WO1998057090A1 - Joint a portee plane pour ensemble de bloc modulaire reliant des composants mecaniques d'un systeme fluidique - Google Patents

Joint a portee plane pour ensemble de bloc modulaire reliant des composants mecaniques d'un systeme fluidique

Info

Publication number
WO1998057090A1
WO1998057090A1 PCT/US1998/012460 US9812460W WO9857090A1 WO 1998057090 A1 WO1998057090 A1 WO 1998057090A1 US 9812460 W US9812460 W US 9812460W WO 9857090 A1 WO9857090 A1 WO 9857090A1
Authority
WO
WIPO (PCT)
Prior art keywords
fluid
bead
face
face seal
gasket
Prior art date
Application number
PCT/US1998/012460
Other languages
English (en)
Inventor
Benjamin J. Olechnowicz
Original Assignee
Swagelok Company
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Swagelok Company filed Critical Swagelok Company
Publication of WO1998057090A1 publication Critical patent/WO1998057090A1/fr

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16L—PIPES; JOINTS OR FITTINGS FOR PIPES; SUPPORTS FOR PIPES, CABLES OR PROTECTIVE TUBING; MEANS FOR THERMAL INSULATION IN GENERAL
    • F16L39/00—Joints or fittings for double-walled or multi-channel pipes or pipe assemblies

Definitions

  • IPC International Patent Classification
  • This invention pertains to the art of fluid environments and more particularly to high purity fluid systems, for example, such as the clean room environment used to manufacture semiconductor wafers.
  • the invention is also applicable to related environments where extreme conditions are encountered such as high temperatures, pressures, vacuum, cryogenic, or corrosive conditions.
  • Gas panels used in the semiconductor industry include one or more flow lines or flow paths in which are arranged fluid components such as pressure regulators, valves, mass flow controllers, check valves, and the like. Each of these fluid components is interconnected by fluid lines or tubes via fittings.
  • fluid components such as pressure regulators, valves, mass flow controllers, check valves, and the like.
  • Each of these fluid components is interconnected by fluid lines or tubes via fittings.
  • a commercially successful fitting used to interconnect fluid components in conventional gas panels is shown and described in U.S. Patent No. 3,521,910 — Callahan, Jr., et al., the contents of which are incorporated herein by reference.
  • Still another concern is to provide a reliable seal between adjacent fluid components that distributes the sealing forces so that stress concentrations do not arise.
  • an assembly that provides a positive stop after complete makeup of the seal is achieved is desirable so that undue stress is not generated by overtorquing the arrangement.
  • Dead space is generally defined as
  • the present invention contemplates a new and improved seal arrangement for a weldless fluid system used in a high purity environment that overcomes all of the above referenced problems and others, and provides an effective, robust seal that does not encounter overtorquing or undue generation of stress.
  • a planar face of a fluid member includes a fluid passage.
  • a seal is disposed about the fluid passage and has a bead that faces outwardly from the passage.
  • the bead is recessed relative to the planar face and, in conjunction with a stop surface, prevents cooperating beads from adjacent fluid members from encountering undesired stress levels.
  • the seal includes a gasket interposed between the beads.
  • stop surface is defined by the planar face of the fluid member.
  • the bead has a constant radius and the bead centerl ne is radially offset from the sidewall of the fluid passage a dimension less than the bead radius.
  • a principal advantage of the invention is found in the effective sealing between adjacent modular fluid components.
  • Another advantage is the stop arrangement that provides a precise make-up of the seal components without encountering overtorquing problems.
  • Another advantage of the invention relates to the robust seal that does not deform under severe conditions.
  • Yet another advantage of the invention resides in the low dead space associated with this seal assembly.
  • Figure 1 is a perspective view of a modular fluid system
  • Figure 2 is an exploded perspective view of the fluid system illustrated in Figure 1;
  • Figure 3 is an enlarged perspective view of a base block having face seals formed in accordance with the teachings of the present invention;
  • Figure 4 is a longitudinal cross-sectional view taken generally along the lines 4-4 of Figure 3;
  • Figure 5 is an enlarged detail view of the encircled area of Figure 4;
  • Figure 6 is an enlarged cross-sectional view through a seal assembly illustrating the stress concentrations encountered with the preferred embodiment of the invention.
  • FIG. 1 With reference to the drawings which illustrate the preferred embodiment of the invention only, and are not intended to limit the invention, the Figures show a fluid system A comprised of base blocks B and fluid components C secured together in a modular arrangement.
  • a preferred face seal D sealingly interconnects adjacent base blocks and fluid components to establish a sealed flow path for the fluid through the system.
  • Figures 1 and 2 show a series of individual base blocks B assembled together to form a serial flow line, as well as providing a transfer path generally perpendicular thereto.
  • Each base block B is of substantially identical construction unless noted to the contrary and is preferably a unitary, substantially cube-shaped integral member having six planar faces.
  • a representative base block particularly shown in detail in Figure 3, has three faces in which passages are formed.
  • the first and second faces designated 14, 16 (which are shown in vertical orientation) and an upper or third face 18 (which is oriented horizontally and perpendicularly to the first and second faces) all include fluid passages.
  • the remaining faces of the base block include parallel fourth and fifth faces or sidewalls 20, 22, and a planar sixth face or bottom wall 24.
  • each face may include additional openings communicating with additional fluid passages to create a modular fluid system adapted to meet a wide array of piping schematics.
  • each face is preferably rectilinear for mating engagement with abutting faces of adjacent base blocks as will be described in greater detail below.
  • the end face 14, shown oriented in the vertical direction, includes a centrally disposed opening 30a defining a first or inlet end of a fluid passage 30.
  • a second or outlet end 30b of the passage communicates in a generally perpendicular fashion with the third face 18.
  • the passage has a generally L-shaped configuration ( Figure 4) , and as indicated above, the opening is substantially centered within the first end face of the base block.
  • the second end 30b of the passage is slightly offset from the center of the third face 18, the reasons for which will become more apparent below.
  • the preferred securing means is a fastener such as the illustrated angle bolt 38.
  • the openings 34, 36 extend at an angle from the upper face 18 to the first face 14, or to the end face 16, respectively.
  • the angle openings 34, 36 are diagonally disposed relative to one another in the upper face 18.
  • the first angle opening 34 proceeds at an acute angle relative to the upper face 18 for communication with the first end face.
  • the angle opening 36 extends at an acute angle relative to the upper face 18 for communication with the second end face 16.
  • a fastener for example angle bolt 38, is received through each angle opening in the upper face of the base block.
  • a threaded end 40 of the angle bolt proceeds through the opening for receipt in a similar angle recess 50 in an end face of the next adjacent block.
  • the recess 50 is preferably threaded so that rotation of the fastener draws the abutting faces of the adjacent base blocks together into sealing engagement.
  • an angle bolt from the adjacent base block extends through the angle opening 36 in the upper face, through the second end face 16, and is received in the recess 50 in first end face of the first base block.
  • the upper face 18 includes four perimeter recesses 52 disposed in the corners.
  • the recesses 52 are preferably threaded and adapted to receive fasteners 54 associated with the fluid components C ( Figure 2).
  • each fluid component preferably includes a planar rectangular or square base 56 that conforms to the dimensions of the upper face of the base block.
  • the fasteners 54 extend through openings in the perimeter of the fluid component base for threaded receipt in the recesses 52 of the base block. This sealingly secures the fluid component to a respective base block B. Moreover, by locating the recesses 52 in the corners, they do not interfere with the numerous passageways, angle openings and recess/pin pairs in the base block as described above.
  • a second passage 70 is also provided in base block B.
  • a first end 70a of the passage extends through the upper face 18 of the block while a second end 70b of the passage is disposed in a central location in the end face 16.
  • the second passage preferably has an L- shaped configuration ( Figure 4) .
  • the passage ends 70a, 30b are intended to communicate with an inlet and outlet associated with a fluid component base 56 secured to the upper face of the base block. This permits fluid that enters passage 70 to proceed through the fluid component and ultimately continue in a general axial direction into the passage 30.
  • the modular arrangement of the fluid system members allows different fluid components to be secured to the upper face 18 of adjacent base blocks.
  • a valve, flow controller, regulator, etc. may be joined to selected base blocks to satisfy various piping schematics.
  • additional flow passages may be desired at right angles, i.e., through the parallel side walls 20, 22 of the base block.
  • the symmetrical arrangement of the fluid passages, angle openings, pins, recesses, etc., described above easily incorporates additional flow passages and angle connections into a base block to achieve this goal. Accordingly, since the structure and operation is substantially identical to that described above with respect to the first and second faces, and forms no

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Gasket Seals (AREA)

Abstract

La présente invention concerne un joint à portée plane pour ensemble modulaire fluidique. Des passages de fluide sont ménagés dans des surfaces planes de blocs de base venant en about et dans des composants mécaniques. Chaque extrémité terminale d'un passage de fluide comprend un joint étanche constitué d'un bourrelet continu, périphérique, qui entoure le passage. La protubérance la plus extérieure est évidée par rapport à une surface d'arrêt, qui selon le mode de réalisation préféré, est définie par ladite surface plane. La surface d'arrêt limite le déplacement des bourrelets de joints étanches venant en about vers un autre bourrelet pour qu'un assemblage précis dudit joint soit obtenu. Le bourrelet présente un rayon sensiblement constant, décalé par rapport à une paroi latérale du passage de fluide, d'une dimension inférieure au rayon du bourrelet, pour que le bourrelet soit robuste, forme un point axial de passage, et répartisse uniformément les contraintes sur le bourrelet.
PCT/US1998/012460 1997-06-13 1998-06-12 Joint a portee plane pour ensemble de bloc modulaire reliant des composants mecaniques d'un systeme fluidique WO1998057090A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US87600497A 1997-06-13 1997-06-13
US08/876,004 1997-06-13

Publications (1)

Publication Number Publication Date
WO1998057090A1 true WO1998057090A1 (fr) 1998-12-17

Family

ID=25366764

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1998/012460 WO1998057090A1 (fr) 1997-06-13 1998-06-12 Joint a portee plane pour ensemble de bloc modulaire reliant des composants mecaniques d'un systeme fluidique

Country Status (2)

Country Link
TW (1) TW396380B (fr)
WO (1) WO1998057090A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000063757A1 (fr) * 1999-04-19 2000-10-26 Millipore Corporation Dispositif de commande modulaire de debit massique et de pression monte en surface

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR920868A (fr) * 1945-10-19 1947-04-21 Cie De Fives Lille Assemblage des tuyauteries pour vapeur haute pression et haute température
GB2038972A (en) * 1978-12-04 1980-07-30 Varian Associates Flange sealing joint with removable metal gasket
EP0651195A1 (fr) * 1993-10-28 1995-05-03 Tadahiro Ohmi Raccord de tuyaux

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR920868A (fr) * 1945-10-19 1947-04-21 Cie De Fives Lille Assemblage des tuyauteries pour vapeur haute pression et haute température
GB2038972A (en) * 1978-12-04 1980-07-30 Varian Associates Flange sealing joint with removable metal gasket
EP0651195A1 (fr) * 1993-10-28 1995-05-03 Tadahiro Ohmi Raccord de tuyaux

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2000063757A1 (fr) * 1999-04-19 2000-10-26 Millipore Corporation Dispositif de commande modulaire de debit massique et de pression monte en surface

Also Published As

Publication number Publication date
TW396380B (en) 2000-07-01

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