WO2002012950A1 - Method of analyzing spectrum using multi-slit member and multi-channel spectrograph using the same - Google Patents

Method of analyzing spectrum using multi-slit member and multi-channel spectrograph using the same Download PDF

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Publication number
WO2002012950A1
WO2002012950A1 PCT/KR2001/001344 KR0101344W WO0212950A1 WO 2002012950 A1 WO2002012950 A1 WO 2002012950A1 KR 0101344 W KR0101344 W KR 0101344W WO 0212950 A1 WO0212950 A1 WO 0212950A1
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WO
WIPO (PCT)
Prior art keywords
objective light
slit member
slit
concave grating
objective
Prior art date
Application number
PCT/KR2001/001344
Other languages
French (fr)
Inventor
Bong-Il Ji
Jong-Su Choi
Original Assignee
Yuil Engineering Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yuil Engineering Corp filed Critical Yuil Engineering Corp
Priority to AU2001277792A priority Critical patent/AU2001277792A1/en
Publication of WO2002012950A1 publication Critical patent/WO2002012950A1/en

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/04—Slit arrangements slit adjustment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12—Generating the spectrum; Monochromators
    • G01J3/18—Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • G01J3/20—Rowland circle spectrometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/30—Measuring the intensity of spectral lines directly on the spectrum itself
    • G01J3/36—Investigating two or more bands of a spectrum by separate detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0237—Adjustable, e.g. focussing

Definitions

  • the present invention relates generally to a spectrograph for determinating the chemical composition of a specimen, and more particularly to a multi-channel spectrograph with a multi-slit member that is able to finely adjust the path of an objective light passed through a specimen so as to analyze the spectrum of the objective light.
  • a grazing- incidence spectrograph wherein a slit unit, a concave grating (grating) and an optical film are positioned on the circumference of a circle on which the focuses of the concave grating are formed, that is, a Rowland circle.
  • the conventional optical spectrograph has a problem in that the Rowland circle should be measured and formed very precisely, and the slit unit, the concave grating and the optical film should be arranged on the circumference of the Rowland circle very precisely to attain high analytical performance.
  • the conventional spectrograph has another problem in that it is difficult to use a flat detector such as a CCD (charge coupled device) detector because the optical film recording the objective light should be curved along the curved circumference of the Rowland circle.
  • a flat detector such as a CCD (charge coupled device) detector because the optical film recording the objective light should be curved along the curved circumference of the Rowland circle.
  • an object of the present invention is to provide a method of analyzing a spectrum using a multi-slit member and multi- channel spectrograph using the method, in which position adjusting means is employed, thereby facilitating the adjustment of the positions of optical members including a detector unit and a multi-slit member located on the focal circle of a concave grating.
  • Another object of the present invention is to provide a method of analyzing a spectrum using a multi-slit member and multi-channel spectrograph using the method, in which a multi-slit member with a plurality of slits is employed, thereby facilitating the adjustment of the path of an objective light passed through the multi-slit member.
  • a further object of ; the , present invention is to provide a method of analyzing a spectrum using a multi-slit member and multi-channel spectrograph using the method, wherein charge coupled device detectors are employed, thereby allowing the spectrum of the objective light to be conveniently analyzed.
  • the present invention provides a multi-channel spectrograph, comprising: a focusing lens for focusing the focus of an objective light generated in a light source and passed through a specimen; a slit unit for passing the objective light focused by the focusing lens through at least one slit; a concave grating for diffracting the objective light passed through the slit unit; and a detector unit for detecting the objective light diffracted by the concave grating; wherein the slit unit is a multi-slit member with a plurality of slits, the objective light diffracted by the concave grating and directed toward the detector unit being moved by the movement of the multi-slit member.
  • the detector unit is a plurality of CCD (charge coupled device) detectors disposed on a circumference of a Rowland circle, that is, a focal curve, of the concave grating.
  • CCD charge coupled device
  • the multi-channel spectrograph further comprises a focus adjusting device for adjusting a position of the focusing lens so as to accurately focus the objective light passed through the focusing lens on the multi-slit member.
  • the multi-channel spectrograph further comprises a zero-order adjustment device for adjusting positions of the light source, the multi-slit member and the concave grating. . ..
  • the present invention provides a method of analyzing a spectrum using a multi-slit member, comprising the steps of: passing an objective light through a specimen, a focusing lens and at least a slit of the multi-slit member; adjusting a focus of the objective light on the multi-slit member; diffracting the objective light passed through the multi-slit member using a concave grating; adjusting a position of the concave grating, based on inspection of the objective light diffracted by the concave grating; detecting a spectrum of the objective light diffracted by the concave grating using a plurality of CCD detectors while the concave grating is tilted; and moving the multi-slit member by a predetermined distance so as to move the objective light positioned on the C
  • Fig. 1 is a schematic view showing a multi-channel spectrograph according to the present invention.
  • Fig. 1 is a schematic diagram showing the multi-channel spectrograph according to the present invention.
  • the multi-channel spectrograph 1 (hereinafter, referred to as the spectrograph), to which the method of analyzing the spectrum using the multi-slit member is applied, is comprised of an optical unit 10 for adjusting the path and position of an objective light 2 which enters the spectrograph 1, a detection unit 20 for detecting the wavelength and path of the objective light 2, and a control unit 30 for producing analysis data based on the optical information detected by the detection unit 20.
  • the optical unit 10 is comprised of a light source 4 for producing the objective light 2 by illuminating a specimen 3 with the beam of light such as ultraviolet rays, a focus adjusting unit 12 for adjusting the focus of the objective light 2 passed through the specimen 3, a multi-slit member 14 through which the objective light 2 adjusted by the focus adjusting unit 12 passes, and a concave grating 16 which diffracts the objective light 2 onto the detection unit 20 and changes the path of the objective light passed through the multi-slit member 14.
  • a light source 4 for producing the objective light 2 by illuminating a specimen 3 with the beam of light such as ultraviolet rays
  • a focus adjusting unit 12 for adjusting the focus of the objective light 2 passed through the specimen 3
  • a multi-slit member 14 through which the objective light 2 adjusted by the focus adjusting unit 12 passes
  • a concave grating 16 which diffracts the objective light 2 onto the detection unit 20 and changes the path of the objective light passed through the multi-slit member 14.
  • the focus adjusting unit 12 is comprised of a focusing lens 12a focusing the objective light 2 passed through the specimen 3 on the multi-slit member 14, a
  • CCD charge coupled device
  • the multi-slit member 14 is provided with a plurality of slits 14a through which the objective light 2 passed through the focusing lens 12a is passed.
  • the multi-slit member 14 is equipped with a multi-slit member moving means (not shown) for moving the multi-slit member 14 by the length of the pitch of the slits
  • the concave grating 16 diffracts the objective light 2 passed through the multi-slit member 14 so as to direct the objective light to the detection unit 20.
  • the concave grating 16 diffracts the objective light 2 passed through one of the slits 14a by means of a plurality of diffraction gratings formed on the surface of the reflective plate of the concave grating 16 so as to direct the diffracted objective light to the detection unit 20.
  • the detection unit 20 is comprised of a zero-order adjustment unit 22 for inspecting the objective light 2 diffracted and reflected by the concave grating 16 to determine the initial setting position of the elements of the spectrograph 1, and the first, second, third and fourth CCD detectors 24a, 24b, 24c, 24d for detecting the objective light 2 diffracted and reflected by the concave grating 16.
  • the zero-order adjustment unit 22 is comprised of a zero-order adjustment camera 22a positioned on the line upwardly perpendicular to the concave grating 16 to inspect the objective light 2 reflected by the concave grating
  • a zero-order adjustment device 22b for analyzing the objective light 2 inspected by the zero-order adjustment camera 22a and resetting the positions of the light source 4, the multi-slit member 14 and the concave grating 16.
  • the first, second, third and fourth CCD detectors 24a, 24b, 24c, 24d are located on a Rowland circle 16a tangential to the concave grating 16.
  • CCD detectors 24a, 24b, 24c, and 24d can detect simultaneously the objective light 2 diffracted by the concave grating 16.
  • a central processor 26 analyzes information about the objective light 2 detected by CCD detectors 24a, 24b, 24c and 24d and provides information that a user requires.
  • the objective light 2 which is produced by the light source 4 and passed through the specimen 3 to be analyzed, is incident upon the spectrograph 1 through the focusing lens 12a.
  • the incident objective light 2 is focused on the multi-slit member 14 member provided in the spectrograph 1 after being passed through the focusing lens 12a.
  • a focus formed on the multi-slit member 14 is detected by a CCD camera 12b.
  • the focus adjusting device 12c inspects whether the objective light is accurately focused on the multi-slit member 14 on the basis of information detected.
  • the focus adjusting device 12c moves the focusing lens 12a by the operation of the focusing lens moving means 12d coupled to the focusing lens 12a, thereby accurately focusing the objective light 2 on the multi-slit member 14.
  • the objective light 2 focused on a specific slit of a plurality of slits 14a formed in the multi-slit member 14 is incident on the concave grating 16 after being passed through the multi-slit member 14, and the objective light 2 incident on the concave grating 16 is diffracted by the diffraction grating formed on the surface of the concave grating 16 and, thus, directed toward the detection unit 20.
  • a part of the objective light 2 diffracted by the concave grating 16 is incident on the zero-order adjustment camera 22a which is placed on the line upwardly pe ⁇ endicular to the concave grating 16.
  • the zero-order adjustment device 22b analyzes information about the objective light 2 which is incident on the zero-order adjustment camera 22a and thus determines the positions of the light source 4, the multi-slit member 14 and the concave grating 16.
  • the multi slit 14 and the concave grating 16 are completed by the zero-order adjustment unit 22, the first, second, third and fourth CCD detectors 24a, 24b, 24c and 24d lying on the
  • Rowland circle 16a detect the objective light 2 diffracted by the concave grating
  • the multi-slit member 14 on which the focus of the objective light is formed is moved by a predetermined distance so as to measure shadow spaces "A" formed between the CCD detectors 24a, 24b, 24c and 24d
  • the objective light 2 illuminating the first, the second, the third and the fourth CCD detectors 24a, 24b, 24c and 24d is moved by a predetermined distance, thereby illuminating the shadow spaces "A” between the CCD detectors 24a, 24b, 24c and 24d and being detected by the CCD detectors 24a, 24b, 24c and 24d.
  • the present invention provides a method of analyzing a spectrum using a multi-slit member and multi-channel spectrograph using the method, which is capable of facilitating the adjustment of the positions of optical members including a detector and the multi-slit member located in the focal circle of a concave grating, facilitating the adjustment of path of the objective light passed through a slit using a multi-slit member, and allowing a spectrum to be conveniently analyzed using CCD detectors.

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  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

Disclosed herein is a method of analyzing spectrum using multi-slit member and multi-channel spectrograph using the method. The multi-channel spectrograph includes a focusing lens (12a) for focusing the focus of an objective light (2) generated in a light source (4) and passed through a specimen (3). A slit unit passes the objective light focused by the focusing lens (12a) through at least one slit formed therein. A concave grating (16) diffracts the objective light (2) passed through the slit unit. A detector unit detects the objective light diffracted by the concave grating (16). The slit unit is a multi-slit member (14) with a plurality of slits (14a). The objective light (2) diffracted by the concave grating (16) and directed toward the detector unit is moved by the movement of the multi-slit member (14).

Description

METHOD OF ANALYZING SPECTRUM USING MULTI-SLIT MEMBER AND MULTI-CHANNEL SPECTROGRAPH USING THE SAME
Technical Field
The present invention relates generally to a spectrograph for determinating the chemical composition of a specimen, and more particularly to a multi-channel spectrograph with a multi-slit member that is able to finely adjust the path of an objective light passed through a specimen so as to analyze the spectrum of the objective light.
Background Art
Typically, in order to analyze a light, there is widely utilized a grazing- incidence spectrograph wherein a slit unit, a concave grating (grating) and an optical film are positioned on the circumference of a circle on which the focuses of the concave grating are formed, that is, a Rowland circle.
However, the conventional optical spectrograph has a problem in that the Rowland circle should be measured and formed very precisely, and the slit unit, the concave grating and the optical film should be arranged on the circumference of the Rowland circle very precisely to attain high analytical performance.
The conventional spectrograph has another problem in that it is difficult to use a flat detector such as a CCD (charge coupled device) detector because the optical film recording the objective light should be curved along the curved circumference of the Rowland circle.
Disclosure of the Invention
Accordingly, the present invention has been made keeping in mind the above problems occurring in the prior art, and an object of the present invention is to provide a method of analyzing a spectrum using a multi-slit member and multi- channel spectrograph using the method, in which position adjusting means is employed, thereby facilitating the adjustment of the positions of optical members including a detector unit and a multi-slit member located on the focal circle of a concave grating. Another object of the present invention is to provide a method of analyzing a spectrum using a multi-slit member and multi-channel spectrograph using the method, in which a multi-slit member with a plurality of slits is employed, thereby facilitating the adjustment of the path of an objective light passed through the multi-slit member. A further object of ; the , present invention is to provide a method of analyzing a spectrum using a multi-slit member and multi-channel spectrograph using the method, wherein charge coupled device detectors are employed, thereby allowing the spectrum of the objective light to be conveniently analyzed.
In order to accomplish the above objects, the present invention provides a multi-channel spectrograph, comprising: a focusing lens for focusing the focus of an objective light generated in a light source and passed through a specimen; a slit unit for passing the objective light focused by the focusing lens through at least one slit; a concave grating for diffracting the objective light passed through the slit unit; and a detector unit for detecting the objective light diffracted by the concave grating; wherein the slit unit is a multi-slit member with a plurality of slits, the objective light diffracted by the concave grating and directed toward the detector unit being moved by the movement of the multi-slit member.
Preferably, the detector unit is a plurality of CCD (charge coupled device) detectors disposed on a circumference of a Rowland circle, that is, a focal curve, of the concave grating.
Preferably, the multi-channel spectrograph further comprises a focus adjusting device for adjusting a position of the focusing lens so as to accurately focus the objective light passed through the focusing lens on the multi-slit member.
Preferably, the multi-channel spectrograph further comprises a zero-order adjustment device for adjusting positions of the light source, the multi-slit member and the concave grating. . .. In addition, the present invention provides a method of analyzing a spectrum using a multi-slit member, comprising the steps of: passing an objective light through a specimen, a focusing lens and at least a slit of the multi-slit member; adjusting a focus of the objective light on the multi-slit member; diffracting the objective light passed through the multi-slit member using a concave grating; adjusting a position of the concave grating, based on inspection of the objective light diffracted by the concave grating; detecting a spectrum of the objective light diffracted by the concave grating using a plurality of CCD detectors while the concave grating is tilted; and moving the multi-slit member by a predetermined distance so as to move the objective light positioned on the CCD detectors by a predetermined distance.
Brief Description of the Drawing
Fig. 1 is a schematic view showing a multi-channel spectrograph according to the present invention.
Best Mode for Carrying Out the Invention
A method of analyzing spectrum using multi-slit member and multichannel spectrograph using the method will be now described in detail with reference to an accompanying drawing.
In the description of the present invention, terms are defined in consideration of the functions of the elements of the present invention. Since the terms can be differently defined according to the inclinations and customs of those skilled in the art, various modifications of the terms may be made without departing from the spirit and scope of the invention.
Fig. 1 is a schematic diagram showing the multi-channel spectrograph according to the present invention.
As shown in Fig.l, the multi-channel spectrograph 1 (hereinafter, referred to as the spectrograph), to which the method of analyzing the spectrum using the multi-slit member is applied, is comprised of an optical unit 10 for adjusting the path and position of an objective light 2 which enters the spectrograph 1, a detection unit 20 for detecting the wavelength and path of the objective light 2, and a control unit 30 for producing analysis data based on the optical information detected by the detection unit 20.
In this case, the optical unit 10 is comprised of a light source 4 for producing the objective light 2 by illuminating a specimen 3 with the beam of light such as ultraviolet rays, a focus adjusting unit 12 for adjusting the focus of the objective light 2 passed through the specimen 3, a multi-slit member 14 through which the objective light 2 adjusted by the focus adjusting unit 12 passes, and a concave grating 16 which diffracts the objective light 2 onto the detection unit 20 and changes the path of the objective light passed through the multi-slit member 14.
The focus adjusting unit 12 is comprised of a focusing lens 12a focusing the objective light 2 passed through the specimen 3 on the multi-slit member 14, a
CCD (charge coupled device) camera 12b for detecting a focus formed on the multi-slit member 14 by the focusing lens 12a, a focus adjusting device 12c for inspecting the focus formed on the multi-slit member 14 based on an image detected by the CCD camera 12b, and a focusing lens moving means 12d for moving the focusing lens 12a based on the data obtained by the focus adjusting device 12c to adjust the focus formed on the multi-slit member 14.
The multi-slit member 14 is provided with a plurality of slits 14a through which the objective light 2 passed through the focusing lens 12a is passed. The multi-slit member 14 is equipped with a multi-slit member moving means (not shown) for moving the multi-slit member 14 by the length of the pitch of the slits
14a of the multi-slit member 14 so as to change the path of the objective light 2 illuminating the concave grating 16 through a plurality of slits 14a.
The concave grating 16 diffracts the objective light 2 passed through the multi-slit member 14 so as to direct the objective light to the detection unit 20. In more detail, the concave grating 16 diffracts the objective light 2 passed through one of the slits 14a by means of a plurality of diffraction gratings formed on the surface of the reflective plate of the concave grating 16 so as to direct the diffracted objective light to the detection unit 20.
The detection unit 20 is comprised of a zero-order adjustment unit 22 for inspecting the objective light 2 diffracted and reflected by the concave grating 16 to determine the initial setting position of the elements of the spectrograph 1, and the first, second, third and fourth CCD detectors 24a, 24b, 24c, 24d for detecting the objective light 2 diffracted and reflected by the concave grating 16.
In this case, the zero-order adjustment unit 22 is comprised of a zero-order adjustment camera 22a positioned on the line upwardly perpendicular to the concave grating 16 to inspect the objective light 2 reflected by the concave grating
16, and a zero-order adjustment device 22b for analyzing the objective light 2 inspected by the zero-order adjustment camera 22a and resetting the positions of the light source 4, the multi-slit member 14 and the concave grating 16.
The first, second, third and fourth CCD detectors 24a, 24b, 24c, 24d are located on a Rowland circle 16a tangential to the concave grating 16. Each of the
CCD detectors 24a, 24b, 24c, and 24d can detect simultaneously the objective light 2 diffracted by the concave grating 16. A central processor 26 analyzes information about the objective light 2 detected by CCD detectors 24a, 24b, 24c and 24d and provides information that a user requires. The method of analyzing the spectrum using the multi-slit member constructed as described above and the operation of the multi-channel spectrograph using the method will be now described in detail with reference to an embodiment of the present invention.
First, the objective light 2, which is produced by the light source 4 and passed through the specimen 3 to be analyzed, is incident upon the spectrograph 1 through the focusing lens 12a.
The incident objective light 2 is focused on the multi-slit member 14 member provided in the spectrograph 1 after being passed through the focusing lens 12a. A focus formed on the multi-slit member 14 is detected by a CCD camera 12b. The focus adjusting device 12c inspects whether the objective light is accurately focused on the multi-slit member 14 on the basis of information detected.
In case that the focus formed on the multi-slit member 14 is not accurate, the focus adjusting device 12c moves the focusing lens 12a by the operation of the focusing lens moving means 12d coupled to the focusing lens 12a, thereby accurately focusing the objective light 2 on the multi-slit member 14.
Thereafter, the objective light 2 focused on a specific slit of a plurality of slits 14a formed in the multi-slit member 14 is incident on the concave grating 16 after being passed through the multi-slit member 14, and the objective light 2 incident on the concave grating 16 is diffracted by the diffraction grating formed on the surface of the concave grating 16 and, thus, directed toward the detection unit 20.
A part of the objective light 2 diffracted by the concave grating 16 is incident on the zero-order adjustment camera 22a which is placed on the line upwardly peφendicular to the concave grating 16. The zero-order adjustment device 22b analyzes information about the objective light 2 which is incident on the zero-order adjustment camera 22a and thus determines the positions of the light source 4, the multi-slit member 14 and the concave grating 16.
When the position setting of the light source 4, the multi slit 14 and the concave grating 16 are completed by the zero-order adjustment unit 22, the first, second, third and fourth CCD detectors 24a, 24b, 24c and 24d lying on the
Rowland circle 16a detect the objective light 2 diffracted by the concave grating
16.
Thereafter, when the multi-slit member 14 on which the focus of the objective light is formed is moved by a predetermined distance so as to measure shadow spaces "A" formed between the CCD detectors 24a, 24b, 24c and 24d, the objective light 2 illuminating the first, the second, the third and the fourth CCD detectors 24a, 24b, 24c and 24d is moved by a predetermined distance, thereby illuminating the shadow spaces "A" between the CCD detectors 24a, 24b, 24c and 24d and being detected by the CCD detectors 24a, 24b, 24c and 24d. Industrial Applicability
As described above, the present invention provides a method of analyzing a spectrum using a multi-slit member and multi-channel spectrograph using the method, which is capable of facilitating the adjustment of the positions of optical members including a detector and the multi-slit member located in the focal circle of a concave grating, facilitating the adjustment of path of the objective light passed through a slit using a multi-slit member, and allowing a spectrum to be conveniently analyzed using CCD detectors.
Although the preferred embodiments of the present invention have been disclosed for illustrative purposes, those skilled in the art will appreciate that various modifications, additions and substitutions are possible, without departing from the scope and spirit of the invention as disclosed in the accompanying claims.

Claims

Claims
1. A multi-channel spectrograph, comprising: a focusing lens for focusing an objective light generated in a light source and passed through a specimen; a slit unit for passing the objective light focused by the focusing lens through at least one slit formed therein; a concave grating for diffracting the objective light passed through the slit unit; and a detector unit for detecting the objective light diffracted by the concave grating; wherein said slit unit is a multi-slit member with a plurality of slits, said objective light diffracted by the concave grating and directed toward the detector unit being moved by movement of said multi-slit member.
2. The multi-channel spectrograph according to claim 1, wherein said detector unit is a plurality of CCD (charge coupled device) detectors disposed on a circumference of a Rowland circle, that is, a focal curve, of the concave grating.
3. The multi-channel spectrograph according to claim 1, further comprising a focus adjusting device for adjusting a position of said focusing lens so as to accurately focus the objective light passed through the focusing lens on the multi-slit member.
4. The multi-channel spectrograph according to claim 1, further comprising a zero-order adjustment device for adjusting positions of said light source, said multi-slit member and said concave grating.
5. A method of analyzing a spectrum using a multi-slit member, comprising the steps of: passing an objective light through a specimen, a focusing lens and at least a slit of the multi-slit member; adjusting a focus of the objective light on the multi-slit member; diffracting the objective light passed through the multi-slit member using a concave grating; adjusting a position of the concave grating, based on inspection of the objective light diffracted by the concave grating; detecting a spectrum of the objective light diffracted by the concave grating using a plurality of CCD detectors while the concave grating is tilted; and moving the multi-slit member by a predetermined distance so as to move the objective light positioned on the CCD detectors by a predetermined distance.
PCT/KR2001/001344 2000-08-10 2001-08-07 Method of analyzing spectrum using multi-slit member and multi-channel spectrograph using the same WO2002012950A1 (en)

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WO2005095910A1 (en) * 2004-04-01 2005-10-13 Alexandr Markovich Livshits Spectrometer
EP3372966A1 (en) * 2017-03-10 2018-09-12 Hitachi High-Tech Analytical Science Limited A portable analyzer using optical emission spectoscopy
CN113418608A (en) * 2021-07-09 2021-09-21 南京浪博科教仪器有限公司 Spectrograph based on high-efficient regulation of income light

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KR102447224B1 (en) * 2020-10-26 2022-09-27 한국생산기술연구원 apparatus for qualitative and quantitative analysis of fine particles

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