WO1990008327A2 - Interface system for measuring by logic analyser digital signals derived from an integrated circuit - Google Patents
Interface system for measuring by logic analyser digital signals derived from an integrated circuit Download PDFInfo
- Publication number
- WO1990008327A2 WO1990008327A2 PCT/FR1990/000030 FR9000030W WO9008327A2 WO 1990008327 A2 WO1990008327 A2 WO 1990008327A2 FR 9000030 W FR9000030 W FR 9000030W WO 9008327 A2 WO9008327 A2 WO 9008327A2
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- circuit
- interface system
- probe
- drawer
- digital signals
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/04—Housings; Supporting members; Arrangements of terminals
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
- G01D11/30—Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
- G01D11/305—Panel mounting of instruments
Definitions
- the present invention relates to an interface system for very high frequency measurement of the output signals of a digital integrated circuit, by means of a logic analyzer.
- the logic analyzers available on the instrumentation market are perfectly suited to the analysis of digital signals in relatively simple cases: few input channels, measured directly, and at relatively low frequencies: from 20 to 70 MHz, because the clock and the sampler-blocker at the input of the logic analyzer are designed to work at these frequencies, and up to 700 MHz at most. Beyond that, the results are unreasonable.
- An object of the invention is to make it possible to make, with a commercial logic analyzer, measurements on integrated circuits. Having a large number of outputs, at an output frequency of the order of 1 GHz, and with great precision , these three criteria being so far contradictory in the field considered.
- Another object of the invention is to avoid interference which, at 1 GHz, easily occurs between the shielded cables which run between the integrated circuit, on the circuit board of the test device, and the logic analyzer.
- Another object of the invention is to allow adaptation of the outputs.
- the integrated circuits to be measured are, at these frequencies, made of GaAs or group III-V materials rather than silicon, and their output data are often acquired by silicon circuits of TTL, ECL, CMOS type, NMOS. . . etc. It is therefore necessary in certain cases, and on certain outputs, to apply a return voltage so that the outputs are adapted to the level of the acquisition circuit.
- Yet another object of the invention is to protect the acquisition probes of the logic analyzer.
- the available devices are delivered with, for each measurement input, a shielded cable at the end of which is a probe, which is a small circuit for reshaping the digital signals.
- This probe includes some GaAs transistors and a connection device: it is very fragile and extremely expensive.
- the interface system according to the invention essentially dedicated to integrated circuits rather than transistors or devices with very few digital outputs, therefore consists of a box, in which are plugged a plurality of module drawers, which are interposes between the same plurality of shielded cables each coming from an output of the test device of the integrated circuit - under peak if it is in a chip, or encapsulated in a micro-box - and the same plurality of shielded cables joined to the inputs of the logic analyzer.
- - a front panel which supports three coaxial connectors for the input of digital signals, their output to a display oscilloscope, and a DC booster voltage input
- a metal deflector fixed on the ceramic substrate, acts simultaneously as electromagnetic shielding and deflector for the cooling air blown by a fan.
- each interface system includes a rotary switch to choose the appropriate recall impedance for each drawer.
- the invention relates to an interface system for measurement by a logic analyzer of a plurality of digital signal channels originating from a microwave integrated circuit, this system forming a mechanical and electrical interface between first shielded cables. which carry the signals coming from the integrated circuit and from second shielded cables provided with high impedance probes which constitute the inputs
- each drawer comprising:
- a dielectric substrate one face of which is at least partially metallized in ground plane, and the other face of which supports a high impedance probe, connected to an input circuit in microstrip lines towards the of them
- ⁇ _- microwave and in a plane parallel to that of the substrate acts as electromagnetic shielding of the microwave circuit, mechanical protection of the probe and deflector for a flow of air for cooling the probe.
- FIG. 1 is diagrammatic in order to bring out the electric circuit better, while FIG. 2, partially cut away, highlights the mechanical assembly which ensures good immunity to electromagnetic interference.
- Each of the drawers or modules of the interface system according to the invention comprises a front face 1 which supports three coaxial connectors:
- the first connector 2 receives the shielded cable which comes from the test device, and provides the digital signal to be analyzed
- the second connector 3 joined directly to the previous one, allows, if necessary, to display the digital input signal on an oscilloscope, for example to check its state and its level, at the input of the measurement probe,
- the third connector 4 constitutes a DC voltage input, for adaptation to the recall level.
- a dielectric substrate plate 5 On this front face 1 is fixed, by known means which need not be detailed here, a dielectric substrate plate 5.
- This substrate is made of a material such as ceramic, epoxy glass or Duroid for example, but having a dielectric constant such that it is possible to produce microstrip lines there. Indeed, all the electrical connections concerned by the digital microwave signals which are produced on the substrate 5 are made of microstrips adapted in frequency and impedance: these microstrip lines are represented in FIGS. 1 and 2 by simple lines only in the sole purpose of simplifying the electrical diagrams. Also because of this, the hidden face of the dielectric substrate 5 is at least partially metallized, to ensure the ground plane of the microstrip lines.
- connection capacitor 9 can be introduced into the input line: it is represented in the form of a component chip which can be mounted on the surface, in dotted lines.
- the probe 7 of the analysis apparatus which he $ has been said how it is fragile and expensive • is fixed on the dielectric substrate 5 by mechanical means not shown: it is thus protected from shocks and electromagnetic interference, in particular by the shielding plate to which we will return later.
- the flat output lead 10 from 0 the probe 7 comes out towards the rear of the interface box, where it is fixed, as shown in FIG. 3.
- a microstrip 11 brings together the cores of the first and second coaxial connectors 2 and 3: this allows an output to a display, for example to control the level and the shape of the digital signals at the input.
- GaAs GaAs, to be measured, and the silicon circuits ECL, TTL,
- CMOS. . . etc of measurement or its electrical environment requires an additional voltage to recall the output levels Q either at a voltage different from ground, or at any voltage under an impedance different from that of the adapted lines.
- This booster voltage is applied to the input microstrip 6 through a polarization tee which, to allow a wide measurement range, is formed by a plurality of LC cells in series: the voltage is applied to the choke, and the capacity is connected to ground.
- the system automatically adapts to the signal frequency.
- This return voltage is supplied from a direct voltage applied to the coaxial connector 4 on the front face of the drawer.
- this voltage is addressed to an impedance selector made up of a plurality of resistors 22, 23, 24, and 25. These resistors can be connected in parallel, as shown, or in series: it is only a question of choice of values.
- the number of resistors is also not limiting of the invention: it depends on the analysis conditions, and four resistors can correspond, for example, to interfaces adapted to ECL, TTL, CMOS, NMOS.
- the choice of the value of the recall impedance can obviously be made directly on the drawer by a switch with several positions.
- the interface system is intended for the analysis of integrated circuits with a large number of outputs - for example 8, 16 or 32 bits - it is more efficient to transfer the selection to a single switch , integrated in the system but external to the drawers.
- it could be a switch with 8, 16 or 32 wafers with 4 positions each, or a small logic programmer, which allows to choose for each drawer - therefore for each measurement channel - the impedance that suits it .
- This member for choosing the restoring impedance is symbolized in FIG. 1 by a switch 26.
- the electrical connections are made by means of a connector 27 fixed on the substrate 5, in relation with a backplane connector, not shown.
- the interface drawer is completed by mechanical means, such as for example four columns 28, fixed in the corners of the dielectric substrate 5, which support a metal plate 29 in a plane parallel to that of the substrate 5.
- This plate 29 is in a metal, such as MUmetal, which ensures good electromagnetic shielding of the measurement probe 7. It is therefore preferable for the fixing means 28 to be electrically conductive so as to form a Faraday cage between the ground plane carried by the dielectric substrate 5 and the plate shield 29.
- the shielding plate 29 is of sufficiently large dimensions so that there is no solution of continuity between the shielded cables: it shields from the bases of the coaxial connectors 2 and 3 to the probe 7, so that each drawer is an element of the shielding of the circuits which convey the digital signals to the logic analyzer.
- this plate has two other additional functions. First, it stiffens the drawer and serves as mechanical protection for the probe 7, which has been said to be both very fragile and very expensive. Then, it serves as a deflector for a flow of cooling air, generated by fans placed under the box of the interface system, to cool the probe 7.
- the plate 29 is supposed to be transparent to allow the circuits on the dielectric substrate 5.
- the measurement probe 7 is part of the logic analyzer, and that it is connected to it by a shielded cable, provided with a plastic connection for handling the probe.
- Figure 3 shows how this shielded cable is held at the rear of the cabinet, so as not to exert mechanical force on the probe 7 or its flat cable 10.
- a plastic overmolding 31 Between the shielded cable 30 and the flat cable 10 is an electrical splice embedded in a plastic overmolding 31.
- This overmolding has two parallel sides 32, which are inserted in a groove 33, of appropriate dimensions, which is part of a comb 34, made of rigid material.
- the depth of the groove 32 is very slightly less than the height of the overmolding 31, so that it is easy to immobilize it by means of a cover 35, screwed onto the comb 34.
- the comb 34 is rigidly fixed on the rear face of the cabinet, at a height in relation to the outlets 10 of the interface drawers: thus, the forces exerted on the shielded cables 30 are canceled up to the overmolding 31, and are not transmitted to the probe 7.
- the comb 34 has as many grooves 33 as there are stages of drawers if these are superimposed in a box of 16 or 32 drawers for example.
- the interface system according to the invention therefore consists of a box, for example to the international standard of 19 inches, the front face of which consists of a plurality of interface drawers such as that which has been described, and of which the 0 rear face supports as many combs as necessary to immobilize the shielded output cables to the logic analyzer.
- U also comprises, on the front face, a switch for distributing the recall impedances, and, on its underside, at least one fan.
- This type of box, _- electronic is sufficiently known so that a representation is not necessary.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Abstract
Mechanical and electric interface, which is inserted between the coaxial cables that carry digital signals from a hyperfrequency integrated circuit, and the probes of an analyzer. The modular system is composed of identical units. Each unit consists of a front side (1) which supports coaxial connectors (2, 3), input-output signals, a dielectric substrate (5) which carries a high impedance probe (7), a hyperfrequency circuit consisting of microstrips (6, 11), a polarization circuit (12, 17) supplied (21) by a recall voltage and a metallic plate for electromagnetic shielding and cooling airflow deflection. The substrate (5) also carries a circuit (22 to 25) for selecting a recall voltage, selected by a switch (26). Application: for the precise measurement at 1 GHz of digital signals derived from an integrated circuit.
Description
SYSTEME D'INTERFACE DE MESURE PAR UN ANALYSEUR LOGIQUE DES SIGNAUX NUMERIQUES D'UN CIRCUIT INTEGRE. INTERFACE SYSTEM FOR MEASURING BY A LOGIC ANALYZER OF THE DIGITAL SIGNALS OF AN INTEGRATED CIRCUIT.
La présente invention concerne un système d'interface pour la mesure à très haute fréquence des signaux de sorties d'un circuit intégré numérique, au moyen d'un analyseur logique .The present invention relates to an interface system for very high frequency measurement of the output signals of a digital integrated circuit, by means of a logic analyzer.
Les analyseurs logiques disponibles sur le marché de l'instrumentation sont parfaitement adaptés à l'analyse des signaux numériques dans des cas relativement simples : peu de voies d'entrées, mesurées directement, et à des fréquences relativement basses : de 20 à 70 MHz, parce que l'horloge et l'échantillonneur-bloqueur à l'entrée de l'analyseur logique sont conçus pour travailler à ces fréquences, et jusque 700 MHz au maximum. Au delà, les résultats sont aberrants .The logic analyzers available on the instrumentation market are perfectly suited to the analysis of digital signals in relatively simple cases: few input channels, measured directly, and at relatively low frequencies: from 20 to 70 MHz, because the clock and the sampler-blocker at the input of the logic analyzer are designed to work at these frequencies, and up to 700 MHz at most. Beyond that, the results are absurd.
Un objet de l'invention est de permettre de faire, avec un analyseur logique commercial, des mesures sur des circuits intégrés .ayant un grand nombre de sorties, à une fréquence de sortie de l'ordre de 1 GHz, et avec une grande précision, ces trois critères étant jusqu'à présent contradictoires dans le domaine considéré.An object of the invention is to make it possible to make, with a commercial logic analyzer, measurements on integrated circuits. Having a large number of outputs, at an output frequency of the order of 1 GHz, and with great precision , these three criteria being so far contradictory in the field considered.
Un autre objet de l'invention est d'éviter les interférences qui, à 1 GHz, interviennent facilement entre les câbles blindés qui courent entre le circuit intégré, sur la platine de l'appareil de test, et l'analyseur logique.Another object of the invention is to avoid interference which, at 1 GHz, easily occurs between the shielded cables which run between the integrated circuit, on the circuit board of the test device, and the logic analyzer.
Un autre objet de l'invention est de permettre l'adaptation des sorties. En effet, les circuits intégrés à mesurer sont, à ces fréquences, réalisés en GaAs ou matériaux du groupe III-V plutôt qu'en silicium, et leurs données de sorties sont souvent acquises par des circuits silicium de type TTL, ECL, CMOS, NMOS . . . etc . Il faut donc dans certains cas, et sur certaines sorties, appliquer une tension de rappel
pour que les sorties soient adaptées au niveau du circuit d'acquisition.Another object of the invention is to allow adaptation of the outputs. Indeed, the integrated circuits to be measured are, at these frequencies, made of GaAs or group III-V materials rather than silicon, and their output data are often acquired by silicon circuits of TTL, ECL, CMOS type, NMOS. . . etc. It is therefore necessary in certain cases, and on certain outputs, to apply a return voltage so that the outputs are adapted to the level of the acquisition circuit.
Un autre objet encore de l'invention est de protéger les sondes d'acquisition de l'analyseur logique. Les appareils disponibles sont livrés avec, pour chaque entrée de mesure, un câble blindé à l'extrémité duquel se trouve une sonde, qui est un -petit circuit de remise en forme des signaux numériques . Cette sonde comprend quelques transistors en GaAs et un dispositif de connexion : elle est très fragile et extrêmement coûteuse .Yet another object of the invention is to protect the acquisition probes of the logic analyzer. The available devices are delivered with, for each measurement input, a shielded cable at the end of which is a probe, which is a small circuit for reshaping the digital signals. This probe includes some GaAs transistors and a connection device: it is very fragile and extremely expensive.
Le système d'interface selon l'invention, essentiellement dédié aux circuits intégrés plutôt qu'aux transistors ou dispositifs à très petit nombre de sorties numériques, consiste donc en un coffret, dans lequel sont enfichés une pluralité de tiroirs-modules, qui s'interpose entre une même pluralité de câbles blindés provenant chacun d'une sortie de l'appareil de test du circuit intégré - sous pointe s'il est en puce, ou encapsulé dans un microboitier - et une même pluralité de câbles blindés réunis aux entrées de l'analyseur logique.The interface system according to the invention, essentially dedicated to integrated circuits rather than transistors or devices with very few digital outputs, therefore consists of a box, in which are plugged a plurality of module drawers, which are interposes between the same plurality of shielded cables each coming from an output of the test device of the integrated circuit - under peak if it is in a chip, or encapsulated in a micro-box - and the same plurality of shielded cables joined to the inputs of the logic analyzer.
Pour simplifier la description, seulement un tiroir du coffret sera décrit, car les tiroirs sont tous identiques, chacun comprenant :To simplify the description, only one drawer of the box will be described, since the drawers are all identical, each comprising:
- une face avant qui supporte trois connecteurs coaxiaux pour l'entrée des signaux numériques, leur sortie vers un oscilloscope de visualisation, et une entrée de tension continue de rappel- a front panel which supports three coaxial connectors for the input of digital signals, their output to a display oscilloscope, and a DC booster voltage input
- un substrat diélectrique qui supporte le Té de polarisation et le réseau d'impédances de rappel, ainsi que la sonde appartenant à l'analyseur logique- a dielectric substrate which supports the polarization tee and the recall impedance network, as well as the probe belonging to the logic analyzer
- un déflecteur métallique, fixé sur le substrat céramique, fait office simultanément de blindage électromagnétique et de déflecteur pour l'air de refroidissement soufflé par un ventilateur.- a metal deflector, fixed on the ceramic substrate, acts simultaneously as electromagnetic shielding and deflector for the cooling air blown by a fan.
De plus, chaque système d'interface comprend un
commutateur-rotacteur pour choisir l'impédance de rappel convenable pour chaque tiroir.In addition, each interface system includes a rotary switch to choose the appropriate recall impedance for each drawer.
De façon plus précise, l'invention concerne un système d'interface de mesure par un analyseur logique d'une pluralité de voies de signaux numériques issus d'un circuit intégré hyperfréquence, ce système, formant interface mécanique et électrique entre de premiers câbles blindés qui transportent les signaux issus du circuit intégré et de seconds câbles blindés munis de sondes à haute impédance qui constituent les entréesMore specifically, the invention relates to an interface system for measurement by a logic analyzer of a plurality of digital signal channels originating from a microwave integrated circuit, this system forming a mechanical and electrical interface between first shielded cables. which carry the signals coming from the integrated circuit and from second shielded cables provided with high impedance probes which constitute the inputs
10 de l'analyseur logique, étant caractérisé en ce qu'il est modulaire et formé par une même pluralité de tiroirs montés dans un coffret, chaque tiroir comportant :10 of the logic analyzer, being characterized in that it is modular and formed by the same plurality of drawers mounted in a box, each drawer comprising:
- une face avant sur laquelle sont fixés un connecteur coaxial d'entrée des signaux numériques, et un connecteur coaxial de i r sortie des mêmes signaux numériques vers un oscilloscope,a front face on which are fixed a coaxial connector for input of digital signals, and a coaxial connector for i r output of the same digital signals towards an oscilloscope,
- fixé sur la-face avant, un substrat diélectrique dont, une face est au moins partiellement métallisée en plan de masse, et dont l'autre face supporte une sonde à haute impédance, connectée à un circuit d'entrée en lignes microbandes vers les deux- fixed on the front face, a dielectric substrate, one face of which is at least partially metallized in ground plane, and the other face of which supports a high impedance probe, connected to an input circuit in microstrip lines towards the of them
20 connecteurs coaxiaux, et à un circuit de polarisation comprenant au moins une self et une capacité ainsi qu'une entrée pour une tension continue de polarisation,20 coaxial connectors, and to a bias circuit comprising at least one choke and a capacitor as well as an input for a DC bias voltage,
- une plaque métallique, fixée par des moyens mécaniques sur le substrat diélectrique, du côté qui porte le circuit- a metal plate, fixed by mechanical means on the dielectric substrate, on the side which carries the circuit
~_- hyperfréquence et dans un plan parallèle à celui du substrat, fait office de blindage électromagnétique du circuit hyperfréquence, de protection mécanique de la sonde et de déflecteur pour un flux d'air de refroidissement de la sonde.~ _- microwave and in a plane parallel to that of the substrate, acts as electromagnetic shielding of the microwave circuit, mechanical protection of the probe and deflector for a flow of air for cooling the probe.
L'invention sera mieux comprise par la descriptionThe invention will be better understood from the description
30 détaillée qui suit maintenant d'un exemple d'application, en s 'appuyant sur les figures jointes en annexe qui représentent :30 detailed, which now follows from an example application, drawing on the attached figures which represent:
- figure 1 : vue latérale d'un tiroir, donnant le schéma électrique d'interfaçage ,- Figure 1: side view of a drawer, giving the electrical interface diagram,
- figure 2 : vue de 3/4 d'un tiroir, montrant l'aspect mécanique- Figure 2: 3/4 view of a drawer, showing the mechanical aspect
- figure 3 : vue éclatée de la fixation par l'arrière d'une
sonde de mesure de l'analyseur numérique.- Figure 3: exploded view of the attachment from the rear of a digital analyzer measurement probe.
Dans la description qui suit, l'invention peut être considérée simultanément sur les figures 1 et 2 : la figure 1 est schématisée pour mieux faire ressortir le circuit électrique, tandis que la figure 2, partiellement écorchée, met en évidence le montage mécanique qui assure une bonne immunité aux interférences électro-magnétiques .In the description which follows, the invention can be considered simultaneously in FIGS. 1 and 2: FIG. 1 is diagrammatic in order to bring out the electric circuit better, while FIG. 2, partially cut away, highlights the mechanical assembly which ensures good immunity to electromagnetic interference.
Chacun des tiroirs ou modules du système d'interface selon l'invention comprend une face avant 1 qui supporte trois connecteurs coaxiaux :Each of the drawers or modules of the interface system according to the invention comprises a front face 1 which supports three coaxial connectors:
- le premier connecteur 2 reçoit le câble blindé qui provient de l'appareil de test, et apporte le signal numérique à analyser,- the first connector 2 receives the shielded cable which comes from the test device, and provides the digital signal to be analyzed,
- le second connecteur 3, réuni directement au précédent, permet si on en a besoin de visualiser le signal numérique d'entrée sur un oscilloscope, par exemple pour contrôler son état et son niveau, à l'entrée de la sonde de mesure,the second connector 3, joined directly to the previous one, allows, if necessary, to display the digital input signal on an oscilloscope, for example to check its state and its level, at the input of the measurement probe,
- le troisième connecteur 4 constitue une entrée de tension continue, pour l'adaptation en niveau de rappel.- The third connector 4 constitutes a DC voltage input, for adaptation to the recall level.
Sur cette face avant 1 est fixée, par des moyens connus qui n'ont pas à être détaillés ici, une plaque de substrat diélectrique 5. Ce substrat est en un matériau tel que céramique, verre -époxy de ou Duroïd par exemple, mais ayant une constante diélectrique telle qu'il soit possible d'y réaliser des lignes microbandes . En effet, toutes les liaisons électriques concernées par les signaux numériques hyperfréquences qui sont réalisées sur le substrat 5 le sont en microbandes adaptées en fréquence et en impédance : ces lignes microbandes ne sont représentées sur les figures 1 et 2 par de simples traits que dans le seul but de simplifier les schémas électriques. De ce fait également, la face cachée du substrat diélectrique 5 est au moins partiellement métallisée, pour assurer le plan de masse des lignes microbandes.On this front face 1 is fixed, by known means which need not be detailed here, a dielectric substrate plate 5. This substrate is made of a material such as ceramic, epoxy glass or Duroid for example, but having a dielectric constant such that it is possible to produce microstrip lines there. Indeed, all the electrical connections concerned by the digital microwave signals which are produced on the substrate 5 are made of microstrips adapted in frequency and impedance: these microstrip lines are represented in FIGS. 1 and 2 by simple lines only in the sole purpose of simplifying the electrical diagrams. Also because of this, the hidden face of the dielectric substrate 5 is at least partially metallized, to ensure the ground plane of the microstrip lines.
L'âme du premier connecteur coaxial 2 est directement brasée sur une microbande 6, qui la réunit à la sonde 7 de l'analyseur logique, par l'intermédiaire d'un connecteur 8. Dans
certains cas, une capacité de liaison 9 peut être introduite dans la ligne d'entrée : elle est représentée sous forme d'une puce de composant montable en surface, en pointillés .The core of the first coaxial connector 2 is directly soldered onto a microstrip 6, which joins it to the probe 7 of the logic analyzer, via a connector 8. In in some cases, a connection capacitor 9 can be introduced into the input line: it is represented in the form of a component chip which can be mounted on the surface, in dotted lines.
La sonde de mesure 7 de l'appareil d'analyse, dont il $ a été dit à quel point elle est fragile • et coûteuse, est fixée sur le substrat diélectrique 5 par des moyens mécaniques non représentés : elle est ainsi protégée des chocs et interférences électromagnétiques, en particulier par la plaque de blindage sur laquelle on reviendra plus loin. Le cordon plat 10 de sortie de 0 la sonde 7 sort vers l'arrière du coffret d'interface, où il est fixé, comme montré en figure 3.The probe 7 of the analysis apparatus, which he $ has been said how it is fragile and expensive • is fixed on the dielectric substrate 5 by mechanical means not shown: it is thus protected from shocks and electromagnetic interference, in particular by the shielding plate to which we will return later. The flat output lead 10 from 0 the probe 7 comes out towards the rear of the interface box, where it is fixed, as shown in FIG. 3.
Au niveau de l'entrée, une microbande 11 réunit les âmes des premier et second connecteurs coaxiaux 2 et 3 : ceci permet une sortie vers une visualisation, par exemple pour contrôler le niveau et la forme des signaux numériques à l'entrée .At the input, a microstrip 11 brings together the cores of the first and second coaxial connectors 2 and 3: this allows an output to a display, for example to control the level and the shape of the digital signals at the input.
Par ailleurs, la compatiblité entre un circuit enFurthermore, the compatibility between a circuit in
GaAs, à mesurer, et les circuits silicium ECL, TTL,GaAs, to be measured, and the silicon circuits ECL, TTL,
CMOS . . . etc de mesure ou de son environnement électrique, exige une tension supplémentaire de rappel des niveaux de sortie Q soit à une tension différente de la masse, soit à une tension quelconque sous une impédance différente de celle des lignes adaptées . Cette tension de rappel est appliquée sur la microbande d'entrée 6 à travers un Té de polarisation qui, pour autoriser une large gamme de mesure, est formé par une pluralité de cellules LC en série : la tension est appliquée sur la self, et la capacité est connectée à la masse. Sur la figureCMOS. . . etc of measurement or its electrical environment, requires an additional voltage to recall the output levels Q either at a voltage different from ground, or at any voltage under an impedance different from that of the adapted lines. This booster voltage is applied to the input microstrip 6 through a polarization tee which, to allow a wide measurement range, is formed by a plurality of LC cells in series: the voltage is applied to the choke, and the capacity is connected to ground. On the face
1, on a représenté quatre cellules LC formées par quatre selfs1, four LC cells are shown formed by four chokes
12, 13, 14 et 15, et quatre capacités 17, 18, 19, et 20, mais le nombre de cellules ne limite pas la portée de l'invention. Le système s'adapte automatiquement à la fréquence du signal.12, 13, 14 and 15, and four capacities 17, 18, 19, and 20, but the number of cells does not limit the scope of the invention. The system automatically adapts to the signal frequency.
Dans le Té de polarisation, toutes les liaisons entre éléments sont faites en technologie microruban, et les selfs et capacités sont rapportées sous forme de composants discrets, bien que la réalisation de selfs gravées en même temps que les lignes microrubans soit une variante prévue par l'invention. La
tension de rappel est appliquée en 21, sur la dernière self 15 du Té de polarisation.In the polarization tee, all the connections between elements are made in microstrip technology, and the inductors and capacitors are reported in the form of discrete components, although the realization of inductors engraved at the same time as the microstrip lines is a variant provided by l 'invention. The return voltage is applied at 21, on the last inductor 15 of the polarization tee.
Cette tension de rappel est fournie à partir d'une tension continue appliquée sur le connecteur coaxial 4 en face avant du tiroir. Par un câblage ordinaire - puisque c'est un courant continu - cette tension est adressée à un sélecteur d'impédance constitué d'une pluralité de résistances 22, 23, 24, et 25. Ces résistances peuvent être montées en parallèle, comme représenté, ou en série : ce n'est qu'une question de choix des valeurs . Le nombre de résistances n'est pas non plus limitatif de l'invention : il dépend des conditions d'analyse , et quatre résistances peuvent correspondre, par exemple, à des interfaces adaptés à ECL, TTL, CMOS, NMOS .This return voltage is supplied from a direct voltage applied to the coaxial connector 4 on the front face of the drawer. By ordinary wiring - since it is a direct current - this voltage is addressed to an impedance selector made up of a plurality of resistors 22, 23, 24, and 25. These resistors can be connected in parallel, as shown, or in series: it is only a question of choice of values. The number of resistors is also not limiting of the invention: it depends on the analysis conditions, and four resistors can correspond, for example, to interfaces adapted to ECL, TTL, CMOS, NMOS.
Le choix de la valeur de l'impédance de rappel peut bien évidemment être fait directement sur le tiroir par un commutateur à plusieurs positions . Cependant, puisqu'il a été dit que le système d'interface est destiné à l'analyse de circuits intégrés à grand nombre de sorties - par exemple 8, 16 ou 32 bits - il est plus efficace de reporter la sélection sur un commutateur unique, intégré dans le système mais externe aux tiroirs . Dans les exemples cités, ce pourra être un commutateur à 8, 16 ou 32 galettes à 4 positions chacune, ou bien un petit programmateur logique, qui permette de choisir pour chaque tiroir - donc pour chaque voie de mesure - l'impédance qui lui convient.The choice of the value of the recall impedance can obviously be made directly on the drawer by a switch with several positions. However, since it has been said that the interface system is intended for the analysis of integrated circuits with a large number of outputs - for example 8, 16 or 32 bits - it is more efficient to transfer the selection to a single switch , integrated in the system but external to the drawers. In the examples cited, it could be a switch with 8, 16 or 32 wafers with 4 positions each, or a small logic programmer, which allows to choose for each drawer - therefore for each measurement channel - the impedance that suits it .
Cet organe de choix de l'impédance de rappel est symbolisé sur la figure 1 par un commutateur 26. Comme il peut être indépendant de chaque tiroir, les liaisons électriques se font au moyen d'un connecteur 27 fixé sur le substrat 5, en rapport avec un connecteur de fond de panier, non représenté.This member for choosing the restoring impedance is symbolized in FIG. 1 by a switch 26. As it can be independent of each drawer, the electrical connections are made by means of a connector 27 fixed on the substrate 5, in relation with a backplane connector, not shown.
Le tiroir d'interface est complété par des moyens mécaniques, tels que par exemple quatre colonnettes 28, fixées dans les coins du substrat diélectrique 5, qui soutiennent une plaque métallique 29 dans un plan parallèle à celui du substrat 5. Cette plaque 29 est en un métal, tel que le MUmétal, qui
assure un bon blindage électromagnétique de la sonde de mesure 7. Il est donc préférable que les moyens de fixation 28 soient conducteurs de l'électricité de façon à former une cage de Faraday entre le plan de masse porté par le substrat diélectrique 5 et la plaque de blindage 29.The interface drawer is completed by mechanical means, such as for example four columns 28, fixed in the corners of the dielectric substrate 5, which support a metal plate 29 in a plane parallel to that of the substrate 5. This plate 29 is in a metal, such as MUmetal, which ensures good electromagnetic shielding of the measurement probe 7. It is therefore preferable for the fixing means 28 to be electrically conductive so as to form a Faraday cage between the ground plane carried by the dielectric substrate 5 and the plate shield 29.
La plaque de blindage 29 est de dimensions assez grandes pour qu'il n'y ait pas de solution de continuité entre les câbles blindés : elle blinde depuis les embases des connecteurs coaxiaux 2 et 3 jusqu'à la sonde 7, de sorte que chaque tiroir est un élément du blindage des circuits qui véhiculent les signaux numériques jusqu'à l'analyseur logique.The shielding plate 29 is of sufficiently large dimensions so that there is no solution of continuity between the shielded cables: it shields from the bases of the coaxial connectors 2 and 3 to the probe 7, so that each drawer is an element of the shielding of the circuits which convey the digital signals to the logic analyzer.
Mais cette plaque a deux autres fonctions annexes . D'abord, elle rigidifie le tiroir et sert de protection mécanique à la sonde 7, dont il a été dit qu'elle est à la fois très fragile et très coûteuse. Ensuite, elle sert de déflecteur à un flux d'air de refroidissement, généré par des ventilateurs placés sous le coffret du système d'interface, pour refroidir la sonde 7. Sur la figure 1, la plaque 29 est supposée transparente pour laisser voir les circuits sur le substrat diélectrique 5.However, this plate has two other additional functions. First, it stiffens the drawer and serves as mechanical protection for the probe 7, which has been said to be both very fragile and very expensive. Then, it serves as a deflector for a flow of cooling air, generated by fans placed under the box of the interface system, to cool the probe 7. In FIG. 1, the plate 29 is supposed to be transparent to allow the circuits on the dielectric substrate 5.
Il a été dit que la sonde de mesure 7 fait partie de l'analyseur logique, et qu'elle lui est reliée par un câble blindé, muni d'un raccord plastique de manipulation de la sonde .It has been said that the measurement probe 7 is part of the logic analyzer, and that it is connected to it by a shielded cable, provided with a plastic connection for handling the probe.
La figure 3 montre comment ce câble blindé est maintenu, à l'arrière du coffret, de façon à ne pas exercer d'effort mécanique sur la sonde 7 ou son câble plat 10. Entre le câble blindé 30 et le câble plat 10 se trouve une épissure électrique noyée dans un surmoulage plastique 31. Ce surmoulage a deux flancs parallèles 32, qui sont insérés dans une gorge 33, de dimensions appropriées, qui fait partie d'un peigne 34, en matériau rigide. La profondeur de la gorge 32 est très légèrement inférieure à la hauteur du surmoulage 31, de telle sorte qu'il est facile de l'immobiliser au moyen d'un couvercle 35, vissé sur le peigne 34. Le peigne 34 est fixé rigidement sur la face arrière du coffret, à une hauteur en relation avec les sorties 10 des tiroirs d'interface : ainsi, les efforts exercés
sur les câbles blindés 30 sont annulés à hauteur du surmoulage 31, et ne sont pas transmis à la sonde 7.Figure 3 shows how this shielded cable is held at the rear of the cabinet, so as not to exert mechanical force on the probe 7 or its flat cable 10. Between the shielded cable 30 and the flat cable 10 is an electrical splice embedded in a plastic overmolding 31. This overmolding has two parallel sides 32, which are inserted in a groove 33, of appropriate dimensions, which is part of a comb 34, made of rigid material. The depth of the groove 32 is very slightly less than the height of the overmolding 31, so that it is easy to immobilize it by means of a cover 35, screwed onto the comb 34. The comb 34 is rigidly fixed on the rear face of the cabinet, at a height in relation to the outlets 10 of the interface drawers: thus, the forces exerted on the shielded cables 30 are canceled up to the overmolding 31, and are not transmitted to the probe 7.
Bien entendu, le peigne 34 comporte autant de gorges 33 qu'il y a d'étages de tiroirs si ceux-ci sont superposés dans e un coffret de 16 ou 32 tiroirs par exemple.Of course, the comb 34 has as many grooves 33 as there are stages of drawers if these are superimposed in a box of 16 or 32 drawers for example.
Le système d'interface selon l'invention consiste donc en un coffret, par exemple à la norme internationale de 19 pouces, dont la face avant est constituée d'une pluralité de tiroirs d'interface tel que celui qui a été décrit, et dont la 0 face arrière supporte autant de peignes que nécessaire pour immobiliser les câbles blindés de sorties vers l'analyseur logique. U comporte également, en face avant, un commutateur de distribution des impédances de rappel, et, sur sa face inférieure, au moins un ventilateur. Ce type de coffret , _- électronique est suffisammment connu pour qu'une représentation ne soit pas nécessaire.The interface system according to the invention therefore consists of a box, for example to the international standard of 19 inches, the front face of which consists of a plurality of interface drawers such as that which has been described, and of which the 0 rear face supports as many combs as necessary to immobilize the shielded output cables to the logic analyzer. U also comprises, on the front face, a switch for distributing the recall impedances, and, on its underside, at least one fan. This type of box, _- electronic is sufficiently known so that a representation is not necessary.
Par les avantages qu'il apporte, notamment le blindage électromagnétique de tout le circuit hyperfréquence, il permet, moyennant une modification du logiciel de l'analyseur logique,By the advantages which it brings, in particular the electromagnetic shielding of all the microwave circuit, it allows, by means of a modification of the software of the logic analyzer,
20 d'effectuer des mesures de grande précision à des fréquences d'analyse de 1 GHz sur des circuits intégrés numériques en arséniure de gallium.
20 to perform high precision measurements at analysis frequencies of 1 GHz on digital integrated circuits of gallium arsenide.
Claims
REVENDICATIONS
1 - Système d'interface de mesure par un analyseur logique d'une pluralité de voies de signaux numériques issus d'un circuit intégré hyperfréquence, ce système, formant interface mécanique et électrique entre de premiers câbles blindés qui transportent les signaux issus du circuit intégré et de seconds câbles blindés munis des sondes à haute impédance qui constituent les entrées de l'analyseur logique, étant caractérisé en ce qu'il est modulaire et formé par une même pluralité de tiroirs montés dans un coffret, chaque tiroir comportant :1 - System of measurement interface by a logic analyzer of a plurality of channels of digital signals coming from a microwave integrated circuit, this system, forming mechanical and electrical interface between first shielded cables which transport the signals coming from the integrated circuit and second shielded cables fitted with high impedance probes which constitute the inputs of the logic analyzer, being characterized in that it is modular and formed by the same plurality of drawers mounted in a box, each drawer comprising:
- une face avant (1) sur laquelle sont fixés un connecteur coaxial (2) d'entrée des signaux numériques et un connecteur coaxial (3) de sortie des mêmes signaux numériques vers un oscilloscope, - fixé sur la face avant (1) , un substrat diélectrique (5) dont une face est au moins partiellement métallisée en plan de masse, et dont l'autre face supporte une sonde (7) à haute impédance, connectée (8) à un circuit d'entrée en lignes microbandes (6, 11) vers les deux connecteurs coaxiaux (2, 3) , et à un circuit de polarisation comprenant au moins une self (12) et une capacité- a front face (1) on which are fixed a coaxial connector (2) for input of digital signals and a coaxial connector (3) for output of the same digital signals to an oscilloscope, - fixed on the front face (1), a dielectric substrate (5) one side of which is at least partially metallized in ground plane, and the other side of which supports a high impedance probe (7), connected (8) to a microstrip line input circuit (6 , 11) to the two coaxial connectors (2, 3), and to a bias circuit comprising at least one choke (12) and a capacitor
(17) ainsi qu'une entrée (21) pour une tension continue de polarisation,(17) as well as an input (21) for a DC bias voltage,
- une plaque métallique (29) , fixée par des moyens mécaniques (28) sur le substrat diélectrique (5) , du côté qui porte le circuit hyperfréquence et dans un plan parallèle à celui du substrat (5) , fait office de blindage électromagnétique du circuit hyperfréquence, de protection mécanique de la sonde (7) et de déflecteur pour un flux d'air de refroidissement de la sonde . 2 - Système d'interface selon la revendication 1, caractérisé en ce que chaque tiroir comporte en outre un circuit
de sélection d'une impédance de rappel correspondant à l'adaptation du circuit intégré à mesurer à un environnement de différentes technologies, ce circuit comportant en face avant (1) un connecteur coaxial (4) sur lequel est appliquée une tension continue, et, sur le substrat (5) une pluralité de résistances (22 à 25) formant un sélecteur d'impédance continue, ainsi qu'un commutateur (26) de choix de l'impédance de rappel appliquée (21) sur le circuit de polarisation (12, 17) des signaux numériques d'entrée . 3 - Système d'interface selon la revendication 1, caractérisé en ce que, pour chaque tiroir, le substrat (5) est en un matériau diélectrique tel que céramique ou verre-époxy dont la constante diélectrique permet de réaliser toutes les liaisons hyperfréquences en lignes microbandes (6, 11) . 4 - Système d'interface selon la revendication 1, caractérisé en ce que, pour chaque tiroir, une capacité (9) de liaison est insérée entre la microbande d'entrée (6) et le connecteur (8) de raccordement à la sonde (7) à haute impédance . 5 - Système d'interface selon la revendication 1, caractérisé en ce que, pour chaque tiroir, le circuit de polarisation est constitué par une pluralité de cellules LC (12 + 17, 13 + 18, 14 + 19, 15 + 20) en série, dans le but de permettre les mesures dans une large bande hyperfréquence, la tension de polarisation étant appliquée (21) sur la dernière cellule .- a metal plate (29), fixed by mechanical means (28) on the dielectric substrate (5), on the side which carries the microwave circuit and in a plane parallel to that of the substrate (5), acts as electromagnetic shielding of the microwave circuit, mechanical protection of the probe (7) and deflector for a flow of air for cooling the probe. 2 - Interface system according to claim 1, characterized in that each drawer further comprises a circuit selection of a booster impedance corresponding to the adaptation of the integrated circuit to be measured to an environment of different technologies, this circuit comprising on the front face (1) a coaxial connector (4) on which a DC voltage is applied, and, on the substrate (5) a plurality of resistors (22 to 25) forming a continuous impedance selector, as well as a switch (26) for choosing the applied restoring impedance (21) on the bias circuit (12 , 17) digital input signals. 3 - Interface system according to claim 1, characterized in that, for each drawer, the substrate (5) is made of a dielectric material such as ceramic or glass-epoxy whose dielectric constant makes it possible to produce all the microwave links in lines microstrips (6, 11). 4 - Interface system according to claim 1, characterized in that, for each drawer, a capacity (9) of connection is inserted between the input microstrip (6) and the connector (8) for connection to the probe ( 7) high impedance. 5 - Interface system according to claim 1, characterized in that, for each drawer, the bias circuit is constituted by a plurality of LC cells (12 + 17, 13 + 18, 14 + 19, 15 + 20) in series, in order to allow measurements in a wide microwave band, the bias voltage being applied (21) to the last cell.
6 - Système d'interface selon la revendication 2, caractérisé en ce que chaque tiroir comporte un commutateur (26) de choix de l'impédance de rappel appliquée (21) sur le circuit de polarisation .6 - Interface system according to claim 2, characterized in that each drawer has a switch (26) for choosing the applied restoring impedance (21) on the bias circuit.
7 - Système d'interface selon la revendication 2, caractérisé en ce que, en vue de distribuer une pluralité d'impédance de rappel vers une pluralité de tiroirs, ce système comporte en outre un dispositif de commutation -unique (26) , comportant autant de sorties qu'il y a de tiroirs dans le
système, l'interface entre les tiroirs et le commutateur unique (26) étant assuré par un connecteur (27) porté par chaque substrat (5) .7 - Interface system according to claim 2, characterized in that, in order to distribute a plurality of recall impedance to a plurality of drawers, this system further comprises a single switching device (26), comprising as many there are drawers in the system, the interface between the drawers and the single switch (26) being provided by a connector (27) carried by each substrate (5).
8 - Système d'interface selon la revendication 1, caractérisé en ce que la plaque métallique (29) de blindage est de dimensions suffisantes pour assurer la continuité du blindage des signaux numériques depuis le connecteur coaxial (2) d'entrée jusqu'à la sonde de mesure (7) .8 - Interface system according to claim 1, characterized in that the metal plate (29) of shielding is of sufficient dimensions to ensure the continuity of the shielding of digital signals from the coaxial connector (2) input to the measuring probe (7).
9 - Système d'interface selon la revendication 1, caractérisé en ce que, en vue d'annuler les contraintes exercées par les seconds câbles blindés (30) sur les sondes (7) , ceux-ci sont bloqués, au niveau de l'épissure (31) de raccordement à la sonde (7) , dans les gorges (33) d'un peigne (34) rigide, supporté par la face arrière du coffret, et fermé par un couvercle (35) .
9 - Interface system according to claim 1, characterized in that, in order to cancel the stresses exerted by the second shielded cables (30) on the probes (7), these are blocked, at the splice (31) for connection to the probe (7), in the grooves (33) of a rigid comb (34), supported by the rear face of the box, and closed by a cover (35).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR89/00482 | 1989-01-17 | ||
| FR8900482A FR2642847B1 (en) | 1989-01-17 | 1989-01-17 | INTERFACE SYSTEM FOR MEASURING BY A LOGICAL ANALYZER OF THE DIGITAL SIGNALS OF AN INTEGRATED CIRCUIT |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO1990008327A2 true WO1990008327A2 (en) | 1990-07-26 |
| WO1990008327A3 WO1990008327A3 (en) | 1990-09-07 |
Family
ID=9377778
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/FR1990/000030 WO1990008327A2 (en) | 1989-01-17 | 1990-01-16 | Interface system for measuring by logic analyser digital signals derived from an integrated circuit |
Country Status (2)
| Country | Link |
|---|---|
| FR (1) | FR2642847B1 (en) |
| WO (1) | WO1990008327A2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1168904A1 (en) * | 2000-05-31 | 2002-01-02 | PX Research & Development Limited | A switching system |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR956487A (en) * | 1950-02-02 | |||
| FR2192746A5 (en) * | 1972-07-13 | 1974-02-08 | Guena Jean |
-
1989
- 1989-01-17 FR FR8900482A patent/FR2642847B1/en not_active Expired - Fee Related
-
1990
- 1990-01-16 WO PCT/FR1990/000030 patent/WO1990008327A2/en unknown
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR956487A (en) * | 1950-02-02 | |||
| FR2192746A5 (en) * | 1972-07-13 | 1974-02-08 | Guena Jean |
Non-Patent Citations (2)
| Title |
|---|
| INTER-ELECTRONIQUE. vol. 27, no. 54, 29 mai 1972, PARIS FR page 34 "Un testeur de cartes incremental" voir page 34, colonne de droite, lignes 1 - 5 * |
| SYSTEMS TECHNOLOGY no. 15, 09 1972, LIVERPOOL GB pages 6 - 8; R.N. Connelly: "A tester for MOS integrated circuits" voir page 6, colonne de gauche, lignes 30 - 33 voir colonne de droite, lignes 49 - 51 voir page 8, colonne de gauche, lignes 32 - 33 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1168904A1 (en) * | 2000-05-31 | 2002-01-02 | PX Research & Development Limited | A switching system |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2642847B1 (en) | 1991-04-12 |
| FR2642847A1 (en) | 1990-08-10 |
| WO1990008327A3 (en) | 1990-09-07 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20070222021A1 (en) | Shielded through-via | |
| US6225816B1 (en) | Split resistor probe and method | |
| FR2733598A1 (en) | MULTI-CONDUCTOR VOLTAGE PROBE | |
| EP1030182A1 (en) | Calibrating a RF integrated circuit sensor | |
| EP0133125A1 (en) | Electronic component housing with a capacitor | |
| EP0270422B1 (en) | Circuit for measuring the dynamic characteristics of a housing for a high-speed integrated circuit, and method of measuring these dynamic characteristics | |
| EP0228741B1 (en) | Testing device for a leadless carrier provided with a high-frequency integrated circuit chip | |
| WO1990008327A2 (en) | Interface system for measuring by logic analyser digital signals derived from an integrated circuit | |
| US4891577A (en) | Apparatus for measuring noise characteristics | |
| EP0273825B1 (en) | Device for measuring the characteristics of a very high frequency component | |
| EP1252804B1 (en) | Radiocommunication module in the form of an electronic macro-component, corresponding interface structure and transfer method onto a motherboard | |
| FR2629271A1 (en) | DEVICE FOR INTERCONNECTING AND PROTECTING A BULK MICROFREQUENCY COMPONENT BLEACH | |
| EP1037054A1 (en) | Elementary low loss calibrating structure for calibrating an integrated circuit probe | |
| FR2564244A1 (en) | MOUNTING STRUCTURE FOR FAST INTEGRATED CIRCUITS | |
| EP0983616B1 (en) | Method and device for connecting two millimetric elements | |
| EP0606943B1 (en) | Switching device for switching television signals in a cable distribution system | |
| US6542382B2 (en) | Densely arranged electrically shielded communication panels | |
| FR2644896A1 (en) | CARD WITH POINTS FOR TESTING SEMICONDUCTOR HYPERFREQUENCY COMPONENTS | |
| EP0596773A1 (en) | Appliance for in-situ broadband hyperfrequency tests | |
| EP0514250B1 (en) | Device for in situ ultra high frequency broadband testing | |
| Mielke et al. | High-speed fixture interconnects for mixed-signal IC testing | |
| FR2630261A1 (en) | Circuit usable in the microwave range | |
| Thomas | Fast light-pulse measurement schemes | |
| EP1146342A2 (en) | High frequency electronic module and test method thereof | |
| FR2820825A1 (en) | Probe card used for semiconductor device manufacturing, separates dielectric of substrate main casing and support dielectric supporting external connecting terminal by conductive materials |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| AK | Designated states |
Kind code of ref document: A2 Designated state(s): CA JP US |
|
| AL | Designated countries for regional patents |
Kind code of ref document: A2 Designated state(s): AT BE CH DE DK ES FR GB IT LU NL SE |
|
| AK | Designated states |
Kind code of ref document: A3 Designated state(s): CA JP US |
|
| AL | Designated countries for regional patents |
Kind code of ref document: A3 Designated state(s): AT BE CH DE DK ES FR GB IT LU NL SE |
|
| CFP | Corrected version of a pamphlet front page |
Free format text: PUBLISHED FIGURE REPLACED BY CORRECT FIGURE |
|
| NENP | Non-entry into the national phase in: |
Ref country code: CA |