WO2000002254A3 - Vorrichtung zur erfassung elektromagnetischer strahlung - Google Patents

Vorrichtung zur erfassung elektromagnetischer strahlung Download PDF

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Publication number
WO2000002254A3
WO2000002254A3 PCT/DE1999/001869 DE9901869W WO0002254A3 WO 2000002254 A3 WO2000002254 A3 WO 2000002254A3 DE 9901869 W DE9901869 W DE 9901869W WO 0002254 A3 WO0002254 A3 WO 0002254A3
Authority
WO
WIPO (PCT)
Prior art keywords
electromagnetic radiation
detecting electromagnetic
economical
assemble
produce
Prior art date
Application number
PCT/DE1999/001869
Other languages
English (en)
French (fr)
Other versions
WO2000002254A2 (de
Inventor
Manfred Rothley
Roland Mueller-Fielder
Erich Zabler
Lars Erdmann
Wilhelm Leneke
Marion Simon
Karlheinz Storck
Joerg Schieferdecker
Original Assignee
Bosch Gmbh Robert
Heimann Optoelectronics Gmbh
Manfred Rothley
Mueller Fielder Roland
Erich Zabler
Lars Erdmann
Wilhelm Leneke
Marion Simon
Karlheinz Storck
Joerg Schieferdecker
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE19923606A external-priority patent/DE19923606A1/de
Application filed by Bosch Gmbh Robert, Heimann Optoelectronics Gmbh, Manfred Rothley, Mueller Fielder Roland, Erich Zabler, Lars Erdmann, Wilhelm Leneke, Marion Simon, Karlheinz Storck, Joerg Schieferdecker filed Critical Bosch Gmbh Robert
Priority to EP99939957A priority Critical patent/EP1097483A2/de
Priority to JP2000558558A priority patent/JP2002520819A/ja
Priority to US09/720,938 priority patent/US6710348B1/en
Publication of WO2000002254A2 publication Critical patent/WO2000002254A2/de
Publication of WO2000002254A3 publication Critical patent/WO2000002254A3/de

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/02—Details
    • G01J1/04—Optical or mechanical part supplementary adjustable parts
    • G01J1/06—Restricting the angle of incident light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/04—Casings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/02—Constructional details
    • G01J5/08—Optical arrangements
    • G01J5/0806—Focusing or collimating elements, e.g. lenses or concave mirrors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
    • G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
    • G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
  • Transforming Light Signals Into Electric Signals (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

Es wird eine Vorrichtung (1) zur Erfassung elektromagnetischer Strahlung mit lokaler Auflösung für bildgebende Verfahren vorgeschlagen, die kostengünstig herstellbar und montierbar ist. Dies wird erfindungsgemäß dadurch erreicht, daß ein mikromechanisch herstellbares, optisches Abbildungssystem (5) vorgesehen wird.
PCT/DE1999/001869 1998-06-30 1999-06-26 Vorrichtung zur erfassung elektromagnetischer strahlung WO2000002254A2 (de)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP99939957A EP1097483A2 (de) 1998-06-30 1999-06-26 Vorrichtung zur erfassung elektromagnetischer strahlung
JP2000558558A JP2002520819A (ja) 1998-06-30 1999-06-26 電磁ビームを検出するための装置
US09/720,938 US6710348B1 (en) 1998-06-30 1999-06-26 Apparatus for sensing electromagnetic radiation

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
DE19829027 1998-06-30
DE19829027.6 1998-06-30
DE19923606.2 1999-05-25
DE19923606A DE19923606A1 (de) 1998-06-30 1999-05-25 Vorrichtung zur Erfassung elektromagnetischer Strahlung

Publications (2)

Publication Number Publication Date
WO2000002254A2 WO2000002254A2 (de) 2000-01-13
WO2000002254A3 true WO2000002254A3 (de) 2000-04-20

Family

ID=26047110

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/DE1999/001869 WO2000002254A2 (de) 1998-06-30 1999-06-26 Vorrichtung zur erfassung elektromagnetischer strahlung

Country Status (5)

Country Link
US (1) US6710348B1 (de)
EP (1) EP1097483A2 (de)
JP (1) JP2002520819A (de)
CN (1) CN1258820C (de)
WO (1) WO2000002254A2 (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004001425A1 (de) * 2004-01-09 2005-08-04 Robert Bosch Gmbh Optische Sensorvorrichtung mit zumindest teilweise in das Gerätegehäuse integrierter Optik
DE102004027512A1 (de) * 2004-06-04 2005-12-22 Robert Bosch Gmbh Spektroskopischer Gassensor, insbesondere zum Nachweis mindestens einer Gaskomponente in der Umluft, und Verfahren zur Herstellung eines derartigen spektroskopischen Gassensors
FR2875299B1 (fr) * 2004-09-10 2006-11-17 Ulis Soc Par Actions Simplifie Composant de detection de rayonnements electromagnetiques
DE112006000959B4 (de) * 2005-05-17 2012-03-29 Heimann Sensor Gmbh Thermopile Infrarot Sensorarray
JP2008047587A (ja) * 2006-08-11 2008-02-28 Sumitomo Electric Ind Ltd 光検出装置
US9250126B2 (en) 2012-10-26 2016-02-02 Excelitas Technologies Singapore Pte. Ltd Optical sensing element arrangement with integral package
DE102015217290A1 (de) * 2015-09-10 2017-03-16 Robert Bosch Gmbh Mikroelektronische Anordnung und entsprechendes Herstellungsverfahren für eine mikroelektronische Anordnung
DE102017113023A1 (de) * 2016-06-21 2017-12-21 Heimann Sensor Gmbh Thermopile Infrarot Einzelsensor für Temperaturmessungen oder zur Gasdetektion

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4695719A (en) * 1983-12-05 1987-09-22 Honeywell Inc. Apparatus and method for opto-electronic package
DE4221037A1 (de) * 1992-06-26 1994-01-05 Heimann Optoelectronics Gmbh Thermischer Sensor mit Absorberschicht
DE4301456C1 (de) * 1993-01-20 1994-06-23 Ant Nachrichtentech Anordnung zur Ankopplung eines Lichtwellenleiters
DE29605813U1 (de) * 1996-03-28 1996-06-05 Heimann Optoelectronics Gmbh, 65199 Wiesbaden Optikbaugruppe für Infrarotsensoren
DE19616969A1 (de) * 1996-04-27 1997-10-30 Bosch Gmbh Robert Optische Baugruppe zur Ankopplung eines Lichtwellenleiters und Verfahren zur Herstellung derselben
EP0809304A2 (de) * 1996-05-24 1997-11-26 Siemens Aktiengesellschaft Optoelektronischer Wandler und dessen Herstellungsverfahren
EP0810440A2 (de) * 1996-05-28 1997-12-03 Motorola, Inc. Optische Halbleiterkomponente sowie Verfahren zu ihrer Herstellung

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55105965U (de) * 1979-01-19 1980-07-24
JPS587887A (ja) * 1981-07-06 1983-01-17 Fujitsu Ltd 光半導体装置
FR2577073B1 (fr) * 1985-02-06 1987-09-25 Commissariat Energie Atomique Dispositif matriciel de detection d'un rayonnement lumineux a ecrans froids individuels integres dans un substrat et son procede de fabrication
US5401968A (en) * 1989-12-29 1995-03-28 Honeywell Inc. Binary optical microlens detector array
DE19508222C1 (de) * 1995-03-08 1996-06-05 Siemens Ag Optoelektronischer Wandler und Herstellverfahren
JPH10115556A (ja) * 1996-10-11 1998-05-06 Mitsubishi Electric Corp 赤外線検出器
JP3399495B2 (ja) * 1996-07-08 2003-04-21 ソニー株式会社 固体撮像装置とその製造方法
US5701008A (en) * 1996-11-29 1997-12-23 He Holdings, Inc. Integrated infrared microlens and gas molecule getter grating in a vacuum package

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4695719A (en) * 1983-12-05 1987-09-22 Honeywell Inc. Apparatus and method for opto-electronic package
DE4221037A1 (de) * 1992-06-26 1994-01-05 Heimann Optoelectronics Gmbh Thermischer Sensor mit Absorberschicht
DE4301456C1 (de) * 1993-01-20 1994-06-23 Ant Nachrichtentech Anordnung zur Ankopplung eines Lichtwellenleiters
DE29605813U1 (de) * 1996-03-28 1996-06-05 Heimann Optoelectronics Gmbh, 65199 Wiesbaden Optikbaugruppe für Infrarotsensoren
DE19616969A1 (de) * 1996-04-27 1997-10-30 Bosch Gmbh Robert Optische Baugruppe zur Ankopplung eines Lichtwellenleiters und Verfahren zur Herstellung derselben
EP0809304A2 (de) * 1996-05-24 1997-11-26 Siemens Aktiengesellschaft Optoelektronischer Wandler und dessen Herstellungsverfahren
EP0810440A2 (de) * 1996-05-28 1997-12-03 Motorola, Inc. Optische Halbleiterkomponente sowie Verfahren zu ihrer Herstellung

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MOTAMEDI M E ET AL: "MICRO-OPTO-ELECTRO-MECHANICAL DEVICES AND ON-CHIP OPTICAL PROCESSING", OPTICAL ENGINEERING,US,SOC. OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS. BELLINGHAM, vol. 36, no. 5, pages 1282-1297, XP000692358, ISSN: 0091-3286 *

Also Published As

Publication number Publication date
CN1317153A (zh) 2001-10-10
WO2000002254A2 (de) 2000-01-13
CN1258820C (zh) 2006-06-07
JP2002520819A (ja) 2002-07-09
EP1097483A2 (de) 2001-05-09
US6710348B1 (en) 2004-03-23

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