WO1998017438A1 - Surface polishing apparatus - Google Patents

Surface polishing apparatus Download PDF

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Publication number
WO1998017438A1
WO1998017438A1 PCT/JP1997/003717 JP9703717W WO9817438A1 WO 1998017438 A1 WO1998017438 A1 WO 1998017438A1 JP 9703717 W JP9703717 W JP 9703717W WO 9817438 A1 WO9817438 A1 WO 9817438A1
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WO
WIPO (PCT)
Prior art keywords
pedestal
bolt
hole
polishing apparatus
groove
Prior art date
Application number
PCT/JP1997/003717
Other languages
French (fr)
Japanese (ja)
Inventor
Shuki Gohda
Hisao Nakayama
Masaru Nakamura
Original Assignee
Kanebo Limited
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanebo Limited filed Critical Kanebo Limited
Publication of WO1998017438A1 publication Critical patent/WO1998017438A1/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/12—Lapping plates for working plane surfaces
    • B24B37/16—Lapping plates for working plane surfaces characterised by the shape of the lapping plate surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/11—Lapping tools
    • B24B37/20—Lapping pads for working plane surfaces
    • B24B37/26—Lapping pads for working plane surfaces characterised by the shape of the lapping pad surface, e.g. grooved
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
    • B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
    • B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
    • B24B7/228—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain for grinding thin, brittle parts, e.g. semiconductors, wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24D—TOOLS FOR GRINDING, BUFFING OR SHARPENING
    • B24D7/00—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor
    • B24D7/06—Bonded abrasive wheels, or wheels with inserted abrasive blocks, designed for acting otherwise than only by their periphery, e.g. by the front face; Bushings or mountings therefor with inserted abrasive blocks, e.g. segmental

Definitions

  • the present invention relates to a lapping grindstone pedestal, and more particularly, to a planar polishing apparatus equipped with a grindstone having a shape suitable for polishing a surface of a metal, glass, semiconductor wafer, or the like flat and uniformly and efficiently. Bright.
  • the workpiece to be polished is made of iron while constantly supplying a slurry containing abrasive grains for polishing. It used to be a so-called lapping type polishing machine that slides and grinds on a surface plate.
  • a whetstone containing abrasive grains instead of iron platen, and water or a small amount of surface activity has been used.
  • a method of polishing while steadily supplying water containing an agent has come to be used. In particular, this method is becoming popular in the polishing of relatively soft metals such as aluminum alloys.
  • the above-mentioned surface polishing apparatus is configured such that a plurality of whetstones are mounted on a surface plate directly or through a pedestal so that their working surfaces form the same plane.
  • a method in which a grindstone is first fixed to a pedestal, and the pedestal is screwed to a polishing machine surface plate with bolts or the like is performed. For this reason, bolt working holes are drilled in the working surface of the grindstone.
  • the present invention has been made in view of the above-mentioned drawbacks of the planar polishing apparatus using a grindstone, and its purpose is to quickly discharge a waste liquid containing dropped abrasive grains, polishing debris, and abrasive binder through a bolt hole. It is an object of the present invention to provide a flat surface polishing apparatus capable of maintaining a good polishing action for a long time and efficiently utilizing a portion where the grinding wheel is effectively used. Disclosure of the invention
  • a flat-surface polishing apparatus is a flat-surface polishing apparatus comprising a plurality of whetstones each having a bolt and a through-hole disposed on a lapping platen via a pedestal such that their working surfaces form the same plane.
  • the groove provided in the pedestal communicates the lower end of the bolt hole with the side surface of the pedestal, and the polishing waste liquid remaining in the bolt hole is formed by the groove provided in the pedestal. Is quickly discharged out of the system through the formed discharge hole. Also, there is no need to drill a hole in the grindstone, and it is sufficient to provide a groove in the pedestal of the grindstone, and the effective use of the grindstone increases. Furthermore, since the bolt head does not protrude from the upper surface of the pedestal, almost all the effective part of the grinding wheel can be used.
  • the bolts for screwing the pedestal and the lapping plate are specified by JIS standards.
  • the pedestal is also used, and the dimensions of the pedestal are determined according to the surface polishing equipment for each machine.However, when the pedestal and the lapping platen are screwed, it is more At present, the head of the bolt is several millimeters from the top of the pedestal because the thickness of the bolt head is large. Therefore, by adjusting the counterbore depth, the unused portion of the grindstone can be reduced as much as possible, and the life of the grinding grindstone has been improved compared to the past.
  • a groove provided in the pedestal is provided with a sufficient width around the bolt ⁇ through-hole, and the waste liquid in the bolt ⁇ through hole is quickly discharged out of the system.
  • the rigidity of the pedestal increases, Since the lapping plate can be easily set, there is no need to take time to align the pedestal when the lapping plate is fixed to the lapping plate with a bolt, leading to a reduction in work time.
  • the discharged polishing liquid and grindstone are again adsorbed to the grindstone by providing a discharge groove for discharging the polishing fluid containing the polishing grime generated during the polishing operation.
  • the polishing condition is not changed.
  • the discharge groove is on the side fixed to the pedestal of the grindstone, the application of the adhesive during the bonding operation when the grindstone and the pedestal are fixed is performed. The problem of difficulty is solved.
  • the pedestal of aluminum, a lightweight pedestal can be used, and the dressing and removal of the whetstone and the pedestal can be easily performed when dressing the whetstone surface which is indispensable for precise polishing.
  • FIG. 1 shows an embodiment of the working surface of a flat-surface polishing apparatus provided with a grooved base according to the present invention.
  • FIG. 2 is an external view of a whetstone mounted on a surface plate through the grooved pedestal.
  • Fig. 3 is a cross-sectional view of a main part of Fig. 2
  • Fig. 4 is an explanatory view of the pedestal of Fig. 2.
  • FIG. 5 is an explanatory view showing a modification of the groove shape of the grooved base of the present invention.
  • FIG. 6 is an external explanatory view showing one embodiment of a planar polishing apparatus provided with a grooved pedestal according to another embodiment of the present invention
  • FIG. 7 is a sectional view of a main part of FIG.
  • FIG. 8 is an external view showing an embodiment of a planar polishing apparatus provided with a grooved pedestal according to another embodiment of the present invention.
  • FIG. 8 is an external view showing an embodiment of a planar polishing apparatus provided with a grooved pedestal according to another embodiment of the present invention.
  • FIG. 9 is a cross-sectional view of a main part of FIG. 0 is an explanatory view showing the groove shape in FIG. 8, and FIG. 11 is an explanatory view of the action of the cut portion of the pedestal in FIG. BEST MODE FOR CARRYING OUT THE INVENTION
  • FIG. 1 is an explanatory view showing an example of a polishing surface of a flat polishing apparatus provided with a grindstone according to the present invention
  • FIG. 2 is an external view when the grindstone is mounted on a surface plate via a pedestal according to the present invention.
  • FIG. 3 is a sectional view of a main part of FIG. 2
  • FIG. 4 is an explanatory view of a pedestal.
  • the pedestal is made of aluminum and the lapping plate is made of steel.
  • the planar polishing apparatus is configured such that a grindstone 3 having a predetermined shape is attached to a surface plate 1 having a rotating performance via a pedestal 2 to form a polishing action surface.
  • a bolt hole 4 is formed in the grindstone 3 and a bolt tightening hole 5 is formed in the pedestal.
  • the grindstone 3 is fixed to the pedestal 2 with an adhesive, and the pedestal 2 is screwed to the surface plate 1 with bolts 7.
  • the pedestal 2 is provided with a groove 6 communicating from the lower end of the bolt hole 4 to the side surface of the pedestal 2 on the surface to be fixed to the grindstone 3.
  • the groove 6 is engraved in a circular shape at the lower end of the bolt ⁇ through hole 4, and the diameter of the bolt insertion hole 4 is larger than the diameter of the bolt 7, as shown in FIG. .
  • the waste liquid flowing into the bolt hole 4 can be smoothly discharged.
  • a counterbore portion can be provided in the bolt tightening hole 5.
  • FIG. 5 is an external view illustrating another example of the grooved pedestal according to the present invention.
  • the direction in which the groove 6 is provided is 45 degrees with respect to the radial direction of the platen in FIG. b) has an angle of 90 degrees.
  • FIG. 6 is an explanatory view of the appearance when a grindstone is mounted on a surface plate via a pedestal in another example according to the present invention. Further, the groove shape of the pedestal 12 in this example is the same as that of FIG. 5 (b).
  • FIG. 7 is a sectional view of a main part of the surface plate of FIG.
  • a protrusion 9 is provided on the side of the pedestal 12 in contact with the surface plate 11, and the protrusion 9 is provided at a position corresponding to the groove 16, and the protrusion is fitted.
  • a recess 10 is provided on the surface plate. The width of the projection 9 is larger than the width of the groove 16.
  • FIG. 8 is an explanatory view of an external appearance when a grindstone is attached to a surface plate via a pedestal in another example according to the present invention.
  • FIG. 9 is a sectional view of a main part of FIG.
  • the pedestal 22 has a groove 2 6 communicating from the lower end of the bolt ⁇ through hole 4 to the side surface of the pedestal 2 on the surface in contact with the surface plate 1.
  • a drain hole 28 for discharging the polishing waste liquid from the bolt hole 4 is formed by the groove 26 and the platen 1.
  • FIG. 10 is an explanatory diagram of a cut portion of the pedestal in FIG.
  • the cut portion 27 is formed in a cross shape at the lower end of the bolt hole 4 so that the waste liquid flowing into the bolt hole 4 can be discharged smoothly.
  • a circular cut through which a bolt can be inserted, and together with the cross-shaped notch, a cut 27 is formed.
  • FIG. 11 is an explanatory view of the operation of the cut portion of the pedestal.
  • planar polishing apparatus using the grooved pedestal according to the present invention a favorable polishing action is maintained for a long time, and further, the waste of the grinding wheel is reduced as compared with the conventional one obtained by drilling the hole on the grinding wheel side. It is economical because it is less, and the service life of the grindstone can be extended, and the workability is improved.
  • the polishing operation can be remarkably improved.
  • the contamination of the waste liquid is reduced, the clogging phenomenon on the grindstone surface is avoided, the frequency of dressing is reduced, and the remaining liquid is partially agglomerated, and scratches (streaks) caused by small pieces entering the polishing surface are caused.
  • a favorable effect of avoiding such phenomena can be obtained.
  • planar polishing apparatus reduces the incidence of defective products in the polishing operation and reduces the number of dressing operations, thereby improving both the operation efficiency and the operation rate of the apparatus.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Polishing Bodies And Polishing Tools (AREA)

Abstract

In a surface polishing apparatus wherein a plurality of grindstones having bolt insert holes are placed on a fixed lapping board via a base so that the working surfaces of the grindstones form the same plane, the surfaces, to which the grindstones are fixed, of the base are provided with grooves communicating with the lower end portions of the bolt insert holes and the side surfaces of the base, these grooves and grindstones forming discharge ports for a polishing liquid and a coolant. According to such a surface polishing apparatus, the grindstones are used wastelessly, and the service life of the grindstones can be prolonged, the operation efficiency of the grindstones being improved.

Description

平面研磨装置 技術分野 Flat surface polishing equipment Technical field
本発明は、 ラッピング用砥石の台座に係わり、 更に詳しくは、 金属、 ガラス、 半導体ウェハー等の表面を平坦に均一且つ効率よく研磨するのに適した形状の砥 石を搭載した平面研磨装置に関す明る。  The present invention relates to a lapping grindstone pedestal, and more particularly, to a planar polishing apparatus equipped with a grindstone having a shape suitable for polishing a surface of a metal, glass, semiconductor wafer, or the like flat and uniformly and efficiently. Bright.
田  Rice field
背景技術 Background art
従来、 金属、 ガラス、 半導体ウェハー等、 極めて平坦な面を必要とする材料の 表面研磨は、 研磨用砥粒削を含有するスラリーを定常的に供給しながら、 被研磨 体 （ワーク） を铸鉄製定盤上で摺動し研削するいわゆるラッピング式研磨機で行 つていたが、 近年、 ラッピング定盤として铸鉄製定盤に代えて砥粒を含有した砥 石を用い、 水あるいは少量の界面活性剤を含有した水を定常的に供給しながら研 磨する方法が行われるようになった。 特に、 アルミ合金等の比較的軟質な金属の 研磨加工において、 この方法は一般的になりつつある。  Conventionally, for the surface polishing of materials requiring extremely flat surfaces, such as metals, glass, and semiconductor wafers, the workpiece to be polished (work) is made of iron while constantly supplying a slurry containing abrasive grains for polishing. It used to be a so-called lapping type polishing machine that slides and grinds on a surface plate.In recent years, instead of a steel surface plate, a whetstone containing abrasive grains has been used instead of iron platen, and water or a small amount of surface activity has been used. A method of polishing while steadily supplying water containing an agent has come to be used. In particular, this method is becoming popular in the polishing of relatively soft metals such as aluminum alloys.
上記平面研磨装置は、 一般に複数の砥石を、 直接又は台座を介して、 その作用 面が同一平面を形成するように定盤に装着したものであり、 特に台座を介して装 着する場合は、 通常砥石をまず台座に固着し、 該台座をボルト等で研磨装置定盤 に螺着する方法が行われている。 このため、 砥石の作用面にはボルト揷通孔が穿 孔されている。  In general, the above-mentioned surface polishing apparatus is configured such that a plurality of whetstones are mounted on a surface plate directly or through a pedestal so that their working surfaces form the same plane. Usually, a method in which a grindstone is first fixed to a pedestal, and the pedestal is screwed to a polishing machine surface plate with bolts or the like is performed. For this reason, bolt working holes are drilled in the working surface of the grindstone.
ところで、 上述の砥石を用いる方法においても、 研磨作業によって脱落砥粒、 研磨屑、 砥粒結合材の屑等を多量に含んだ研磨液からなる廃液が発生し、 砥石面 の目づまり等が起こり、 良好な研磨作用を著しく阻害することになる。 このため 、 かかる廃液は、 新しい研磨液の供給に伴い速やかに系外に排出しなければなら ない。  By the way, even in the above-mentioned method using a grindstone, a waste liquid consisting of a polishing liquid containing a large amount of dropped abrasive grains, polishing swarf, swarf of an abrasive grain binder, etc. is generated by the polishing operation, and the grindstone surface is clogged. However, a good polishing action is significantly impaired. For this reason, such waste liquid must be promptly discharged out of the system when a new polishing liquid is supplied.
しかしながら、 前述のボルト揷通孔は閉鎖孔のため上記廃液がボルト揷通孔に 滞留することになり、 とくに下定盤にあるボルト揷通孔は、 滞留した廃液の逃げ 場がなく、 常時廃液が満たされ、 脱落砥粒、 研磨屑等が徐々に堆積することにな る。 この結果、 ワーク表面の汚染や目詰まり現象、 更にはそれに伴う異常な条痕 が発生するといつた問題点があつた。 However, since the above-mentioned bolt holes are closed holes, the waste liquid accumulates in the bolt holes. Especially, the bolt holes in the lower platen allow the accumulated waste liquid to escape. There is no space, the waste liquid is always filled, and the falling off abrasive grains and polishing debris will gradually accumulate. As a result, there was a problem that contamination and clogging of the work surface and abnormal streaks accompanying the contamination occurred.
かかる現象を回避するために、 上記廃液を速やかにボルト揷通孔から排除する 方法として、 本願出願人は実願平 1 4 9 2 1 4号において、 ボルト揷通孔の底 部から砥石側面に連通する溝を刻設し、 該溝と台座によって形成した側孔を設け る方法を提案した。 この方法は前述の好ましからざる現象を十分に予防し、 一応 所期の目的を達成し得たものの、 側孔が砥石を穿孔することによって作られるた めに、 使用できる砥石部分が減り、 砥石としての寿命が短くなるという問題点は 完全には解決されなかった。  In order to avoid such a phenomenon, as a method of quickly removing the waste liquid from the bolt hole, the present applicant disclosed in Japanese Patent Application No. A method of engraving a communicating groove and providing a side hole formed by the groove and the pedestal was proposed. Although this method sufficiently prevented the undesirable phenomenon described above and could achieve the intended purpose for the time being, since the side hole was created by drilling a grindstone, the usable grindstone part was reduced, and The problem of shortened life was not completely solved.
本発明は、 前述の砥石を用いた平面研磨装置の持つ欠点に鑑みなされたもので あり、 その目的は脱落砥粒、 研磨屑、 砥粒結合材を含んだ廃液をボルト揷通孔か ら速やかに排出すると共に、 良好な研磨作用を長時間維持し、 且つ砥石の有効利 用部分を十分に活用し得る平面研磨装置を提供することを目的としている。 発明の開示  SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned drawbacks of the planar polishing apparatus using a grindstone, and its purpose is to quickly discharge a waste liquid containing dropped abrasive grains, polishing debris, and abrasive binder through a bolt hole. It is an object of the present invention to provide a flat surface polishing apparatus capable of maintaining a good polishing action for a long time and efficiently utilizing a portion where the grinding wheel is effectively used. Disclosure of the invention
本発明に係る平面研磨装置は、 ボルト揷通孔を穿設した複数の砥石を、 その作 用面が同一平面を形成する様に台座を介してラッピング定盤に配設してなる平面 研磨装置において、  A flat-surface polishing apparatus according to the present invention is a flat-surface polishing apparatus comprising a plurality of whetstones each having a bolt and a through-hole disposed on a lapping platen via a pedestal such that their working surfaces form the same plane. At
前記台座の砥石を固着する側の面に、 ボルト揷通孔の下端部と台座の側面に連 通する溝を刻設し、 該溝と砥石によつて研磨液等の排出孔を形成したことを特徴 とする平面研磨装置である。  On the surface of the pedestal to which the grindstone is fixed, a groove communicating with the lower end of the bolt hole and the side surface of the pedestal is formed, and a discharge hole for a polishing liquid or the like is formed by the groove and the grindstone. This is a planar polishing apparatus characterized by the following.
本発明の平面研磨装置は、 台座に設けた溝が、 ボルト揷通孔の下端部と台座の 側面とを連通しており、 ボルト揷通孔に滞留する研磨廃液は台座に設けた溝によ り形成される排出孔より速やかに系外へ排出される。 また、 砥石に穿孔する必要 がなく、 砥石の台座に溝を設ければよく、 砥石の有効利用部分が増加する。 さらに、 ボルト頭部が台座の上面に出ることがないため、 砥石の有効部分をほ ぼ全量使用することができる。  In the planar polishing apparatus of the present invention, the groove provided in the pedestal communicates the lower end of the bolt hole with the side surface of the pedestal, and the polishing waste liquid remaining in the bolt hole is formed by the groove provided in the pedestal. Is quickly discharged out of the system through the formed discharge hole. Also, there is no need to drill a hole in the grindstone, and it is sufficient to provide a groove in the pedestal of the grindstone, and the effective use of the grindstone increases. Furthermore, since the bolt head does not protrude from the upper surface of the pedestal, almost all the effective part of the grinding wheel can be used.
ここで、 台座とラッピング定盤を螺着するボルトは、 J I S規格で定められた ものが使われており、 また台座においても寸法は各メ一力一ごとで平面研磨装置 に合った規格が定められているが、 台座とラッピング定盤を螺着した時に台座の 座グリよりもボルト頭部の厚さが厚い為にボルトの頭部は台座の上面から数ミ リ 出ているのが現状である。 そこで、 座グリの深さを調製することにより、 砥石の 未使用部分を限りなく減らすことができ、 従来に比べて研磨砥石の寿命がァップ した。 Here, the bolts for screwing the pedestal and the lapping plate are specified by JIS standards. The pedestal is also used, and the dimensions of the pedestal are determined according to the surface polishing equipment for each machine.However, when the pedestal and the lapping platen are screwed, it is more At present, the head of the bolt is several millimeters from the top of the pedestal because the thickness of the bolt head is large. Therefore, by adjusting the counterbore depth, the unused portion of the grindstone can be reduced as much as possible, and the life of the grinding grindstone has been improved compared to the past.
さらに、 台座に設けた溝がボルト揷通孔の回りに十分な幅をもって設けられて おり、 ボルト揷通孔内の廃液が系外へ速やかに排出するため、 ボルト揷通孔に廃 液が滞留することはないのである。 すなわち、 ボルト揷通孔の外周にも溝を設け ることにより、 比較的目の粗い砥粒を用いて研磨した時に、 ボルト揷通孔の下端 部から該台座の側面へ連通する溝だけではボルトが妨害をして研磨屑の排出を遅 らせる危険性も回避できる。  Furthermore, a groove provided in the pedestal is provided with a sufficient width around the bolt 揷 through-hole, and the waste liquid in the bolt 揷 through hole is quickly discharged out of the system. There is nothing to do. That is, by providing a groove also on the outer periphery of the bolt hole, when polishing is performed using relatively coarse abrasive grains, only the groove communicating from the lower end portion of the bolt hole to the side surface of the pedestal is used. The risk of interference with the removal of grinding waste can be avoided.
さらに、 平面研磨装置のラッピング定盤に凹部を配設し、 台座のラッピング定 盤に螺着する側に該凹部と嵌合する凸部を設けることにより、 台座の剛性が高ま り、 台座とラッピング定盤のセッ 卜が容易に行えるので、 台座をラッピング定盤 をボル卜で固着する時の位置合わせに手間取ることがなく、 作業時間の短縮にも つながるのである。  Furthermore, by providing a concave portion on the lapping plate of the flat surface polishing apparatus and providing a convex portion that fits into the concave portion on the side of the pedestal that is screwed to the lapping plate, the rigidity of the pedestal increases, Since the lapping plate can be easily set, there is no need to take time to align the pedestal when the lapping plate is fixed to the lapping plate with a bolt, leading to a reduction in work time.
また、 研磨作業時に発生する研磨屑を含む研磨液等を排出する排出溝を、 台座 の砥石に固着する側の裏面に設けることにより、 排出される研磨液や研磨屑が砥 石に再び吸着されることがなくなるので、 研磨状態が変わることがない。 さらに 、 台座のサイズが大きく、 排出溝を多く配設する場合、 該排出溝が砥石の台座に 固着する側にあると、 砥石と台座を固着する時の接着作業において、 接着剤の塗 布がやりづらいという問題も解消されるのである。  In addition, by providing a discharge groove on the back of the pedestal on the side to be fixed to the grindstone, the discharged polishing liquid and grindstone are again adsorbed to the grindstone by providing a discharge groove for discharging the polishing fluid containing the polishing grime generated during the polishing operation. The polishing condition is not changed. Furthermore, in the case where the pedestal is large and a large number of discharge grooves are provided, if the discharge groove is on the side fixed to the pedestal of the grindstone, the application of the adhesive during the bonding operation when the grindstone and the pedestal are fixed is performed. The problem of difficulty is solved.
また、 台座をアルミニウム製とすることで、 軽量な台座とすることができ、 精 密研磨に不可欠な砥石表面のドレッシングの際、 砥石および台座の取り外し、 取 付けが容易に行える。 図面の簡単な説明  In addition, by making the pedestal of aluminum, a lightweight pedestal can be used, and the dressing and removal of the whetstone and the pedestal can be easily performed when dressing the whetstone surface which is indispensable for precise polishing. BRIEF DESCRIPTION OF THE FIGURES
図 1は、 本発明における溝付き台座を備えた平面研磨装置の作用面の一実施例 を示す外観説明図である。 FIG. 1 shows an embodiment of the working surface of a flat-surface polishing apparatus provided with a grooved base according to the present invention. FIG.
また、 図 2は、 係る溝付き台座を介して砥石を定盤に取り付けた際の外観説明 図であり、 図 3は図 2の要部の断面図、 図 4は図 2の台座の説明図である。 また、 図 5は、 本発明の溝付き台座の溝形状の一変形例を示す説明図である。 また、 図 6は、 本発明における他の実施例における溝付き台座を備えた平面研 磨装置の一実施例を示す外観説明図であり、 図 7は図 6の要部の断面図である。 また、 図 8は、 本発明に係る他の実施例における溝付き台座を備えた平面研磨 装置の一実施例を示す外観説明図であり、 図 9は図 8の要部の断面図、 図 1 0は 図 8の溝形状を示す説明図であり、 図 1 1は図 8の台座の切り込み部の作用の説 明図である。 発明を実施するための最良の形態  Fig. 2 is an external view of a whetstone mounted on a surface plate through the grooved pedestal. Fig. 3 is a cross-sectional view of a main part of Fig. 2, and Fig. 4 is an explanatory view of the pedestal of Fig. 2. It is. FIG. 5 is an explanatory view showing a modification of the groove shape of the grooved base of the present invention. FIG. 6 is an external explanatory view showing one embodiment of a planar polishing apparatus provided with a grooved pedestal according to another embodiment of the present invention, and FIG. 7 is a sectional view of a main part of FIG. FIG. 8 is an external view showing an embodiment of a planar polishing apparatus provided with a grooved pedestal according to another embodiment of the present invention. FIG. 9 is a cross-sectional view of a main part of FIG. 0 is an explanatory view showing the groove shape in FIG. 8, and FIG. 11 is an explanatory view of the action of the cut portion of the pedestal in FIG. BEST MODE FOR CARRYING OUT THE INVENTION
以下、 本発明の実施の形態につき添付図面に基づいて説明する。  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.
図 1は本発明に係る砥石を備えた平面研磨装置の研磨作用面の一例を示す説 明図であり、 図 2は、 本発明に係る台座を介して砥石を定盤に取り付けた際の外 観説明図、 図 3は図 2の要部の断面図であり、 図 4は台座の説明図である。 ここ で、 台座はアルミニウム製であり、 ラッピング定盤は鋼鉄製である。  FIG. 1 is an explanatory view showing an example of a polishing surface of a flat polishing apparatus provided with a grindstone according to the present invention, and FIG. 2 is an external view when the grindstone is mounted on a surface plate via a pedestal according to the present invention. FIG. 3 is a sectional view of a main part of FIG. 2, and FIG. 4 is an explanatory view of a pedestal. Here, the pedestal is made of aluminum and the lapping plate is made of steel.
図 1に示すように、 本発明に係る平面研磨装置は、 回転性能を備えた定盤 1に 台座 2を介して所定の形状をした砥石 3を取り付け研磨作用面が形成されている 図 2、 図 3に示すように、 砥石 3にはボルト揷通孔 4を、 台座にはボルト締付 孔 5をそれぞれ穿孔している。 砥石 3を接着剤により台座 2に固着し、 また、 台 座 2はボルト 7で定盤 1に螺着している。 台座 2には、 砥石 3と固着する側の面 に、 ボルト揷通孔 4の下端部から台座 2の側面へ連通する溝 6が設けられ、 この 溝 6と砥石 3とでボルト揷通孔 4から研磨廃液を排出するための排出孔 8が形成 されている。  As shown in FIG. 1, the planar polishing apparatus according to the present invention is configured such that a grindstone 3 having a predetermined shape is attached to a surface plate 1 having a rotating performance via a pedestal 2 to form a polishing action surface. As shown in FIG. 3, a bolt hole 4 is formed in the grindstone 3 and a bolt tightening hole 5 is formed in the pedestal. The grindstone 3 is fixed to the pedestal 2 with an adhesive, and the pedestal 2 is screwed to the surface plate 1 with bolts 7. The pedestal 2 is provided with a groove 6 communicating from the lower end of the bolt hole 4 to the side surface of the pedestal 2 on the surface to be fixed to the grindstone 3. There is formed a discharge hole 8 for discharging polishing waste liquid from the substrate.
また、 図 4に示すように溝 6はボルト揷通孔 4の下端部で円形状に刻設し、 図 3に示すようにボルト挿通孔 4の直径をボル卜 7の直径より大きく している。 こ れにより、 ボルト揷通孔 4に流れ込む廃液を円滑に排出することができる。 ここ で、 ボルト 7の頭部の厚みが厚い場合には、 ボルト締付孔 5に座ぐり部を設ける こともできる。 Also, as shown in FIG. 4, the groove 6 is engraved in a circular shape at the lower end of the bolt 揷 through hole 4, and the diameter of the bolt insertion hole 4 is larger than the diameter of the bolt 7, as shown in FIG. . As a result, the waste liquid flowing into the bolt hole 4 can be smoothly discharged. here When the head of the bolt 7 is thick, a counterbore portion can be provided in the bolt tightening hole 5.
図 5は本発明の溝付き台座の他の例を示す外観説明図であり、 溝 6を設ける方 向を、 定盤の径方向に対して、 図 5 ( a ) では 4 5度、 そして （b ) では 9 0度 の角度を持たせている。  FIG. 5 is an external view illustrating another example of the grooved pedestal according to the present invention. The direction in which the groove 6 is provided is 45 degrees with respect to the radial direction of the platen in FIG. b) has an angle of 90 degrees.
図 6は本発明に係る他の例における台座を介して砥石を定盤に取り付けた際の 外観説明図である。 また、 この例における台座 1 2の溝形状は、 図 5 ( b ) と同 様である。  FIG. 6 is an explanatory view of the appearance when a grindstone is mounted on a surface plate via a pedestal in another example according to the present invention. Further, the groove shape of the pedestal 12 in this example is the same as that of FIG. 5 (b).
図 7は図 6の定盤の要部の断面図である。  FIG. 7 is a sectional view of a main part of the surface plate of FIG.
図 6、 図 7に示すように、 台座 1 2の定盤 1 1に接する側に凸部 9を設け、 該 凸部 9を溝 1 6に対応する位置に設けると共に、 該凸部を嵌合する凹部 1 0を定 盤に設けている。 該凸部 9の幅は、 溝 1 6の幅より大きく している。  As shown in FIGS. 6 and 7, a protrusion 9 is provided on the side of the pedestal 12 in contact with the surface plate 11, and the protrusion 9 is provided at a position corresponding to the groove 16, and the protrusion is fitted. A recess 10 is provided on the surface plate. The width of the projection 9 is larger than the width of the groove 16.
図 8は本発明に係る他の例における台座を介して砥石を定盤に取り付けた際の 外観説明図である。  FIG. 8 is an explanatory view of an external appearance when a grindstone is attached to a surface plate via a pedestal in another example according to the present invention.
、 図 9は図 8の要部の断面図である。 FIG. 9 is a sectional view of a main part of FIG.
図 8、 図 9に示すように、 この例においては、 台座 2 2には、 定盤 1 と接する 側の面に、 ボルト揷通孔 4の下端部から台座 2の側面へ連通する溝 2 6を設け、 この溝 2 6と定盤 1 とでボルト揷通孔 4から研磨廃液を排出するための排出孔 2 8が形成されている。  As shown in FIGS. 8 and 9, in this example, the pedestal 22 has a groove 2 6 communicating from the lower end of the bolt 揷 through hole 4 to the side surface of the pedestal 2 on the surface in contact with the surface plate 1. A drain hole 28 for discharging the polishing waste liquid from the bolt hole 4 is formed by the groove 26 and the platen 1.
図 1 0は図 8の台座の切り込み部の説明図である。  FIG. 10 is an explanatory diagram of a cut portion of the pedestal in FIG.
切り込み部 2 7はボルト揷通孔 4の下端部で十文字状に刻設され、 ボルト揷通 孔 4に流れ込む廃液を円滑に排出することができるようにしている。  The cut portion 27 is formed in a cross shape at the lower end of the bolt hole 4 so that the waste liquid flowing into the bolt hole 4 can be discharged smoothly.
また、 十文字の中心にはボルトが挿通できる円形の切り込みを設け、 十文字状 の刻設とあわせて、 切り込み部 2 7を形成している。  At the center of the cross, there is provided a circular cut through which a bolt can be inserted, and together with the cross-shaped notch, a cut 27 is formed.
図 1 1は台座の切り込み部の作用の説明図である。  FIG. 11 is an explanatory view of the operation of the cut portion of the pedestal.
台座 2 2のボルト揷通孔 4の下端部の位置にある、 切り込み部 2 7で、 溝 2 6 と通じるようにしている。 これにより、 図 1 1に示すように廃液がボルト挿通孔 4から溝 2 6に流れ込むのである。 産業上の利用可能性 The notch 27 located at the lower end of the bolt 揷 through hole 4 of the pedestal 22 communicates with the groove 26. As a result, the waste liquid flows into the groove 26 from the bolt insertion hole 4 as shown in FIG. Industrial applicability
本発明に係る溝付き台座を適用した平面研磨装置によれば、 良好な研磨作用が 長時間持続することとなり、 さらに、 従来の砥石側孔を穿孔して得られたものに 比べ、 砥石の無駄が少なく経済的であり、 砥石の耐用時間を延ばすことができ、 作業性が向上することとなる。  According to the planar polishing apparatus using the grooved pedestal according to the present invention, a favorable polishing action is maintained for a long time, and further, the waste of the grinding wheel is reduced as compared with the conventional one obtained by drilling the hole on the grinding wheel side. It is economical because it is less, and the service life of the grindstone can be extended, and the workability is improved.
また、 本発明の溝付き台座を平面研磨装置に用いれば、 研磨作業は著しく向上 するものである。 即ち廃液の汚染が少なくなると共に、 砥石表面の目づまり現象 が回避されドレッシング回数が現象し、 さらには滞留した液が一部凝集し、 その 小片が研磨面に入り込むことによって生じるスクラッチ （条痕） 等の現象が回避 されるという好ましい効果が得られるものである。  Also, if the grooved pedestal of the present invention is used in a planar polishing apparatus, the polishing operation can be remarkably improved. In other words, the contamination of the waste liquid is reduced, the clogging phenomenon on the grindstone surface is avoided, the frequency of dressing is reduced, and the remaining liquid is partially agglomerated, and scratches (streaks) caused by small pieces entering the polishing surface are caused. A favorable effect of avoiding such phenomena can be obtained.
従って、 本発明に係る平面研磨装置を使用すれば研磨作業における不良品の発 生率は減少し且つドレツシング作業の回数が減る事により作業効率と装置稼働率 とが共に向上するものである。  Therefore, the use of the planar polishing apparatus according to the present invention reduces the incidence of defective products in the polishing operation and reduces the number of dressing operations, thereby improving both the operation efficiency and the operation rate of the apparatus.

Claims

請 求 の 範 囲 The scope of the claims
1 . ボルト揷通孔を穿設した複数の砥石を、 その作用面が同一平面を形成する様 に台座を介してラッピング定盤に配設してなる平面研磨装置において、 1. In a flat grinding machine in which a plurality of grinding stones with bolt through holes are arranged on a lapping platen via a pedestal so that their working surfaces form the same plane,
前記台座の砥石を固着する側の面に、  On the surface of the pedestal to which the whetstone is fixed,
ボルト揷通孔の下端部と台座の側面に連通する溝を刻設し、 該溝と砥石によつ て研磨液および Zまたはクーラン卜の排出孔を形成したことを特徴とする平面研  A flat surface grinding machine characterized by forming a groove communicating with the lower end of the bolt 孔 through hole and the side surface of the pedestal, and forming a discharge hole for the polishing liquid and Z or coolant with the groove and the grindstone.
2 . 台座に設けたボルト締付孔に、 ボルトの頭部が前記台座の上面に出ない深さ を有する座ぐり部を設けたことを特徴とする請求の範囲第 1項記載の平面研磨装 2. The flat polishing apparatus according to claim 1, wherein a counterbore portion having a depth such that a head portion of the bolt does not protrude from the upper surface of the pedestal is provided in a bolt tightening hole provided in the pedestal.
3 . 溝が、 ボルト揷通孔の下端部でボルトを中心とする円形状をなし、 且つボル ト揷通孔の直径がボルトの頭部の直径以上であることを特徴とする請求の範囲第 1項または第 2項記載の平面研磨装置。 3. The groove, wherein the groove has a circular shape centered on the bolt at the lower end of the bolt through hole, and the diameter of the bolt through hole is larger than the diameter of the head of the bolt. Item 3. The planar polishing apparatus according to Item 1 or 2.
4 . 台座のラッピング定盤に螺着する側に凸部を設けるとともにラッピング定盤 には該凸部を嵌合する凹部を設けることを特徴とする請求の範囲第 1項〜第 3項 のいずれかに記載の平面研磨装置。  4. The pedestal according to any one of claims 1 to 3, wherein a convex portion is provided on a side of the pedestal that is screwed to the lapping surface plate, and the lapping surface plate is provided with a concave portion for fitting the convex portion. A planar polishing apparatus according to any one of the above.
5 . ボルト揷通孔を穿設した複数の砥石を、 その作用面が同一平面を形成する様 に台座を介してラッピング定盤に配設してなる平面研磨装置において、  5. In a flat grinding machine in which a plurality of grindstones having drilled bolt holes are arranged on a lapping platen via a pedestal so that their working surfaces form the same plane,
前記台座の前記ボルト揷通孔の下端部に対応する位置に、 切り込みを設け、 且つ、 前記台座の砥石を固着する側の裏面に、 前記切り込みを通して、  A notch is provided at a position corresponding to the lower end of the bolt hole of the pedestal, and on the back surface of the pedestal to which the grindstone is fixed, through the notch,
ボルト揷通孔の下端部と台座の側面に連通する溝を刻設し、 該溝と前記ラッピ ング定盤によつて研磨液等の排出孔を形成したことを特徴とする平面研磨装置。 A flat polishing apparatus, characterized in that a groove communicating with the lower end of the bolt-through hole and the side surface of the pedestal is formed, and a discharge hole for a polishing liquid or the like is formed by the groove and the lapping platen.
6 . 平面研磨装置が被研磨体を精密研磨する際に用いられるものであって、 且つ 台座がアルミニゥム製であることを特徴とする請求の範囲第 1項〜第 5項のいず れかに記載の平面研磨装置。 補正書の請求の範囲 6. The method according to any one of claims 1 to 5, wherein the surface polishing apparatus is used for precisely polishing the object to be polished, and the pedestal is made of aluminum. The planar polishing apparatus as described in the above. Claims of amendment
[ 1 9 9 8年 3月 6日 （0 6 . 0 3 . 9 8 ) 国際事務局受理：出願当初の請求の範囲 1は補正され た；他の請求の範囲は変更なし。 （ 1頁） ]  [March 6, 1998 (06.0.9.8) Accepted by the International Bureau: Claim 1 at the time of filing was amended; other claims remained unchanged. (1 page)]
1 . (補正後） ボルト揷通孔を穿設した複数の砥石を、 その作用面が同一平面を 形成する様に台座を介してラッピング定盤に配設してなる平面研磨装置において 前記台座の砥石を固着する側の面に、  1. (After correction) In a flat-surface polishing apparatus in which a plurality of grindstones each having a bolt through hole are arranged on a lapping surface plate via a pedestal so that their working surfaces form the same plane, On the side where the whetstone is fixed,
ボルト揷通孔の下端部と台座の側面に連通する溝を刻設し、 該溝と砥石によつ て研磨液および/またはク一ラン卜の排出孔を形成し、  A groove communicating with the lower end of the bolt 揷 through hole and the side surface of the pedestal is formed, and a discharge hole for the polishing liquid and / or the coolant is formed by the groove and the grindstone.
該排出孔の断面形状を略矩形としたことを特徴とする平面研磨装置。  A planar polishing apparatus, wherein a cross-sectional shape of the discharge hole is substantially rectangular.
2 . 台座に設けたボルト締付孔に、 ボルトの頭部が前記台座の上面に出ない深さ を有する座ぐり部を設けたことを特徴とする請求の範囲第 1項記載の平面研磨装 置。  2. The flat polishing apparatus according to claim 1, wherein a counterbore portion having a depth such that a head portion of the bolt does not protrude from the upper surface of the pedestal is provided in a bolt tightening hole provided in the pedestal. Place.
3 . 溝が、 ボル卜揷通孔の下端部でボルトを中心とする円形状をなし、 且つボル ト揷通孔の直径がボルトの頭部の直径以上であることを特徴とする請求の範囲第 1項または第 2項記載の平面研磨装置。  3. The groove has a circular shape centered on the bolt at the lower end of the bolt hole, and the diameter of the bolt hole is greater than the diameter of the head of the bolt. Item 3. The planar polishing device according to Item 1 or 2.
4 . 台座のラッピング定盤に螺着する側に凸部を設けるとともにラッピング定盤 には該凸部を嵌合する凹部を設けることを特徴とする請求の範囲第 1項〜第 3項 のいずれかに記載の平面研磨装置。  4. The pedestal according to any one of claims 1 to 3, wherein a convex portion is provided on a side of the pedestal that is screwed to the lapping surface plate, and the lapping surface plate is provided with a concave portion for fitting the convex portion. A planar polishing apparatus according to any one of the above.
5 . ボルト揷通孔を穿設した複数の砥石を、 その作用面が同一平面を形成する様 に台座を介してラッピング定盤に配設してなる平面研磨装置において、  5. In a flat grinding machine in which a plurality of grindstones having drilled bolt holes are arranged on a lapping platen via a pedestal so that their working surfaces form the same plane,
前記台座の前記ボルト揷通孔の下端部に対応する位置に、 切り込みを設け、 且つ、 前記台座の砥石を固着する側の裏面に、 前記切り込みを通して、  A notch is provided at a position corresponding to the lower end of the bolt hole of the pedestal, and on the back surface of the pedestal to which the grindstone is fixed, through the notch,
ボルト揷通孔の下端部と台座の側面に連通する溝を刻設し、 該溝と前記ラッピ ング定盤によつて研磨液等の排出孔を形成したことを特徴とする平面研磨装置。 A flat polishing apparatus, characterized in that a groove communicating with the lower end of the bolt-through hole and the side surface of the pedestal is formed, and a discharge hole for a polishing liquid or the like is formed by the groove and the lapping platen.
6 . 平面研磨装置が被研磨体を精密研磨する際に用いられるものであって、 且つ 台座がアルミ二ゥム製であることを特徴とする請求の範囲第 1項〜第 5項のいず れかに記載の平面研磨装置。 6. The method according to any one of claims 1 to 5, wherein the flat-surface polishing apparatus is used for precisely polishing an object to be polished, and the pedestal is made of aluminum. A planar polishing apparatus according to any one of the preceding claims.
補正された用紙 (条約第 19条) Amended paper (Article 19 of the Convention)
PCT/JP1997/003717 1996-10-18 1997-10-15 Surface polishing apparatus WO1998017438A1 (en)

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JP29750996 1996-10-18
JP8/297509 1996-10-18

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002032624A1 (en) * 2000-10-20 2002-04-25 H K Founders Ltd Segmented wafer polishing pad
EP1321233A1 (en) * 2001-12-12 2003-06-25 Gerätebau Wiedtal Schützeichel KG Grinding tool
US20150328746A1 (en) * 2012-11-16 2015-11-19 Hilti Aktiengesellschaft Processing disk for processing a substrate

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JPH02139063U (en) * 1989-04-25 1990-11-20

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JPH02139063U (en) * 1989-04-25 1990-11-20

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MICROFILM OF JAPANESE UTILITY MODEL, Application No. 9175/1990 (Laid-Open No. 100070/1991) (KANEBO, LTD.), (18-10-91). *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002032624A1 (en) * 2000-10-20 2002-04-25 H K Founders Ltd Segmented wafer polishing pad
EP1321233A1 (en) * 2001-12-12 2003-06-25 Gerätebau Wiedtal Schützeichel KG Grinding tool
US20150328746A1 (en) * 2012-11-16 2015-11-19 Hilti Aktiengesellschaft Processing disk for processing a substrate

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