WO2002004322A3 - SMIF container latch mechanism - Google Patents

SMIF container latch mechanism Download PDF

Info

Publication number
WO2002004322A3
WO2002004322A3 PCT/US2001/021694 US0121694W WO0204322A3 WO 2002004322 A3 WO2002004322 A3 WO 2002004322A3 US 0121694 W US0121694 W US 0121694W WO 0204322 A3 WO0204322 A3 WO 0204322A3
Authority
WO
WIPO (PCT)
Prior art keywords
pod
pod door
latch assembly
door
latch mechanism
Prior art date
Application number
PCT/US2001/021694
Other languages
French (fr)
Other versions
WO2002004322A2 (en
Inventor
Mark V Smith
Robert P Wartenbergh
William P Pennybacker
Original Assignee
Asyst Technologies
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asyst Technologies filed Critical Asyst Technologies
Priority to EP01984159A priority Critical patent/EP1412600A4/en
Priority to AU2002218765A priority patent/AU2002218765A1/en
Publication of WO2002004322A2 publication Critical patent/WO2002004322A2/en
Publication of WO2002004322A3 publication Critical patent/WO2002004322A3/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
    • H01L21/6735—Closed carriers
    • H01L21/67373—Closed carriers characterised by locking systems
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T292/00—Closure fasteners
    • Y10T292/08—Bolts
    • Y10T292/0801—Multiple
    • Y10T292/0834—Sliding
    • Y10T292/0836—Operating means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T292/00—Closure fasteners
    • Y10T292/08—Bolts
    • Y10T292/0801—Multiple
    • Y10T292/0834—Sliding
    • Y10T292/0836—Operating means
    • Y10T292/084—Cam
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T292/00—Closure fasteners
    • Y10T292/08—Bolts
    • Y10T292/096—Sliding
    • Y10T292/0961—Multiple head
    • Y10T292/0962—Operating means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T292/00—Closure fasteners
    • Y10T292/08—Bolts
    • Y10T292/096—Sliding
    • Y10T292/1014—Operating means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T292/00—Closure fasteners
    • Y10T292/08—Bolts
    • Y10T292/096—Sliding
    • Y10T292/1014—Operating means
    • Y10T292/1016—Cam
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T292/00—Closure fasteners
    • Y10T292/08—Bolts
    • Y10T292/096—Sliding
    • Y10T292/1014—Operating means
    • Y10T292/1022—Rigid

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Packaging Frangible Articles (AREA)

Abstract

The present invention includes a latch assembly (102), such as may be useful for SMIF pods. SMIF pods are in general comprised of a pod door (110) which mates with a pod shell (100) to provide a sealed environment in which wafers may be stored and transferred. During wafer storage and transport, the pod door (110) is typically held affixed to the pod shell (100) by a latch assembly (102). When it is desired to separate the pod door (110) from the pod shell (100), each latch must be actuated outwardly, to withdraw each engagement portion (116) from the pod door (110), at which time the pod door (110) may be separated. The present invention includes an improved such latch assembly (102).
PCT/US2001/021694 2000-07-10 2001-07-10 Smif container latch mechanism WO2002004322A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
EP01984159A EP1412600A4 (en) 2000-07-10 2001-07-10 Smif container latch mechanism
AU2002218765A AU2002218765A1 (en) 2000-07-10 2001-07-10 Smif container latch mechanism

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US21720400P 2000-07-10 2000-07-10
US60/217,204 2000-07-10

Publications (2)

Publication Number Publication Date
WO2002004322A2 WO2002004322A2 (en) 2002-01-17
WO2002004322A3 true WO2002004322A3 (en) 2002-04-25

Family

ID=22810080

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2001/021694 WO2002004322A2 (en) 2000-07-10 2001-07-10 Smif container latch mechanism

Country Status (4)

Country Link
US (1) US6536813B2 (en)
EP (1) EP1412600A4 (en)
AU (1) AU2002218765A1 (en)
WO (1) WO2002004322A2 (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6984237B2 (en) 2002-05-22 2006-01-10 Orthopaedic Biosystems Ltd., Inc. Suture passing surgical instrument
US7389324B2 (en) * 2003-11-07 2008-06-17 Plaxo, Inc. Viral engine for network deployment
US7080104B2 (en) * 2003-11-07 2006-07-18 Plaxo, Inc. Synchronization and merge engines
US7325685B2 (en) * 2003-11-25 2008-02-05 International Business Machines Corporation Secondary latchkey mechanism and method for reticle SMIF pods
US7328836B2 (en) * 2004-02-03 2008-02-12 Taiwan Semiconductor Manufacturing Co., Ltd. Smart tag holder and cover housing
AU2005262460B2 (en) 2004-06-16 2011-12-15 Smith & Nephew, Inc. Suture passing
US7380668B2 (en) * 2004-10-07 2008-06-03 Fab Integrated Technology, Inc. Reticle carrier
US7996357B2 (en) * 2008-02-29 2011-08-09 Plaxo, Inc. Enabling synchronization with a difference unaware data source
US8556916B2 (en) 2011-02-14 2013-10-15 Smith & Nephew, Inc. Method and device for suture manipulation
EP3134008A1 (en) 2014-04-24 2017-03-01 Smith&Nephew, Inc. Suture passer
WO2018081374A1 (en) 2016-10-31 2018-05-03 Smith & Nephew, Inc. Suture passer and grasper instrument and method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4739882A (en) * 1986-02-13 1988-04-26 Asyst Technologies Container having disposable liners
US6106213A (en) * 1998-02-27 2000-08-22 Pri Automation, Inc. Automated door assembly for use in semiconductor wafer manufacturing
US6186331B1 (en) * 1998-04-06 2001-02-13 Dainichi Shoji K.K. Container

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US907933A (en) * 1908-04-27 1908-12-29 Frank S Wisterman Grave-vault door.
FR677818A (en) * 1929-07-03 1930-03-14 Ver Baubeschlag Gretsch Co Control handle for windows with opening from above
GB1104346A (en) * 1965-06-25 1968-02-21 Ass Elect Ind Latching devices
US4532970A (en) * 1983-09-28 1985-08-06 Hewlett-Packard Company Particle-free dockable interface for integrated circuit processing
US4534389A (en) * 1984-03-29 1985-08-13 Hewlett-Packard Company Interlocking door latch for dockable interface for integrated circuit processing
US4709834A (en) * 1987-02-02 1987-12-01 Empak Inc. Storage box
US4995430A (en) * 1989-05-19 1991-02-26 Asyst Technologies, Inc. Sealable transportable container having improved latch mechanism
US5570987A (en) * 1993-12-14 1996-11-05 W. L. Gore & Associates, Inc. Semiconductor wafer transport container
US5613821A (en) * 1995-07-06 1997-03-25 Brooks Automation, Inc. Cluster tool batchloader of substrate carrier
US6223396B1 (en) * 1998-04-27 2001-05-01 Asyst Technologies, Inc. Pivoting side handles

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4739882A (en) * 1986-02-13 1988-04-26 Asyst Technologies Container having disposable liners
US6106213A (en) * 1998-02-27 2000-08-22 Pri Automation, Inc. Automated door assembly for use in semiconductor wafer manufacturing
US6186331B1 (en) * 1998-04-06 2001-02-13 Dainichi Shoji K.K. Container

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP1412600A4 *

Also Published As

Publication number Publication date
WO2002004322A2 (en) 2002-01-17
US20020021009A1 (en) 2002-02-21
EP1412600A4 (en) 2005-09-14
US6536813B2 (en) 2003-03-25
EP1412600A2 (en) 2004-04-28
AU2002218765A1 (en) 2002-01-21

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