WO1999001890A1 - Tube a decharge et procede de calibrage de longueur d'ondes laser en utilisant ce tube - Google Patents

Tube a decharge et procede de calibrage de longueur d'ondes laser en utilisant ce tube Download PDF

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Publication number
WO1999001890A1
WO1999001890A1 PCT/JP1998/003009 JP9803009W WO9901890A1 WO 1999001890 A1 WO1999001890 A1 WO 1999001890A1 JP 9803009 W JP9803009 W JP 9803009W WO 9901890 A1 WO9901890 A1 WO 9901890A1
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WO
WIPO (PCT)
Prior art keywords
discharge tube
electrodes
discharge
tube according
light
Prior art date
Application number
PCT/JP1998/003009
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English (en)
Japanese (ja)
Inventor
Shiro Ikeda
Koji Matsushita
Hidenaga Warashina
Original Assignee
Hamamatsu Photonics K.K.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hamamatsu Photonics K.K. filed Critical Hamamatsu Photonics K.K.
Priority to AU79371/98A priority Critical patent/AU7937198A/en
Publication of WO1999001890A1 publication Critical patent/WO1999001890A1/fr

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J61/00—Gas-discharge or vapour-discharge lamps
    • H01J61/02—Details
    • H01J61/04—Electrodes; Screens; Shields
    • H01J61/06—Main electrodes
    • H01J61/067—Main electrodes for low-pressure discharge lamps

Definitions

  • the present invention relates to a discharge tube and a method for calibrating a laser wavelength using the same. More specifically, the present invention relates to a discharge tube such as a hollow single-sided lamp or a laser galvanized lamp used in a lithography process or a standard wavelength lamp in the semiconductor industry. And a laser wavelength calibration method using the same.
  • a high monochromaticity of an exposure light source is required in order to minimize chromatic aberration of a reduction projection optical system.
  • excimer laser light sources with shorter wavelengths have been used as exposure light sources, but the wavelength width of general excimer laser light does not satisfy the required monochromaticity.
  • additional monochromatization measures are required.
  • Fabry-Perot etalons and diffraction gratings are used, but a wavelength standard is required to fix the absolute wavelength and stabilize the wavelength.
  • a method of stabilizing the wavelength there are a method of utilizing the obtogalvanic effect of gas discharge in the discharge tube and a method of referring to an emission line from the discharge tube.
  • a discharge tube for wavelength calibration having an absorption transition near the oscillation wavelength of the laser is used.
  • a hollow P-electrode and an anode are arranged on a central axis connecting a laser input window and an output window facing each other in a sealed container filled with a discharge gas.
  • a monochromatic laser beam having a desired wavelength can be obtained.
  • the laser wavelength can be calibrated by forming a feedback loop including the tube voltage measuring device and the monochromator.
  • the same effect can be obtained by observing the laser light intensity emitted from the discharge tube instead of observing the optogalvanic effect.
  • Other methods for calibrating the absolute wavelength of a monochromatic laser beam using the opto-galvanic effect are disclosed in JP-A-63-280483, JP-A-9-121067, etc. Are also disclosed.
  • a discharge lamp emitting a bright line close to the laser wavelength is disclosed.
  • the monochromatic laser beam and the bright line from the discharge tube are simultaneously incident on one diffraction grating.
  • a one-dimensional sensor array is arranged on the image plane of the diffraction grating, and the desired wavelength is adjusted by adjusting the monochromator so that the laser beam forms an image at a certain position with respect to the emission line of known wavelength. Is obtained.
  • a KrF of 248 ⁇ m is obtained by using a discharge tube in which the cathode material is made of iron and the sealed discharge gas is made of an inert gas.
  • Excimer lasers are being made monochromatic.
  • those using various filling gases and cathode materials have been developed depending on the application.Specifically, those shown in Table 1 below as filling gases and cathode materials as Are shown in Tables 2 to 4 below. Filled gas (main absorption wavelength)
  • Ne (632.8173 nm ⁇ 830.0326 nm)
  • Rh rhodium 45 343.4893 Table 4 Element Atomic Absorption Wavelength Number (nm)
  • the present inventors have conducted intensive studies on the above-described discharge tube and found the following problems.
  • all of the above-mentioned conventional discharge tubes respond to ArF laser light (oscillation wavelength: 193.35 nm) to meet the demand for higher definition in next-generation lithography technology.
  • ArF laser light oscillation wavelength: 193.35 nm
  • An object of the present invention is to provide a discharge tube having an absorption transition near the wavelength of 193.35 nm ( ⁇ 0.5 nm), a high emission line intensity that can be practically used, and a high emission line output stability. It is to provide.
  • the present inventors have conducted intensive studies and as a result, it has been found that the above problem can be solved by configuring both or one of a pair of electrodes constituting a discharge tube with a specific material and selecting a specific gas as a sealing gas. I found
  • the discharge tube of the present invention contains a pair of electrodes, an encapsulating gas which is made into a plasma by a discharge between the electrodes, and which can sputter the electrodes by the plasma, and contains the electrodes and the encapsulating gas.
  • a discharge vessel provided with a sealed container, wherein at least one of the pair of electrodes contains a carbon atom-containing material, and the filling gas contains an oxygen atom-containing gas.
  • the sealed gas composed of the oxygen atom-containing gas is turned into plasma by the discharge generated between the electrodes, and the cathode is sputtered by the plasma.
  • an emission line having a wavelength coincident with the wavelength of 193.0905 nm is emitted with practical strength and high stability.
  • a light passing hole may be formed in each of the electrodes, and light incident from outside the sealed container may pass through each of the light passing holes.
  • the light passes through each light passage hole of the pair of electrodes. At this time, the incident light is absorbed by the plasma in the sealed container, and the Optogalvanic effect is observed.
  • the light is The light is emitted through the light passage hole.
  • At least one of the electrodes may include a carbon atom-containing material and an oxidation-resistant metal material.
  • At least one of the electrodes may include a member to be sputtered made of a carbon atom-containing material along the light passage hole.
  • At least one of the electrodes may include an electrode substrate made of the oxidation-resistant metal material.
  • at least one of the electrodes is formed along the light passage hole into a coil body, a tubular body or a body made of the oxidation-resistant metal material.
  • a covering film may be further provided.
  • one of the electrodes may have a bottomed cylindrical shape, and an opening formed in the electrode may face the other electrode.
  • the discharge tube can be used as a hollow cathode lamp.
  • a pulse voltage may be applied between the electrodes.
  • the discharge tube of the present invention can be used also as a flash lamp.
  • a pulse voltage between these electrodes by applying a pulse voltage between these electrodes, light is turned on at a predetermined frequency between the electrodes. That is, since the light is intermittently turned on, the life can be extended and power saving can be achieved as compared with the case where the light is turned on continuously.
  • the present inventors have further provided the above-described discharge tube by further providing a member to be sputtered other than the pair of electrodes in the sealed container, and selecting a specific material as a material constituting the member to be sputtered. In addition, they found that the above problems could be solved.
  • the discharge tube of the present invention contains a pair of electrodes, an encapsulating gas that is turned into plasma by a discharge between the electrodes, and that can discharge the electrodes by the plasma, and the electrodes and the encapsulating gas.
  • the sealing gas contains a gas containing oxygen atoms.
  • the member to be sputtered is preferably disposed between the pair of electrodes. In this case, since a discharge is likely to occur between the pair of electrodes and plasma is easily generated, the member to be sputtered is efficiently sputtered.
  • a through-hole is formed in the member to be sputtered, and discharge between the electrodes can be performed through the through-hole.
  • a light passing hole may be formed in each of the electrodes, and light incident from outside the sealed container may pass through each of the light passing holes. In this case, when light is incident from the outside of the sealed container, the light passes through the light passage holes of the pair of electrodes. At this time, the incident light is absorbed by the plasma in the sealed container, and the Optgal panic effect is observed. When light is generated between the electrodes, the light is emitted through the light passage hole of the electrode.
  • At least one of the electrodes contains an oxidation-resistant metal material. In this case, if the electrode contains an oxidation-resistant metal material, the oxidation of the electrode is sufficiently prevented.
  • At least one of the electrodes may include a coil body, a tubular body, or a coating film made of an oxidation-resistant metal material along the light passage hole.
  • the member to be sputtered may have a light passage hole communicating with the through hole and allowing light incident from outside the sealed container to pass therethrough.
  • a discharge tube such as a flash lamp which does not have a light passage hole for letting a laser beam pass through the electrode, light can be incident from the outside of the sealed container, and the optogalvanic The effect can be observed.
  • the discharge tube of the present invention has another member to be sputtered which is arranged apart from the member to be sputtered, and discharge can be performed between the electrodes through a space between the pair of members to be sputtered. And light incident from the outside of the sealed container may be allowed to pass therethrough.
  • a laser beam is allowed to pass through an electrode such as a flash lamp, for example. Even in a discharge tube having no light passage hole, a discharge can easily occur between the electrodes, laser light can be incident from outside the sealed container, and the Optogalvanic effect can be observed.
  • a pulse voltage is applied between the electrodes.
  • light is lit at a predetermined frequency between the electrodes by applying a pulse voltage between the electrodes. That is, since the light is turned on intermittently, the life can be extended and power saving can be achieved as compared with the case where the light is turned on continuously.
  • the electrodes may contain a carbon atom-containing material.
  • the discharge tube of the present invention can emit light having a wavelength of 193.0905 nm with high emission line intensity and high emission line output stability that can be practically used. It can be used to calibrate the wavelength of 93.35 nm ArF laser.
  • the step of dividing the laser light emitted from the laser light source the step of causing a part of the divided laser light to enter the spectrum device and the method of dividing the laser light Making the remaining laser light of the laser light incident on the discharge tube; comparing a measurement signal generated by a spectrum device with an optogalvanic reference signal generated by the discharge tube; Calibrating the wavelength of the laser light emitted from the laser light source via the wavelength selecting means based on the result.
  • the laser wavelength calibration method using the discharge tube of the present invention can be achieved by another method. That is, the laser wavelength calibration method includes the steps of passing reference light emitted from the discharge tube and laser light emitted from a laser light source through first slits and second slits that are respectively separated by a predetermined distance; And forming an image of the laser beam on the same photodetector via a diffraction grating and a condensing optical system.
  • FIG. 1 is a partial sectional front view showing a first embodiment of the discharge tube of the present invention.
  • FIG. 2 is a side view showing the discharge tube of FIG.
  • FIG. 3 is a perspective view showing an anode and a cathode.
  • FIG. 4 is a schematic diagram showing one mode of use of the discharge tube.
  • FIG. 5 is a schematic view showing another mode of use of the discharge tube.
  • FIG. 6 is a schematic diagram showing an example of a laser wavelength calibration device for applying the laser wavelength calibration method of the present invention.
  • FIG. 7 is a side sectional view showing a first modification of the cathode in the discharge tube of FIG.
  • FIG. 8 is a side sectional view showing a second modification of the cathode in the discharge tube of FIG.
  • FIG. 9 is a side sectional view showing a third modification of the cathode in the discharge tube of FIG.
  • FIG. 10 is a side sectional view showing a fourth modification of the cathode in the discharge tube of FIG.
  • FIG. 11 is a partial sectional front view showing a second embodiment of the discharge tube of the present invention.
  • FIG. 12 is a front view showing an anode and a cathode.
  • FIG. 13 is a side view showing the discharge tube of FIG.
  • FIG. 14 is a partial cross-sectional front view showing a third embodiment of the discharge tube of the present invention.
  • FIG. 15 is a side view showing the discharge tube of FIG.
  • FIG. 16 is a perspective view showing the arrangement of the anode, the member to be sputtered, and the cathode.
  • FIG. 17 is a schematic view showing one mode of use of the discharge tube of FIG.
  • FIG. 18 is a side sectional view showing a first modification of the cathode in the discharge tube of FIG.
  • FIG. 19 is a side sectional view showing a second modification of the cathode in the discharge tube of FIG.
  • FIG. 20 is a side sectional view showing a third modification of the cathode in the discharge tube of FIG.
  • FIG. 21 is a front view showing a fourth embodiment of the discharge tube of the present invention.
  • FIG. 22 is a front view showing a fifth embodiment of the discharge tube of the present invention.
  • FIG. 23 is a front view showing a modified example of the sealed container in the discharge tube of FIG.
  • FIG. 24 is a schematic diagram showing an example of a laser wavelength calibration device for applying the laser wavelength calibration method of the present invention.
  • FIG. 25 is a front view showing a sixth embodiment of the discharge tube of the present invention.
  • FIG. 26 is a front view showing a modified example of the sealed container in the discharge tube of FIG.
  • FIG. 27 is a front view showing a seventh embodiment of the discharge tube of the present invention.
  • FIG. 28 is a plan view showing the discharge tube of FIG.
  • FIG. 29 is a front view showing an eighth embodiment of the discharge tube of the present invention.
  • FIG. 30 is a sectional view taken along the line 30-30 in FIG.
  • FIG. 31 is a front view showing a ninth embodiment of the discharge tube of the present invention.
  • FIG. 32 is a cross-sectional view of FIG. 31 taken along the line 32-2-32.
  • FIG. 33 is a circuit diagram for examining the stability of the discharge voltage.
  • FIG. 34 is a graph showing a change in discharge voltage of the discharge tube of Example 1 during ArF laser beam irradiation.
  • FIG. 35 is a graph showing the light emission spectrum of the discharge tube of Example 2.
  • FIG. 36 is a graph showing a light emission spectrum of the discharge tube of Example 11.
  • FIG. 37 is a graph showing the light emission spectrum of the discharge tube of Example 13.
  • FIG. 38 is a graph in which a part of the light emitting spectrum of FIG. 37 is enlarged.
  • FIG. 39 is a graph showing an emission spectrum of the discharge tube of Example 14.
  • FIG. 40 is a graph in which a part of the light emitting spectrum of FIG. 39 is enlarged.
  • FIG. 41 is a graph showing an emission spectrum of the discharge tube of Example 15.
  • FIG. 42 is a graph in which a part of the light emitting spectrum of FIG. 41 is enlarged.
  • FIG. 43 is a schematic diagram showing a system for measuring a light emission spectrum. BEST MODE FOR CARRYING OUT THE INVENTION
  • FIG. 1 is a partial cross-sectional front view showing a first embodiment of the discharge tube of the present invention
  • FIG. 2 is a side view showing the discharge tube of FIG.
  • the discharge tube 1 shown in these figures is a laser galvatron type discharge tube, and is used for stabilizing the wavelength of laser light having a predetermined wavelength.
  • the discharge tube 1 has a T-tube 2 made of borosilicate glass, and the T-tube 2 has a cylindrical portion 3.
  • UV transmitting windows 5 and 6 made of synthetic quartz are fused through a step connecting portion (not shown) for reducing the thermal expansion coefficient between the synthetic quartz and the borosilicate glass. Is being worn.
  • the ultraviolet transmitting windows 5 and 6 have a plate-shaped light incident portion 5a for emitting laser light and a plate-shaped light emitting portion 6a for emitting laser light.
  • the portion 5a and the light emitting portion 6a are inclined so as to form an angle of Bruce with respect to the laser light to be input and output, which is determined by the refractive index of the window material at the wavelength of the laser light. Therefore, the discharge tube 1 can minimize the reflected light intensity when the linearly polarized laser beam passes along the central axis C of the cylindrical portion 3.
  • the T-tube 2 has a hanging portion 4 extending from the cylindrical portion 3, and a concave stem portion 4 a is provided at an end of the hanging portion 4. .
  • a cylindrical exhaust pipe ⁇ made of borosilicate glass extends outside the hanging portion 4.
  • the exhaust pipe 7 is attached to a vacuum exhaust system (not shown), and is fused after being evacuated and baked and introducing a sealed gas. H is configured.
  • a sealed gas is sealed in the sealed container H.
  • an oxygen atom-containing gas for example, an oxygen atom-containing gas is used.
  • the oxygen atom-containing gas means a gas containing oxygen atoms, and is an oxygen gas or an oxide gas.
  • the oxide gas such as carbon dioxide (C 0 2), nitrogen oxide (N 0 2), oxide Iou (S 0 2) or the like is used.
  • a mixed gas of an oxygen atom-containing gas and an inert gas can be used as the filling gas.
  • the inert gas such as helium (H e), neon (N e), argon (A r) as a rare gas or nitrogen (N 2), etc. and the like are used.
  • the pressure is preferably 2 to 1 OT orr.
  • an oxygen atom-containing gas oxygen gas or oxidizing gas
  • the partial pressure of the mixed gas is preferably 0.5 to 1 Torr, and the total pressure of the mixed gas is preferably 5 to 20 Torr.
  • an anode 8 and a cathode 9 are provided along a central axis C between a light incident portion 5a and a light emitting portion 6a.
  • the anode 8 and the cathode 9 each have a substantially cylindrical shape that allows laser light from outside the sealed container H to pass therethrough. That is, the anode 8 has a columnar light passage hole 8a formed therein, and the cathode 9 has a columnar light passage hole 9a formed therein (see FIG. 3).
  • the anode 8 is arranged concentrically with the cylindrical portion 3, and is fixed to the stem portion 4 a via a lead pin 11 extending from the outer surface of the anode 8.
  • the lead bin 11 is made of a conductive material such as Kovar metal.
  • the cylindrical cathode 9 is arranged concentrically with the cylindrical portion 3 and is arranged to face the anode 8.
  • a carbon atom-containing material refers to a material containing carbon atoms.
  • a carbon material such as graphite or amorphous carbon or a carbide material such as silicon carbide (SiC) is used.
  • Such a cathode 9 is formed into a cylindrical shape by first preparing a cylindrical member made of a carbon atom-containing material and forming a cylindrical light passage hole 9a in the cylindrical member.
  • a carbide material is used as the carbon atom-containing material, it is preferable that at least 0.5 mol% of carbon atoms be present in the carbide material.
  • the cathode 9 may be provided with a coating film made of a carbon atom-containing material over the entire inner surface of a cylindrical electrode substrate made of nickel or the like. In this case, the coating film is formed along the light passing holes 9a.
  • the cathode 9 is fixed to the stem portion 4a via a lead bin 12 extending from the outer surface of the cathode 9.
  • the lead pin 12 is made of Kovar metal or the like, and is coated with quartz glass 14 to prevent discharge between the lead bin 12 and the lead pin 11.
  • the cathode 9 has a cylindrical discharge prevention made of Kovar glass in order to prevent a discharge between the outer peripheral surface of the cathode 9 and the anode 8 and to provide a stable hollow discharge. It is covered with member 10.
  • the discharge prevention member 10 is fixed to the stem portion 4a by fixing the joining ends of nickel ribbons 21 and 22 wound around the outer periphery to the lead bins 11 and 13 respectively. I have.
  • the cathode 9 is connected to the constant current power supply 17 and this constant current power supply
  • a voltage is applied between the anode 8 and the cathode 9.
  • the discharge ionizes the sealing gas composed of the oxygen atom-containing gas and generates plasma, which causes the inner surface of the cylindrical cathode 9 to be spattered.
  • carbon atoms (or ions) are released into the discharge plasma.
  • an emission line having a wavelength substantially coincident with the wavelength of 193.0905 nm is emitted with practical luminance and high stability.
  • FIG. 6 is a schematic diagram showing a laser wavelength calibration device to which this method is applied.
  • the laser wavelength calibration device 16 includes a laser device 15.
  • the laser device 15 includes a laser active medium 18, a reflecting mirror 19 is disposed at one end thereof, and a reflection diffraction grating 23 is disposed at the other end thereof via a prism 20. Diffraction grating 23 It is rotatable by the motor 25 through the point 24.
  • the reflection mirror 19, the prism 20 and the reflection diffraction grating 23 constitute a part of the laser resonator. Therefore, the laser device 15 can change the wavelength of the laser light while narrowing the bandwidth of the laser wavelength.
  • the laser beam emitted from the laser device 17 is split by a mirror 26, a part of which is reflected and sent to a spectrum device 27 such as a Fabry-Perot interferometer to detect light from an image sensor or the like.
  • Detector 28 The electric signal detected by the photodetector 28 is sent to the comparison control circuit 29 as a measurement signal.
  • the remaining laser light transmitted through the mirror 26 is sequentially reflected by the mirrors 30 and 31, and the light passing hole 8 a of the anode 8 of the discharge tube 1 and the light passing hole 9 a of the cathode 9 described above. It is passed to.
  • the discharge tube 1 emits light having a wavelength close to the wavelength of 193.35 nm, that is, light having a wavelength of 193.0905 nm and has a practically usable emission line intensity and high stability. Since the laser beam can be emitted, a remarkable Optogalvanic effect can be observed by the voltage measuring device 32 when the laser beam is incident.
  • the electric signal obtained at this time is sent to the comparison control circuit 29 as an opto-galvanic reference signal.
  • the comparison control circuit 29 compares the measurement signal with the optogalvanic reference signal. If there is a deviation between the signals, the comparison control circuit 29 issues a control signal to the motor 25 to rotate.
  • the reflection diffraction grating 23 is rotated via the joint 24. That is, when the wavelength of the laser light emitted from the laser device 17 is different from the reference wavelength, the wavelength of the laser light is adjusted so as to approach the reference wavelength.
  • no control signal is issued to the module 25. This means that the wavelength of the laser light substantially matches the reference wavelength.
  • the discharge tube 1 of the present invention can calibrate the wavelength of the ArF laser beam having the oscillation wavelength of 193.35 nm, it is used in the lithography process of semiconductor integrated circuits.
  • the A / F laser beam Chromatic aberration of the reduction projection optical system is minimized. For this reason, pattern formation with higher accuracy can be performed more accurately than in the case where laser light having a wavelength longer than the conventional wavelength of 193.0905 nm is used.
  • the life of the discharge tube 1 is determined by the reaction rate between carbon contained in the cathode 9 and oxygen in the filling gas.
  • the life of the discharge tube 1 is reduced by minimizing the reaction between the oxygen in the sealed gas and the carbon in the cathode 9 so that the emission line intensity of 193.905 nm of carbon is sufficiently maintained.
  • Solvable The reaction between the oxygen in the sealed gas and the carbon in the cathode 9 is determined by the magnitude of the discharge current, and can be suppressed by reducing the discharge current.
  • maintaining a stable discharge requires a discharge current of at least about 10 mA.
  • the present inventors have made the material constituting the cathode 9 at least two types, and at least one of the materials containing no carbon, thereby reducing the contribution of the cathode 9 by carbon and suppressing the reaction. As a result, it has been found that the life of the discharge tube 1 can be extended.
  • Various materials can be considered as a material that does not contain carbon.
  • an oxygen atom-containing gas is used as the sealing gas, a material that is hardly oxidized by the oxygen atom-containing gas, that is, an oxidation-resistant metal material is preferable.
  • Such oxidation-resistant metal materials include gold (Au), platinum (Pt), iridium (Ir), nickel (Ni), titanium (Ti), aluminum (Al), stainless steel or stainless steel. These alloys are listed. Of these, Au is most preferably used because of its excellent oxidation resistance.
  • FIG. 5 is a side sectional view showing an example of the cathode 9 composed of an oxidation-resistant metal material and a carbon atom-containing material.
  • the cathode 9 has a cylindrical electrode base material 33 made of Au, and the electrode base material 33 has a cylindrical light passage hole 9a. It is formed concentrically with 3.
  • the electrode substrate 33 has a cylindrical first opening 34 and a second opening 35 having an inner diameter larger than the first opening 34.
  • a graphite sputtered member 36 made of graphite is press-fitted.
  • a Au cylindrical member 37 having the same diameter as the sputtered member 36 is press-fitted concentrically adjacent to the sputtered member 36. Therefore, graphite is exposed on a part of the inner surface of the cathode 9.
  • the amount of the graphite which is spattered is smaller than when the entire inner surface of the cathode 9 is the graphite. Decrease. In other words, excessive spattering of graph items can be suppressed.
  • Au does not react with oxygen in the oxygen atom-containing gas even if it is sputtered, and thus does not change its electrical properties. Therefore, the life of the discharge tube 1 is prolonged.
  • a Ni cylindrical pipe 38a as a tubular body is press-fitted into the inside of the first opening 34 of the electrode substrate 33, and further, as shown in FIG.
  • a cylindrical pipe 38 b made of Au as a tubular body may be press-fitted inside 37.
  • the cathode 9 in FIG. 8 is replaced with an A u coil body 39 a, 3 b in place of the cylindrical pipe 38 a, 38 b made of A 11 in the cathode 9 shown in FIG. 9b may be press-fitted.
  • each of the coil bodies 39a and 39b is obtained by tightly winding a linear member made of Au in a spiral shape. Further, as shown in FIG.
  • a graphite cylindrical sputtering member 36 is formed. May be press-fitted into the second opening 35, and then the cylindrical member 37 coated or vapor-deposited with Au may be press-fitted.
  • Au layers 40a and 4Ob as covering layers are formed along the light passing holes 9a in a state where the graphite is exposed.
  • the structure of the cathode 9 described above can be applied to the anode 8.
  • FIG. 11 is a partial cross-sectional front view showing a second embodiment of the discharge tube of the present invention
  • FIG. 12 is a front view showing a cathode and an anode.
  • the discharge tube 41 shown in this figure includes a sealed container H having the same configuration as the sealed container H of the first embodiment, and inside the sealed container H, The same filling gas as in the first embodiment is filled.
  • the discharge tube 41 has a pair of cathodes 9 along the central axis C of the cylindrical portion 3 inside the sealed container H.
  • Each of the cathodes 9 has a cylindrical shape. Has become. That is, each of the cathodes 9 has a cylindrical light passage hole 9a.
  • the cathode 9 is a coil formed by, for example, spirally and densely winding a linear member made of gold. Note that the cathode 9 may have the same configuration as the cathode (see FIGS. 7 to 10) used in the first embodiment.
  • the cathode 9 is fixed to the stem 4 a via a lead bin 43 covered with quartz glass 42, and the other cathode 9 is a resin covered with quartz glass 44. It is fixed to the stem portion 4a via the dobin 45.
  • an anode 8 is provided between these cathodes 9, and the anode 8 has a cylindrical shape. That is, the anode 8 is formed with a cylindrical light passage hole 8a.
  • the anode 8 includes the same material as the carbon atom-containing material used in the first embodiment, and is, for example, entirely constituted by graphite.
  • the Pole pole 8 may have a complex structure as shown in FIGS.
  • the anode 8 is fixed to the stem 4 a via the lead bin 46, and the lead pin 46 is made of quartz glass to prevent discharge from the lead pins 43, 45 connected to the cathode 9. Coated with 4 7.
  • a pair of ceramic discharge prevention members 10 are provided in order to prevent discharge between the anode 8 and the outer peripheral surface of the cathode 9.
  • Each of the discharge prevention members 10 has a rectangular parallelepiped shape. (See FIG. 13), and a cylindrical through-hole 10 a having an inner diameter substantially the same as the outer diameter of the cathode 9 is formed so as to accommodate the cathode 9.
  • the pair of discharge prevention members 10 are arranged so as to face each other, and the anode 8 is sandwiched by these discharge prevention members 10.
  • this discharge tube 41 is extremely effective as a discharge tube for calibrating the wavelength of A.F laser light of 193.35 nm, and a method of calibrating the wavelength of ArF laser light is applied. This is useful in a laser wavelength calibration device for performing
  • FIG. 14 is a partial cross-sectional front view showing a third embodiment of the discharge tube of the present invention.
  • the discharge tube 48 shown in this figure differs from the discharge tube 1 of the first embodiment in that a member to be sputtered 49 is provided between the free electrode 8 and the cathode 9 inside the sealed container H.
  • the member to be sputtered 49 is disposed coaxially with the anode 8 and the cathode 9 and is sputtered by the plasma of the sealing gas generated by the discharge between the anode 8 and the cathode 9.
  • the member to be sputtered 49 is cylindrical and has a cylindrical through hole 49a (see FIG. 16).
  • the through hole 49 a is arranged such that one end thereof faces the anode 8 and the other end faces the cathode 9.
  • the member to be sputtered 49 is housed inside the anode-side end of the discharge preventing member 10 in order to prevent discharge between the anode 8.
  • the material constituting the member to be sputtered 49 the same material (for example, graphite) as the carbon atom-containing material used in the discharge tube of the first embodiment is used.
  • the part to be sputtered 49 may be made of a material containing a carbon atom.
  • the member to be sputtered 49 for example, a member in which a coating film made of the above-described carbon atom-containing material is formed over the entire inner surface of the cylindrical member can be used. It is also possible to use a press-fitted tubular body made of a carbon atom-containing material.
  • the cylindrical member is, for example, iron (F e), nickel (N i), acid aluminum (A 1 2 0 3), Ru is composed of a material such as silicon dioxide (S i 0 2).
  • the anode 8 is fixed to the stem portion 4a via an L-shaped lead bin 50 extending from the outer surface thereof and a lead bin 51 for fixing the lead bin 50, and the lead pins 50, 51 are It is made of a conductive material such as Kovar metal.
  • the cathode 9 is fixed to the stem 4a via a lead pin 52 extending from the outer surface.
  • the lead pins 52 are made of Kovar metal or the like, and are coated with quartz glass 53 to prevent discharge between the lead bins 50 and 51.
  • the discharge prevention member 10 is fixed to the stem portion 4a by fixing the joining ends of the nickel ribbons 21 and 22 wound around the outer periphery to the lead pins 51 and 54, respectively. .
  • the discharge tube 48 having the above-described configuration, when a voltage is applied between the anode 8 and the cathode 9 and a discharge occurs between the anode 8 and the cathode 9, the discharge causes the cylindrical member to be sputtered 49.
  • the charged gas inside the gas is ionized to generate a plasma of the charged gas, and this plasma causes the inner surface of the member to be sputtered 49 to be spun, thereby releasing carbon atoms (or ions) into the discharge plasma.
  • a bright line having a wavelength substantially coincident with the wavelength of 193.0905 nm is emitted with a practically usable luminance and high output stability.
  • the laser beam is emitted from the laser device 15 through the light passage hole 8a of the anode 8, the through hole 49a of the member to be sputtered 49, and the light passage hole 9a of the cathode 9.
  • a laser beam having a wavelength of 193.35 nm is incident on the inside of the sealed container H, an Optogalvanic effect as a change in the discharge voltage is observed. Therefore, the discharge tube 48 is extremely effective as a discharge tube for calibrating the wavelength of the 193.35 nm ArF laser beam.
  • the sealed gas sealed in the sealed container H contains an oxygen atom-containing gas.
  • the anode 8 and / or the cathode 9 contain a material that is hardly oxidized by the oxygen atom-containing gas, that is, an oxidation-resistant metal material.
  • oxidation-resistant metal materials include gold (Au), platinum (Pt), iridium (Ir), nickel (Ni), titanium (Ti), aluminum (Al), stainless steel or stainless steel. These alloys are listed. Of these, gold is most preferably used because of its high oxidation resistance.
  • FIG. 18 is a cross-sectional side view showing an example of the configuration of the cathode 9 including the oxidation-resistant metal material.
  • the cathode 9 includes a cylindrical electrode substrate 55, and inside the electrode substrate 55, a cylindrical tubular body 56 made of an oxidation-resistant metal material is provided. It is press-fitted. That is, the cathode 9 has a tubular body 56 along the light transmission hole 9a.
  • the material constituting the electrode substrate 55 is not particularly limited as long as it is a conductive material.
  • an oxidation-resistant metal material such as iron (Fe), copper (Cu), or nickel (Ni) is used. It may be.
  • the cathode 9 is made of an oxidation-resistant metal pressed into the inside of the electrode base material 55 as shown in FIG.
  • a coil body 58 made of a material may be used.
  • the coil body 58 is obtained by spirally and densely winding a linear member made of an oxidation-resistant metal material.
  • the cathode 9 may be formed by coating or vapor-depositing a coating film 59 made of an oxidation-resistant metal material on the entire surface of the electrode substrate 55. .
  • FIG. 21 is a sectional view showing a fourth embodiment of the discharge tube of the present invention.
  • the discharge tube 60 shown in this figure includes a sealed container H having the same configuration as the sealed container H of the first embodiment. Inside the sealed container H, the same sealed gas as in the first embodiment is provided. Is enclosed. An anode 8, a cathode 9, and a member to be sputtered 49 are disposed inside the sealed container H.
  • the cathode 8 and the cathode 9 are coil bodies made of an oxidation-resistant metal material (for example, gold) and have the same outer diameter as the inner diameter of the cylindrical discharge prevention member 10.
  • the protection member 10 is inserted from both ends and housed therein, and is fixed by the discharge prevention member 10.
  • the P pole 8 and the cathode 9 are made into a coil body because the coil body is made by spirally winding a wire rod, so that the cylindrical body is hollowed out. This is because it is advantageous in terms of productivity and cost as compared with the production of the anode 8 and the cathode 9 which are formed into a cylindrical body.
  • the anode 8 is fixed to the stem portion 4a by fixing a lead bin 62 covered with quartz glass 61 to a lead bin 63 described later, and the cathode 9 is covered with a quartz glass 64. It is fixed to the stem portion 4a via the lead pin 65.
  • the member to be sputtered 49 is housed inside the cylindrical discharge prevention member 10 and between the anode 8 and the cathode 9.
  • the member to be sputtered 49 is fixed to the stem portion 4a through a lead bar 66 made of Kovar metal penetrating the side surface of the discharge prevention member 10, and the discharge prevention member 10 is made of nickel wound around its outer surface. It is fixed to the stem portion 4a via a lead bin 68 attached to the joining end of the ribbon 67. Note that the lead bin 68 has an insulating member 69 interposed in the middle thereof to prevent discharge at the lead pin 68.
  • the anode 8 and the cathode 9 are made of an oxidation-resistant metal material, the oxidation reaction between the anode 8 and the cathode 9 and oxygen atoms or ions in the sealed gas is sufficiently prevented.
  • the life of the discharge tube 1 is prolonged.
  • the anode 8 and the cathode 9 are inserted from both sides of the discharge prevention member 10, respectively, so that the positioning can be easily performed, and the anode 8, the cathode 9 and the member to be sputtered can be easily inserted. 4 9 is securely placed coaxially.
  • FIG. 22 is a schematic side view showing a fifth embodiment of the discharge tube of the present invention.
  • a discharge tube 70 is a hollow single-sword lamp type discharge tube, and this discharge tube 70 is provided with a cylindrical hermetic container H, inside of which is used in the first embodiment.
  • the same filling gas as the filling gas is filled.
  • the sealed container H may be such that the inner diameter at the end of the sealed container H on the stem portion 71a side is larger than the inner diameter at the other end.
  • cylindrical anodes 8 and cathodes 9 are respectively arranged concentrically with the sealed container H along the extending direction.
  • the cathode 9 has a cylindrical shape with a bottom, and an opening 9 a formed in the cathode 9 is connected to the anode 8. Facing The anode 8 and the cathode 9 are fixed to the stem 7 la at one end of the sealed container H via lead pins (not shown). The cathode 9 is connected to a constant current power supply.
  • FIG. 24 is a schematic diagram showing a laser wavelength calibration device to which this laser wavelength calibration method is applied.
  • the configuration of this apparatus and method is disclosed in Japanese Patent Application Laid-Open No. 1-321325, except that the discharge tube 70 that emits light having a wavelength of 193.0905 nm is used. Is similar to the device and method described in the corresponding US Pat. No. 4,983,039.
  • this device 72 has a plate-like member 73, which is arranged side by side at a predetermined interval (for example, 23.0 mm). Two slits S 1 and S 2 are formed.
  • one of the slits (first slit) S 1 is for passing the reference light (wavelength: 193.0905 nm) emitted from the discharge tube 70 described above, and the reference light Is guided to the vicinity of the slit S 1 by an optical fiber 74 or the like, and is passed through the slit S 1 via a lens 75.
  • the other slit (second slit) S 2 is for passing ArF laser light (wavelength: 193.35 nm) emitted from the laser device 77, and the laser light is, for example, It is guided to the vicinity of the slit S2 by an optical fiber 76, etc., and is passed through the slit S2 via the lens 78.
  • the light passing through the slits SI and S2 is reflected by the collimating mirror Ml, enters the diffraction grating 79, and the reflected light is focused by the focusing mirror M2, and An image is formed on a photodetector such as the same linear image sensor 81 via the lens 80.
  • a photodetector such as the same linear image sensor 81 via the lens 80.
  • the wavelength of the ArF laser beam coincides with the wavelength of the reference light emitted from the discharge tube 70.
  • the lenses 75, 78, 80, the collimating mirror Ml, and the condenser mirror M2 constitute a condenser optical system.
  • the ArF laser beam has a high degree of monochromaticity when used in a lithography process of a semiconductor integrated circuit. Since light can be emitted, chromatic aberration of the reduced projection optical system is minimized. For this reason, pattern formation with higher precision can be performed more accurately than in the case where laser light having a wavelength longer than the conventional wavelength of 193.0905 nm is used.
  • FIG. 25 is a side view showing a sixth embodiment of the discharge tube of the present invention.
  • the discharge tube 82 shown in FIG. 25 is different from the discharge tube of the fifth embodiment in that a cylindrical member to be sputtered 49 is disposed concentrically with the sealed container H between the anode 8 and the cathode 9. And different.
  • the inner diameter of the sealed container H at the end of the stem portion 71a may be larger than the inner diameter of the end at the opposite side to the stem portion 71a.
  • FIG. 27 is a schematic side view showing a seventh embodiment of the discharge tube of the present invention
  • FIG. 28 is a plan view of the discharge tube of FIG.
  • the discharge tube 83 is a flash lamp type discharge tube.
  • the discharge tube 83 includes a cylindrical sealed container H.
  • the same oxygen atom-containing gas as in the first embodiment is sealed in the sealed container H as a sealed gas.
  • the anode 8 is fixed to the stem portion 4 a via the lead pin 84
  • the cathode 9 is fixed to the stem portion 4 a via the lead pin 85.
  • the anode 8 and the cathode 9 have conical tips 86 and 87, respectively, and the cathode 9 and the anode 8 are arranged to face each other such that the tips 87 and 87 face each other.
  • a material constituting the cathode 9 the same material (for example, graphite) as the carbon atom-containing material used in the discharge tube 1 of the first embodiment is used.
  • a trigger probe electrode and a spacious force electrode are provided inside the sealed container H, and a trigger pulse voltage is applied by these electrodes.
  • a discharge occurs between the anode 8 and the cathode 9. Occurs, and light is lit at a predetermined frequency.
  • the discharge ionizes the sealing gas containing the oxygen atom-containing gas and generates plasma.
  • the plasma sputters the surface of the cathode 9 and carbon atoms (or ions) are released into the discharge plasma. You. At this time, a bright line having a wavelength substantially coincident with the wavelength of 193.0905 nm is emitted with a practically usable luminance. Therefore, as shown in FIG.
  • the laser device 15 outside the sealed container H emits a laser beam having a wavelength of 193.3.35 11111, and the laser beam is transmitted to the side of the sealed container H.
  • the laser light is incident so as to pass between the anode 8 and the cathode 9, whereby laser light having a stable wavelength can be extracted even from such a flash lamp type discharge tube 40.
  • a flash lamp type discharge tube 83 light is intermittently lit, so As compared with the case of lighting, the life is extended and power saving is achieved.
  • FIG. 29 is a schematic side view showing an eighth embodiment of the discharge tube of the present invention
  • FIG. 30 is a sectional view taken along the line 30--30 in FIG.
  • This discharge tube 88 is different from the discharge tube 83 of the seventh embodiment in that a cylindrical member to be sputtered 49 is disposed between the anode 8 and the cathode 9 in the sealed container H.
  • a cylindrical through-hole 49 a is formed in the member to be sputtered 49, and the through-hole 49 a is arranged so that one end thereof faces the anode 8 and the other end thereof faces the cathode 9. Have been.
  • the through hole 49 a secures a discharge path between the anode 8 and the cathode 9.
  • the light receiving member 49 has two light passage holes 89a and 89b communicating with the through holes 49a and orthogonal to the outer surface of the light receiving member 49.
  • the holes 89a, 89b face each other.
  • the wavelength is substantially equal to the wavelength of 193.0905 nm. An emission line having the same wavelength is emitted with practical brightness and high output stability.
  • the discharge tube 88 becomes similar to the laser galvatron type discharge tube. It can be effectively used as a discharge tube for wavelength calibration of ArF laser light, and can emit laser light of a stable wavelength. Further, since the discharge tube 88 emits light intermittently, the life thereof is extended and power saving can be achieved as compared with a discharge tube which continuously emits light.
  • FIG. 31 is a schematic side view showing a ninth embodiment of the discharge tube of the present invention
  • FIG. 32 is a cross-sectional view taken along line 32-232 of FIG.
  • This discharge tube 90 differs from the discharge tube 83 of the seventh embodiment in that a pair of flat plate-like members to be sputtered 49 A and 49 B are arranged between the anode 8 and the cathode 9.
  • These pair of spacious components 49 A, 49 B Are spaced apart and parallel to each other, and a gap between the members to be sputtered 49 A and 49 B is formed between the anode 8 and the cathode 9 in order to secure a discharge path between the anode 8 and the cathode 9.
  • They are arranged to face each other.
  • the member to be sputtered 49 A is fixed to the stem 4 a via the lead pin 91
  • the member to be sputtered 49 B is fixed to the stem 4 a via the lead bin 92. I have.
  • this discharge tube 90 when a voltage is applied between the anode 8 and the cathode 9 and a trigger voltage pulse is applied at a predetermined frequency to the trigger probe electrode and the spark electrode, light is turned on at a predetermined frequency. At this time, a bright line having a wavelength substantially coincident with the wavelength of 193.0905 nm is emitted with practical luminance and high output stability.
  • the discharge tube 90 becomes, like the laser galvatron type discharge tube, It can be used effectively as a discharge tube for calibrating the wavelength of ArF laser light, and can emit laser light with a stable wavelength. Further, similarly to the case of the discharge tube 83, the discharge tube 90 has a longer life and can save power as compared with a discharge tube that emits light continuously.
  • the present invention is not limited to the embodiments described above.
  • the member to be sputtered 49 is disposed between the anode 8 and the cathode 9 from the viewpoint of facilitating generation of plasma by discharge.
  • the 49 can be arranged in a region other than between the anode 8 and the cathode 9 as long as it can be sputtered by the discharge to generate the plasma of the sealed gas.
  • a laser galvatron type discharge tube was used as the discharge tube.
  • This discharge tube Then, a T-shaped sealed container with the following configuration was used. That is, in the sealed container, a tube made of borosilicate glass was prepared. A light entrance window and a light exit window made of synthetic quartz are fused to opposite ends of the tube, respectively. The cylindrical portion of the tube between the light entrance window and the light exit window has an inner diameter of 2 mm. 5 mm, length 12 O mm. The cylindrical part was integrally provided with a hanging part with an inner diameter of 38 mm with a concave end.
  • a ring-shaped nickel anode with an inner diameter of 8 mm, a thickness of 0.2 mm, and a length of 3 mm is concentrically arranged along the center axis of the cylindrical portion of the T-tube via a lead pin.
  • a cylindrical cathode made of graphite having an inner diameter of 3 mm, a thickness of 2.5 mm, and a length of 18 mm was fixed to the stem via a lead pin.
  • a cylindrical Kovar glass discharge prevention member having an inner diameter of 8 mm, a thickness of l mm, and a length of 28 mm is arranged concentrically with the cathode on the outer side of the cathode. It was secured to the stem via two lead bins, each attached to two wound nickel ribbons. Then, oxygen gas was sealed in the sealed container as the sealing gas, and the pressure was set to 5 Torr. Using this discharge tube, the stability of the discharge voltage during irradiation of the light-emitting spectrum and the ArF laser beam was examined. Table 5 shows the results.
  • Example 7 Oxygen (7) Graphite 193.0905 29 2
  • Example 8 Oxygen + Helium (12 + 3) Graphite 193.0905 86 3
  • Example 9 Oxygen + Helium (8 + 5) Graphite 193.0905 36 2
  • Example 10 Oxygen + Argon (8 + 2) Graphite 193.0905 22 3 Comparative Example 1 Neon (6) Graphite 193.0905 4 3 Comparative Example 2 Neon (6) Iron 0 3 Comparative Example 3 Hydrogen (10) Graphite 0 3 Comparative Example 4 Helium (15) Graphite 193.0905 2 3 Comparative Example 5 Argon (7) Graphite 193.0905 23 Comparative Example 6 Carbon Dioxide (5) Iron 193.0905 58 1
  • the emission spectrum is generated by applying a discharge current of 10 mA between the P pole 8 and the cathode 9 to cause a discharge, passing through the anode 8 and radiating outside the sealed container H.
  • Light was received by a monochromator (Model THR manufactured by JOVIN YVON) 93.
  • a monochromator Model THR manufactured by JOVIN YVON
  • the anode 8 was grounded, and a constant current power supply (Model 417 A-500 manufactured by Metronics) 17 was connected between the anode 8 and the cathode 9.
  • an emission line having an emission peak at 193.0905 nm and a half-width of 4.5 pm was observed, and its relative beak intensity was 65, indicating that a practical emission line intensity could be obtained. understood.
  • the stability of the discharge voltage during ArF laser beam irradiation was measured as follows. That is, an electric current of 10 mA flows between the anode and the cathode to cause a discharge, and as shown in FIG. 5, the ArF laser beam (PSX-100 manufactured by MPB) 15 emitted from the ArF laser device (MPS) A laser beam intensity of 200 J) was incident along the central axis of the cylindrical portion 3 so as to pass through the light passage hole 9 a of the cathode 9 and the light passage hole 8 a of the anode 8.
  • Reference numeral 94 indicates a DC high-voltage power supply.
  • the emission spectrum and the A were set in the same manner as in Example 1 except that the sealed gas was a mixed gas of oxygen gas and neon, the partial pressure of oxygen was 2 Torr, and the total pressure of the mixed gas was 10 Torr.
  • the stability of the discharge voltage after rF laser irradiation was investigated. The results are shown in FIG. 35 and Table 5. As shown in FIG. 35, in the emission spectrum, an emission line having an emission peak at 193.0905 nm and a half-width of 4.5 pm was observed, and the relative emission intensity was 72, which was a practical emission intensity. Turned out to be. In addition, the Optogalvanic effect was observed in the same manner as in Example 1 by irradiating ArF laser light, and the stability of the discharge voltage during ArF laser light irradiation was good.
  • the emission spectrum and Ar were the same as in Example 1 except that the sealed gas was a mixed gas of oxygen gas and helium, the partial pressure of oxygen was 1 T rr, and the total pressure of the mixed gas was 16 Torr.
  • the stability of discharge voltage after irradiation with F laser light was investigated. Table 5 shows the results. As shown in Table 5, in the emission spectrum, an emission line having an emission peak at 193.0905 nm and a half-width of 4.5 pm was observed, and the relative emission intensity was 100, indicating that practical emission intensity could be obtained. understood. In addition, the stability of the discharge voltage during ArF laser beam irradiation was good.
  • the emission spectrum and ArF laser light were the same as in Example 1 except that the filling gas was a mixed gas of oxygen gas and argon, the partial pressure of oxygen was 7 T 0 rr, and the total pressure of the mixed gas was 14 Torr.
  • the stability of the discharge voltage after irradiation was investigated. Table 5 shows the results. As shown in Table 5, in the emission spectrum, a bright line with an emission beak at 193.0905 ⁇ m and a half-width of 4.5 pm was observed, and the relative bright line intensity was 25, indicating that a practical bright line intensity was obtained. It turns out. In addition, the stability of the discharge voltage during ArF laser beam irradiation was good.
  • Example 5 The emission spectrum and the stability of the discharge voltage after the irradiation of the ArF laser beam were examined in the same manner as in Example 1 except that the filling gas was carbon dioxide and the pressure of the carbon dioxide was 5 Torr. Table 5 shows the results. As shown in Table 5, in the emission spectrum, an emission line having an emission peak at 193.0905 nm and a half-width of 4.5 pm was observed, and the relative emission intensity was 72, indicating that a practical emission intensity could be obtained. I understand. In addition, the stability of the discharge voltage during ArF laser beam irradiation was relatively good. (Example 6)
  • the emission spectrum and A were determined in the same manner as in Example 1 except that the enclosed gas was a mixed gas of carbon dioxide and neon, the partial pressure of carbon dioxide was 3 Torr, and the total pressure of the mixed gas was 15 Torr.
  • the stability of the discharge voltage during rF laser beam irradiation was investigated. Table 5 shows the results. As shown in Table 5, in the emission spectrum, an emission line with an emission peak at 193.0905 nm and a half-width of 4.5 pm was observed, and the relative emission line intensity was 80, indicating that a practical emission line intensity was obtained. It turns out. In addition, the stability of the discharge voltage during ArF laser light irradiation was good.
  • Example 5 The emission spectrum and the stability of the discharge voltage after irradiation with ArF laser light were examined in the same manner as in Example 1 except that the filling gas was oxygen and the pressure of oxygen was 7 Torr. Table 5 shows the results. As shown in Table 5, in the emission spectrum, an emission line with an emission peak at 193.0905 nm and a half-width of 4.5 pm was observed, and the relative emission intensity was 29, indicating that practical emission intensity could be obtained. understood. Further, the stability of the discharge voltage during the irradiation of the ArF laser beam was relatively good.
  • Example 5 An emission spectrum and an ArF laser were used in the same manner as in Example 1 except that the sealed gas was a mixed gas of oxygen and helium, the partial pressure of oxygen was 12 Torr, and the total pressure of the mixed gas was 15 Torr.
  • the stability of the discharge voltage during light irradiation was investigated. Table 5 shows the results. As shown in Table 5, the emission spectrum shows 193.0905 nm A bright line with a luminescence beak and a half-width of 4.5 pm was observed, and the relative bright line intensity was 86, indicating that a practical bright line intensity could be obtained. Also, the stability of the discharge voltage during ArF laser beam irradiation was good.
  • the emission spectrum and the A / F laser were the same as in Example 1 except that the sealed gas was a mixed gas of oxygen and helium, the oxygen pressure was 8 Torr, and the total pressure of the mixed gas was 5 Torr.
  • the stability of the discharge voltage after light irradiation was investigated. Table 5 shows the results. As shown in Table 5, in the emission spectrum, an emission line having an emission peak at 193.0905 nm and a half-width of 4.5 pm was observed, and the relative emission line intensity was 36, and a practical emission line intensity was obtained. Turned out to be. In addition, the stability of the discharge voltage during ArF laser beam irradiation was relatively good.
  • Example 2 An emission spectrum and an ArF laser were used in the same manner as in Example 1 except that the sealed gas was a mixed gas of oxygen and argon, the partial pressure of oxygen was 8 T0 rr, and the total pressure of the mixed gas was 1 Otorr.
  • the stability of the discharge voltage during light irradiation was investigated. Table 5 shows the results. As shown in Table 5, in the emission spectrum, an emission line with an emission peak at 193.0905 nm and a half-width of 4.5 pm was observed, and the relative emission intensity was 22, indicating that a practical emission intensity could be obtained. understood. In addition, the stability of the discharge voltage during ArF laser beam irradiation was good.
  • Example 2 The emission spectrum and the stability of the discharge voltage during ArF laser beam irradiation were examined in the same manner as in Example 1, except that neon was used as the sealing gas and the neon pressure was set to 6 Torr. Table 5 shows the results. As shown in Table 5, the stability of the discharge voltage during ArF laser irradiation was as good as in Example 1, but the emission line observed in the emission spectrum and having an emission peak at 193.09055 nm was observed. The relative bright line intensity was lower than that of Example 1, and a practical bright line intensity could not be obtained. (Comparative Example 2)
  • Example 5 The stability of the emission voltage and the discharge voltage during ArF laser beam irradiation were examined in the same manner as in Example 1 except that the cathode material was iron, the filling gas was neon, and the neon pressure was 6 Torr. Table 5 shows the results. As shown in Table 5, the stability of the discharge voltage during ArF laser light irradiation was as good as in Example 1, but the relative bright line intensity at 193.0 905 nm was zero and the practical bright line intensity was It was not obtained.
  • Example 5 The emission spectrum and the stability of the discharge voltage during ArF laser beam irradiation were examined in the same manner as in Example 1 except that hydrogen was used as the sealing gas and the pressure of hydrogen was set at 10 Torr. Table 5 shows the results. As shown in Table 5, the stability of the discharge voltage during ArF laser beam irradiation was as good as in Example 1, but the relative bright line intensity at 193.0905 nm was zero and a practical bright line intensity was obtained. I could't.
  • Example 5 The same procedure as in Example 3 was carried out except that the mixture gas was prepared by removing oxygen from the mixed gas (that is, helium) and the pressure of the helium was set to 15 Torr.
  • the stability of the discharge voltage was investigated. Table 5 shows the results. As shown in Table 5, the stability of the discharge voltage during ArF laser beam irradiation was as good as in Example 1, but the emission line observed in the emission spectrum and having an emission beak at 193.0 905 nm was observed. The relative bright line intensity was lower than that of Example 3, and a practical bright line intensity could not be obtained.
  • Example 5 After irradiating the light-emitting spectrum and the ArF laser light in the same manner as in Example 4, except that the mixture gas was obtained by removing oxygen from the mixed gas (that is, argon) and the pressure of argon was set to 7 Torr.
  • the stability of the discharge voltage was investigated. Table 5 shows the results. As shown in Table 5, the stability of the discharge voltage during ArF laser beam irradiation was Although good as in Example 1, the relative emission intensity of the emission line observed in the emission spectrum and having an emission peak at 193.0905 nm was lower than that of Example 4, and a practical emission intensity was obtained. I could't.
  • the emission spectrum and the ArF laser were the same as in Example 5 except that the cathode material was iron.
  • Table 5 shows the results. As shown in Table 5, in the emission spectrum, an emission line having an emission peak at 193.0905 nm and a half-value width of 4.5 pm was observed, and its relative emission line intensity was as high as 58, so that it can be used practically. However, it was found that the stability of the discharge voltage during the irradiation of the ArF laser beam was poor and not suitable for practical use.
  • a laser galvatron type discharge tube was used as the discharge tube.
  • a T-shaped sealed container having the following configuration was used. That is, in the sealed container, a T-tube made of borosilicate glass was prepared. A light entrance window and a light exit window made of synthetic quartz are fused to opposite ends of this T-shaped tube, and the cylindrical part between the light entrance window and the light exit window has an inner diameter of 25 mm and a length of 25 mm. It was set to 120 mm. In addition, the cylindrical part was integrally provided with a hanging part with an inner diameter of 38 mm with a concave tip.
  • a ring-shaped stainless steel anode with an inner diameter of 8 mm, a thickness of 0.2 mm, and a length of 3 mm is concentrically arranged along the center axis of the cylindrical portion of the T-tube via a lead pin.
  • the cylindrical cathode with a length of 18 mm was fixed to the stem via a lead bin.
  • the cathode was produced as follows. First, a cylindrical electrode substrate made of gold was prepared. This electrode substrate has an inner diameter of 3 mm from the open end at one end to 13 mm, and the remaining part has an inner diameter of 6 mm.
  • a graphite member having an inner diameter of 3 mm, a thickness of 1.5 mm and a length of 3 mm is press-fitted into the opening at the other end of the electrode base material.
  • a 5 mm, 2 mm long gold cylindrical member was press-fitted.
  • a discharge cover made of cylindrical Kovar glass with an inner diameter of 8 mm, a thickness of l mm, and a length of 28 mm A stop member is arranged concentrically with the cathode, and this discharge prevention member is fixed to the stem via two lead bins attached to two nickel-made ribbons wound around its outer periphery. did.
  • a sealed gas is filled with a mixed gas of oxygen gas and neon as a filling gas.
  • the partial pressure of oxygen gas is 3 T0 rr
  • the partial pressure of neon is 8 T0 rr
  • the total pressure of the mixed gas is It was 1 1 Torr.
  • a discharge tube was manufactured in the same manner as in Example 11 except that oxygen gas was used as the sealing gas and the pressure was set at 5 Torr.
  • the emission spectrum and the stability of the discharge voltage during the irradiation of the ArF laser beam were examined in the same manner as in Example 1, and the amount and lifetime of graphite that was spattered were also examined. .
  • Table 6 shows the results. As shown in Table 6, although the amount of graphite spattered was large, an emission line with an emission peak at 193.0905 nm and a half width of 6 pm was observed in the emission spectrum. The relative peak intensity was 67, which proved to be a practical bright line intensity. Also, the stability of the discharge voltage was good.
  • Example 11 Except that a mixed gas of oxygen gas and neon was used as the filling gas, the partial pressure of oxygen gas was 5 Torr, the partial pressure of neon was 5 Torr, and the total pressure of the mixed gas was 10 Torr, A discharge tube was produced in the same manner as in Example 11. With respect to this discharge tube, the stability of the discharge voltage during emission of the light-emitting spectrum and the ArF laser beam was examined in the same manner as in Example 1, and the amount and the life of the graphite spattered were also examined. . Table 6 shows the results.
  • a discharge tube was manufactured in the same manner as in Example 11 except that neon was used as the sealing gas and the pressure was set to 8 T rr. With respect to this discharge tube, the emission spectrum and the stability of the discharge voltage during the irradiation of the ArF laser beam were examined in the same manner as in Example 1, and the amount and the life of graphite spattered were also examined. Table 6 shows the results.
  • the discharge tube of the present invention can be used both as a discharge tube for wavelength calibration using the optogalvanic effect or absorption and as a light source (hollow one-sided sword lamp) used as a standard wavelength emission line. understood.
  • a laser galvatron type discharge tube was used as the discharge tube.
  • a T-shaped sealed container having the following configuration was used. That is, in the sealed container, a T-tube made of borosilicate glass was prepared. A light entrance window and a light exit window made of synthetic quartz are fused to opposite ends of the T-tube, respectively, and the cylindrical portion of the T-tube between the light entrance window and the light exit window has an inner diameter of 2 mm. The length was 5 mm and the length was 120 mm. The cylindrical part was integrally provided with a hanging part with an inner diameter of 38 mm with a concave end.
  • two coil-shaped gold cathodes with an inner diameter of 3 mm, a thickness of l mm, and a length of 6 mm are prepared concentrically along the center axis of the T-tube.
  • Each was fixed to the stem via a lead bin covered with quartz glass.
  • each of these cathodes was housed in a cylindrical through-hole having an inner diameter of 6 mm formed in a rectangular parallelepiped ceramic discharge prevention member.
  • a ring-shaped graphite anode having an inner diameter of 2 mm and an outer diameter of 10 mm is housed between the discharge prevention members.
  • the anode is fixed to the stem via lead pins covered with quartz glass, Of the discharge prevention member.
  • FIG. 37 is a graph showing an emission spectrum
  • FIG. 38 is a graph showing an enlargement of the emission spectrum of FIG. Table 7
  • an emission line having an emission peak at 193.0905 nm and a half width of 7.7 pm was observed, and its relative peak intensity was 36, indicating that a practical emission line intensity was obtained.
  • a discharge tube was produced in the same manner as in Example 13 except that the partial pressure of neon was 4 Torr and the total pressure of the mixed gas was 6 Torr, and a light emitting spectrum and an ArF laser were produced in the same manner as in Example 1.
  • the stability of the discharge voltage during light irradiation was investigated. The results are shown in FIGS. 39 and 40 and Table 7.
  • FIG. 39 is a graph showing the emission spectrum
  • FIG. 40 is a graph showing an enlargement of the emission spectrum of FIG.
  • a laser galvatron type discharge tube was used as the discharge tube.
  • a T-shaped sealed container having the following configuration was used. That is, in the sealed container, a T-tube made of borosilicate glass is prepared, and a light entrance window and a light exit window made of synthetic stone are fused to opposite ends of the T-tube, respectively.
  • the cylindrical portion between the light exit window and the light exit window had an inner diameter of 25 mm and a length of 120 mm.
  • the cylindrical part was integrally provided with a hanging part with an inner diameter of 38 mm with a concave tip.
  • a gold cylindrical cathode with an inner diameter of 3 mm, a thickness of 2.5 mm, and a length of 18 mm is arranged concentrically with the cylindrical part of the T-tube.
  • a graphite member to be sputtered having an inner diameter of 2 mm, a thickness of 3 mm, and a length of 3 mm was arranged concentrically with the cylindrical portion at a position facing the cathode.
  • the cathode is fixed to the stem through a lead bottle that penetrates the side surface of the discharge prevention member and is covered with quartz glass, and the discharge prevention member is connected to the joint end of the two nickel ribbons wound around its outer periphery. It was fixed to the stem via two attached lead pins.
  • a ring-shaped nickel anode with an inner diameter of 8 mm, a thickness of 0.2 mm, and a length of 3 mm concentric with the cylindrical part is placed outside the discharge prevention member and facing the member to be sputtered. Placed.
  • the anode was fixed to the stem by fixing a lead bin to a lead pin.
  • FIG. 41 is a graph showing an emission spectrum
  • FIG. 42 is an enlarged graph of the emission spectrum of FIG.
  • the emission spectrum was measured by connecting a constant current power supply to the cathode 9, grounding the anode 8, and using a monochrome monitor 93 to measure the emission due to discharge.
  • the circuit configuration for measuring the discharge voltage was the configuration shown in FIG. 33 as in the first embodiment.
  • Table 8 In the emission spectrum, as shown in FIG. 41, an emission line having an emission peak at 193.0905 nm was observed, and its half-value width and relative peak intensity were different from each other. As shown in FIGS. 41 and 42, the values were 5. lpm and 77, indicating that a practical bright line intensity could be obtained.
  • Example 15 From the results of Example 15 described above, it was found that suitable characteristics were obtained even when the sealed gas contained an oxygen atom-containing gas and the member to be spattered contained a carbon atom-containing material.
  • a carbon atom-containing material is used as a material constituting either the cathode or the anode, and an oxygen atom-containing gas is used as the sealing gas, so that .3 It has an absorption transition near the wavelength of 5 nm and has a high intensity and practically stable emission line that can be used practically.It is used as a standard wavelength lamp or a discharge tube for wavelength calibration. can do. Further, according to the discharge tube of the present invention, the above-mentioned effect can be achieved by providing a member to be sputtered containing a carbon atom-containing material between the cathode and the anode.

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Abstract

La présente invention concerne un tube à décharge (1) qui est pourvu d'une paire d'électrodes (8, 9) enfermées dans une enceinte hermétique (H), l'une des deux électrodes (8, 9) renfermant une substance carbonée. L'enceinte (H) renferme un gaz oxygéné qui se transforme en plasma sous l'effet de la décharge électrique entre les électrodes (8, 9), les électrodes recevant une pulvérisation de plasma. Le tube à décharge (1) peut également être équipé d'un élément à recouvrir par pulvérisation et contenant une substance carbonée entre les électrodes (8, 9) à l'intérieur de l'enceinte (H).
PCT/JP1998/003009 1997-07-03 1998-07-03 Tube a decharge et procede de calibrage de longueur d'ondes laser en utilisant ce tube WO1999001890A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
AU79371/98A AU7937198A (en) 1997-07-03 1998-07-03 Discharge tube and method of calibrating laser wavelength by using the same

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP17857597 1997-07-03
JP9/178575 1997-07-03
JP10/84234 1998-03-30
JP8423498 1998-03-30
JP10/140130 1998-05-21
JP14013098 1998-05-21

Publications (1)

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WO1999001890A1 true WO1999001890A1 (fr) 1999-01-14

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AU (1) AU7937198A (fr)
WO (1) WO1999001890A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010135162A (ja) * 2008-12-04 2010-06-17 Orc Mfg Co Ltd 放電ランプ
JP2013532349A (ja) * 2010-05-05 2013-08-15 ペルキネルマー ヘルス サイエンシーズ， インコーポレイテッド 耐酸化性誘導装置
US9478933B2 (en) 2011-07-06 2016-10-25 Gigaphoton Inc. Wavelength detector and wavelength calibration system
US9983060B1 (en) 2016-11-28 2018-05-29 Cymer, Llc Calibration of a spectral analysis module

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JPS5017794B1 (fr) * 1970-03-23 1975-06-24
JPS51896A (en) * 1974-06-20 1976-01-07 Mitsubishi Electric Corp Yokohokoreikigata co2 reezahatsushinsochi
JPS5914686A (ja) * 1982-07-01 1984-01-25 グリゴリイ・アニシモビツチ・マチユルカ ガスレ−ザ−陰極および製法
JPS63280483A (ja) * 1987-05-13 1988-11-17 Canon Inc レーザ光の波長検出方法
JPS6422086A (en) * 1987-07-17 1989-01-25 Komatsu Mfg Co Ltd Control equipment for laser wavelength
JPH01214186A (ja) * 1987-12-28 1989-08-28 Lambda Physik Forschungs & Entwickl Gmbh レーザー・ビームの周波数を安定させる方法と装置
JPH01272175A (ja) * 1987-12-15 1989-10-31 Lumonics Inc エクサイマ・レーザ
JPH01321325A (ja) * 1988-06-24 1989-12-27 Hitachi Ltd 分光器及びそれを用いた投影露光装置並びに投影露光方法
JPH02148871A (ja) * 1988-11-30 1990-06-07 Nikon Corp エキシマレーザ発生装置
JPH02215175A (ja) * 1989-02-16 1990-08-28 Agency Of Ind Science & Technol 狹帯域化エキシマレーザーの波長制御装置
JPH02238635A (ja) * 1989-03-10 1990-09-20 Toshiba Corp Ｍｏｓ型半導体装置の製造方法
JPH09121067A (ja) * 1995-10-25 1997-05-06 Mitsubishi Heavy Ind Ltd レーザ波長較正法
JPH09199780A (ja) * 1996-01-16 1997-07-31 Nec Corp 狭帯域エキシマレーザ装置

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5017794B1 (fr) * 1970-03-23 1975-06-24
JPS51896A (en) * 1974-06-20 1976-01-07 Mitsubishi Electric Corp Yokohokoreikigata co2 reezahatsushinsochi
JPS5914686A (ja) * 1982-07-01 1984-01-25 グリゴリイ・アニシモビツチ・マチユルカ ガスレ−ザ−陰極および製法
JPS63280483A (ja) * 1987-05-13 1988-11-17 Canon Inc レーザ光の波長検出方法
JPS6422086A (en) * 1987-07-17 1989-01-25 Komatsu Mfg Co Ltd Control equipment for laser wavelength
JPH01272175A (ja) * 1987-12-15 1989-10-31 Lumonics Inc エクサイマ・レーザ
JPH01214186A (ja) * 1987-12-28 1989-08-28 Lambda Physik Forschungs & Entwickl Gmbh レーザー・ビームの周波数を安定させる方法と装置
JPH01321325A (ja) * 1988-06-24 1989-12-27 Hitachi Ltd 分光器及びそれを用いた投影露光装置並びに投影露光方法
JPH02148871A (ja) * 1988-11-30 1990-06-07 Nikon Corp エキシマレーザ発生装置
JPH02215175A (ja) * 1989-02-16 1990-08-28 Agency Of Ind Science & Technol 狹帯域化エキシマレーザーの波長制御装置
JPH02238635A (ja) * 1989-03-10 1990-09-20 Toshiba Corp Ｍｏｓ型半導体装置の製造方法
JPH09121067A (ja) * 1995-10-25 1997-05-06 Mitsubishi Heavy Ind Ltd レーザ波長較正法
JPH09199780A (ja) * 1996-01-16 1997-07-31 Nec Corp 狭帯域エキシマレーザ装置

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010135162A (ja) * 2008-12-04 2010-06-17 Orc Mfg Co Ltd 放電ランプ
JP2013532349A (ja) * 2010-05-05 2013-08-15 ペルキネルマー ヘルス サイエンシーズ， インコーポレイテッド 耐酸化性誘導装置
US9478933B2 (en) 2011-07-06 2016-10-25 Gigaphoton Inc. Wavelength detector and wavelength calibration system
US9983060B1 (en) 2016-11-28 2018-05-29 Cymer, Llc Calibration of a spectral analysis module

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