USD893438S1 - Wafer boat - Google Patents
Wafer boat Download PDFInfo
- Publication number
- USD893438S1 USD893438S1 US29/635,787 US201829635787F USD893438S US D893438 S1 USD893438 S1 US D893438S1 US 201829635787 F US201829635787 F US 201829635787F US D893438 S USD893438 S US D893438S
- Authority
- US
- United States
- Prior art keywords
- wafer boat
- view
- taken along
- along line
- sectional
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Description
The broken lines shown in the drawings represent portions of the wafer boat that form no part of the claimed design. All sides not shown form no part of the claimed design.
Claims (1)
- The ornamental design for a wafer boat, as shown and described.
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPD2017-17840F JP1597807S (en) | 2017-08-21 | 2017-08-21 | |
JP2017-017840 | 2017-08-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD893438S1 true USD893438S1 (en) | 2020-08-18 |
Family
ID=61189744
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/635,787 Active USD893438S1 (en) | 2017-08-21 | 2018-02-02 | Wafer boat |
Country Status (3)
Country | Link |
---|---|
US (1) | USD893438S1 (en) |
JP (1) | JP1597807S (en) |
TW (1) | TWD196110S (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD920935S1 (en) * | 2018-09-20 | 2021-06-01 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD923279S1 (en) * | 2019-12-04 | 2021-06-22 | John H. Ellis | Crash barrel lifting basket |
USD940669S1 (en) * | 2018-11-19 | 2022-01-11 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD965542S1 (en) * | 2020-03-19 | 2022-10-04 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD1022933S1 (en) * | 2021-08-27 | 2024-04-16 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
USD1029444S1 (en) * | 2024-02-06 | 2024-05-28 | Javid Rouhi | Cylinder lifting apparatus |
Citations (50)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4165584A (en) * | 1977-01-27 | 1979-08-28 | International Telephone And Telegraph Corporation | Apparatus for lapping or polishing materials |
USD361752S (en) * | 1993-09-17 | 1995-08-29 | Tokyo Electron Kasbushiki Kaisha | Wafer boat or rack for holding semiconductor wafers |
USD366868S (en) * | 1993-09-29 | 1996-02-06 | Tokyo Electron Kabushiki Kaisha | Wafer boat or rack |
USD378675S (en) * | 1995-05-30 | 1997-04-01 | Tokyo Electron Limited | Wafer boat |
USD378823S (en) * | 1995-05-30 | 1997-04-15 | Tokyo Electron Limited | Wafer boat |
USD380454S (en) * | 1995-05-30 | 1997-07-01 | Tokyo Electron Limited | Wafer boat |
USD383377S (en) * | 1996-05-03 | 1997-09-09 | Sellers Kathleen R | Cushioned furniture protector |
USD404015S (en) * | 1997-01-31 | 1999-01-12 | Tokyo Electron Ltd. | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD404371S (en) * | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD409158S (en) * | 1997-08-20 | 1999-05-04 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD411176S (en) * | 1997-08-20 | 1999-06-22 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD517073S1 (en) * | 2004-07-14 | 2006-03-14 | Capital One Financial Corporation | Data card |
US20060102081A1 (en) * | 2004-11-16 | 2006-05-18 | Sumitomo Electric Industries, Ltd. | Wafer Guide, MOCVD Equipment, and Nitride Semiconductor Growth Method |
US20080102199A1 (en) * | 2006-10-26 | 2008-05-01 | Veeco Instruments Inc. | Multi-wafer rotating disc reactor with wafer planetary motion induced by vibration |
USD570308S1 (en) * | 2006-05-01 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD570309S1 (en) * | 2006-10-25 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
US20090017190A1 (en) * | 2007-07-10 | 2009-01-15 | Veeco Instruments Inc. | Movable injectors in rotating disc gas reactors |
US20090155028A1 (en) * | 2007-12-12 | 2009-06-18 | Veeco Instruments Inc. | Wafer carrier with hub |
USD614593S1 (en) * | 2008-07-21 | 2010-04-27 | Asm Genitech Korea Ltd | Substrate support for a semiconductor deposition apparatus |
US20100190418A1 (en) * | 2009-01-27 | 2010-07-29 | Kai Yasuoka | Lapping plate-conditioning grindstone segment, lapping plate-conditioning lapping machine, and method for conditioning lapping plate |
US8216379B2 (en) * | 2009-04-23 | 2012-07-10 | Applied Materials, Inc. | Non-circular substrate holders |
US20120234229A1 (en) * | 2011-03-16 | 2012-09-20 | Applied Materials, Inc. | Substrate support assembly for thin film deposition systems |
US20120240859A1 (en) * | 2011-03-22 | 2012-09-27 | Chi Mei Lighting Technology Corp. | Wafer susceptor and chemical vapor deposition apparatus |
USD674759S1 (en) * | 2010-08-19 | 2013-01-22 | Epistar Corporation | Wafer carrier |
USD686175S1 (en) * | 2012-03-20 | 2013-07-16 | Veeco Instruments Inc. | Wafer carrier having pockets |
USD686582S1 (en) * | 2012-03-20 | 2013-07-23 | Veeco Instruments Inc. | Wafer carrier having pockets |
USD690671S1 (en) * | 2012-03-20 | 2013-10-01 | Veeco Instruments Inc. | Wafer carrier having pockets |
US20130276704A1 (en) * | 2012-04-18 | 2013-10-24 | Sandeep Krishnan | Wafter carrier for chemical vapor deposition systems |
USD695242S1 (en) * | 2012-03-20 | 2013-12-10 | Veeco Instruments Inc. | Wafer carrier having pockets |
USD695241S1 (en) * | 2012-03-20 | 2013-12-10 | Veeco Instruments Inc. | Wafer carrier having pockets |
US20140261698A1 (en) * | 2013-03-14 | 2014-09-18 | Veeco Instruments Inc. | Wafer carrier with temperature distribution control |
USD716742S1 (en) * | 2013-09-13 | 2014-11-04 | Asm Ip Holding B.V. | Substrate supporter for semiconductor deposition apparatus |
USD723077S1 (en) * | 2013-12-03 | 2015-02-24 | Applied Materials, Inc. | Chuck carrier film |
USD724553S1 (en) * | 2013-09-13 | 2015-03-17 | Asm Ip Holding B.V. | Substrate supporter for semiconductor deposition apparatus |
US20150118009A1 (en) * | 2012-12-03 | 2015-04-30 | Xiamen Sanan Optoelectronics Technology Co., Ltd. | Graphite Wafer Carrier for LED Epitaxial Wafer Processes |
USD731409S1 (en) * | 2014-06-26 | 2015-06-09 | Water Technology Llc | Surface ornamentation for a passive solar heating article |
USD734730S1 (en) * | 2012-12-27 | 2015-07-21 | Hitachi Kokusai Electric Inc. | Boat of substrate processing apparatus |
USD737785S1 (en) * | 2013-07-29 | 2015-09-01 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD738329S1 (en) * | 2013-07-29 | 2015-09-08 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD747279S1 (en) * | 2013-07-29 | 2016-01-12 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD760180S1 (en) * | 2014-02-21 | 2016-06-28 | Hzo, Inc. | Hexcell channel arrangement for use in a boat for a deposition apparatus |
USD761745S1 (en) * | 2013-06-28 | 2016-07-19 | Sumitomo Electric Industries, Ltd. | Semiconductor device |
USD771622S1 (en) * | 2015-01-16 | 2016-11-15 | Apple Inc. | Electronic device |
US9633822B2 (en) * | 2011-10-31 | 2017-04-25 | Kyocera Corporation | Gas nozzle, plasma apparatus using the same, and method for manufacturing gas nozzle |
USD790489S1 (en) * | 2015-07-08 | 2017-06-27 | Ebara Corporation | Vacuum contact pad |
USD793972S1 (en) * | 2015-03-27 | 2017-08-08 | Veeco Instruments Inc. | Wafer carrier with a 31-pocket configuration |
USD793971S1 (en) * | 2015-03-27 | 2017-08-08 | Veeco Instruments Inc. | Wafer carrier with a 14-pocket configuration |
USD839219S1 (en) * | 2016-02-12 | 2019-01-29 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD846514S1 (en) * | 2018-05-03 | 2019-04-23 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD860146S1 (en) * | 2017-11-30 | 2019-09-17 | Veeco Instruments Inc. | Wafer carrier with a 33-pocket configuration |
-
2017
- 2017-08-21 JP JPD2017-17840F patent/JP1597807S/ja active Active
-
2018
- 2018-02-02 US US29/635,787 patent/USD893438S1/en active Active
- 2018-02-13 TW TW107300940F patent/TWD196110S/en unknown
Patent Citations (51)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4165584A (en) * | 1977-01-27 | 1979-08-28 | International Telephone And Telegraph Corporation | Apparatus for lapping or polishing materials |
USD361752S (en) * | 1993-09-17 | 1995-08-29 | Tokyo Electron Kasbushiki Kaisha | Wafer boat or rack for holding semiconductor wafers |
USD366868S (en) * | 1993-09-29 | 1996-02-06 | Tokyo Electron Kabushiki Kaisha | Wafer boat or rack |
USD378675S (en) * | 1995-05-30 | 1997-04-01 | Tokyo Electron Limited | Wafer boat |
USD378823S (en) * | 1995-05-30 | 1997-04-15 | Tokyo Electron Limited | Wafer boat |
USD380454S (en) * | 1995-05-30 | 1997-07-01 | Tokyo Electron Limited | Wafer boat |
USD383377S (en) * | 1996-05-03 | 1997-09-09 | Sellers Kathleen R | Cushioned furniture protector |
USD404015S (en) * | 1997-01-31 | 1999-01-12 | Tokyo Electron Ltd. | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD404371S (en) * | 1997-08-20 | 1999-01-19 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD409158S (en) * | 1997-08-20 | 1999-05-04 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD411176S (en) * | 1997-08-20 | 1999-06-22 | Tokyo Electron Limited | Wafer boat for use in a semiconductor wafer heat processing apparatus |
USD517073S1 (en) * | 2004-07-14 | 2006-03-14 | Capital One Financial Corporation | Data card |
US20060102081A1 (en) * | 2004-11-16 | 2006-05-18 | Sumitomo Electric Industries, Ltd. | Wafer Guide, MOCVD Equipment, and Nitride Semiconductor Growth Method |
USD570308S1 (en) * | 2006-05-01 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
USD570309S1 (en) * | 2006-10-25 | 2008-06-03 | Tokyo Electron Limited | Wafer boat |
US20080102199A1 (en) * | 2006-10-26 | 2008-05-01 | Veeco Instruments Inc. | Multi-wafer rotating disc reactor with wafer planetary motion induced by vibration |
US20090017190A1 (en) * | 2007-07-10 | 2009-01-15 | Veeco Instruments Inc. | Movable injectors in rotating disc gas reactors |
US20090155028A1 (en) * | 2007-12-12 | 2009-06-18 | Veeco Instruments Inc. | Wafer carrier with hub |
USD614593S1 (en) * | 2008-07-21 | 2010-04-27 | Asm Genitech Korea Ltd | Substrate support for a semiconductor deposition apparatus |
US20100190418A1 (en) * | 2009-01-27 | 2010-07-29 | Kai Yasuoka | Lapping plate-conditioning grindstone segment, lapping plate-conditioning lapping machine, and method for conditioning lapping plate |
US8216379B2 (en) * | 2009-04-23 | 2012-07-10 | Applied Materials, Inc. | Non-circular substrate holders |
USD674759S1 (en) * | 2010-08-19 | 2013-01-22 | Epistar Corporation | Wafer carrier |
USD704155S1 (en) * | 2010-08-19 | 2014-05-06 | Epistar Corporation | Wafer carrier |
US20120234229A1 (en) * | 2011-03-16 | 2012-09-20 | Applied Materials, Inc. | Substrate support assembly for thin film deposition systems |
US20120240859A1 (en) * | 2011-03-22 | 2012-09-27 | Chi Mei Lighting Technology Corp. | Wafer susceptor and chemical vapor deposition apparatus |
US9633822B2 (en) * | 2011-10-31 | 2017-04-25 | Kyocera Corporation | Gas nozzle, plasma apparatus using the same, and method for manufacturing gas nozzle |
USD686175S1 (en) * | 2012-03-20 | 2013-07-16 | Veeco Instruments Inc. | Wafer carrier having pockets |
USD686582S1 (en) * | 2012-03-20 | 2013-07-23 | Veeco Instruments Inc. | Wafer carrier having pockets |
USD695242S1 (en) * | 2012-03-20 | 2013-12-10 | Veeco Instruments Inc. | Wafer carrier having pockets |
USD695241S1 (en) * | 2012-03-20 | 2013-12-10 | Veeco Instruments Inc. | Wafer carrier having pockets |
USD690671S1 (en) * | 2012-03-20 | 2013-10-01 | Veeco Instruments Inc. | Wafer carrier having pockets |
US20130276704A1 (en) * | 2012-04-18 | 2013-10-24 | Sandeep Krishnan | Wafter carrier for chemical vapor deposition systems |
US20150118009A1 (en) * | 2012-12-03 | 2015-04-30 | Xiamen Sanan Optoelectronics Technology Co., Ltd. | Graphite Wafer Carrier for LED Epitaxial Wafer Processes |
USD734730S1 (en) * | 2012-12-27 | 2015-07-21 | Hitachi Kokusai Electric Inc. | Boat of substrate processing apparatus |
US20140261698A1 (en) * | 2013-03-14 | 2014-09-18 | Veeco Instruments Inc. | Wafer carrier with temperature distribution control |
USD761745S1 (en) * | 2013-06-28 | 2016-07-19 | Sumitomo Electric Industries, Ltd. | Semiconductor device |
USD737785S1 (en) * | 2013-07-29 | 2015-09-01 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD738329S1 (en) * | 2013-07-29 | 2015-09-08 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD747279S1 (en) * | 2013-07-29 | 2016-01-12 | Hitachi Kokusai Electric Inc. | Boat for substrate processing apparatus |
USD716742S1 (en) * | 2013-09-13 | 2014-11-04 | Asm Ip Holding B.V. | Substrate supporter for semiconductor deposition apparatus |
USD724553S1 (en) * | 2013-09-13 | 2015-03-17 | Asm Ip Holding B.V. | Substrate supporter for semiconductor deposition apparatus |
USD723077S1 (en) * | 2013-12-03 | 2015-02-24 | Applied Materials, Inc. | Chuck carrier film |
USD760180S1 (en) * | 2014-02-21 | 2016-06-28 | Hzo, Inc. | Hexcell channel arrangement for use in a boat for a deposition apparatus |
USD731409S1 (en) * | 2014-06-26 | 2015-06-09 | Water Technology Llc | Surface ornamentation for a passive solar heating article |
USD771622S1 (en) * | 2015-01-16 | 2016-11-15 | Apple Inc. | Electronic device |
USD793972S1 (en) * | 2015-03-27 | 2017-08-08 | Veeco Instruments Inc. | Wafer carrier with a 31-pocket configuration |
USD793971S1 (en) * | 2015-03-27 | 2017-08-08 | Veeco Instruments Inc. | Wafer carrier with a 14-pocket configuration |
USD790489S1 (en) * | 2015-07-08 | 2017-06-27 | Ebara Corporation | Vacuum contact pad |
USD839219S1 (en) * | 2016-02-12 | 2019-01-29 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD860146S1 (en) * | 2017-11-30 | 2019-09-17 | Veeco Instruments Inc. | Wafer carrier with a 33-pocket configuration |
USD846514S1 (en) * | 2018-05-03 | 2019-04-23 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD920935S1 (en) * | 2018-09-20 | 2021-06-01 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD940669S1 (en) * | 2018-11-19 | 2022-01-11 | Kokusai Electric Corporation | Boat for substrate processing apparatus |
USD923279S1 (en) * | 2019-12-04 | 2021-06-22 | John H. Ellis | Crash barrel lifting basket |
USD965542S1 (en) * | 2020-03-19 | 2022-10-04 | Kokusai Electric Corporation | Boat of substrate processing apparatus |
USD1022933S1 (en) * | 2021-08-27 | 2024-04-16 | Kokusai Electric Corporation | Wafer support of semiconductor manufacturing apparatus |
USD1029444S1 (en) * | 2024-02-06 | 2024-05-28 | Javid Rouhi | Cylinder lifting apparatus |
Also Published As
Publication number | Publication date |
---|---|
JP1597807S (en) | 2018-02-19 |
TWD196110S (en) | 2019-02-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FEPP | Fee payment procedure |
Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |