USD981970S1 - Substrate mounting plate for substrate processing apparatus - Google Patents

Substrate mounting plate for substrate processing apparatus Download PDF

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Publication number
USD981970S1
USD981970S1 US29/806,527 US202129806527F USD981970S US D981970 S1 USD981970 S1 US D981970S1 US 202129806527 F US202129806527 F US 202129806527F US D981970 S USD981970 S US D981970S
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US
United States
Prior art keywords
substrate
processing apparatus
mounting plate
substrate processing
substrate mounting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/806,527
Inventor
Tetsuaki Inada
Takeshi Yasui
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kokusai Electric Corp
Original Assignee
Kokusai Electric Corp
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Filing date
Publication date
Application filed by Kokusai Electric Corp filed Critical Kokusai Electric Corp
Assigned to Kokusai Electric Corporation reassignment Kokusai Electric Corporation ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: INADA, TETSUAKI, YASUI, TAKESHI
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Description

FIG. 1 is a front, top and right side perspective view of a substrate mounting plate for substrate processing apparatus showing our new design;
FIG. 2 is a front elevational view thereof;
FIG. 3 is a rear elevational view.
FIG. 4 is a top plan view thereof;
FIG. 5 is a bottom plan view thereof;
FIG. 6 is a left side elevational view thereof;
FIG. 7 is a right side elevational view thereof; and,
FIG. 8 is a view take along line 8-8 in FIG. 2 .

Claims (1)

    CLAIM
  1. The ornamental design for a substrate mounting plate for substrate processing apparatus, as shown and described.
US29/806,527 2021-03-04 2021-09-03 Substrate mounting plate for substrate processing apparatus Active USD981970S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2021-004536D 2021-03-04
JPD2021-4536F JP1700776S (en) 2021-03-04 2021-03-04

Publications (1)

Publication Number Publication Date
USD981970S1 true USD981970S1 (en) 2023-03-28

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ID=78766342

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/806,527 Active USD981970S1 (en) 2021-03-04 2021-09-03 Substrate mounting plate for substrate processing apparatus

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US (1) USD981970S1 (en)
JP (1) JP1700776S (en)
TW (1) TWD217375S (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1002336S1 (en) * 2022-02-07 2023-10-24 Christopher L. Moore Anode mounting plate
USD1022667S1 (en) * 2023-12-21 2024-04-16 Guangdong Yupin Industrial Co., Ltd Cover plate

Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD583394S1 (en) * 2006-12-15 2008-12-23 Tokyo Electron Limited Cover for a heater stage of a plasma processing apparatus
US20100108500A1 (en) * 2008-10-31 2010-05-06 Applied Materials, Inc. Encapsulated sputtering target
USD790041S1 (en) * 2016-01-08 2017-06-20 Asm Ip Holding B.V. Gas dispersing plate for semiconductor manufacturing apparatus
USD797067S1 (en) * 2015-04-21 2017-09-12 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD825505S1 (en) * 2015-06-18 2018-08-14 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD830981S1 (en) * 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
USD868124S1 (en) * 2017-12-11 2019-11-26 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD869409S1 (en) * 2016-09-30 2019-12-10 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD877101S1 (en) * 2018-03-09 2020-03-03 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD908645S1 (en) * 2019-08-26 2021-01-26 Applied Materials, Inc. Sputtering target for a physical vapor deposition chamber
USD937329S1 (en) * 2020-03-23 2021-11-30 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
USD940765S1 (en) * 2020-12-02 2022-01-11 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target

Patent Citations (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD583394S1 (en) * 2006-12-15 2008-12-23 Tokyo Electron Limited Cover for a heater stage of a plasma processing apparatus
US20100108500A1 (en) * 2008-10-31 2010-05-06 Applied Materials, Inc. Encapsulated sputtering target
USD797067S1 (en) * 2015-04-21 2017-09-12 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD825505S1 (en) * 2015-06-18 2018-08-14 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD790041S1 (en) * 2016-01-08 2017-06-20 Asm Ip Holding B.V. Gas dispersing plate for semiconductor manufacturing apparatus
USD869409S1 (en) * 2016-09-30 2019-12-10 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD830981S1 (en) * 2017-04-07 2018-10-16 Asm Ip Holding B.V. Susceptor for semiconductor substrate processing apparatus
USD868124S1 (en) * 2017-12-11 2019-11-26 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD877101S1 (en) * 2018-03-09 2020-03-03 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target
USD908645S1 (en) * 2019-08-26 2021-01-26 Applied Materials, Inc. Sputtering target for a physical vapor deposition chamber
USD937329S1 (en) * 2020-03-23 2021-11-30 Applied Materials, Inc. Sputter target for a physical vapor deposition chamber
USD940765S1 (en) * 2020-12-02 2022-01-11 Applied Materials, Inc. Target profile for a physical vapor deposition chamber target

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD1002336S1 (en) * 2022-02-07 2023-10-24 Christopher L. Moore Anode mounting plate
USD1022667S1 (en) * 2023-12-21 2024-04-16 Guangdong Yupin Industrial Co., Ltd Cover plate

Also Published As

Publication number Publication date
JP1700776S (en) 2021-11-29
TWD217375S (en) 2022-02-21

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