WO1995008721A1 - Uses of microspheres and microspheroids made of diamond, cbn or structured ceramic materials in micromechanics, sensor and medical technology, tribology and related fields - Google Patents

Uses of microspheres and microspheroids made of diamond, cbn or structured ceramic materials in micromechanics, sensor and medical technology, tribology and related fields Download PDF

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Publication number
WO1995008721A1
WO1995008721A1 PCT/EP1994/003115 EP9403115W WO9508721A1 WO 1995008721 A1 WO1995008721 A1 WO 1995008721A1 EP 9403115 W EP9403115 W EP 9403115W WO 9508721 A1 WO9508721 A1 WO 9508721A1
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diamond
cbn
micromechanics
spheroids
related fields
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PCT/EP1994/003115
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German (de)
French (fr)
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Peter Rolf BÜRKI
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Buerki Peter Rolf
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Priority to AU78082/94A priority Critical patent/AU7808294A/en
Publication of WO1995008721A1 publication Critical patent/WO1995008721A1/en

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/02—Parts of sliding-contact bearings
    • F16C33/04—Brasses; Bushes; Linings
    • F16C33/043—Sliding surface consisting mainly of ceramics, cermets or hard carbon, e.g. diamond like carbon [DLC]
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
    • C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
    • C04B35/583—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on boron nitride
    • C04B35/5831—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on boron nitride based on cubic boron nitrides or Wurtzitic boron nitrides, including crystal structure transformation of powder
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M103/00—Lubricating compositions characterised by the base-material being an inorganic material
    • C10M103/06—Metal compounds
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N1/00—Sampling; Preparing specimens for investigation
    • G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/06—Metal compounds
    • C10M2201/061—Carbides; Hydrides; Nitrides
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/16—Carbon dioxide
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10M—LUBRICATING COMPOSITIONS; USE OF CHEMICAL SUBSTANCES EITHER ALONE OR AS LUBRICATING INGREDIENTS IN A LUBRICATING COMPOSITION
    • C10M2201/00—Inorganic compounds or elements as ingredients in lubricant compositions
    • C10M2201/18—Ammonia
    • C—CHEMISTRY; METALLURGY
    • C10—PETROLEUM, GAS OR COKE INDUSTRIES; TECHNICAL GASES CONTAINING CARBON MONOXIDE; FUELS; LUBRICANTS; PEAT
    • C10N—INDEXING SCHEME ASSOCIATED WITH SUBCLASS C10M RELATING TO LUBRICATING COMPOSITIONS
    • C10N2040/00—Specified use or application for which the lubricating composition is intended
    • C10N2040/02—Bearings
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00—Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N2035/00178—Special arrangements of analysers
    • G01N2035/00237—Handling microquantities of analyte, e.g. microvalves, capillary networks

Definitions

  • the invention relates to the field of micromechanics, microelectromechanics, sensor and medical technology, tribology and related fields.
  • micromechanics microelectromechanics
  • sensor and medical technology tribology and related fields.
  • tribology tribology and related fields.
  • balls and spheroids made of diamond or cubic boron nitride (CBN) are ideally suited for applications in these areas, such as the smallest ball bearings, low-friction and low-wear sliding surfaces, ball valves, valves, pumps, pistons and syringes with diameters from a few micrometers down to the submicrometer range.
  • CBN cubic boron nitride
  • Micro ball bearings and sliding surfaces made of diamond or CBN microspheres (cluster diamond, cluster CBN) and frames made of CVD diamond (Chemical Vapor Deposition) or similar materials ideally meet these high requirements. This also applies to other applications in the
  • spherical diamond grains which have been produced, for example, by pyrolysis of hydrocarbons (e.g. CO 2 laser-induced pyrolysis of C2H4), are made from CVD diamond in frames a lithographic process (eg photo, X-ray, electron beam lithography) were used.
  • lithographic process eg photo, X-ray, electron beam lithography
  • low-friction and low-wear sliding surfaces are produced by the combination of submicron-sized, spherical diamond grains with surfaces coated with CVD diamond.
  • spherical or spheroidal diamond grains which have been produced, for example, by pyrolysis of hydrocarbons (e.g. C02 laser-induced pyrolysis of C2H4), are used in unchanged or reworked form (E.g. drilling through laser drilling) used in bodies made of structural ceramic materials or diamond.
  • Pistons and syringes are manufactured by combining microtubes with diameters significantly less than 1 mm (e.g. the recently developed carbon nanotubes) with microspheres or spheroids made of diamond, cubic boron nitride (CBN) or structural ceramic materials.
  • Ultra-precise micro syringes for volumes from 1 ⁇ l down to 1 al (1 10 -18 1) are obtained by combining microtubes with pistons made of spheres or spheroids, which are moved with the aid of a stepper motor.

Abstract

Spherical or spheroid grains made of diamond, cubic boron nitride (CBN) or structured ceramic materials are used to produce structural elements and components in micromechanics, microelectromechanics, sensor and medical technology, tribology and related fields, for example to produce ball bearings, low abrasion and low attrition sliding surfaces, ball or globe valves, submillimetric pumps and micropumps, micropumps for feeding the smallest amounts of gasses, powders or liquids and for producing micropistons, as well as highly accurate microsyringes for injecting volumes from 1 νl down to 1 al(1.10-181).

Description

Beschreibungdescription
Anwendungen von Mikrokugeln und -Sphäroiden ausApplications from microspheres and spheroids
Diamant, CBN oder strukturkeramischen Werkstoffen in der Mikromechanik, Sensor- und Medizinaltechnik, Tribologie und verwandten GebietenDiamond, CBN or structural ceramic materials in micromechanics, sensor and medical technology, tribology and related fields
Die Erfindung bezieht sich auf das Gebiet der Mikromechanik, Mikroelektromechanik, Sensor- und Medizinaltechnik, Tribologie und verwandte Gebiete. Im Zuge fortschreitender Miniaturisierung von bestehenden Produkten in den Submillimeter- und Submikrometerbereich in Analogie zur Mikroelektronik ist die Entwicklung von neuen, miniaturisierten Strukturelementen und Bauteilen ein dringendes Bedürfnis im Hinblick auf den Fortschritt der Forschung in diesen Gebieten wie auch zur Herstellung neuartiger Produkte. Bis heute konnten jedoch viele Schlüsselkomponenten noch nicht entwickelt werden, da geeignete Mikrokugeln aus geeigneten, ultraharten und chemisch inerten Materialien fehlten.The invention relates to the field of micromechanics, microelectromechanics, sensor and medical technology, tribology and related fields. In the course of advancing miniaturization of existing products in the submillimeter and submicrometer range in analogy to microelectronics, the development of new, miniaturized structural elements and components is an urgent need with regard to the progress of research in these areas as well as for the production of new products. To date, however, many key components have not yet been developed due to the lack of suitable microspheres made of suitable, ultra-hard and chemically inert materials.
Dank der seit kurzer Zeit bestehenden Verfügbarkeit von kleinsten (Durchmesser 0.01 — 100 μm) Kügelchen und Sphäroiden aus Diamant (cluster diamond) und andern strakturkeramischen Werkstoffen (Metall und Nichtmetall-Oxide, -Nitride, -Karbide, - Silicide, -Boride, Mischkeramiken, wie zum Beispiel Oxinitride und Nitrid-karbide, und Kompositkeramiken, z.B. fasernverstärkte Keramiken), wird der Stand der Technik in diesen Gebieten wesentlich verbessert. Wegen seiner Härte und chemischen Inertheit sind Kugeln und Sphäroide aus Diamant oder kubischem Bornitrid (CBN) optimal geeignet für Anwendungen auf diesen Gebieten, wie kleinste Kugellager, reibungs- und verschleissarme Gleitflächen, Kugel- Ventile, -Hähne, Pumpen, Kolben und Spritzen mit Durchmessern von einigen Mikrometern bis hinunter in den Submikrometerbereich.Thanks to the recent availability of the smallest (diameter 0.01 - 100 μm) spheres and spheroids made of diamond (cluster diamond) and other structural ceramic materials (metal and non-metal oxides, nitrides, carbides, silicides, borides, mixed ceramics, such as, for example, oxynitrides and nitride carbides, and composite ceramics, for example fiber-reinforced ceramics), the state of the art in these areas is significantly improved. Because of its hardness and chemical inertness, balls and spheroids made of diamond or cubic boron nitride (CBN) are ideally suited for applications in these areas, such as the smallest ball bearings, low-friction and low-wear sliding surfaces, ball valves, valves, pumps, pistons and syringes with diameters from a few micrometers down to the submicrometer range.
Da Mikrobauteile hohen mechanischen, thermischen und chemischen Belastungen ausgesetzt sind, sind harte, dauerhafte, belastbare und chemisch inerte Werkstoffe unabdingbar. Jede Art von Verschleiss würde in diesem Grössenordnungsbereich die Betriebsdauer drastisch verkürzen. Mikrokugellager und -gleitflächen aus Diamant¬ oder CBN-Mikrokugeln (cluster diamond, cluster CBN) und Fassungen aus CVD- Diamant (Chemical Vapour Deposition) oder ähnlichen Materialien erfüllen diese hohen Anforderungen in idealer Weise. Dies gilt auch für andere Anwendungen in derSince microcomponents are exposed to high mechanical, thermal and chemical loads, hard, durable, resilient and chemically inert materials are essential. Any type of wear would drastically shorten the operating time in this range. Micro ball bearings and sliding surfaces made of diamond or CBN microspheres (cluster diamond, cluster CBN) and frames made of CVD diamond (Chemical Vapor Deposition) or similar materials ideally meet these high requirements. This also applies to other applications in the
OR/GINAL UNTERLAGEN Sensor- und Medizinaltechnik und verwandten Gebieten, z.B. Mikrokugelventile, und - hähne, Mirkopumpen für gasförmige, flüssige oder pulvrige Medien, Mikrokolben und -spritzen.OR / GINAL DOCUMENTS Sensor and medical technology and related fields, such as microsphere valves and taps, micro pumps for gaseous, liquid or powdery media, micro pistons and syringes.
Ausführungsbeispiel 1Embodiment 1
Für die Herstellung von Diamant-Kugellagern im Grössenbereich von einigen Mikrometern bis unterhalb 1 μm werden sphärische Diamantkörner, die beispielsweise durch Pyrolyse von Kohlenwasserstoffen (Bsp. Cθ2-Laser induzierte Pyrolyse von C2H4) hergestellt wurden, in Fassungen aus CVD-Diamant, die mit Hilfe eines lithographischen Verfahrens (z.B. Photo-, Röntgen, Elektronenstrahllitliographie) hergestellt wurden, eingesetzt. Analog werden reibungs- und verschleissarme Gleitflächen durch die Kombination von submikrometergrossen, sphärischen Diamantkörnern mit mit CVD-Diamant beschichteten Oberflächen hergestellt.For the production of diamond ball bearings in the size range from a few micrometers to below 1 μm, spherical diamond grains, which have been produced, for example, by pyrolysis of hydrocarbons (e.g. CO 2 laser-induced pyrolysis of C2H4), are made from CVD diamond in frames a lithographic process (eg photo, X-ray, electron beam lithography) were used. Analogously, low-friction and low-wear sliding surfaces are produced by the combination of submicron-sized, spherical diamond grains with surfaces coated with CVD diamond.
Ausfuhrungsbeispiel 2Exemplary embodiment 2
Für die Herstellung von Kugelventilen und -hähnen und Pumpen im Grössenbereich von einigen Mikrometern bis unterhalb 1 μm werden sphärische oder sphäroidische Diamantkörner, die beispielsweise durch Pyrolyse von Kohlenwasserstoffen (Bsp. Cθ2-Laser induzierte Pyrolyse von C2H4) hergestellt wurden, in unveränderter oder nachbearbeiteter Form (Bsp. Durchbohrung durch Laserdrilling) in Körper aus strukturkeramischen Werkstoffen oder Diamant eingesetzt.For the manufacture of ball valves and valves and pumps in the size range from a few micrometers to less than 1 μm, spherical or spheroidal diamond grains, which have been produced, for example, by pyrolysis of hydrocarbons (e.g. C02 laser-induced pyrolysis of C2H4), are used in unchanged or reworked form (E.g. drilling through laser drilling) used in bodies made of structural ceramic materials or diamond.
Ausführungsbeispiel 3Embodiment 3
Kolben und Spritzen werden hergestellt, indem Mikroröhrchen mit Durchmessern deutlich unter 1 mm (z.B. die kürzlich entwickelten Kohlenstoff-Nanotubes) mit Mikrokügelchen oder -sphäroiden aus Diamant, kubischem Bornitrid (CBN) oder strukturkeramischen Werkstoffen kombiniert werden. Ultrapräzise Mikrospritzen für Volumina von 1 μl bis hinunter zu 1 al (1 10-18 1) werden erhalten, indem man Mikroröhrchen mit Kolben aus Kugeln oder Sphäroiden kombiniert, die mit Hilfe eines Steppermotors bewegt werden. Pistons and syringes are manufactured by combining microtubes with diameters significantly less than 1 mm (e.g. the recently developed carbon nanotubes) with microspheres or spheroids made of diamond, cubic boron nitride (CBN) or structural ceramic materials. Ultra-precise micro syringes for volumes from 1 μl down to 1 al (1 10 -18 1) are obtained by combining microtubes with pistons made of spheres or spheroids, which are moved with the aid of a stepper motor.

Claims

Patentansprüche claims
1. Verwendung von submillimetergrossen Kugeln oder Sphäroiden aus Diamant, kubischem Bornitrid (CBN) oder strukturkeramischen Werkstoffen zum Bau von Strukturelementen, die in der Mikromechanik, Mikroelektromechanik, Sensor- und Medizinaltechnik, Tribologie und verwandten Gebieten verwendet werden können, dadurch gekennzeichnet, dass submillimetergrosse Kugeln oder Sphäroide aus den genannten Werkstoffen wesentlicher Bestandteil dieser Strukturelemente sind.1. Use of submillimeter-sized spheres or spheroids made of diamond, cubic boron nitride (CBN) or structural ceramic materials for the construction of structural elements that can be used in micromechanics, microelectromechanics, sensor and medical technology, tribology and related fields, characterized in that sub-millimeter-sized spheres or spheroids made of the materials mentioned are an essential part of these structural elements.
2. Verwendung von nachbearbeiteten, submillimetergrossen Kugeln oder Sphäroiden aus Diamant, kubischem Bornitrid (CBN) oder strukturkeramischen Werkstoffen zum Bau von Strukturelementen, die in der Mikromechanik, Mikroelektromechanik, Sensor- und Medizinaltechnik, Tribologie und verwandten Gebieten verwendet werden können, dadurch gekennzeichnet, dass Bauteile aus nach der Synthese in irgend einer Weise modifizierten, submillimetergrossen Kugeln oder Sphäroiden aus den genannten Werkstoffen wesentlicher Bestandteil dieser Strukturelemente sind.2. Use of reworked, submillimeter-sized spheres or spheroids made of diamond, cubic boron nitride (CBN) or structural ceramic materials for the construction of structural elements that can be used in micromechanics, microelectromechanics, sensor and medical technology, tribology and related fields, characterized in that Components made from sub-millimeter-sized spheres or spheroids made of the materials mentioned and modified in any way after synthesis are an integral part of these structural elements.
3. Submillimetergrosse Kugellager für Anwendungen in der Mikromechanik, Mikroelektromechanik, Sensor- und Medizinaltechnik und verwandten Gebieten, die Kugeln oder Sphäroide mit Durchmessern unter 1 mm aus Diamant, kubischem Bornitrid (CBN) oder strukturkeramischen Werkstoffen enthalten.3. Submillimeter-sized ball bearings for applications in micromechanics, microelectromechanics, sensor and medical technology and related fields, which contain balls or spheroids with diameters under 1 mm made of diamond, cubic boron nitride (CBN) or structural ceramic materials.
4. Submillimetergrosse Kugelventile oder Kugelhähne für Anwendungen in der Mikromechanik, Mikroelektromechanik, Sensor- und Medizinaltechnik und verwandten Gebieten, die Kugeln oder Sphäroide oder daraus hergestellte Strukturelemente mit Durchmessern unter 1 mm aus Diamant, kubischem Bornitrid (CBN) oder stnikturkeramischen Werkstoffen enthalten.4.Sub-millimeter-sized ball valves or ball valves for applications in micromechanics, microelectromechanics, sensor and medical technology and related fields, which contain balls or spheroids or structural elements made from them with diameters under 1 mm made of diamond, cubic boron nitride (CBN) or ceramic ceramic materials.
5. Submillimetergrosse Pumpen für Anwendungen in der Mikromechanik, Mikroelektromechanik, Sensor- und Medizinaltechnik und verwandten Gebieten, die Kugeln oder Sphäroide oder daraus hergestellte Strukturelemente mit Durchmessern unter 1 mm aus Diamant, kubischem Bornitrid (CBN) oder strukturkeramischen Werkstoffen enthalten. 5. Sub-millimeter-sized pumps for applications in micromechanics, microelectromechanics, sensor and medical technology and related fields, which contain balls or spheroids or structural elements made therefrom with diameters below 1 mm made of diamond, cubic boron nitride (CBN) or structural ceramic materials.
6. Submillimetergrosse Kolben für Anwendungen in der Mikromechanik, Mikroelektromechanik, Sensor- und Medizinaltechnik und verwandten Gebieten, die durch die Kombination von Röhrchen mit einem Innendurchmesser unter 1 mm und Kugeln oder Sphäroiden oder daraus hergestellten Strukturelementen mit Durchmessern unter 1 mm aus Diamant, kubischem Bornitrid (CBN) oder strukturkeramischen Werkstoffen hergestellt wurden.6. Sub-millimeter-sized pistons for applications in micromechanics, microelectromechanics, sensor and medical technology and related fields, which are created by combining tubes with an inner diameter of less than 1 mm and spheres or spheroids or structural elements made from them with diameters of less than 1 mm made of diamond, cubic boron nitride (CBN) or structural ceramic materials.
7. Submillimetergrosse Spritzen mit Volumina im Bereich von 1 μl bis 1 al (1-10-6 1 bis 1 • 10"18 1) für Anwendungen in der Mikromechanik, -Mikroelektromechanik, Sensor- und Medizinaltechnik und verwandten Gebieten, die durch die Kombination von Röhrchen mit einem Innendurchmesser unter 1 mm und Kugeln oder Sphäroiden oder daraus hergestellten Strukturelementen mit Durchmessern unter 1 mm aus Diamant, kubischem Bornitrid (CBN) oder strukturkeramischen Werkstoffen hergestellt wurden.7. Submillimeter-sized syringes with volumes in the range from 1 μl to 1 al (1-10- 6 1 to 1 • 10 " 18 1) for applications in micromechanics, micro-electro-mechanics, sensor and medical technology and related fields, through the combination tubes with an inner diameter of less than 1 mm and spheres or spheroids or structural elements made therefrom with diameters of less than 1 mm made of diamond, cubic boron nitride (CBN) or structural ceramic materials.
8. Verwendung von Kugeln oder Sphäroiden aus Diamant (cluster diamond), kubischem Bornitrid (CBN) oder strukturkeramischen Werkstoffen mit Durchmessern unter 1 μm in der Tribologie und verwandten Gebieten. 8. Use of spheres or spheroids made of diamond (cluster diamond), cubic boron nitride (CBN) or structural ceramic materials with diameters under 1 μm in tribology and related fields.
PCT/EP1994/003115 1993-09-21 1994-09-16 Uses of microspheres and microspheroids made of diamond, cbn or structured ceramic materials in micromechanics, sensor and medical technology, tribology and related fields WO1995008721A1 (en)

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