UST966009I4 - Static free fluid bearing track system - Google Patents

Static free fluid bearing track system Download PDF

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Publication number
UST966009I4
UST966009I4 US05/800,151 US80015177A UST966009I4 US T966009 I4 UST966009 I4 US T966009I4 US 80015177 A US80015177 A US 80015177A US T966009 I4 UST966009 I4 US T966009I4
Authority
US
United States
Prior art keywords
fluid bearing
track system
bearing track
free fluid
static free
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
US05/800,151
Inventor
Bayard G. Gardineer, Jr.
Stanley A. Manning
Arthur E. Meeks
Bela Musits
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of UST966009I4 publication Critical patent/UST966009I4/en
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67784—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations using air tracks
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G51/00—Conveying articles through pipes or tubes by fluid flow or pressure; Conveying articles over a flat surface, e.g. the base of a trough, by jets located in the surface
    • B65G51/02—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases
    • B65G51/03—Directly conveying the articles, e.g. slips, sheets, stockings, containers or workpieces, by flowing gases over a flat surface or in troughs

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)

Abstract

an improved fluid bearing track structure in which the metal surface of the track is enclosed by a transparent envelope having the inner surface coated with a transparent metal film which is grounded with the metal track surface to prevent static buildup.
US05/800,151 1976-04-13 1977-05-24 Static free fluid bearing track system Pending UST966009I4 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US67660076A 1976-04-13 1976-04-13

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
US67660076A Continuation 1976-04-13 1976-04-13

Publications (1)

Publication Number Publication Date
UST966009I4 true UST966009I4 (en) 1978-01-03

Family

ID=24715162

Family Applications (1)

Application Number Title Priority Date Filing Date
US05/800,151 Pending UST966009I4 (en) 1976-04-13 1977-05-24 Static free fluid bearing track system

Country Status (3)

Country Link
US (1) UST966009I4 (en)
JP (1) JPS52124679A (en)
FR (1) FR2348131A1 (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060165496A1 (en) * 2004-12-22 2006-07-27 Smc Corporation Air levitation apparatus with neutralization device, and neutralization method for levitation apparatus
US20090092345A1 (en) * 2007-10-09 2009-04-09 Ferdinand Hendriks System and method to electrically ground fluid dynamic bearings
US20160111310A1 (en) * 2014-09-24 2016-04-21 SanDisk Techologies Inc. Wafer Transfer System
US9527674B2 (en) * 2013-07-02 2016-12-27 Shenzhen China Star Optoelectronics Technology Co., Ltd. Transmission device with air-float guide wheel of the liquid crystal display panel

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8706380U1 (en) * 1987-05-05 1988-06-09 Frank, Gabriele, 6333 Braunfels Device for floating conveying
JPH01271356A (en) * 1988-04-25 1989-10-30 Somar Corp Film separator
US5205991A (en) * 1991-07-30 1993-04-27 Corning Incorporated Manufacture of extruded ceramics
JP2532541Y2 (en) * 1992-05-06 1997-04-16 東洋製罐株式会社 Article transfer device
JP4105778B2 (en) * 1997-04-24 2008-06-25 株式会社渡辺商行 Airflow transfer device
US6398464B1 (en) 1999-12-27 2002-06-04 Kabushiki Kaisha Watanabe Shoko Air stream transfer apparatus
JP6090013B2 (en) * 2013-07-02 2017-03-08 トヨタ自動車株式会社 Transport system
CN111439588A (en) * 2019-01-16 2020-07-24 上海襄万机电科技有限公司 Contactless material conveying device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060165496A1 (en) * 2004-12-22 2006-07-27 Smc Corporation Air levitation apparatus with neutralization device, and neutralization method for levitation apparatus
US7328617B2 (en) * 2004-12-22 2008-02-12 Smc Corporation Air levitation apparatus with neutralization device, and neutralization method for levitation apparatus
US20090092345A1 (en) * 2007-10-09 2009-04-09 Ferdinand Hendriks System and method to electrically ground fluid dynamic bearings
US9527674B2 (en) * 2013-07-02 2016-12-27 Shenzhen China Star Optoelectronics Technology Co., Ltd. Transmission device with air-float guide wheel of the liquid crystal display panel
US20160111310A1 (en) * 2014-09-24 2016-04-21 SanDisk Techologies Inc. Wafer Transfer System
US10332770B2 (en) * 2014-09-24 2019-06-25 Sandisk Technologies Llc Wafer transfer system

Also Published As

Publication number Publication date
FR2348131B1 (en) 1978-11-03
JPS52124679A (en) 1977-10-19
FR2348131A1 (en) 1977-11-10

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