WO2002033361A3 - Apparatus and method for maintaining a constant pressure drop across a gas metering unit - Google Patents

Apparatus and method for maintaining a constant pressure drop across a gas metering unit Download PDF

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Publication number
WO2002033361A3
WO2002033361A3 PCT/US2001/024607 US0124607W WO0233361A3 WO 2002033361 A3 WO2002033361 A3 WO 2002033361A3 US 0124607 W US0124607 W US 0124607W WO 0233361 A3 WO0233361 A3 WO 0233361A3
Authority
WO
WIPO (PCT)
Prior art keywords
inlet
metering unit
pressure
actual
measurement device
Prior art date
Application number
PCT/US2001/024607
Other languages
French (fr)
Other versions
WO2002033361A2 (en
Inventor
Paul Francis Grosshart
Original Assignee
Mks Instr Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mks Instr Inc filed Critical Mks Instr Inc
Publication of WO2002033361A2 publication Critical patent/WO2002033361A2/en
Publication of WO2002033361A3 publication Critical patent/WO2002033361A3/en

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D7/00—Control of flow
    • G05D7/06—Control of flow characterised by the use of electric means
    • G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
    • G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
    • G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/15—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters specially adapted for gas meters
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
    • G01F25/00—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume
    • G01F25/10—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters
    • G01F25/17—Testing or calibration of apparatus for measuring volume, volume flow or liquid level or for metering by volume of flowmeters using calibrated reservoirs

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Measuring Volume Flow (AREA)
  • Flow Control (AREA)

Abstract

An apparatus (16) is disclosed for maintaining a substantially constant pressure drop across a gas metering unit to ensure precise operation of the unit. The apparatus (16) includes an inlet valve (42) controlling flow to an inlet of the metering unit (12), an inlet pressure measurement device (46) connected to the inlet of the metering unit, and an outlet pressure measurement device (48) connected to an outlet of the metering unit. The apparatus also includes a controller (40, 63) that receives an actual inlet pressure from the inlet pressure measurement device, receives an actual outlet pressure from the outlet pressure measurement device, compares the actual inlet pressure to the actual outlet pressure to determine an actual pressure change, and causes the inlet valve (42) to vary flow to the inlet of the metering unit if the actual pressure change varies from a predetermined initial pressure change. In this manner the disclosed apparatus maintains a substantially constant pressure drop across the metering unit.
PCT/US2001/024607 2000-10-13 2001-08-06 Apparatus and method for maintaining a constant pressure drop across a gas metering unit WO2002033361A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US68757100A 2000-10-13 2000-10-13
US09/687,571 2000-10-13

Publications (2)

Publication Number Publication Date
WO2002033361A2 WO2002033361A2 (en) 2002-04-25
WO2002033361A3 true WO2002033361A3 (en) 2002-08-01

Family

ID=24760938

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/024607 WO2002033361A2 (en) 2000-10-13 2001-08-06 Apparatus and method for maintaining a constant pressure drop across a gas metering unit

Country Status (1)

Country Link
WO (1) WO2002033361A2 (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2006017116A2 (en) * 2004-07-09 2006-02-16 Celerity, Inc. Method and system for flow measurement and validation of a mass flow controller
US7757554B2 (en) 2005-03-25 2010-07-20 Mks Instruments, Inc. High accuracy mass flow verifier with multiple inlets
DE102011100029C5 (en) * 2011-04-29 2016-10-13 Horiba Europe Gmbh Device for measuring a fuel flow and calibration device therefor
CN104764510A (en) * 2015-04-23 2015-07-08 江苏博克斯自动化控制工程有限公司 Calibration system for full-automatic direct-inserted hot type gas mass-flow meter and application thereof
JP6795832B2 (en) * 2016-07-05 2020-12-02 株式会社フジキン Flow control equipment, flow calibration method for flow control equipment, flow measurement equipment and flow measurement method using flow measurement equipment

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59225411A (en) * 1983-06-06 1984-12-18 Tokyo Keiki Co Ltd Digital valve controller
US4951224A (en) * 1987-07-30 1990-08-21 Jiri Hokynar Control device for fluid flow
US5190068A (en) * 1992-07-02 1993-03-02 Brian Philbin Control apparatus and method for controlling fluid flows and pressures
JPH11259140A (en) * 1998-03-13 1999-09-24 Kokusai Electric Co Ltd Flow rate controller
WO2000020940A1 (en) * 1998-10-08 2000-04-13 Mott Metallurgical Corporation Fluid flow controlling
US6074691A (en) * 1997-06-24 2000-06-13 Balzers Aktiengesellschaft Method for monitoring the flow of a gas into a vacuum reactor

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59225411A (en) * 1983-06-06 1984-12-18 Tokyo Keiki Co Ltd Digital valve controller
US4951224A (en) * 1987-07-30 1990-08-21 Jiri Hokynar Control device for fluid flow
US5190068A (en) * 1992-07-02 1993-03-02 Brian Philbin Control apparatus and method for controlling fluid flows and pressures
US6074691A (en) * 1997-06-24 2000-06-13 Balzers Aktiengesellschaft Method for monitoring the flow of a gas into a vacuum reactor
JPH11259140A (en) * 1998-03-13 1999-09-24 Kokusai Electric Co Ltd Flow rate controller
WO2000020940A1 (en) * 1998-10-08 2000-04-13 Mott Metallurgical Corporation Fluid flow controlling

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 009, no. 101 (P - 353) 2 May 1985 (1985-05-02) *
PATENT ABSTRACTS OF JAPAN vol. 1999, no. 14 22 December 1999 (1999-12-22) *

Also Published As

Publication number Publication date
WO2002033361A2 (en) 2002-04-25

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