WO2000030222A1 - Co2-slablaser - Google Patents
Co2-slablaser Download PDFInfo
- Publication number
- WO2000030222A1 WO2000030222A1 PCT/DE1999/003570 DE9903570W WO0030222A1 WO 2000030222 A1 WO2000030222 A1 WO 2000030222A1 DE 9903570 W DE9903570 W DE 9903570W WO 0030222 A1 WO0030222 A1 WO 0030222A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- electrodes
- mirrors
- slab laser
- tube housing
- laser according
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/0315—Waveguide lasers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
- H01S3/0407—Liquid cooling, e.g. by water
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
- H01S3/041—Arrangements for thermal management for gas lasers
Definitions
- Slablaser are known from earlier applications, including those of the owner of this patent (eg WO 94/15384).
- Their geometry is characterized in that a narrow discharge space for a gas, in particular C0 2 , is formed between two substantially parallel plate-shaped electrodes, which is excited by a high-frequency voltage applied to the electrodes.
- resonator mirrors are arranged on the opposite end faces of the narrow discharge space formed by the electrodes.
- the mirrors of a laser according to the invention have no internal cooling and do not have their own adjustment facility for the electrode, since the mirror and the electrode form a unit (either manufactured in one piece or firmly screwed together), the heat which is generated in the mirrors is passed on to the electrode. So that these electrodes now have as little thermal deflection as possible, they are designed with a semicircular cross section and cooled inside by cooling bores.
- these cooling bores there is a cooling medium conveyed by a coolant pump, or advantageously a medium or steam, which dissipate heat or latent heat from the inner walls of the cooling bore by free convection flow and / or by capillary action and by phase transitions on the walls of the cavities or capillary.
- Air coolers are advantageously provided on the end pieces of the tube housing, outside the gas space, to the cooling fins of which the cooling lines formed by the cooling bores come from the electrodes. These cooling fins can then be blown from the outside by fans for better heat dissipation.
- the aim is to use natural circulation according to the "heat pipe” principle.
- Heat pipes are hermetically sealed and evacuated hollow cylinders, inside which there is any medium, e.g. Water, which boils at a usually selected vacuum at lower temperatures.
- Fig. 7 shows a laser assembly with a tubular housing, which is provided in the middle with a bellows.
- FIG. 2 one of the mirrors, namely the mirror 38, which is fastened on the lower electrode 34 with a screw, is shown in FIG. 2. It can also be seen that three adjusting screws 20 and three tie rods 22 are proposed in order to achieve optimal adjustability.
- the tubular housing 10 is cylindrical, with the electrodes 34, 36 forming a circular section on average, the radius of which is smaller than the inner radius of the tubular housing. In this way, the laser gas space is optimally used.
- the cooling channels 40 within the electrodes and the semicircular cross section of the electrodes 34, 36 can be seen.
- the coolant holes 40 are connected either to air coolers 16 or to externally connected supply and return lines 42, 44, which lead to conventional external cooling circuits.
- the arrangement is shown in perspective in a longitudinal section. It can now be seen here how the mirrors 38 each attached to the electrodes face each other in the gas space.
- the RF energy is applied to the electrodes, which are electrically insulated from one another, so that a gas discharge takes place between the electrodes, the coupling-out mirror being shorter than the rear-view mirror for decoupling, so that part of the laser light energy is spent.
- the number of reflections and thus the optimal use of the multiple reflections is strongly dependent on the correct adjustment.
- This adjustment can be achieved with the adjusting screws 20 by changing the position of the outer sections of the end pieces 24 relative to the inner sections of the end pieces 26. It is also conceivable to arrange piezoelectric crystals in the adjusting screws in order to fine-tune the resonator or possibly during operation readjust. Such piezoelectric crystals can also be provided in the electrodes themselves, in order to counteract the thermal bending of the electrodes depending on the laser light power.
- the right section of the drawing clearly shows that the end pieces are one-piece.
- a sticking or sealing over sealing rings would result in a not so good gas tightness.
- the electrodes can only be adjusted with the mirrors at the time of assembly, and can be fixed later after the adjustment by welding, soldering or gluing the bearing. In this case, it is not necessary to attach the adjustment elements to the laser or to leave them on.
- Fig. 7 the C0 2 slab laser is shown in a further embodiment, in which the tubular housing 10 is formed in two parts, centrally connected by a bellows 54, the two parts being adjustable to each other.
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
- Immobilizing And Processing Of Enzymes And Microorganisms (AREA)
- Laminated Bodies (AREA)
- Preparation Of Compounds By Using Micro-Organisms (AREA)
Abstract
Description
Claims
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
AU17713/00A AU1771300A (en) | 1998-11-13 | 1999-11-09 | Co2 slab laser |
DE59914899T DE59914899D1 (de) | 1998-11-13 | 1999-11-09 | Co 2-slablaser |
US09/831,698 US6853668B1 (en) | 1998-11-13 | 1999-11-09 | CO2 slab laser |
EP99960875A EP1138100B1 (de) | 1998-11-13 | 1999-11-09 | Co 2-slablaser |
US11/041,613 US7274722B2 (en) | 1998-11-13 | 2005-01-24 | CO2 slab laser |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE19852284.3 | 1998-11-13 | ||
DE19852284A DE19852284C2 (de) | 1998-11-13 | 1998-11-13 | Kleiner CO¶2¶-Slablaser |
Related Child Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US09831698 A-371-Of-International | 1999-11-09 | ||
US11/041,613 Division US7274722B2 (en) | 1998-11-13 | 2005-01-24 | CO2 slab laser |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2000030222A1 true WO2000030222A1 (de) | 2000-05-25 |
Family
ID=7887626
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/DE1999/003570 WO2000030222A1 (de) | 1998-11-13 | 1999-11-09 | Co2-slablaser |
Country Status (6)
Country | Link |
---|---|
US (2) | US6853668B1 (de) |
EP (2) | EP2028733A3 (de) |
AT (1) | ATE413708T1 (de) |
AU (1) | AU1771300A (de) |
DE (2) | DE19852284C2 (de) |
WO (1) | WO2000030222A1 (de) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7415051B1 (en) * | 2003-06-16 | 2008-08-19 | Universal Laser Systems, Inc. | Air cooler laser apparatus and method |
DE102004014815A1 (de) * | 2004-03-24 | 2005-10-06 | Taufenbach, Norbert, Dipl.-Ing. | Gas-Slablaser |
US7535150B1 (en) | 2006-05-08 | 2009-05-19 | Prc Laser Corporation | Centrifugal turbine blower with gas foil bearings |
US7756182B2 (en) * | 2007-03-28 | 2010-07-13 | Coherent, Inc. | RF excited CO2 slab laser tube housing and electrodes cooling |
ITFI20070142A1 (it) * | 2007-06-26 | 2008-12-27 | El En Spa | "sorgente laser a gas eccitata in radiofrequenza" |
DE102009004949A1 (de) | 2008-01-02 | 2009-07-09 | Taufenbach Gmbh | Kühleinrichtung für Laser |
DE102015201375A1 (de) * | 2015-01-27 | 2016-07-28 | Siemens Aktiengesellschaft | Vorrichtung zur Erzeugung von Röntgenstrahlung in einem äußeren Magnetfeld |
CN107528196A (zh) * | 2017-10-25 | 2017-12-29 | 上海容东激光科技有限公司 | 一种可调节输出功率的激光管 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4010149A1 (de) * | 1990-03-29 | 1991-10-02 | Siemens Ag | Hochfrequenzangeregter bandleiterlaser |
EP0477864A1 (de) * | 1990-09-26 | 1992-04-01 | Siemens Aktiengesellschaft | Slab- oder Bandleiterlaser |
US5140606A (en) * | 1990-10-12 | 1992-08-18 | Coherent, Inc. | RF excited CO2 slab waveguide laser |
EP0585481A1 (de) * | 1992-08-31 | 1994-03-09 | CARL ZEISS JENA GmbH | Bandleiterlaser-Resonator |
DE29804405U1 (de) * | 1998-03-12 | 1998-05-14 | LASOS Laser-Fertigung GmbH, 07745 Jena | Bandleiterlaser |
Family Cites Families (24)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3719900A (en) * | 1971-05-19 | 1973-03-06 | U Hochuli | Ultra stable symmetrical laser structures |
US4719639B1 (en) * | 1987-01-08 | 1994-06-28 | Boreal Laser Inc | Carbon dioxide slab laser |
DE3729053A1 (de) * | 1987-08-31 | 1989-03-16 | Deutsche Forsch Luft Raumfahrt | Hochleistungs-bandleiterlaser |
JPH01258482A (ja) * | 1988-04-08 | 1989-10-16 | Fanuc Ltd | ガスレーザ装置用放電管 |
US5197079A (en) | 1990-09-26 | 1993-03-23 | Siemens Aktiengesellschaft | High-power stripline laser |
US5123028A (en) * | 1990-10-12 | 1992-06-16 | Coherent, Inc. | RF Excited CO2 slab waveguide laser |
US5502354A (en) * | 1992-07-31 | 1996-03-26 | Correa; Paulo N. | Direct current energized pulse generator utilizing autogenous cyclical pulsed abnormal glow discharges |
DE9217640U1 (de) | 1992-12-23 | 1994-09-29 | Rofin-Sinar Laser Gmbh, 22113 Hamburg | Slab- oder Bandleiterlaser |
US5353293A (en) * | 1993-04-27 | 1994-10-04 | Spectra-Physics Lasers, Inc. | Hybrid cooled ion laser |
US5648980A (en) * | 1993-12-14 | 1997-07-15 | Seguin; Herb Joseph John | Excitation system for multi-channel lasers |
JPH0832155A (ja) * | 1993-12-14 | 1996-02-02 | Herb Joseph John Seguin | 複数個チャンネル レーザーの励起装置 |
US5412681A (en) * | 1994-03-30 | 1995-05-02 | Carl Zeiss, Inc. | Slab-waveguide CO2 laser |
DE4428194C2 (de) * | 1994-08-09 | 1998-02-12 | Rofin Sinar Laser Gmbh | Lasersystem mit einer kompensierten Spiegeloptik |
US5592504A (en) * | 1995-10-10 | 1997-01-07 | Cameron; Harold A. | Transversely excited non waveguide RF gas laser configuration |
US5661746A (en) * | 1995-10-17 | 1997-08-26 | Universal Laser Syatems, Inc. | Free-space gas slab laser |
US5822354A (en) * | 1996-04-22 | 1998-10-13 | Synrad, Inc. | Variable-aperture cavity laser |
US5901167A (en) * | 1997-04-30 | 1999-05-04 | Universal Laser Systems, Inc. | Air cooled gas laser |
US5881087A (en) * | 1997-04-30 | 1999-03-09 | Universal Laser Systems, Inc. | Gas laser tube design |
US5867517A (en) * | 1997-04-30 | 1999-02-02 | Universal Laser Systems, Inc. | Integrated gas laser RF feed and fill apparatus and method |
US5953360A (en) * | 1997-10-24 | 1999-09-14 | Synrad, Inc. | All metal electrode sealed gas laser |
JP3796038B2 (ja) * | 1997-11-18 | 2006-07-12 | 株式会社小松製作所 | ガスレーザ発振装置 |
JP3428632B2 (ja) * | 1999-08-04 | 2003-07-22 | ウシオ電機株式会社 | ガスレーザ装置用コロナ予備電離電極 |
JP3760111B2 (ja) * | 2000-05-19 | 2006-03-29 | 知夫 藤岡 | 円筒ストレートスラブ型ガス・レーザー |
US20020122449A1 (en) * | 2001-03-02 | 2002-09-05 | Satoshi Tanaka | Gas laser apparatus for lithography |
-
1998
- 1998-11-13 DE DE19852284A patent/DE19852284C2/de not_active Expired - Fee Related
-
1999
- 1999-11-09 EP EP08016310A patent/EP2028733A3/de not_active Withdrawn
- 1999-11-09 WO PCT/DE1999/003570 patent/WO2000030222A1/de active Application Filing
- 1999-11-09 AT AT99960875T patent/ATE413708T1/de not_active IP Right Cessation
- 1999-11-09 AU AU17713/00A patent/AU1771300A/en not_active Abandoned
- 1999-11-09 EP EP99960875A patent/EP1138100B1/de not_active Expired - Lifetime
- 1999-11-09 US US09/831,698 patent/US6853668B1/en not_active Expired - Fee Related
- 1999-11-09 DE DE59914899T patent/DE59914899D1/de not_active Expired - Lifetime
-
2005
- 2005-01-24 US US11/041,613 patent/US7274722B2/en not_active Expired - Fee Related
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4010149A1 (de) * | 1990-03-29 | 1991-10-02 | Siemens Ag | Hochfrequenzangeregter bandleiterlaser |
EP0477864A1 (de) * | 1990-09-26 | 1992-04-01 | Siemens Aktiengesellschaft | Slab- oder Bandleiterlaser |
US5140606A (en) * | 1990-10-12 | 1992-08-18 | Coherent, Inc. | RF excited CO2 slab waveguide laser |
EP0585481A1 (de) * | 1992-08-31 | 1994-03-09 | CARL ZEISS JENA GmbH | Bandleiterlaser-Resonator |
DE29804405U1 (de) * | 1998-03-12 | 1998-05-14 | LASOS Laser-Fertigung GmbH, 07745 Jena | Bandleiterlaser |
Also Published As
Publication number | Publication date |
---|---|
EP1138100B1 (de) | 2008-11-05 |
US6853668B1 (en) | 2005-02-08 |
DE19852284C2 (de) | 2000-11-30 |
DE19852284A1 (de) | 2000-05-25 |
EP1138100A1 (de) | 2001-10-04 |
US7274722B2 (en) | 2007-09-25 |
AU1771300A (en) | 2000-06-05 |
DE59914899D1 (de) | 2008-12-18 |
US20050180483A1 (en) | 2005-08-18 |
ATE413708T1 (de) | 2008-11-15 |
EP2028733A2 (de) | 2009-02-25 |
EP2028733A3 (de) | 2009-06-03 |
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