USD564462S1 - RF electrode for a process tube of semiconductor manufacturing apparatus - Google Patents
RF electrode for a process tube of semiconductor manufacturing apparatus Download PDFInfo
- Publication number
- USD564462S1 USD564462S1 US29/260,830 US26083006F USD564462S US D564462 S1 USD564462 S1 US D564462S1 US 26083006 F US26083006 F US 26083006F US D564462 S USD564462 S US D564462S
- Authority
- US
- United States
- Prior art keywords
- electrode
- manufacturing apparatus
- semiconductor manufacturing
- process tube
- view
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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Description
Claims (1)
- The ornamental design for a RF electrode for a process tube of semiconductor manufacturing apparatus, as shown and described.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005038333 | 2005-12-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
USD564462S1 true USD564462S1 (en) | 2008-03-18 |
Family
ID=39182700
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/260,830 Expired - Lifetime USD564462S1 (en) | 2005-12-27 | 2006-06-02 | RF electrode for a process tube of semiconductor manufacturing apparatus |
Country Status (1)
Country | Link |
---|---|
US (1) | USD564462S1 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD744967S1 (en) | 2012-03-20 | 2015-12-08 | Veeco Instruments Inc. | Spindle key |
USD748591S1 (en) * | 2012-03-20 | 2016-02-02 | Veeco Instruments Inc. | Keyed spindle |
US9816184B2 (en) | 2012-03-20 | 2017-11-14 | Veeco Instruments Inc. | Keyed wafer carrier |
USD956005S1 (en) * | 2019-09-19 | 2022-06-28 | Applied Materials, Inc. | Shaped electrode |
-
2006
- 2006-06-02 US US29/260,830 patent/USD564462S1/en not_active Expired - Lifetime
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD744967S1 (en) | 2012-03-20 | 2015-12-08 | Veeco Instruments Inc. | Spindle key |
USD748591S1 (en) * | 2012-03-20 | 2016-02-02 | Veeco Instruments Inc. | Keyed spindle |
US9816184B2 (en) | 2012-03-20 | 2017-11-14 | Veeco Instruments Inc. | Keyed wafer carrier |
USD956005S1 (en) * | 2019-09-19 | 2022-06-28 | Applied Materials, Inc. | Shaped electrode |
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