USD893438S1 - Wafer boat - Google Patents

Wafer boat Download PDF

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Publication number
USD893438S1
USD893438S1 US29/635,787 US201829635787F USD893438S US D893438 S1 USD893438 S1 US D893438S1 US 201829635787 F US201829635787 F US 201829635787F US D893438 S USD893438 S US D893438S
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US
United States
Prior art keywords
wafer boat
view
taken along
along line
sectional
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
US29/635,787
Inventor
Tomoya Hasegawa
Koichi Shimada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Assigned to TOKYO ELECTRON LIMITED reassignment TOKYO ELECTRON LIMITED ASSIGNMENT OF ASSIGNORS INTEREST (SEE DOCUMENT FOR DETAILS). Assignors: SHIMADA, KOICHI, HASEGAWA, TOMOYA
Application granted granted Critical
Publication of USD893438S1 publication Critical patent/USD893438S1/en
Active legal-status Critical Current
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FIG. 1 is a front, top, and left side perspective view of a wafer boat, showing our new design;
FIG. 2 is a front view thereof;
FIG. 3 is a top plan view thereof;
FIG. 4 is a bottom plan view thereof;
FIG. 5 is a cross-sectional view thereof, taken along line 5-5 in FIG. 2;
FIG. 6 is an enlarged portion view thereof, taken along line 6-6 in FIG. 5;
FIG. 7 is an enlarged cross-sectional view thereof, taken along line 7-7 in FIG. 2;
FIG. 8 is an enlarged cross-sectional view thereof, taken along line 8-8 in FIG. 2; and,
FIG. 9 is an enlarged cross-sectional view thereof, taken along line 9-9 in FIG. 2.
The broken lines shown in the drawings represent portions of the wafer boat that form no part of the claimed design. All sides not shown form no part of the claimed design.

Claims (1)

    CLAIM
  1. The ornamental design for a wafer boat, as shown and described.
US29/635,787 2017-08-21 2018-02-02 Wafer boat Active USD893438S1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JPD2017-17840F JP1597807S (en) 2017-08-21 2017-08-21
JP2017-017840 2017-08-21

Publications (1)

Publication Number Publication Date
USD893438S1 true USD893438S1 (en) 2020-08-18

Family

ID=61189744

Family Applications (1)

Application Number Title Priority Date Filing Date
US29/635,787 Active USD893438S1 (en) 2017-08-21 2018-02-02 Wafer boat

Country Status (3)

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US (1) USD893438S1 (en)
JP (1) JP1597807S (en)
TW (1) TWD196110S (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD920935S1 (en) * 2018-09-20 2021-06-01 Kokusai Electric Corporation Boat for substrate processing apparatus
USD923279S1 (en) * 2019-12-04 2021-06-22 John H. Ellis Crash barrel lifting basket
USD940669S1 (en) * 2018-11-19 2022-01-11 Kokusai Electric Corporation Boat for substrate processing apparatus
USD965542S1 (en) * 2020-03-19 2022-10-04 Kokusai Electric Corporation Boat of substrate processing apparatus
USD1022933S1 (en) * 2021-08-27 2024-04-16 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus
USD1029444S1 (en) * 2024-02-06 2024-05-28 Javid Rouhi Cylinder lifting apparatus

Citations (50)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4165584A (en) * 1977-01-27 1979-08-28 International Telephone And Telegraph Corporation Apparatus for lapping or polishing materials
USD361752S (en) * 1993-09-17 1995-08-29 Tokyo Electron Kasbushiki Kaisha Wafer boat or rack for holding semiconductor wafers
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD380454S (en) * 1995-05-30 1997-07-01 Tokyo Electron Limited Wafer boat
USD383377S (en) * 1996-05-03 1997-09-09 Sellers Kathleen R Cushioned furniture protector
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD517073S1 (en) * 2004-07-14 2006-03-14 Capital One Financial Corporation Data card
US20060102081A1 (en) * 2004-11-16 2006-05-18 Sumitomo Electric Industries, Ltd. Wafer Guide, MOCVD Equipment, and Nitride Semiconductor Growth Method
US20080102199A1 (en) * 2006-10-26 2008-05-01 Veeco Instruments Inc. Multi-wafer rotating disc reactor with wafer planetary motion induced by vibration
USD570308S1 (en) * 2006-05-01 2008-06-03 Tokyo Electron Limited Wafer boat
USD570309S1 (en) * 2006-10-25 2008-06-03 Tokyo Electron Limited Wafer boat
US20090017190A1 (en) * 2007-07-10 2009-01-15 Veeco Instruments Inc. Movable injectors in rotating disc gas reactors
US20090155028A1 (en) * 2007-12-12 2009-06-18 Veeco Instruments Inc. Wafer carrier with hub
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
US20100190418A1 (en) * 2009-01-27 2010-07-29 Kai Yasuoka Lapping plate-conditioning grindstone segment, lapping plate-conditioning lapping machine, and method for conditioning lapping plate
US8216379B2 (en) * 2009-04-23 2012-07-10 Applied Materials, Inc. Non-circular substrate holders
US20120234229A1 (en) * 2011-03-16 2012-09-20 Applied Materials, Inc. Substrate support assembly for thin film deposition systems
US20120240859A1 (en) * 2011-03-22 2012-09-27 Chi Mei Lighting Technology Corp. Wafer susceptor and chemical vapor deposition apparatus
USD674759S1 (en) * 2010-08-19 2013-01-22 Epistar Corporation Wafer carrier
USD686175S1 (en) * 2012-03-20 2013-07-16 Veeco Instruments Inc. Wafer carrier having pockets
USD686582S1 (en) * 2012-03-20 2013-07-23 Veeco Instruments Inc. Wafer carrier having pockets
USD690671S1 (en) * 2012-03-20 2013-10-01 Veeco Instruments Inc. Wafer carrier having pockets
US20130276704A1 (en) * 2012-04-18 2013-10-24 Sandeep Krishnan Wafter carrier for chemical vapor deposition systems
USD695242S1 (en) * 2012-03-20 2013-12-10 Veeco Instruments Inc. Wafer carrier having pockets
USD695241S1 (en) * 2012-03-20 2013-12-10 Veeco Instruments Inc. Wafer carrier having pockets
US20140261698A1 (en) * 2013-03-14 2014-09-18 Veeco Instruments Inc. Wafer carrier with temperature distribution control
USD716742S1 (en) * 2013-09-13 2014-11-04 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD723077S1 (en) * 2013-12-03 2015-02-24 Applied Materials, Inc. Chuck carrier film
USD724553S1 (en) * 2013-09-13 2015-03-17 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
US20150118009A1 (en) * 2012-12-03 2015-04-30 Xiamen Sanan Optoelectronics Technology Co., Ltd. Graphite Wafer Carrier for LED Epitaxial Wafer Processes
USD731409S1 (en) * 2014-06-26 2015-06-09 Water Technology Llc Surface ornamentation for a passive solar heating article
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
USD737785S1 (en) * 2013-07-29 2015-09-01 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD738329S1 (en) * 2013-07-29 2015-09-08 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD747279S1 (en) * 2013-07-29 2016-01-12 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD760180S1 (en) * 2014-02-21 2016-06-28 Hzo, Inc. Hexcell channel arrangement for use in a boat for a deposition apparatus
USD761745S1 (en) * 2013-06-28 2016-07-19 Sumitomo Electric Industries, Ltd. Semiconductor device
USD771622S1 (en) * 2015-01-16 2016-11-15 Apple Inc. Electronic device
US9633822B2 (en) * 2011-10-31 2017-04-25 Kyocera Corporation Gas nozzle, plasma apparatus using the same, and method for manufacturing gas nozzle
USD790489S1 (en) * 2015-07-08 2017-06-27 Ebara Corporation Vacuum contact pad
USD793972S1 (en) * 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 31-pocket configuration
USD793971S1 (en) * 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 14-pocket configuration
USD839219S1 (en) * 2016-02-12 2019-01-29 Kokusai Electric Corporation Boat for substrate processing apparatus
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus
USD860146S1 (en) * 2017-11-30 2019-09-17 Veeco Instruments Inc. Wafer carrier with a 33-pocket configuration

Patent Citations (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4165584A (en) * 1977-01-27 1979-08-28 International Telephone And Telegraph Corporation Apparatus for lapping or polishing materials
USD361752S (en) * 1993-09-17 1995-08-29 Tokyo Electron Kasbushiki Kaisha Wafer boat or rack for holding semiconductor wafers
USD366868S (en) * 1993-09-29 1996-02-06 Tokyo Electron Kabushiki Kaisha Wafer boat or rack
USD378675S (en) * 1995-05-30 1997-04-01 Tokyo Electron Limited Wafer boat
USD378823S (en) * 1995-05-30 1997-04-15 Tokyo Electron Limited Wafer boat
USD380454S (en) * 1995-05-30 1997-07-01 Tokyo Electron Limited Wafer boat
USD383377S (en) * 1996-05-03 1997-09-09 Sellers Kathleen R Cushioned furniture protector
USD404015S (en) * 1997-01-31 1999-01-12 Tokyo Electron Ltd. Wafer boat for use in a semiconductor wafer heat processing apparatus
USD404371S (en) * 1997-08-20 1999-01-19 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD409158S (en) * 1997-08-20 1999-05-04 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD411176S (en) * 1997-08-20 1999-06-22 Tokyo Electron Limited Wafer boat for use in a semiconductor wafer heat processing apparatus
USD517073S1 (en) * 2004-07-14 2006-03-14 Capital One Financial Corporation Data card
US20060102081A1 (en) * 2004-11-16 2006-05-18 Sumitomo Electric Industries, Ltd. Wafer Guide, MOCVD Equipment, and Nitride Semiconductor Growth Method
USD570308S1 (en) * 2006-05-01 2008-06-03 Tokyo Electron Limited Wafer boat
USD570309S1 (en) * 2006-10-25 2008-06-03 Tokyo Electron Limited Wafer boat
US20080102199A1 (en) * 2006-10-26 2008-05-01 Veeco Instruments Inc. Multi-wafer rotating disc reactor with wafer planetary motion induced by vibration
US20090017190A1 (en) * 2007-07-10 2009-01-15 Veeco Instruments Inc. Movable injectors in rotating disc gas reactors
US20090155028A1 (en) * 2007-12-12 2009-06-18 Veeco Instruments Inc. Wafer carrier with hub
USD614593S1 (en) * 2008-07-21 2010-04-27 Asm Genitech Korea Ltd Substrate support for a semiconductor deposition apparatus
US20100190418A1 (en) * 2009-01-27 2010-07-29 Kai Yasuoka Lapping plate-conditioning grindstone segment, lapping plate-conditioning lapping machine, and method for conditioning lapping plate
US8216379B2 (en) * 2009-04-23 2012-07-10 Applied Materials, Inc. Non-circular substrate holders
USD674759S1 (en) * 2010-08-19 2013-01-22 Epistar Corporation Wafer carrier
USD704155S1 (en) * 2010-08-19 2014-05-06 Epistar Corporation Wafer carrier
US20120234229A1 (en) * 2011-03-16 2012-09-20 Applied Materials, Inc. Substrate support assembly for thin film deposition systems
US20120240859A1 (en) * 2011-03-22 2012-09-27 Chi Mei Lighting Technology Corp. Wafer susceptor and chemical vapor deposition apparatus
US9633822B2 (en) * 2011-10-31 2017-04-25 Kyocera Corporation Gas nozzle, plasma apparatus using the same, and method for manufacturing gas nozzle
USD686175S1 (en) * 2012-03-20 2013-07-16 Veeco Instruments Inc. Wafer carrier having pockets
USD686582S1 (en) * 2012-03-20 2013-07-23 Veeco Instruments Inc. Wafer carrier having pockets
USD695242S1 (en) * 2012-03-20 2013-12-10 Veeco Instruments Inc. Wafer carrier having pockets
USD695241S1 (en) * 2012-03-20 2013-12-10 Veeco Instruments Inc. Wafer carrier having pockets
USD690671S1 (en) * 2012-03-20 2013-10-01 Veeco Instruments Inc. Wafer carrier having pockets
US20130276704A1 (en) * 2012-04-18 2013-10-24 Sandeep Krishnan Wafter carrier for chemical vapor deposition systems
US20150118009A1 (en) * 2012-12-03 2015-04-30 Xiamen Sanan Optoelectronics Technology Co., Ltd. Graphite Wafer Carrier for LED Epitaxial Wafer Processes
USD734730S1 (en) * 2012-12-27 2015-07-21 Hitachi Kokusai Electric Inc. Boat of substrate processing apparatus
US20140261698A1 (en) * 2013-03-14 2014-09-18 Veeco Instruments Inc. Wafer carrier with temperature distribution control
USD761745S1 (en) * 2013-06-28 2016-07-19 Sumitomo Electric Industries, Ltd. Semiconductor device
USD737785S1 (en) * 2013-07-29 2015-09-01 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD738329S1 (en) * 2013-07-29 2015-09-08 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD747279S1 (en) * 2013-07-29 2016-01-12 Hitachi Kokusai Electric Inc. Boat for substrate processing apparatus
USD716742S1 (en) * 2013-09-13 2014-11-04 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD724553S1 (en) * 2013-09-13 2015-03-17 Asm Ip Holding B.V. Substrate supporter for semiconductor deposition apparatus
USD723077S1 (en) * 2013-12-03 2015-02-24 Applied Materials, Inc. Chuck carrier film
USD760180S1 (en) * 2014-02-21 2016-06-28 Hzo, Inc. Hexcell channel arrangement for use in a boat for a deposition apparatus
USD731409S1 (en) * 2014-06-26 2015-06-09 Water Technology Llc Surface ornamentation for a passive solar heating article
USD771622S1 (en) * 2015-01-16 2016-11-15 Apple Inc. Electronic device
USD793972S1 (en) * 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 31-pocket configuration
USD793971S1 (en) * 2015-03-27 2017-08-08 Veeco Instruments Inc. Wafer carrier with a 14-pocket configuration
USD790489S1 (en) * 2015-07-08 2017-06-27 Ebara Corporation Vacuum contact pad
USD839219S1 (en) * 2016-02-12 2019-01-29 Kokusai Electric Corporation Boat for substrate processing apparatus
USD860146S1 (en) * 2017-11-30 2019-09-17 Veeco Instruments Inc. Wafer carrier with a 33-pocket configuration
USD846514S1 (en) * 2018-05-03 2019-04-23 Kokusai Electric Corporation Boat of substrate processing apparatus

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD920935S1 (en) * 2018-09-20 2021-06-01 Kokusai Electric Corporation Boat for substrate processing apparatus
USD940669S1 (en) * 2018-11-19 2022-01-11 Kokusai Electric Corporation Boat for substrate processing apparatus
USD923279S1 (en) * 2019-12-04 2021-06-22 John H. Ellis Crash barrel lifting basket
USD965542S1 (en) * 2020-03-19 2022-10-04 Kokusai Electric Corporation Boat of substrate processing apparatus
USD1022933S1 (en) * 2021-08-27 2024-04-16 Kokusai Electric Corporation Wafer support of semiconductor manufacturing apparatus
USD1029444S1 (en) * 2024-02-06 2024-05-28 Javid Rouhi Cylinder lifting apparatus

Also Published As

Publication number Publication date
JP1597807S (en) 2018-02-19
TWD196110S (en) 2019-02-21

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