WO1992016014A3 - Method and apparatus for concave substrates - Google Patents

Method and apparatus for concave substrates Download PDF

Info

Publication number
WO1992016014A3
WO1992016014A3 PCT/US1992/001484 US9201484W WO9216014A3 WO 1992016014 A3 WO1992016014 A3 WO 1992016014A3 US 9201484 W US9201484 W US 9201484W WO 9216014 A3 WO9216014 A3 WO 9216014A3
Authority
WO
WIPO (PCT)
Prior art keywords
concave
deposition material
concave substrates
base
substrate
Prior art date
Application number
PCT/US1992/001484
Other languages
French (fr)
Other versions
WO1992016014A2 (en
Inventor
Thomas M Crook
Theodore J Podgorski
Original Assignee
Honeywell Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Honeywell Inc filed Critical Honeywell Inc
Priority to JP4509669A priority Critical patent/JPH06503209A/en
Publication of WO1992016014A2 publication Critical patent/WO1992016014A2/en
Publication of WO1992016014A3 publication Critical patent/WO1992016014A3/en

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • G02B5/0825—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only
    • G02B5/0833—Multilayer mirrors, i.e. having two or more reflecting layers the reflecting layers comprising dielectric materials only comprising inorganic materials only

Landscapes

  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Physical Vapour Deposition (AREA)
  • Optical Elements Other Than Lenses (AREA)

Abstract

A method of fabricating a deposited concave mirror substrate (40) includes adjusting the background pressure in a vacuum system (3) and interposing a mask (50) between a directed flow of deposition material (60) and a flat base (30) so that the deposition material forms a concave substrate (40) on the base (30).
PCT/US1992/001484 1991-03-07 1992-02-27 Method and apparatus for concave substrates WO1992016014A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4509669A JPH06503209A (en) 1991-03-07 1992-02-27 Method and apparatus for concave substrates

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US66613591A 1991-03-07 1991-03-07
US666,135 1991-03-07

Publications (2)

Publication Number Publication Date
WO1992016014A2 WO1992016014A2 (en) 1992-09-17
WO1992016014A3 true WO1992016014A3 (en) 1992-10-29

Family

ID=24672969

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US1992/001484 WO1992016014A2 (en) 1991-03-07 1992-02-27 Method and apparatus for concave substrates

Country Status (2)

Country Link
JP (1) JPH06503209A (en)
WO (1) WO1992016014A2 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6197164B1 (en) * 1997-10-10 2001-03-06 International Business Machines Corporation Method and apparatus to improve the uniformity of ion beam deposited films in an ion beam sputtering system
US6086727A (en) * 1998-06-05 2000-07-11 International Business Machines Corporation Method and apparatus to improve the properties of ion beam deposited films in an ion beam sputtering system
US6783635B2 (en) 1999-12-09 2004-08-31 International Business Machines Corporation Spin valve sensor free layer structure with a cobalt based layer that promotes magnetic stability and high magnetoresistance
DE102006024068A1 (en) * 2006-05-23 2007-11-29 Oerlikon Leybold Vacuum Gmbh coating plant

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1545890A (en) * 1967-10-05 1968-11-15 Centre Nat Rech Scient Improvements to methods and devices for spraying molecules and to supports coated by the molecules thus projected
GB1265834A (en) * 1969-10-13 1972-03-08
US3900585A (en) * 1972-02-12 1975-08-19 Agency Ind Science Techn Method for control of ionization electrostatic plating
USRE32849E (en) * 1978-04-13 1989-01-31 Litton Systems, Inc. Method for fabricating multi-layer optical films
EP0354195A2 (en) * 1988-08-03 1990-02-07 ENEA-Comitato Nazionale per la Ricerca e per lo Sviluppo dell'Energia Nucleare e delle Energie Alternative Method for producing laser mirrors with radially variable reflectance

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1545890A (en) * 1967-10-05 1968-11-15 Centre Nat Rech Scient Improvements to methods and devices for spraying molecules and to supports coated by the molecules thus projected
GB1265834A (en) * 1969-10-13 1972-03-08
US3900585A (en) * 1972-02-12 1975-08-19 Agency Ind Science Techn Method for control of ionization electrostatic plating
USRE32849E (en) * 1978-04-13 1989-01-31 Litton Systems, Inc. Method for fabricating multi-layer optical films
EP0354195A2 (en) * 1988-08-03 1990-02-07 ENEA-Comitato Nazionale per la Ricerca e per lo Sviluppo dell'Energia Nucleare e delle Energie Alternative Method for producing laser mirrors with radially variable reflectance

Also Published As

Publication number Publication date
WO1992016014A2 (en) 1992-09-17
JPH06503209A (en) 1994-04-07

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