod 867 is rotated, the contact portion 869 contacts the shaft of the rotational handle 866 so that the rotation of the rotational handle 866 is restricted.

Also, in the present preferred embodiment, a power case 840, a battery (not shown), a switch 841, and a lamp portion 830 are further provided. The power case 840 is coupled to the first side plate 824 and has an inner space. The battery is accommodated in the inner space of the power case 840. The switch cuts off the power of the battery. The lamp portion 830 is connected to the battery and disposed above the removal groove insertion protrusion 85 of each of the first and second insertion protruding portions 83 and 84.

Thus, as the lamp portion 830 emits light, the removal groove insertion protrusion 85 of each of the first and second insertion protruding portions 83 and 84 can be easily inserted in the removal groove 3 of the pellicle 2.

In the meantime, in the present preferred embodiment, a separation and approach adjustment portion 870 to have the upper plates 82 separated from and approach each other is further provided. The separation and approach adjustment portion 870 includes a coupling portion 872, a separation lever 87, a downward protruding portion 874, and an arm portion 88.

The coupling portion 872 is fixed to the central portion of the lower surface of the central mobile plate member 70 and has a coupling portion through hole 872h. The separation lever 87 protrudes from the coupling portion 872 by penetrating the coupling portion through hole 872h of the coupling portion 872. The downward protruding portion 874 is fixed at an end portion of the separation lever 87 and capable of pivoting in horizontal and vertical directions according to a pivot position of the separation lever 87. The arm portion 88 has one end coupled to the upper plate 82 and the other end coupled to the downward protruding portion 874. In the present preferred embodiment, the upper plates 82 further includes a spring protrusion 892 and an upper plate spring 89 to receive forces in directions to approach each other. The spring protrusion 892 protrudes downward from the lower surface of the central mobile plate member 70. The upper spring 89 has one end fixed to the upper plate 82 and the other end coupled to the spring protrusion 892.

The pellicle removing apparatus 100 according to the present preferred embodiment further includes the up/down fine adjustment portion 90 to minutely adjust movement ofthe removal groove insertion member 80 in the up and down directions. The up/down fine adjustment portion 90 includes a sealing portion 91, an adjustment upper plate 92, an upper coupling portion 93, a vertical rod portion 94, an adjustment rod 95, a first rotational plate 71, a second advancing plate 73, a bearing 74, and an advancing plate guide rail 76. The sealing portion 91 is fixed to the upper surface ofthe fixed plate member 50, and a sealing portion through hole 912 is formed at the central portion ofthe sealing portion 91. The adjustment upper plate 92 is disposed separated parallel to the fixed plate member 50 and an adjustment upper plate through hole 922 is formed at the central portion of the adjustment upper plate 92. Also, the adjustment upper plate 92 is connected to the fixed plate member 50 capable of approaching and being separated with respect to the fixed plate member 50.

The upper coupling portion 93 is coupled to the upper surface ofthe adjustment upper plate 92 and has an upper coupling portion through hole 932 where a screw tab is formed. Also, the upper coupling portion 93 further includes a display portion 96 to measure and display an amount of movement of the adjustment upper plate 92 in the up and down directions.

The vertical rod portion 94 according to the present preferred embodiment, as shown in FIG. 14, has one end fixed to each of corners ofthe adjustment plate 92 and the other end fixed to the first rotational plate 71 to be described later via the fixed plate through hole 51. Also, to restrict a downward movement ofthe adjustment upper plate 92, the vertical rod portion 94 further includes a stopper 97 inserted around the vertical rod portion 94 and contacting the lower surface ofthe adjustment upper plate 92. The adjustment rod 95 is screwed to the upper coupling portion through hole 932 ofthe upper coupling portion 93 and an end portion ofthe adjustment rod 95 protrudes downward by passing through the through hole 922 ofthe adjustment upper plate 92. The first rotational plate 71 is connected to the chain 66 of the pull handle member 60 and moves upward as the pull lever 62 is pulled upward. Also, the first rotational plate 71 is coupled to the vertical rod portion 94.

The second advancing plate 73 is shaft-connected to the first rotational plate 71 by a connection shaft 72, is disposed between the first rotational plate 71 and the central mobile plate member 70, and has the advancing plate guide 75. The advancing plate guide 75 is fixed to the lower surface of second advancing plate 73 and is installed in a direction perpendicular to the front and rear directions, that is, the handle portion 61. The bearing 74 is inserted around the connection shaft 72. The advancing guide rail 76 is coupled to the guide ofthe second advancing plate 73 and fixed to the upper surface of the central mobile plate member 70.

Thus, the central mobile plate member 70 and the second advancing plate 73 are allowed to relatively move in the advancing direction by the advancing plate guide 75 ofthe second advancing plate 73 and the advancing plate guide rail 76 of the central mobile plate member 70. The second advancing plate 73 and the first rotational plate 71 are allowed to relatively rotate parallel to the horizontal direction therebetween by the bearing 74.

In the present preferred embodiment, as shown in FIG. 16, an arc groove 712 and a second advancing plate protrusion 732 are provided to restrict the amount of relative rotation of the first rotational plate 71 and the second advancing plate 73. The arc groove 712 is formed at both sides of the lower surface of the first rotational plate 71. The second advancing plate protrusion 732 has one end inserted in the arc groove 712 of the first rotational plate 71 and the other end fixed to the second advancing plate 73. The amount of relative rotation between the first rotational plate 71 and the second advancing plate 73 is restricted as long that an arc distance that the second advancing plate protrusion 732 moves between the one end and the other end of the arc groove 712. The operation of the pellicle removing apparatus 100 having the above structure according to a preferred embodiment of the present invention is described below.

The vertical moving lever 45 is moved to the lowermost position, the end portion of the bent lever 452 is caught by the catch protrusion 414 so that upward movement of the vertical moving lever 45 is prevented. Here, the fixed plate member 50 is disposed at the uppermost position within a range of its vertical movement. The upper plates 82 are controlled to be most separated from each other by pivoting the separation lever 87 of the removal groove insertion member 80.

The lower end of the adjustment rod 95 is moved downward by rotating the upper end of the adjustment rod 95. When lower end of the adjustment rod 95 contacts the upper surface of the fixed plate member 50 after passing through the through hole 912 of the sealing portion 91, the movement of the adjustment rod 95 is stopped. In this state, the zero point of the display portion 96 is set so that a pointer ofthe display portion 96 points zero.

In the meantime, the separation distance between the adjustment upper plate 92 and the fixed plate member 50 is adjusted by the height of the stopper 97 disposed under the lower surface of the adjustment upper plate 92. As the distance between the adjustment upper plate 92 and the fixed plate member 50 decreases, the removal groove insertion protrusion 85 is disposed at the lower side. Thus, when the vertical moving lever 45 is moved to the uppermost position so that the removal groove insertion protrusion 85 is disposed at the lowest position, the height of the stopper 97 is adjusted so that the removal groove insertion protrusion 85 does not contact the upper surface of the mask 1 and is very slightly separated therefrom.

In the above state, as shown in FIG. 7, the mask 1 to which the pellicle 2 to be removed adheres is accommodated on the mask accommodating member 20. Here, the four corners of the mask 1 are placed on the placing groove 221 of the mask placing portion 22 fixed to the upper surface of the first frame 212 having a rectangular shape. Next, as shown in FIG. 18, a pair of the side connection portions 23 coupled to both side surfaces of the frame 21 are gathered in the directions in which the frame 21 is disposed. Accordingly, the movement prevention plate 24 coupled to the upper surface of the side connection portion 23 is placed on the upper surface of the mask placing portion 22 and contacts the four corners of the upper surfaces of the mask 1 to prevent movement ofthe mask 1 in the upward direction. In this state, as shown in FIG. 19, the mask accommodating member 20 is inserted into the mask fixing member 30 in a direction D of FIG. 6 and a direction H of FIG. 19. Accordingly, the mask accommodating member 20 is inserted in the state in which the end portion of each of the side connection portions 23 is inserted in the accommodating member receiving grove 32. As shown in FIG. 20, the mask accommodating member 20 is inserted into the mask fixing member 30 until the locking protrusion 252 of the hook portion 25 is accommodated in the hook portion protrusion receiving groove 34 of the mask fixing member 30. Here, the stop portion protrusion 38 of the stop portion 35 contacts the frame 21 and the stop portion protrusion 38 is completely inserted into the stop portion groove 36. In the meantime, to separate the mask accommodating member 20 from the mask fixing member 30, the unlocking protrusion 254 of the hook portion 25 is pressed downward to separate the locking protrusion 252 from the hook portion protrusion receiving groove 34 and the mask accommodating member 20 is pulled backward to separate the locking protrusion 252 from the hook portion protrusion receiving groove 34. The mask accommodating member 20 can be separated from the mask fixing member 30 with the help ofthe restoring force of the stop portion spring 37.

Next, as shown in FIG. 9, the bent lever 452 of the vertical moving lever 45 is rotated in a direction E. Accordingly, an end of the bent lever 452 pivots and, since the catch protrusion 414 is not disposed on a proceeding path of the end portion of the vertical portion 454 of the bent lever 452 in the vertically upward direction, the vertical moving lever 45 can be moved vertically upward. In this state, as shown in FIG. 22, when the vertical moving lever 45 is moved upward, the vertical mobile plate 43 in the state of being coupled to the vertical guide rail 42 of the vertical column plate 41 is moved downward. Accordingly, the fixing late member 50 fixed to the vertical mobile plate 43 is moved downward. Thus, the first rotational plate 71, the second advancing plate 73, the central mobile plate member 70, the first insertion protruding portion 83, and the second insertion protruding portion 84 are moved downward. Here, when the vertical moving lever 45 is stopped in the middle of moving upward, the vertical moving lever 45 is prevented by the weight 444 from dropping downward and remains without movement. In the meantime, when the vertical moving lever 45 is completed moved upward, the first and second insertion protruding portions 83 and 84 are located at the lowermost positions. Here, as shown in FIG. 23, the removal groove insertion protrusion 85 coupled to the first and second insertion portions 83 and 84 is disposed at a position very slightly separated from the upper surface of the mask 1. in the meantime, an impact generated by the movement of the fixed plate member 50 in a downward direction is reduced by high pressure gas filling the inner space of the cylinder 494, as the protruding pin 496 inserted in the cylinder 494 of the protruding portion 49 contacts the stop member 416, as shown in FIGS. 24 through 26.

In the above state, as shown in FIG. 27, the separation lever 87 is rotated downward (in the direction K of FIG. 27). Accordingly, as shown in FIG. 28, the downward protruding portion 874 pivots downward, and the arm portion 88 coupled to the downward protruding portion 874 has the upper plates 82 of the removal groove insertion member 80 move in directions close to each other. Here, the upper plate spring 89 provides a restoring force in a direction in which the upper plates 82 are disposed most close to each other. As the upper plates 82 are moved in the directions close to each other, the removal groove insertion protrusion 85 coupled to the first and second insertion protruding portions 83 and 84 are disposed close to the upper plates 85.

Next, the switch 841 is operated to turn the lamp portion 830 on to illuminate an end of the removal groove insertion protrusion 85. By rotating the rotation restricting rod 867 the contact portion 869 is prevented from contacting the shaft of the rotational handle 866. in this state, the rotational handle 866 is rotated. Accordingly, the first and second insertion protruding portions 83 and 84 are moved in the direction in which they are separated from or approach each other. For example, as shown in FIG. 29, by rotating the rotational handle 866 in the direction L, the first and second insertion protruding portions 83 and 84 are moved in the directions in which they are separated from each other (in the direction M of FIG. 29). In contrast, as shown in FIG. 30, when the rotational handle 86 is rotated in the direction N, the first and second insertion protruding portions 83 and 84 are moved in the directions close to each other (in the direction O of FIG. 30). Thus, by rotating the rotational handle 866, the removal groove insertion protrusion 85 is adjusted to fit to the width of the removal groove 3 of the pellicle 2. After the adjustment of the removal groove insertion protrusion 85 to fit to the width of the removal groove 3 in the widthwise direction is completed, the rotation restricting rod 867 is rotated so that the contact portion 869 closely contacts the shaft of the rotational handle 866. By doing so, undesirable rotation of the rotational handle 866 can be prevented.

Next, the adjustment rod 95 of the up/down fine adjustment portion 90 is rotated (in the direction P of FIG. 31). Accordingly, the end portion of the adjustment rod 95 presses the fixed plate member 50 downward (in the direction Q of FIG. 31). However, since the vertical moving lever 45 is disposed at the uppermost position, the fixed plate member 50 is prevented from moving downward, although the end portion of the adjustment rod 95 presses the fixed plate member 50, the fixed plate member 50 is not moved while the adjustment upper plate 92 is moved upward by retroaction thereto. Accordingly, as shown in FIG. 31, the first rotational plate 71, the second advancing plate 73, the central mobile plate member 70, the first insertion protruding portion 83, and the second insertion protruding portion 84, which are connected to the adjustment upper plate 92, are slightly moved upward. When the first and second insertion protruding portions 83 and 84 are slightly moved upward, as shown in FIG. 32, the removal groove insertion protrusion 85 is inserted into the removal groove 3 of the pellicle 2. That the removal groove insertion protrusion 85 is inserted into the removal groove 3 can be made easier by the action of the upper plate spring 89. Here, since the amount of the upward movement of the removal groove insertion protrusion 85 is displayed on the display portion 96, to remove the pellicle 2 adhering to the upper surface of a different mask 1 ofthe same type, the adjustment rod 95 is adjusted as much as the figure indicated on the display portion 96 so that the up/down fine adjustment work is made easy.

In the above state, the pull lever 62 is pulled upward (in the direction R of FIG. 33) with holding the handle portion 61 of the pull handle member 60. Accordingly, the first rotational plate 71 is moved upward by the pull chain 66, and the second advancing plate 73, the central mobile plate member 70, the first insertion protruding portion 83, and the second insertion protruding portion 84, which are connected to the first rotational plate 71, are moved upward. The first and second insertion protruding portions 83 and 84 are moved upward in the state in which the removal groove insertion protrusion 85 is completely inserted into the removal groove 3 ofthe pellicle 2. Thus, as shown in FIG. 33, the pellicle 2 is clearly removed from the upper surface of the mask 1.

Next, the mask accommodating member 20 is separated from the mask fixing member 30 by pulling the mask accommodating member 20 in the state in which the hook portion 25 and the unlocking protrusion 253 are pressed downward. Here, the restoration force of the stop portion spring 37 facilitates the separation between the mask accommodating member 20 and the mask fixing member 30. When the mask accommodating member 20 is completely separated from the mask fixing member 30 as described above, the side connection portions 23 are separated from the frame 21 by the restoring force of the frame spring 27 of the mask accommodating member 20, so that the movement prevention plate 24 is separated from the four corners of the upper surface ofthe mask 1. Accordingly, the mask 1 can be easily removed from the mask placing portion 22. Therefore, the pellicle 2 is removed by removing the mask 1 removed of the pellicle 2 from the mask accommodating and placing another mask with the pellicle 2 to be removed on the mask placing portion 22 and repeating the above process.

Industrial Applicability

As described above, in the pellicle removing apparatus according to the present invention, the pellicle can be conveniently and quickly removed without leaving defects such as scratches on the upper surface of the photomask and the time for removing the pellicle can be saved.

While this invention has been particularly shown and described with reference to preferred embodiments thereof, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention as defined by the appended claims.

Claims

What is claimed is:

1. A pellicle removing apparatus comprising: a base plate; a mask accommodating member which accommodates a photomask to which a pellicle having a removal groove for removing adheres and having a movement prevention plate which approaches the photomask to contact a comer portion on an upper surface of the photomask to prevent movement of the photomask and separates from the photomask to allow the movement of the photomask; a mask fixing member coupled to both ends of the base plate to fix the mask accommodating member; a vertical fixing member coupled to a rear portion of the base plate to protrude upward from the base plate; a fixed plate member coupled to the vertical fixing member to be capable of moving up and own with respect to the vertical fixing member and disposed parallel to the base plate; a pair of pull handle members coupled to both ends of the fixed plate member; a central mobile plate member connected to the pull handle member to move upward as the pull handle member is pulled upward; and a removal groove insertion member coupled to the central mobile plate member and having a protrusion inserted into the removal groove of the pellicle, wherein, as the pull handle member is pulled upward, the pellicle receives an upward directional force by the removal groove insertion portion so that the pellicle is separated from the photomask.

2. The pellicle removing apparatus of claim 1, wherein the mask accommodating member comprises: a frame; a mask placing portion coupled to an upper surface of the frame and having a support groove where the comer portion of the photomask is accommodated; and a pair of side connection portion coupled to both side surfaces of the frame and having a mask upper surface cover contacting the frame and disposed on an upper surface of the mask placing portion.

3. The pellicle removing apparatus of claim 2, wherein the mask accommodating member comprises: a frame groove formed in both side surfaces of the frame; a side connection portion through hole formed by penetrating the side connection portion at a position corresponding to the frame groove of the side connection portion; and a side coupling rod, wherein the side coupling rod penetrates the side connection portion through hole and is accommodated by the frame groove so that the side surface portion is coupled to both side surfaces ofthe frame.

4. The pellicle removing apparatus of claim 3, wherein the mask accommodating member further comprises a frame spring which is a coil spring disposed between the side connection portion and the frame and inserted around the outer circumference of the side coupling rod, to facilitate separation between the side connection portion and the frame.

5. The pellicle removing apparatus of claim 1, wherein the mask fixing member comprises a pair of vertical wall portions fixed to both ends at the front portion of the base plate and having a predetermined length and having a groove formed to have a predetermined depth along the lengthwise direction, and both ends of the mask accommodating member is inserted in the groove formed in the vertical wall portion so that the mask accommodating member is fixed.

6. The pellicle removing apparatus of claim 2, further comprising: a hook portion having a protrusion and coupled to the side connection portions not to protrude from the side surface ofthe side connection portion; and a hook portion protrusion accommodating groove formed upward at the front position of the vertical wall portion, wherein the protrusion of the hook portion is inserted into the hook portion protrusion accommodating groove so that the mask accommodating member is prevented from being inserted excessively into the groove of the vertical wall portion and a position where the mask accommodating member is accommodated is determined.

7. The pellicle removing apparatus of claim 6, further comprising: a hook portion spring elastically biasing the hook portion upward; a stop portion fixed to the base plate at a position of an end of a rear portion ofthe mask fixing member and having a groove; a stop portion spring inserted into the groove ofthe stop portion; and a stop portion protrusion inserted into the groove of the stop portion and having one end contacting the stop portion spring and the other end protruding from the stop portion, to facilitate separation of the mask accommodating member and the mask fixing member, wherein, when the mask accommodating member and the mask fixing member, the stop portion protrusion pushes an end of the mask accommodating member.

8. The pellicle removing apparatus of claim 1, wherein the vertical fixing member comprises: a vertical column plate coupled to the base plate in a vertical direction; a vertical guide rail coupled to one surface of the vertical column plate and having a guide groove; a vertical mobile plate coupled to the guide groove of the vertical guide rail and sliding up and down along the vertical guide rail; a connection plate disposed at a surface of the vertical column plate opposite to a surface to which the vertical guide rail is coupled and connected to the vertical mobile plate to move the vertical mobile plate up and down; a vertical moving lever connected to the connection plate to move the connection plate up and down; and a chain coupling the vertical mobile plate and the connection plate, wherein the fixed plate member is fixed to a front surface of the vertical mobile plate.

9. The pellicle removing apparatus of claim 8, further comprising: a lower connection plate disposed at a position separated downward from the connection plate; and a weight having a predetermined weight and inserted between the connection plate and the lower connection plate, to prevent movement of the vertical moving lever up and down when the vertical moving lever is disposed at an arbitrary position, wherein the vertical moving lever is prevented from moving up and down as weight connected to the vertical mobile plate and weight connected to the connection plate are balanced.

10. The pellicle removing apparatus of claim 1, further comprising: a protruding portion fixed to the side surface of the vertical mobile plate and protruding from the side surface ofthe vertical mobile plate; and a stop member fixed to the surface of the vertical column plate to which the guide rail is coupled, coupled to a position separated downward from an end ofthe guide rail, and preventing the protruding portion from moving downward.

11. The pellicle removing apparatus of claim 10, wherein the protruding portion comprises: a protrusion coupling plate fixed to the side surface of the vertical mobile plate and having a through hole; a cylinder inserted into the through hole of the protrusion coupling plate and having an inner groove filled with a high pressure gas; and a protruding pin inserted into the groove ofthe cylinder, wherein an impact by the protruding pin and the stop member is reduced by the high pressure gas filling the groove ofthe cylinder.

12. The pellicle removing apparatus of claim 8, further comprising: a catch protrusion coupled to the side surface of the vertical column plate and protruding from the side surface ofthe vertical column plate; a bent lever having a parallel portion passing through a through hole formed in the vertical moving lever and a vertical portion bent perpendicular to the parallel portion, to restrict and allow movement of the vertical mobile lever upward from the lowermost position, wherein, when the vertical moving lever is moved upward from the lowermost position, since the catch protrusion is disposed on a proceeding path of an end of the vertical portion of the bent lever, upward movement of the vertical mobile lever is restricted, and the upward movement of the vertical mobile lever is allowed by pivoting the parallel portion of the bent portion to move the position ofthe end ofthe vertical portion.

13. The pellicle removing apparatus of claim 1, wherein the pull handle member comprises: a handle portion fixed to the fixed plate member; a lever hinge coupled to the handle portion and having a bent portion that is bent; a chain pulley coupled to the lower surface of the fixed plate member; and a chain coupled to the chain pulley and having one end connected to the lever and the other end coupled to the central mobile plate member, wherein the central mobile plate member is moved upward as the lever is pulled upward.

14. The pellicle removing apparatus of claim 1, wherein the removal groove insertion member comprises: a pair of central mobile plate guides installed a both ends of the lower surface ofthe central mobile plate member; a pair of upper plates coupled to the central mobile plate guides, each of which having an upper surface to which an insertion guide rail is fixed; and first and second insertion protruding portions coupled to the lower surfaces of the upper plates and having a removal groove insertion protrusion inserted into the removal groove ofthe pellicle.

15. The pellicle removing apparatus of claim 14, wherein the removal groove insertion member further comprises an interval adjustment portion adjusting the interval between the first and second insertion protruding portions, and the interval adjustment portion comprises: first and second side plates fixed to both ends of the lower surface of the upper plate and having a side plate through hole; a central fixing portion having a central through hole and fixed to the lower surface ofthe upper plate; an intermediate bearing inserted into the central through hole of the central fixing portion; and a rotational rod assembly comprising: a central rod inserted into the central bearing, where no thread is formed; a first screw rod extending from the central rod and having one end inserted into the side plate through hole and coupled to the first side plate to be capable of rotating, where a right hand thread or a left hand thread is formed; a second screw rod extending from the central rod in a direction opposite to the side where the first screw rod is disposed and having an end inserted into the side plate through hole and coupled to the second side plate to be capable of rotating, where a thread in a direction opposite to a direction ofthe thread formed on the first screw rod; and a rotational handle coupled to the second screw rod and passing through the side through hole of the second side plate and protruding from the second side plate, wherein a screw through hole screwed to the thread formed on the first screw rod is formed at the first insertion protruding portion, a screw through hole screwed to the thread formed on the second screw rod is formed at the second insertion protruding portion, and when the rotational handle is rotated in one direction, the first insertion protruding portion and the second insertion protruding portion approach each other while when the rotational handle is rotated in the other direction, the first insertion protruding portion and the second insertion protruding portion are separated from each other.

16. The pellicle removing apparatus of claim 15, wherein, to guide movements ofthe first and second insertion protruding portions, through holes is formed in each of the first side plate, the second side plate, the first insertion protruding portion, the second insertion protruding portion, and the central fixing portion, and a guide rod is provided to penetrate the respective through holes.

17. The pellicle removing apparatus of claim 15, further comprising: a side plate protruding portion fixed to the second side plate to protrude from the second side plate and having a through hole; a contact portion disposed under the side plate protruding portion and on the upper surface of a shaft of the rotational handle, and having a screw groove to be capable of being screwed; and a rotational restricting rod passing through the through hole of the side plate protruding portion and screwed to the screw groove of the contact portion, to restrict undesired rotation ofthe rotational handle, wherein, by rotating the rotation restricting rod, the contact portion contacts the shaft of the rotation restrict rod so that the rotation of the rotational handle is restricted.

18. The pellicle removing apparatus of claim 15, further comprising: a power case coupled to the first side plate and having an inner space; a battery accommodated in the inner space ofthe power case; a switch cutting off the power ofthe battery; and a lamp portion connected to the battery and disposed above the protrusion of each ofthe first and second insertion protruding portions, wherein, as the lamp portion emits light, the insertion of the protrusions of the first and second insertion protruding portions are facilitated.

19. The pellicle removing apparatus of claim 15, further comprising a separation and approach adjustment portion separating and approaching the distance between the upper plates, the separation and approach adjustment portion comprising: a coupling portion having a through hole and fixed to the central portion ofthe lower surface of the central mobile plate member; a separation lever penetrating the through hole of the coupling portion and protruding from the coupling portion; a lower protruding portion fixed to an end portion of the separation lever to be capable of pivoting in horizontal and vertical directions according to the pivot position of the separation lever; and an arm portion having one end coupled to the upper plate and the other end coupled to the lower protruding portion.

20. The pellicle removing apparatus of claim 19, further comprising: a spring protrusion protruding downward from lower surface of the central mobile plate; and a coil spring having one end fixed to the upper plate and the other end coupled to the spring protrusion, to apply a force in a direction in which the upper plates approach each other.

21. The pellicle removing apparatus of claim 1 , further comprising an up/down fine adjustment portion to finely adjust movement ofthe central mobile plate in the up and down directions, the up/down fine adjustment portion comprising: a plurality of fixed plate through holes formed in the fixed plate member; a seal portion fixed to the upper plate of the fixed plate member and having a through hole formed in the central portion ofthe seal portion; an adjustment upper plate disposed separated from and parallel to the fixed plate member, having a through hole, and connected to the fixed plate member to be capable of approaching and being separated from the fixed plate member; an upper coupling portion coupled to the upper surface of the adjustment upper plate and having a through hole where a screw tab is formed; a vertical rod portion having one end fixed to the adjustment upper plate and the other end passing through the fixed plate and fixed to the central mobile plate member; and an adjustment rod screwed to the through hole of the upper coupling portion and having an end protruding downward by passing through the through hole ofthe adjustment upper plate, wherein the adjustment rod is moved downward so that the end of the adjustment rod passes through the through hole of the seal portion and contacts the upper surface of the fixed plate member and movement in a proceeding direction is prevented, and accordingly, by the reaction thereto, the adjustment upper plate and the central mobile plate member are finely moved upward.

22. The pellicle removing apparatus of claim 21, wherein the upper coupling portion further comprises a display portion measuring and displaying an amount ofthe adjustment upper plate in up and down directions.

23. The pellicle removing apparatus of claim 21, further comprising a stopper inserted around the vertical rod, having an upper surface contacting the lower surface of the adjustment upper plate, to restrict downward movement of the adjustment upper plate.

24. The pellicle removing apparatus of claim 21 , further comprising: a first rotational plate connected to the pull handle member, moving upward as the pull handle member is pulled upward, and coupled to the vertical rod; a second advancing plate axially coupled to the first rotational plate by a connection shaft, disposed between the first rotational plate and the central mobile plate member, and having a guide fixed to the lower surface of the second advancing plate and formed length along the lower surface of the second advancing plate in an advancing direction; a bearing inserted into the connection shaft; and a guide rail coupled to the guide of the second advancing plate and fixed to the upper surface of the central mobile plate member, to control movement of the central mobile plate member in a proceeding direction and rotation of the central mobile plate member in a direction parallel to the horizontal surface, wherein the central mobile plate member and the second advancing plate are movable in the advancing direction by the guide of the second advancing plate and the guide rail of the central mobile plate member, and the second advancing plate and the first rotational plate are rotatable parallel to a horizontal direction by the bearing.

25. The pellicle removing apparatus of claim 24, wherein an arc shaped groove is formed in the lower surface of the first rotational plate and a second advancing protrusion having one end inserted into the first rotational plate and the other end fixed to the second advancing plate is further provided, to limit an amount of relative rotation between the first rotational plate and the second advancing plate, wherein the amount of relative rotation between the first rotational plate and the second advancing plate is limited as much as the distance that the second advancing protrusion moved between one end and the other end ofthe groove of the first rotational plate.

26. The pellicle removing apparatus of claim 24, wherein the pull handle member comprises: a handle portion fixed to the fixed plate member; a lever hinge coupled to the handle portion and having a bent portion that is bent; a chain pulley coupled to the lower surface of the fixed plate member; and a chain coupled to the chain pulley and having one end connected to the lever and the other end coupled to the first rotational plate, wherein the first rotational plate, the second advancing plate, and the central mobile plate member are moved upward by pulling the lever upward