WO2002003856A2 - Self energized wireless mems devices - Google Patents
Self energized wireless mems devices Download PDFInfo
- Publication number
- WO2002003856A2 WO2002003856A2 PCT/US2001/020561 US0120561W WO0203856A2 WO 2002003856 A2 WO2002003856 A2 WO 2002003856A2 US 0120561 W US0120561 W US 0120561W WO 0203856 A2 WO0203856 A2 WO 0203856A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- mems
- storage device
- transceiver
- sensor
- power
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M5/00—Investigating the elasticity of structures, e.g. deflection of bridges or air-craft wings
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/0002—Remote monitoring of patients using telemetry, e.g. transmission of vital signals via a communication network
- A61B5/0031—Implanted circuitry
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/02—Details of sensors specially adapted for in-vivo measurements
- A61B2562/028—Microscale sensors, e.g. electromechanical sensors [MEMS]
Definitions
- Figure 4 is an application of self-powered MEMS devices for monitoring the human body, in accordance with a preferred embodiment of the present invention.
- Interfaces 103 and 105 are formed at the boundaries between sensor 102 and energy harvesting device 104, and between energy harvesting/storage device 104 and transceiver 106. Communication is achieved between the individual MEMS devices that make up self-powered sensor 100 through the use of the interfaces.
- Energy harvesting/storage device 104 may be based on energy provided by mechanical, chemical, heat, solar, etc., means. In this embodiment, the energy harvesting/storage device 104 converts mechanical energy to electrical energy using a piezoelectric or electro-strictive device which converts vibration or mechanical energy, to electrical energy. This electrical energy is then made available to both sensor 102 and transceiver 106 via the respective interfaces 103 and 105. The energy is made available only for a short period of time and at a low energy level - generally measured in micro-watts. As the device is usually in constant mechanical stress, the harvesting device is constantly charging.
- MEMS sensors and relay antennas may be located around the aircraft for detecting and transmitting required information.
- MEMS sensor 204 can be used to detect internal aircraft temperatures.
- MEMS sensor 210 can be used to detect engine temperature or vibrations.
- MEMS 212 can be used to sense stress in fuel tank walls.
- MEMS devices in the manner of the present invention, can be substituted for hard wired sensors in virtually any situation. Additionally, there is no need to go to the expense and effort of providing wiring harnesses to the devices as there would be with normal sensors for any new aircraft design and construction.
Abstract
Description
Claims
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU2001271557A AU2001271557A1 (en) | 2000-07-10 | 2001-06-28 | Self energized wireless mems devices |
EP01950583A EP1299030A2 (en) | 2000-07-10 | 2001-06-28 | Self energized wireless mems devices |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US61278500A | 2000-07-10 | 2000-07-10 | |
US09/612,785 | 2000-07-10 |
Publications (2)
Publication Number | Publication Date |
---|---|
WO2002003856A2 true WO2002003856A2 (en) | 2002-01-17 |
WO2002003856A3 WO2002003856A3 (en) | 2002-06-06 |
Family
ID=24454650
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/US2001/020561 WO2002003856A2 (en) | 2000-07-10 | 2001-06-28 | Self energized wireless mems devices |
Country Status (3)
Country | Link |
---|---|
EP (1) | EP1299030A2 (en) |
AU (1) | AU2001271557A1 (en) |
WO (1) | WO2002003856A2 (en) |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2007105606A1 (en) | 2006-03-15 | 2007-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
FR2905974A1 (en) * | 2006-09-15 | 2008-03-21 | Snecma Sa | Aerodynamic instability`s pumping or rotating detachment type phenomenon detecting system for e.g. jet engine, has microelectromechanical system type device for transmitting data to data receiving unit by radio waves |
US7586413B2 (en) | 2005-09-01 | 2009-09-08 | Assa Abloy Ab | Human feedback using parasitic power harvesting of RFID tags |
WO2010080234A2 (en) * | 2009-01-09 | 2010-07-15 | The Boeing Company | Autonomous power generation unit for auxiliary system on an airborne platform |
ITTO20110694A1 (en) * | 2011-07-28 | 2011-10-27 | Torino Politecnico | SYSTEM OF INFOMOBILITY AND / OR SELF-ENHANCED DIAGNOSTICS AND HARVESTER DEVICE PERFECTED FOR SUPPLYING THIS SYSTEM |
US8098143B2 (en) | 2008-12-10 | 2012-01-17 | Lockheed Martin Corporation | Power aware techniques for energy harvesting remote sensor system |
US8354778B2 (en) | 2007-09-18 | 2013-01-15 | University Of Florida Research Foundation, Inc. | Dual-mode piezoelectric/magnetic vibrational energy harvester |
US8490971B2 (en) | 2004-10-25 | 2013-07-23 | Koninklijke Philips Electronics N.V. | Autonomous wireless die |
US8983817B2 (en) | 2008-12-04 | 2015-03-17 | The Boeing Company | Dynamic load balancing for adaptive meshes |
NL2012484A (en) * | 2014-03-20 | 2015-12-10 | Stichting Incas3 | Sensor system, Mote and a Motes-system for sensing an environmental parameter. |
WO2016148336A1 (en) * | 2015-03-16 | 2016-09-22 | 울산과학기술원 | Apparatus for measuring biomaterial in vivo |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000019888A1 (en) * | 1998-10-05 | 2000-04-13 | The Regents Of The University Of California | Implantable medical sensor system |
WO2000032512A1 (en) * | 1998-12-02 | 2000-06-08 | Massachusetts Institute Of Technology | Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions |
DE19857550A1 (en) * | 1998-12-14 | 2000-06-21 | Bosch Gmbh Robert | Encapsulation of metallic microcomponents on analyzing circuit on substrate wafer, e.g. for car, machine control and consumer purposes, has protective coating on circuit covered by bonding medium on cap wafer |
-
2001
- 2001-06-28 WO PCT/US2001/020561 patent/WO2002003856A2/en not_active Application Discontinuation
- 2001-06-28 EP EP01950583A patent/EP1299030A2/en not_active Withdrawn
- 2001-06-28 AU AU2001271557A patent/AU2001271557A1/en not_active Abandoned
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2000019888A1 (en) * | 1998-10-05 | 2000-04-13 | The Regents Of The University Of California | Implantable medical sensor system |
WO2000032512A1 (en) * | 1998-12-02 | 2000-06-08 | Massachusetts Institute Of Technology | Integrated palladium-based micromembranes for hydrogen separation and hydrogenation/dehydrogenation reactions |
DE19857550A1 (en) * | 1998-12-14 | 2000-06-21 | Bosch Gmbh Robert | Encapsulation of metallic microcomponents on analyzing circuit on substrate wafer, e.g. for car, machine control and consumer purposes, has protective coating on circuit covered by bonding medium on cap wafer |
Non-Patent Citations (2)
Title |
---|
SAFFORD ET AL: "MEMS application in tactical aircraft systems" DIGITAL AVIONICS SYSTEMS CONFERENCE, 1997. 16TH DASC., AIAA/IEEE IRVINE, CA, USA 26-30 OCT. 1997, NEW YORK, NY, USA,IEEE, US, 26 October 1997 (1997-10-26), pages 3.1-36-3.1-41, XP010256027 ISBN: 0-7803-4150-3 * |
SUBRAMANIAN H ET AL: "DESIGN AND FABRICATION OF WIRELESS REMOTELY READABLE MEMS BASED MICROACCELEROMETERS" SMART MATERIALS AND STRUCTURES, IOP PUBLISHING LTD., BRISTOL, GB, vol. 6, no. 6, 1 December 1997 (1997-12-01), pages 730-738, XP000725242 ISSN: 0964-1726 * |
Cited By (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8490971B2 (en) | 2004-10-25 | 2013-07-23 | Koninklijke Philips Electronics N.V. | Autonomous wireless die |
US7586413B2 (en) | 2005-09-01 | 2009-09-08 | Assa Abloy Ab | Human feedback using parasitic power harvesting of RFID tags |
EP2002383A4 (en) * | 2006-03-15 | 2009-09-16 | Semiconductor Energy Lab | Semiconductor device |
WO2007105606A1 (en) | 2006-03-15 | 2007-09-20 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
EP2002383A1 (en) * | 2006-03-15 | 2008-12-17 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
US8692653B2 (en) | 2006-03-15 | 2014-04-08 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device |
FR2905974A1 (en) * | 2006-09-15 | 2008-03-21 | Snecma Sa | Aerodynamic instability`s pumping or rotating detachment type phenomenon detecting system for e.g. jet engine, has microelectromechanical system type device for transmitting data to data receiving unit by radio waves |
US8354778B2 (en) | 2007-09-18 | 2013-01-15 | University Of Florida Research Foundation, Inc. | Dual-mode piezoelectric/magnetic vibrational energy harvester |
US8983817B2 (en) | 2008-12-04 | 2015-03-17 | The Boeing Company | Dynamic load balancing for adaptive meshes |
US8098143B2 (en) | 2008-12-10 | 2012-01-17 | Lockheed Martin Corporation | Power aware techniques for energy harvesting remote sensor system |
WO2010080234A3 (en) * | 2009-01-09 | 2010-09-10 | The Boeing Company | Autonomous power generation unit for auxiliary system on an airborne platform |
US8232706B2 (en) | 2009-01-09 | 2012-07-31 | The Boeing Company | Autonomous power generation unit for auxiliary system on an airborne platform |
WO2010080234A2 (en) * | 2009-01-09 | 2010-07-15 | The Boeing Company | Autonomous power generation unit for auxiliary system on an airborne platform |
WO2013014686A1 (en) * | 2011-07-28 | 2013-01-31 | Politecnico Di Torino | Harvester device for supplying info-mobility and/or diagnostic systems |
ITTO20110694A1 (en) * | 2011-07-28 | 2011-10-27 | Torino Politecnico | SYSTEM OF INFOMOBILITY AND / OR SELF-ENHANCED DIAGNOSTICS AND HARVESTER DEVICE PERFECTED FOR SUPPLYING THIS SYSTEM |
NL2012484A (en) * | 2014-03-20 | 2015-12-10 | Stichting Incas3 | Sensor system, Mote and a Motes-system for sensing an environmental parameter. |
US9880143B2 (en) | 2014-03-20 | 2018-01-30 | Ingu Solutions Inc. | Sensor system, mote and a motes-system for sensing an environmental parameter |
WO2016148336A1 (en) * | 2015-03-16 | 2016-09-22 | 울산과학기술원 | Apparatus for measuring biomaterial in vivo |
Also Published As
Publication number | Publication date |
---|---|
WO2002003856A3 (en) | 2002-06-06 |
AU2001271557A1 (en) | 2002-01-21 |
EP1299030A2 (en) | 2003-04-09 |
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