USD568914S1 - Substrate support lift pin - Google Patents
Substrate support lift pin Download PDFInfo
- Publication number
- USD568914S1 USD568914S1 US29/256,744 US25674406F USD568914S US D568914 S1 USD568914 S1 US D568914S1 US 25674406 F US25674406 F US 25674406F US D568914 S USD568914 S US D568914S
- Authority
- US
- United States
- Prior art keywords
- lift pin
- substrate support
- support lift
- shoulder section
- pin
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Images
Description
A lift pin for selectively spacing a substrate from a substrate support is provided. Embodiments of the lift pin include a lift pin shaft and at least one larger diameter shoulder section symmetrical the lift pin shaft that forms a relief region between the lift pin and a guide hole disposed through a substrate support. The shoulder section reduces pin scratching, particle generation, and component wear, thus increasing the life of the lift pin. The shoulder section also minimizes sticking of the lift pin, thus enhancing movement of the lift pin through the guide hole. The shoulder section may be made of a different material than the lift pin shaft and/or an outer surface of the shoulder section may be machined to a micro-smooth surface. An upper portion of the lift pin also includes a tapered portion configured to provide a stop for the lift pin to prevent the lift pin from falling through the guide hole in the substrate support.
Claims (1)
- The ornamental design for a substrate support lift pin, as shown and described.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/256,744 USD568914S1 (en) | 2002-09-10 | 2006-03-24 | Substrate support lift pin |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US24100502 | 2002-09-10 | ||
US12045605 | 2005-05-03 | ||
US29/256,744 USD568914S1 (en) | 2002-09-10 | 2006-03-24 | Substrate support lift pin |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US11/120,456 Continuation US20050194100A1 (en) | 2002-09-10 | 2005-05-03 | Reduced friction lift pin |
Publications (1)
Publication Number | Publication Date |
---|---|
USD568914S1 true USD568914S1 (en) | 2008-05-13 |
Family
ID=39362114
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/256,744 Expired - Lifetime USD568914S1 (en) | 2002-09-10 | 2006-03-24 | Substrate support lift pin |
Country Status (1)
Country | Link |
---|---|
US (1) | USD568914S1 (en) |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090317964A1 (en) * | 2008-06-20 | 2009-12-24 | Varian Semiconductor Equipment Associates, Inc. | Platen for reducing particle contamination on a substrate and a method thereof |
US20090314211A1 (en) * | 2008-06-24 | 2009-12-24 | Applied Materials, Inc. | Big foot lift pin |
KR101403327B1 (en) * | 2011-12-30 | 2014-06-09 | 엘아이지에이디피 주식회사 | Apparatus and Method for Processing Substrate |
USD774571S1 (en) * | 2015-07-23 | 2016-12-20 | Synergy Mouldworks Inc | Ejector pin |
US10658207B2 (en) | 2008-06-20 | 2020-05-19 | Varian Semiconductor Equipment Associates, Inc. | Platen for reducing particle contamination on a substrate and a method thereof |
USD980884S1 (en) * | 2021-03-02 | 2023-03-14 | Applied Materials, Inc. | Lift pin |
US11651990B2 (en) | 2019-07-03 | 2023-05-16 | Samsung Electronics Co., Ltd. | Substrate processing apparatus and driving method thereof |
USD990534S1 (en) * | 2020-09-11 | 2023-06-27 | Asm Ip Holding B.V. | Weighted lift pin |
USD1009817S1 (en) * | 2021-09-28 | 2024-01-02 | Applied Materials, Inc. | Shadow ring lift pin |
-
2006
- 2006-03-24 US US29/256,744 patent/USD568914S1/en not_active Expired - Lifetime
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20090317964A1 (en) * | 2008-06-20 | 2009-12-24 | Varian Semiconductor Equipment Associates, Inc. | Platen for reducing particle contamination on a substrate and a method thereof |
US8681472B2 (en) * | 2008-06-20 | 2014-03-25 | Varian Semiconductor Equipment Associates, Inc. | Platen ground pin for connecting substrate to ground |
US10658207B2 (en) | 2008-06-20 | 2020-05-19 | Varian Semiconductor Equipment Associates, Inc. | Platen for reducing particle contamination on a substrate and a method thereof |
US20090314211A1 (en) * | 2008-06-24 | 2009-12-24 | Applied Materials, Inc. | Big foot lift pin |
KR101403327B1 (en) * | 2011-12-30 | 2014-06-09 | 엘아이지에이디피 주식회사 | Apparatus and Method for Processing Substrate |
USD774571S1 (en) * | 2015-07-23 | 2016-12-20 | Synergy Mouldworks Inc | Ejector pin |
US11651990B2 (en) | 2019-07-03 | 2023-05-16 | Samsung Electronics Co., Ltd. | Substrate processing apparatus and driving method thereof |
US11984345B2 (en) | 2019-07-03 | 2024-05-14 | Samsung Electronics Co., Ltd. | Substrate processing apparatus and driving method thereof |
USD990534S1 (en) * | 2020-09-11 | 2023-06-27 | Asm Ip Holding B.V. | Weighted lift pin |
USD980884S1 (en) * | 2021-03-02 | 2023-03-14 | Applied Materials, Inc. | Lift pin |
USD1009817S1 (en) * | 2021-09-28 | 2024-01-02 | Applied Materials, Inc. | Shadow ring lift pin |
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